CN211744711U - Acoustic transducer structure and array thereof - Google Patents
Acoustic transducer structure and array thereof Download PDFInfo
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- CN211744711U CN211744711U CN202020752659.3U CN202020752659U CN211744711U CN 211744711 U CN211744711 U CN 211744711U CN 202020752659 U CN202020752659 U CN 202020752659U CN 211744711 U CN211744711 U CN 211744711U
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Abstract
The utility model provides an acoustic transducer structure and an array thereof, the acoustic transducer structure comprises a substrate, a central cavity, at least one annular cavity and a vibrating diaphragm, wherein the central cavity is opened from the upper surface of the substrate and extends towards the lower surface of the substrate; at least one annular concave cavity surrounds the central concave cavity, and a preset distance is arranged between the edge of the inner ring of the annular concave cavity and the edge of the central concave cavity; the vibrating diaphragm is positioned on the upper surface of the substrate and covers the openings of the central concave cavity and the annular concave cavity. The utility model discloses accessible machining or MEMS based on semiconductor technology make, realize the outside mechanical dynamic correlation between the structure of successive layer, reach the effect of mechanical frequency response coupling between the different vibrating diaphragms. By repeated combination of simple physical device structures, the inherent mechanical resonance frequency of the device is realized, and resonance modes are mutually coupled to achieve frequency response at other frequencies, so that wider acoustic dynamic response is realized, and the sound field intensity in a response range is improved.
Description
Technical Field
The utility model belongs to microelectronics chip design field relates to an acoustics transducer structure and array thereof.
Background
The dynamic response range of conventional acoustic transducers is generally determined by the natural resonant frequency. And the natural resonant frequency is generally determined by the physical structure and dimensions of the device. Due to the limitation of the processing technology, the acoustic transducer/sensor made of the traditional fast material is generally fixed in physical structure and only has one dynamic response frequency. A good dynamic response over a wide area cannot be truly achieved. The application of many acoustic devices in acoustic media requires that the devices have higher dynamic response at different frequencies to meet wider application requirements. For example, the measurement resolution is modulated by adjusting the frequency, the detection range is controlled, and the like.
MEMS (micro electro mechanical system) sensors by micromachining can achieve larger bandwidth response through different device physical shape, size combinations. But a single device design typically operates at only a single frequency. The combination of multiple devices generally corresponds to the same amount of frequency response and operating bandwidth.
Therefore, how to provide an acoustic transducer structure and an array thereof having a wider acoustic dynamic response becomes an important technical problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned shortcomings of the prior art, the present invention provides an acoustic transducer structure and an array thereof, which are used for solving the problems of narrow acoustic dynamic response range and low sound field intensity in the response range of the existing acoustic transducer.
To achieve the above and other related objects, the present invention provides an acoustic transducer structure, including:
a substrate;
the central concave cavity is opened from the upper surface of the substrate and extends towards the lower surface of the substrate;
the annular concave cavity surrounds the central concave cavity, and a preset distance is formed between the edge of the inner ring of the annular concave cavity and the edge of the central concave cavity;
and the vibrating diaphragm is positioned on the upper surface of the substrate and covers the opening of the central concave cavity and the opening of the annular concave cavity.
Optionally, the number of the annular cavities ranges from 2 to 10, and the annular cavities are sequentially arranged at intervals from inside to outside.
Optionally, the centre of the annular cavity coincides with the centre of the central cavity.
Optionally, the opening of the central cavity is circular, polygonal or rectangular with rounded corners, and the opening of the annular cavity is circular, polygonal or rectangular with rounded corners.
Optionally, a first-order resonance frequency of the diaphragm corresponding to the central concave cavity is higher or lower than a first-order resonance frequency of the diaphragm corresponding to the annular concave cavity.
The utility model also provides an acoustic transducer structural array, acoustic transducer structural array include a plurality of as above arbitrary one acoustic transducer structure, it is a plurality of acoustic transducer structure is array arrangement.
Optionally, a plurality of the acoustic transducer structures are arranged in at least two rows, the acoustic transducer structures between adjacent rows being aligned.
Optionally, the plurality of acoustic transducer structures are arranged in at least two rows, the acoustic transducer structures between adjacent rows being staggered.
As described above, the utility model discloses an acoustic transducer structure and array accessible machining or the MEMS based on semiconductor technology make, realize the outside outward structure of successive layer mechanical dynamic correlation between, reach the effect of mechanical frequency response coupling between the vibrating diaphragm that different cavities correspond. By repeated combination of simple physical device structures, the inherent mechanical resonance frequency of the device is realized, resonance modes are mutually coupled, and frequency response at other frequencies (such as high-order modes) is achieved, so that the purpose of wider acoustic dynamic response is realized, and the sound field intensity in a response range is improved.
Drawings
Figure 1 shows a single mechanical membrane structure with rounded rectangles.
Fig. 2 shows a circular single mechanical membrane structure.
Figure 3 shows a square single mechanical membrane structure.
Fig. 4 shows a single mechanical membrane structure of regular hexagonal shape.
Fig. 5 shows a single mechanical membrane structure in the form of a circular ring.
Fig. 6 shows a dual-acoustic array structure composed of two different sizes of mechanical membranes.
Fig. 7 is a schematic cross-sectional view of an acoustic transducer according to an embodiment of the present invention.
Fig. 8 is a plan view of the central diaphragm suspended above the central cavity and the annular diaphragm (outer diaphragm) suspended above the annular cavity in the first embodiment of the present invention.
Fig. 9 shows a schematic view of another embodiment in which the opening of the central cavity is hexagonal and the opening of the annular cavity is hexagonal.
Fig. 10 shows a schematic view of another embodiment in which the opening of the central cavity is square and the opening of the annular cavity is a square ring.
Fig. 11 shows a schematic view of another embodiment in which the opening of the central cavity is a rounded rectangle and the opening of the annular cavity is a rounded rectangle.
Fig. 12 is a schematic diagram showing a plurality of the acoustic transducer structures arranged in at least two rows and two adjacent rows of the acoustic transducer structures aligned with each other according to the first embodiment of the present invention.
Fig. 13 is a schematic diagram showing a plurality of the acoustic transducer structures arranged in at least two rows and two adjacent rows, where the acoustic transducer structures are staggered with each other according to the first embodiment of the present invention.
Fig. 14 is a graph showing the amplitude dynamic frequency response of the inner and outer diaphragms of the acoustic transducer structure according to the first embodiment of the present invention.
Fig. 15 is an overall acoustic frequency response diagram of an acoustic transducer structure according to a first embodiment of the present invention.
Fig. 16 is a schematic cross-sectional view of an acoustic transducer structure according to a second embodiment of the present invention.
Fig. 17 is a plan view of the central diaphragm suspended above the central cavity, the annular diaphragm suspended above the first annular cavity, and the annular diaphragm suspended above the second annular cavity in the second embodiment of the present invention.
Fig. 18 is a schematic diagram of a plurality of acoustic transducer structures arranged in at least two rows and two adjacent rows of the acoustic transducer structures aligned with each other according to the second embodiment of the present invention.
Fig. 19 is a schematic diagram showing a plurality of acoustic transducer structures arranged in at least two rows and two adjacent rows, where the acoustic transducer structures are staggered with each other according to the second embodiment of the present invention.
Fig. 20 shows simulation results of wide-area acoustic response of an acoustic transducer structure according to a second embodiment of the present invention.
Description of the element reference numerals
101 smaller diaphragm
102 larger diaphragm
201 substrate
202 center cavity
203 annular cavity
203a first annular cavity
203b second annular cavity
204 diaphragm
2041 center diaphragm
2042. 2043 Ring diaphragm
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
Please refer to fig. 1 to 20. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the invention in a schematic manner, and only the components related to the invention are shown in the drawings rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, quantity and proportion of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
As shown in fig. 1 to 5, five different shapes of single mechanical thin film structures are shown, wherein fig. 1 shows a rounded rectangular single mechanical thin film structure, fig. 2 shows a circular single mechanical thin film structure, fig. 3 shows a square single mechanical thin film structure, fig. 4 shows a regular hexagonal single mechanical thin film structure, and fig. 5 shows a circular single mechanical thin film structure. For the acoustic transducer adopting the single mechanical film structure, the dynamic response frequency is only one, and the good dynamic response can not be really realized in a wide area
As shown in fig. 6, a dual-frequency-response array structure composed of two mechanical films with different sizes is shown, in which a smaller diaphragm 101 corresponds to a higher dynamic frequency response, and a larger diaphragm 102 corresponds to a lower dynamic frequency response. For such acoustic transducers employing multiple device combinations, which generally correspond to the same number of frequency responses and operating bandwidths, the increased dynamic response range is limited.
Accordingly, the present invention further extends the acoustic dynamic response range of an acoustic transducer by improving the structural design of the acoustic transducer. The technical solution of the present invention will be described below by specific examples.
Example one
The present invention provides an acoustic transducer structure, please refer to fig. 7, which is a schematic cross-sectional view of the acoustic transducer structure, and includes a substrate 201, a central cavity 202, an annular cavity 203 and a diaphragm 204, wherein the central cavity 202 is opened from the upper surface of the substrate 201 and extends toward the lower surface of the substrate 201; the annular cavity 203 surrounds the central cavity 202, and a preset distance is reserved between the inner ring edge of the annular cavity 203 and the edge of the central cavity 202; the diaphragm 204 is located on the upper surface of the substrate and covers the opening of the central cavity 202 and the opening of the annular cavity 203.
Specifically, the diaphragms 204 are integrated, so that the suspended diaphragms above different cavities can be linked with each other. Referring to fig. 8, a plan layout of a center diaphragm 2041 suspended above the center cavity 202 and an annular diaphragm 2042 (outer diaphragm) suspended above the annular cavity 203 is shown, wherein a connecting portion (not shown in fig. 8, see fig. 7) between the center diaphragm 2041 and the annular diaphragm 2042 is fixed on the upper surface of the substrate 201.
Illustratively, the center of the annular cavity 203 coincides with the center of the central cavity 202.
Illustratively, the opening of the central cavity 202 is circular, the opening of the annular cavity 203 is circular, and accordingly, the central diaphragm 2041 is circular and the annular diaphragm 2042 is circular.
Of course, in other embodiments, the opening of the central cavity 202 may be polygonal (e.g., hexagonal as shown in fig. 9, or square as shown in fig. 10) or rectangular with rounded corners (as shown in fig. 11), and the opening of the annular cavity 203 may be polygonal (e.g., hexagonal as shown in fig. 9, or square as shown in fig. 10) or rectangular with rounded corners (as shown in fig. 11).
As an example, the first-order resonance frequency of the diaphragm corresponding to the central cavity (the central diaphragm 2041) is different from the first-order resonance frequency of the diaphragm corresponding to the annular cavity (the annular diaphragm 2042).
By way of example, the mechanical coupling can be maximized by adjusting the dimensions of the respective cavities such that the mechanical frequency responses of the inner and outer diaphragms are multiples of each other. For example, when the first-order resonance frequency of the diaphragm corresponding to the central cavity is higher than the first-order resonance frequency of the diaphragm corresponding to the annular cavity, the first-order resonance frequency of the diaphragm corresponding to the central cavity is equal to an integral multiple of the first-order resonance frequency of the diaphragm corresponding to the annular cavity, or within a close range, for example, deviates from the integral multiple of the first-order resonance frequency of the diaphragm corresponding to the annular cavity by no more than 20%. And when the first-order resonance frequency of the diaphragm corresponding to the central cavity is lower than the first-order resonance frequency of the diaphragm corresponding to the annular cavity, the first-order resonance frequency of the diaphragm corresponding to the annular cavity is equal to an integral multiple of the first-order resonance frequency of the diaphragm corresponding to the central cavity, or within an approaching range, for example, the integral multiple of the first-order resonance frequency of the diaphragm corresponding to the central cavity is deviated by no more than 20%.
In addition, because mechanical coupling effect, when the low frequency vibrating diaphragm reaches resonance response, can drive the company of high frequency vibrating diaphragm shake, if the high order response of low frequency vibrating diaphragm and high frequency vibrating diaphragm resonant frequency are close or unanimous, the interlock effect can be strengthened, and the phenomenon of shaking also can repeated appearance at the high-price mode of high frequency vibrating diaphragm in addition. Therefore, the size of each cavity can be adjusted, so that the first-order resonance frequency of the diaphragm corresponding to the central cavity is higher than the first-order resonance frequency of the diaphragm corresponding to the annular cavity, and one high-order resonance frequency of the diaphragm corresponding to the annular cavity is equal to the first-order resonance frequency of the diaphragm corresponding to the central cavity, or deviates from the first-order resonance frequency of the diaphragm corresponding to the central cavity by no more than 20%. Or by adjusting the size of each cavity, the first-order resonance frequency of the diaphragm corresponding to the central cavity is lower than the first-order resonance frequency of the diaphragm corresponding to the annular cavity, and one high-order resonance frequency of the diaphragm corresponding to the central cavity is equal to the first-order resonance frequency of the diaphragm corresponding to the annular cavity, or the one high-order resonance frequency of the diaphragm corresponding to the central cavity deviates from the first-order resonance frequency of the diaphragm corresponding to the annular cavity by no more than 20%.
As an example, referring to fig. 12 and 13, a plurality of the acoustic transducer structures may be provided to form an acoustic transducer structure array, and the acoustic transducer structures are arranged in an array, where fig. 12 shows that the acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures in two adjacent rows are aligned with each other, and fig. 13 shows that the acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures in two adjacent rows are staggered with each other. Of course, in other embodiments, the specific arrangement rule of the plurality of acoustic transducer structures in the acoustic transducer structure array may also be adjusted as required, and the protection scope of the present invention should not be limited herein.
By way of example, please refer to fig. 14 and fig. 15, which are graphs showing simulation effects of dynamic responses of the acoustic transducer structure of the present embodiment, wherein fig. 14 is a graph showing dynamic frequency response of amplitudes of the inner and outer diaphragms, and fig. 15 is a graph showing an overall acoustic frequency response of the inner and outer diaphragm structures. As can be seen from fig. 14, the first-order resonance frequency of the outer-layer annular diaphragm is 1MHz, and the first-order resonance frequency of the center diaphragm is 5MHz, which is 5 times the first-order resonance frequency of the outer-layer annular diaphragm. Three dotted line frames in fig. 15 represent the first resonance coupling and the second resonance coupling respectively from left to right in the high-order resonance coupling response, and it can be seen that there is a linkage effect caused by mechanical coupling between the inner and outer diaphragms. As can be seen from fig. 15, the acoustic dynamic response and the acoustic energy of the device at frequencies of 1MHz, 5MHz, and 8MHz are improved, and the wide-area acoustic dynamic response and the improvement of the acoustic energy are realized.
The acoustic transducer structure of this embodiment utilizes the mechanical mode dynamic coupling between a plurality of vibrating diaphragms through the level combination of a central vibrating diaphragm and an annular vibrating diaphragm, realizes the joint vibration of different cavity top vibrating diaphragms, has not only strengthened the vibration intensity of each mode, has enlarged the acoustics dynamic response scope of device moreover, realizes exceeding the effect that only single vibrating diaphragm acoustics dynamic frequency response superposes each other when a plurality of physical vibrating diaphragms of tradition are combined.
Example two
The present embodiment and the first embodiment adopt substantially the same technical solutions, except that the acoustic transducer structure of the first embodiment includes a central diaphragm and a ring-shaped diaphragm, and in the present embodiment, the acoustic transducer structure includes a central diaphragm and two ring-shaped diaphragms.
Referring to fig. 16, a schematic cross-sectional structure of an acoustic transducer structure of this embodiment is shown, which includes a substrate 201, a central cavity 202, a first annular cavity 203a, a second annular cavity 203b, and a diaphragm 204, wherein the central cavity 202 is opened from an upper surface of the substrate 201 and extends toward a lower surface of the substrate 201; the first annular cavity 203a and the second annular cavity 203b surround the central cavity 202 and are arranged at intervals from inside to outside in sequence; the diaphragm 204 is located on the upper surface of the substrate 201 and covers the opening of the central cavity 202, the opening of the first annular cavity 203a, and the opening of the second annular cavity 203 b.
Fig. 17 shows a plan layout of the central diaphragm 2041 suspended above the central cavity 202, the annular diaphragm 2042 suspended above the first annular cavity 203a, and the annular diaphragm 2043 suspended above the second annular cavity 203 b.
Referring to fig. 18 and 19, a plurality of acoustic transducer structures of the present embodiment may be provided to form an acoustic transducer structure array, and the acoustic transducer structures are arranged in an array, where fig. 18 shows that the acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures in two adjacent rows are aligned with each other, and fig. 19 shows that the acoustic transducer structures are arranged in at least two rows, and the acoustic transducer structures in two adjacent rows are staggered with each other. Of course, in other embodiments, the specific arrangement rule of the plurality of acoustic transducer structures in the acoustic transducer structure array may also be adjusted as required, and the protection scope of the present invention should not be limited herein.
As an example, please refer to fig. 20, which shows a simulation result of a wide-area acoustic response (2-8MHz) of the acoustic transducer structure of this embodiment, it can be seen that the acoustic transducer structure of this embodiment achieves an acoustic frequency response range between 2-8MHz close to a flat band, and achieves a wide-area acoustic dynamic response and an improvement of acoustic energy.
The acoustic transducer structure of this embodiment utilizes the mechanical mode dynamic coupling between a plurality of vibrating diaphragms through the level combination of a central vibrating diaphragm and two annular vibrating diaphragms, realizes the joint vibration of different cavity top vibrating diaphragms, has not only strengthened the vibration intensity of each mode, has still enlarged the acoustics dynamic response scope of device, realizes exceeding the effect that only single vibrating diaphragm acoustics dynamic frequency response superposes each other when a plurality of physical vibrating diaphragms of tradition are combined.
EXAMPLE III
The present embodiment adopts substantially the same technical solutions as those of the first embodiment or the second embodiment, except that the acoustic transducer structure of the first embodiment includes a central diaphragm and an annular diaphragm, and the acoustic transducer structure of the second embodiment includes a central diaphragm and two annular diaphragms, but in this embodiment, the acoustic transducer structure includes a central diaphragm and at least three annular diaphragms, for example, 3 to 10, and the annular cavities are sequentially spaced from inside to outside.
The acoustic transducer structure of this embodiment can utilize the mechanical mode dynamic coupling between a plurality of vibrating diaphragms through the level combination of a central vibrating diaphragm and at least three annular vibrating diaphragms, realizes the joint vibration of different cavity top vibrating diaphragms, has not only strengthened the vibration intensity of each mode, has enlarged the acoustics dynamic response scope of device moreover, realizes exceeding the effect that only single vibrating diaphragm acoustics dynamic frequency response superposes each other when a plurality of physical vibrating diaphragms of tradition are combined.
To sum up, the utility model discloses an acoustics transducer structure and array accessible machining or the MEMS based on semiconductor technology make, realize the outside mechanical dynamic correlation between the structure of successive layer, reach the effect of mechanical frequency response coupling between the vibrating diaphragm that different cavities correspond. By repeated combination of simple physical device structures, the inherent mechanical resonance frequency of the device is realized, resonance modes are mutually coupled, and frequency response at other frequencies (such as high-order modes) is achieved, so that the purpose of wider acoustic dynamic response is realized, and the sound field intensity in a response range is improved. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (8)
1. An acoustic transducer structure, comprising:
a substrate;
the central concave cavity is opened from the upper surface of the substrate and extends towards the lower surface of the substrate;
the annular concave cavity surrounds the central concave cavity, and a preset distance is formed between the edge of the inner ring of the annular concave cavity and the edge of the central concave cavity;
and the vibrating diaphragm is positioned on the upper surface of the substrate and covers the opening of the central concave cavity and the opening of the annular concave cavity.
2. An acoustic transducer structure according to claim 1, characterized in that: the number of the annular concave cavities ranges from 2 to 10, and the annular concave cavities are sequentially arranged from inside to outside at intervals.
3. An acoustic transducer structure according to claim 1, characterized in that: the center of the annular cavity coincides with the center of the central cavity.
4. An acoustic transducer structure according to claim 1, characterized in that: the opening of the central concave cavity is circular, polygonal or round-corner rectangular, and the opening of the annular concave cavity is circular, polygonal or round-corner rectangular.
5. An acoustic transducer structure according to claim 1, characterized in that: the first-order resonance frequency of the diaphragm corresponding to the central concave cavity is higher than or lower than the first-order resonance frequency of the diaphragm corresponding to the annular concave cavity.
6. An array of acoustic transducer structures, characterized by: the array of acoustic transducer structures comprising a plurality of acoustic transducer structures according to any of claims 1-5, the plurality of acoustic transducer structures being arranged in an array.
7. An array of acoustic transducer structures according to claim 6, wherein: the plurality of acoustic transducer structures are arranged in at least two rows, with the acoustic transducer structures between adjacent rows being aligned.
8. An array of acoustic transducer structures according to claim 6, wherein: the plurality of acoustic transducer structures are arranged in at least two rows, with the acoustic transducer structures between adjacent rows being staggered.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020752659.3U CN211744711U (en) | 2020-05-09 | 2020-05-09 | Acoustic transducer structure and array thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020752659.3U CN211744711U (en) | 2020-05-09 | 2020-05-09 | Acoustic transducer structure and array thereof |
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| CN211744711U true CN211744711U (en) | 2020-10-23 |
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