CN211858592U - Weight module for chip coating process - Google Patents
Weight module for chip coating process Download PDFInfo
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- CN211858592U CN211858592U CN202020176143.9U CN202020176143U CN211858592U CN 211858592 U CN211858592 U CN 211858592U CN 202020176143 U CN202020176143 U CN 202020176143U CN 211858592 U CN211858592 U CN 211858592U
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Abstract
The utility model relates to a weight module for chip coating process, which comprises a base, wherein an XYZ three-axis motion platform is arranged on the base, a weight assembly is arranged on the XYZ three-axis motion platform, and the weight assembly comprises a plurality of strip-shaped weights, a lower fixing frame and an upper fixing frame; the weight component also comprises a lower fixing frame and an upper fixing frame which are penetrated by the weight, and the weight can move up and down between the lower fixing frame and the upper fixing frame; the positions of the weights on the lower fixing frame and the upper fixing frame correspond to the positions of the chips mounted on the jig; the weight includes an extension bar disposed at the top thereof, on which the floating weight is placed or removed. The utility model discloses owing to adopted single weight to replace the mode of dull and stereotyped pressurize and possessed XYZ triaxial motion platform, can guarantee that the size of the power that each chip received all is the same, and make the weight matrix can carry out the removal of level and vertical direction, realize that a weight carries out the pressurize of misplacing to a plurality of chips, satisfy the demand of the inseparable range of chip on the tool.
Description
Technical Field
The utility model relates to a pressurizer, especially a weight module for chip coating film technology.
Background
Before the chip coating film, need fix the chip on the tool, the mode of fixing the chip at present is pasted the chip on the tool through the double faced adhesive tape, after pasting the process, still need pass through the pressurize process, just can guarantee that the chip pastes firmly, prevent the bottom of coating film technology pollution chip, present pressurize process generally adopts manual pressurize or mechanical pressurize, the pressurize instrument of adoption generally is a smooth board, exert pressure through manual or machinery, both all have pressure to exert inhomogeneous problem, and the chip is very fragile, two kinds of above pressurize modes all very lead to the damage of chip easily.
SUMMERY OF THE UTILITY MODEL
In view of the above, it is desirable to provide a weight module for chip coating process.
A weight module for a chip film coating process comprises a base, wherein an XYZ three-axis motion platform is arranged on the base, a weight assembly is arranged on the XYZ three-axis motion platform, and the weight assembly comprises a plurality of strip-shaped weights, a lower fixing frame and an upper fixing frame; the weight is vertically arranged and penetrates through the lower fixing frame and the upper fixing frame, and the weight can move up and down between the lower fixing frame and the upper fixing frame; the positions of the weights on the lower fixing frame and the upper fixing frame correspond to the positions of the chips mounted on the jig; the weight includes an extension bar disposed at the top thereof, on which the floating weight is placed or removed.
As a further aspect of the present invention: the XYZ three-axis motion platform comprises an X axis, a Y axis and a Z axis, wherein the Z axis is arranged on the base, the X axis is arranged on the Z axis, and the Y axis is arranged on the X axis.
As a further aspect of the present invention: the Z axle is including setting up Z axle track on the base, and Z axle drive arrangement sets up Z axle slider up-and-down motion is driven at orbital top of Z axle, be provided with X axle track and X axle drive arrangement on the Z axle slider, with X axle track complex X axle slider sets up on the mounting bracket, still be provided with Y axle track and Y axle drive arrangement on the mounting bracket, with the Y axle slider that Y axle track corresponds sets up on weight subassembly mounting panel, the weight subassembly sets up on the weight subassembly mounting panel.
As a further aspect of the present invention: the Z-axis sliding block is in a 'mouth' shape, and the Z-axis track is positioned in the middle of the 'mouth' shaped structure of the Z-axis sliding block; the mounting bracket is "T" shape, and the breach direction orientation of "T" shape the Z axle, the Y axle track sets up the both ends position of mounting bracket, Y axle drive arrangement sets up the intermediate position of mounting bracket, just Y axle drive arrangement output shaft orientation on the weight component mounting panel.
As a further aspect of the present invention: the XYZ three-axis motion platform comprises an X axis, a Y axis and a Z axis, wherein the Y axis is arranged on the base, the Z axis is arranged on the Y axis, and the X axis is arranged on the Z axis.
As a further aspect of the present invention: and a fine adjustment device is further arranged between the Z axis and the Y axis and is used for fine adjustment of the weight module in the X axis direction.
As a further aspect of the present invention: the weight with adopt clearance fit between the upper bracket, make it can the upper bracket is interior can the activity from top to bottom, the weight bottom is provided with the step, makes the weight can by the lower carriage holds up.
As a further aspect of the present invention: the weight still includes weight pressure head, fixed weight and pressure head gum cover, the weight pressure head is fixed weight orientation the one end of tool, the pressure head gum cover sets up the weight pressure head is kept away from the one end of fixed weight.
As a further aspect of the present invention: the position that contacts the chip on the pressure head gum cover is provided with a shrinkage pool, makes the pressure head gum cover only can contact chip top position all around, the weight pressure head is installed the position department of pressure head gum cover is provided with umbelliform dop, the pressure head gum cover with install on the dop.
As a further aspect of the present invention: one end of the extension rod is provided with an external thread, a threaded hole is formed in the mounting position of the extension rod, which corresponds to the external thread, and the extension rod is detachably connected with the weight.
The utility model has the advantages that: the utility model discloses owing to adopted the mode of single weight to replace dull and stereotyped pressurize, can guarantee that the size of the power that each chip received all is the same, adjustable unsteady weight lets this weight module can adapt to the pressurize work of various model chips, because this weight module possesses XYZ three-axis motion platform for the weight matrix can carry out the removal of level and vertical direction, realizes the dislocation pressurize of a weight to a plurality of chips, satisfies the demand of the inseparable range of chip on the tool.
Drawings
Fig. 1 is a front view of a first weight module provided by an embodiment of the present invention;
fig. 2 is a side view of a first weight module provided by the embodiment of the present invention;
fig. 3 is a top view of a first weight module according to an embodiment of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 1 at A;
FIG. 5 is an enlarged view of a portion of FIG. 1 at B;
fig. 6 is a schematic structural view of a first weight module provided in an embodiment of the present invention;
fig. 7 is an exploded view first view of the XYZ three-axis motion platform of the present invention;
fig. 8 is a second perspective view of an exploded view of the XYZ three-axis motion platform of the present invention;
fig. 9 is a first view angle of a second weight module provided by the present invention;
fig. 10 is a second view angle of the second weight module according to the present invention.
Reference numerals: 1-a base; 2-a jig; 3-weight components; 301-lower fixing frame; 302-weight pressure head; 303-fixing a weight; 304-an extension pole; 305-floating weight; 306-upper fixing frame; 307-pressing head rubber sleeve; 308-concave holes; 4-X axis; 410-X axis orbit; 420-X axis slide; 430-X axis drive; 5-Y axis; 510-Y axis orbit; 520-Y axis slide block; 530-Y axis drive; 6-Z axis; 610-Z axis orbit; 620-Z axis drive; a 630-Z axis slide; 7-a mounting frame; 8-weight component mounting plate; 9-fine adjustment device; 10-fine tuning the track.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
The utility model discloses a solve the uneven problem of pressure when chip pressurize among the prior art, provide a weight module for chip coating film technology, realized that pressurize pressure is even, solve the problem that single weight can't satisfy the inseparable range of chip on the tool simultaneously.
As shown in fig. 1-3 and 6-7, a weight module for chip coating process comprises a base 1, wherein an XYZ three-axis motion platform is arranged on the base 1, a weight assembly 3 is arranged on the XYZ three-axis motion platform, and the weight assembly 3 comprises a plurality of strip-shaped weights, a lower fixing frame 301 and an upper fixing frame 306; the weights penetrate the lower fixing frame 301 and the upper fixing frame 306; the weight is vertically arranged and can move up and down between the lower fixing frame 301 and the upper fixing frame 306; the positions of the weights on the lower fixing frame 301 and the upper fixing frame 306 correspond to the positions of the chips mounted on the jig 2; the weight includes an extension bar 304 disposed on the top thereof, the extension bar 304 being capable of placing or removing a floating weight 305.
In this embodiment, the weight can move about from top to bottom in last mount 306 and lower mount 301, lower mount 301 plays the supporting effect to the weight, when needs carry out the pressurize, through XYZ triaxial motion platform, the weight removes the chip directly over after, the whole whereabouts of weight subassembly 3, single weight then falls on each chip, because the weight can move about between last mount and lower mount, consequently, the weight utilizes the weight of self to carry out the pressurize to the chip when can understanding for this, it is firm to make the sticky subsides on chip and the tool, prevent that the defective products from appearing in the chip coating process.
Because the chip is very intensive in horizontal and vertical arrangement on the tool, when the volume restriction of weight can not correspond a chip by a weight, can realize the dislocation pressurize of chip through XYZ triaxial motion platform, for example, receive the volume influence of weight, a chip has more been distributed between two adjacent weights, the weight of 2X 2 matrix is corresponding the chip of 4X 4 matrix promptly, then through the drive of XYZ triaxial motion platform, can make the chip in the dislocation pressurize 2X 2 matrix of single weight, the same reason, according to the weight volume difference, can also change into 3X 3 matrix or bigger size matrix.
The utility model discloses owing to adopted the mode of single weight to replace dull and stereotyped pressurize, can guarantee that the size of the power that each chip received all is the same, adjustable unsteady weight lets this weight module can adapt to the pressurize work of various model chips, because this weight module possesses XYZ three-axis motion platform for the weight matrix can carry out the removal of level and vertical direction, realizes that a weight carries out the pressurize to a plurality of chips in proper order, satisfies the demand of the inseparable range of chip on the tool.
The utility model discloses in, XYZ triaxial motion platform has two kinds of structures:
the first embodiment is as follows: as shown in fig. 7 to 8, the XYZ three-axis motion stage includes an X axis 4, a Y axis 5, and a Z axis 6, the Z axis 6 being disposed on the base 1, the X axis 4 being disposed on the Z axis 6, and the Y axis 5 being on the X axis 4.
The Z-axis driving device 620 is a motor, and adopts a lead screw for transmission, and the X-axis driving device 430 and the Y-axis driving device 530 are both cylinders.
The Z-axis slide block 630 is shaped like a "mouth", and the Z-axis track 610 is located in the middle of the "mouth" of the Z-axis slide block 630.
The mounting rack 7 is in a shape of a T, the notch direction of the T is towards the Z axis 6, the Y axis track 510 is arranged at two end positions of the mounting rack 7, the Y axis driving device 530 is arranged at the middle position of the mounting rack 7, and the output shaft of the Y axis driving device 530 faces the weight component mounting plate 8.
In this scheme, the mounting bracket 7 that is "T" shape includes the kink at intermediate portion and both ends, has set up the Y axle track at the top and the bottom position of kink, counts four, and is corresponding, has four Y axle sliders 520 on the weight component mounting panel 8, and Y axle slider 520 sets up four angular positions on weight component mounting panel 8 and perpendicular to weight component mounting panel 8 for weight component mounting panel 8 forms the structure similar to the desk shape.
Example two: as shown in fig. 9 to 10, the XYZ three-axis motion stage includes an X axis 4, a Y axis 5, and a Z axis 6, the Y axis 5 being disposed on the base 1, the Z axis 6 being disposed on the Y axis 5, and the X axis 4 being disposed on the Z axis 6.
Since the mounting position of the Y-axis 5 is changed to the base 1, in this embodiment, there is no mounting bracket 7 and the weight assembly mounting plate 8 is directly arranged on the X-axis 4.
And a fine adjustment device 9 is also arranged between the Z shaft 6 and the Y shaft 5 and is used for fine adjustment of the weight module in the X-axis direction.
As shown in fig. 9-10, specifically, the fine adjustment device 9 performs fine adjustment by means of a screw-nut pair, and it can be known that the fine adjustment device 9 further includes a fine adjustment rail 10 disposed between the Z-axis 6 and the Y-axis 5.
In this embodiment, different from the first embodiment, the Y axis 5 adopts a screw motor structure, and compared with the cylinder driving in the first embodiment, the stability and the precision are improved to some extent, and the error is effectively reduced.
The weight component mounting plate 8 is used for mounting the weight component 3, wherein the lower fixing frame 301 and the upper fixing frame 306 are both horizontally fixed on the weight component mounting plate 8, and baffles are further arranged on two sides of the lower fixing frame 301 and the upper fixing frame 306.
As shown in fig. 1 and fig. 4 to 5, the weight further includes a weight pressing head 302, a fixed weight 303, and a pressing head rubber sleeve 307, wherein the weight pressing head 302 is fixed at one end of the fixed weight 303 facing the jig 2, and the pressing head rubber sleeve 307 is arranged at one end of the weight pressing head 302 far away from the fixed weight 303. In this embodiment, design into the multistage structure with the weight and can be convenient for change the weight pressure head 303 of different shapes or the fixed weight 303 of different weight when facing the chip of different models.
As shown in fig. 4, a recess 308 is formed in the indenter rubber 307 at a position contacting the chip, so that the indenter rubber 307 contacts only the top periphery of the chip. In this embodiment, a square chip is used for illustration, and since only the bottom of the chip is adhered to the adhesive when the chip is adhered to the jig, the weight is only pressed around the chip by the concave hole design of the pressure head rubber sleeve 307, and no pressure is generated on the middle position of the chip, thereby further ensuring that the fragile chip is not damaged.
As shown in fig. 5, an umbrella-shaped chuck is arranged at the position where the weight indenter 302 is installed on the indenter rubber sleeve 307, and the indenter rubber sleeve 307 is installed on the chuck. Because the indenter rubber sleeve 307 is a rubber product and has a limited service life, it is necessary to design a replaceable structure to facilitate replacement when the indenter rubber sleeve 307 is damaged.
As shown in fig. 4, one end of the extension rod 304 is provided with an external thread, a threaded hole is formed at the mounting position of the corresponding weight, and the extension rod 304 is detachably connected with the weight. In this embodiment, the detachable extension rod 304 means that it can be replaced with a different length, and theoretically, a floating weight can be added without limitation to increase the weight of the weight as a whole.
As shown in fig. 4, adopt clearance fit between weight and the upper fixing frame 306, it can be understood that, the gap between weight and the upper fixing frame 306 is the smaller the better, and the weight vertical degree is the higher the better promptly, makes it can move about from top to bottom in the upper fixing frame 306, and the weight bottom is provided with the step for the weight can be held up by lower fixing frame 301. When the gap between the weight and the upper fixing frame 306 is small enough, the weight can be completely vertical to the chip after falling on the chip, and the pressure received by the chip is equal to the weight of the weight. When pressure maintaining is carried out, after the pressure head rubber sleeve 307 at the bottom of the weight contacts the chip, the weight component 3 continues to move downwards, the weight is gradually separated from the lower fixing frame 301 at the moment, namely, the lower fixing frame 301 does not play a role in supporting any more, and the weight of the weight is completely pressed on the chip at the moment.
To sum up, the utility model provides a pair of a weight module for chip coating process is owing to adopted the design of XYZ triaxial moving platform and weight subassembly for this weight module can adapt to the chip pressurize work of different models, just the utility model discloses pressure to each chip all is invariable and stable, and the pressurize is effectual, effectively promotes the yields in the sputtering technology, ensures the economic benefits of enterprise.
The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above description in any form, and although the present invention has been disclosed with reference to the preferred embodiment, it is not limited to the present invention, and any skilled person in the art can make modifications or changes equivalent to the equivalent embodiment of the above embodiments without departing from the scope of the present invention.
Claims (10)
1. The utility model provides a weight module for chip coating process, includes base (1), its characterized in that:
an XYZ three-axis motion platform is arranged on the base (1), a weight component (3) is arranged on the XYZ three-axis motion platform, and the weight component (3) comprises a plurality of strip-shaped weights, a lower fixing frame (301) and an upper fixing frame (306);
the weight is vertically arranged and penetrates through the lower fixing frame (301) and the upper fixing frame (306), and the weight can move up and down between the lower fixing frame (301) and the upper fixing frame (306);
the positions of the weights on the lower fixing frame (301) and the upper fixing frame (306) correspond to the positions of the chips mounted on the jig (2);
the weight includes an extension rod (304) disposed on top of it, the extension rod (304) having a floating weight (305) placed or removed.
2. The weight module of claim 1, wherein: the XYZ three-axis motion platform comprises an X axis (4), a Y axis (5) and a Z axis (6), wherein the Z axis (6) is arranged on the base (1), the X axis (4) is arranged on the Z axis (6), and the Y axis (5) is arranged on the X axis (4).
3. The weight module of claim 2, wherein: z axle (6) are including setting up Z axle track (610) on base (1), and Z axle drive arrangement (620) set up Z axle slider (630) up-and-down motion is driven at orbital top of Z axle, be provided with X axle track (410) and X axle drive arrangement (430) on Z axle slider (630), with X axle slider (420) of X axle track (410) complex sets up on mounting bracket (7), still be provided with Y axle track (510) and Y axle drive arrangement (530) on mounting bracket (7), with Y axle slider (520) that Y axle track (510) correspond sets up on weight subassembly mounting panel (8), weight subassembly (3) set up on weight subassembly mounting panel (8).
4. The weight module as recited in claim 3, wherein the Z-axis slider (630) is "mouth" shaped, and the Z-axis track (610) is located in the middle of the "mouth" shaped structure of the Z-axis slider (630); the mounting rack (7) is T-shaped, the notch direction of the T-shaped notch faces the Z shaft (6), the Y shaft track (510) is arranged at the two ends of the mounting rack (7), the Y shaft driving device (530) is arranged at the middle position of the mounting rack (7), and the output shaft of the Y shaft driving device (530) faces the weight assembly mounting plate (8).
5. The weight module of claim 1, wherein: the XYZ three-axis motion platform comprises an X axis (4), a Y axis (5) and a Z axis (6), wherein the Y axis (5) is arranged on the base (1), the Z axis (6) is arranged on the Y axis (5), and the X axis (4) is arranged on the Z axis (6).
6. The weight module of claim 5, wherein: and a fine adjustment device (9) is further arranged between the Z shaft (6) and the Y shaft (5) and is used for fine adjustment of the weight module in the X-axis direction.
7. The weight module as recited in claim 1, wherein the weight is in clearance fit with the upper fixing frame (306) so as to be movable up and down in the upper fixing frame (306), and a step is arranged at the bottom of the weight so that the weight can be supported by the lower fixing frame (301).
8. The weight module of claim 1, wherein: the weight still includes weight pressure head (302), fixed weight (303) and pressure head gum cover (307), weight pressure head (302) are fixed weight (303) orientation the one end of tool (2), pressure head gum cover (307) set up weight pressure head (302) are kept away from the one end of fixed weight (303).
9. The weight module of claim 8, wherein: the position that contacts the chip on pressure head gum cover (307) is provided with a shrinkage pool (308), makes pressure head gum cover (307) only can contact chip top position all around, weight pressure head (302) installation the position department of pressure head gum cover (307) is provided with umbelliform dop, pressure head gum cover (307) with install on the dop.
10. The weight module of claim 1, wherein: one end of the extension rod (304) is provided with an external thread, a threaded hole is formed in the mounting position of the extension rod (304) corresponding to the external thread, and the extension rod (304) is detachably connected with the weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020176143.9U CN211858592U (en) | 2020-02-17 | 2020-02-17 | Weight module for chip coating process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020176143.9U CN211858592U (en) | 2020-02-17 | 2020-02-17 | Weight module for chip coating process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211858592U true CN211858592U (en) | 2020-11-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020176143.9U Active CN211858592U (en) | 2020-02-17 | 2020-02-17 | Weight module for chip coating process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211858592U (en) |
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2020
- 2020-02-17 CN CN202020176143.9U patent/CN211858592U/en active Active
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