CN211740138U - Plane, spherical surface and paraboloid combined interference measuring device - Google Patents
Plane, spherical surface and paraboloid combined interference measuring device Download PDFInfo
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- CN211740138U CN211740138U CN202020094699.3U CN202020094699U CN211740138U CN 211740138 U CN211740138 U CN 211740138U CN 202020094699 U CN202020094699 U CN 202020094699U CN 211740138 U CN211740138 U CN 211740138U
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Abstract
The utility model discloses a plane, sphere, parabolic combination interference measurement device belongs to light interference measuring instrument technical field, and the device includes: the device comprises a laser reentry beam expanding system, a main interferometer system and an imaging system; the main interference system consists of a polarization modulation component, a surface shape measurement component and a phase modulation component; the polarization component realizes the contrast adjustment of the interference pattern by adjusting the angle between the polarizer and the analyzer, the surface shape measurement component adjusts the light path structure according to different surface shapes to be measured, and the phase modulation component modulates the phase of the interference pattern according to different demodulation algorithms. The utility model has the advantages of accurate high efficiency, compact structure, easy operation, the facula of expanding the beam is even, and the contrast is adjustable, can measure plane, sphere, the multiple optical mirror surface of paraboloid, can utilize to move phase, Fourier carrier, regularization phase place following method (RPT) multiple demodulation algorithm.
Description
Technical Field
The utility model belongs to the technical field of light interference measuring instrument, especially, relate to a plane, sphere, parabolic combination interference measuring device.
Background
In the industrial production field, mechanical or electrical methods are generally adopted to measure the surface topography of a device, and such contact measurement often causes certain damage to a test piece and can only measure a specific track profile or surface shape distribution of a limited measurement area. The interferometry is a surface appearance measuring method based on the optical interference principle, has the advantages of high measuring speed, high precision and non-contact, and is widely applied to measuring various surface shapes. The universal interference structure comprises a Fizeau structure, a Taemann Green structure and a Mach-Zehnder structure, has high measurement sensitivity, can measure an optical surface with a nanometer level, but has no universality for measuring different surface shapes.
For example, chinese patent publication No. CN101672632A discloses an optical fiber point diffraction phase-shifting interferometry method for optical spherical surface shape, in which first, the spherical wave diffracted by the measuring fiber is reflected to the auxiliary positive lens through the beam splitter prism, and is converted into converging spherical wave and reflected on the surface of the measured spherical surface, and the reflected wavefront carrying the information of the measured spherical surface is converged to the end face of the reference fiber through the auxiliary positive lens and the beam splitter prism to form the measured wavefront; the measured spherical surface is removed, other optical elements are kept still, a plane reflector is placed at the focal point of the auxiliary positive lens, and the aberration brought by the end surface roughness of the auxiliary positive lens, the beam splitter prism and the reference optical fiber can be measured by the same method.
Currently commonly used demodulation algorithms include phase shifting algorithms, fourier carrier algorithms and Regularized Phase Tracking (RPT). The phase-shifting algorithm collects a plurality of phase-shifting interferograms in a phase-shifting manner, the demodulation speed is high, the accuracy is high, the environmental disturbance is small, and a plurality of interferograms are needed. The Fourier carrier algorithm has high demodulation speed, can demodulate only by a single interference pattern, but needs to introduce a carrier wave, and has slightly lower precision than a phase-shifting algorithm. The RPT demodulation algorithm can demodulate only by a single interference pattern, but the demodulation time is relatively long. Various demodulation algorithms have advantages and disadvantages and are suitable for different measurement environments.
SUMMERY OF THE UTILITY MODEL
For solving the not enough of prior art existence, the utility model provides a plane, sphere, paraboloid combination interferometry device has accurate high efficiency, compact structure, easy operation, expands the even, the contrast adjustable of facula has a little, can measure the multiple optical mirror surface of plane, sphere, paraboloid, can utilize to move the phase, Fourier carrier, regularization phase following method (RPT) multiple demodulation algorithm.
A plane, spherical surface and paraboloid combined interference measuring device comprises a laser turn-back beam expanding system, a main interferometer system and an imaging system, wherein the laser turn-back beam expanding system is used for realizing collimation of expanded beams;
the main interferometer system comprises a polarization modulation component, a surface shape measurement component and a phase modulation component; the polarization modulation component comprises a polarizer, a polarization splitting prism, a quarter wave plate and an analyzer;
after collimated light beams emitted by the laser retrace beam expanding system enter the main interference system, the collimated light beams are converted into linearly polarized light through the polarizer, and then are divided into two paths of light rays of a measuring path and a reference path through the polarization beam splitter prism, wherein the parallel polarized light of the measuring path penetrates through the quarter-wave plate to be incident to the surface shape measuring assembly, is reflected by a surface to be measured in the assembly, and returns to the original path to be used as measuring light; the vertical polarized light of the reference path is reflected by the phase modulation component through the quarter-wave plate and returns to the original path to be used as reference light; the measuring light and the reference light respectively pass through the quarter-wave plate twice, the polarization states respectively rotate by 90 degrees, and an interference pattern is formed in an imaging system after the measuring light and the reference light sequentially pass through the polarization beam splitter prism and the analyzer;
the surface shape measuring component is a plane measuring component, a spherical surface measuring component or a paraboloid measuring component, and the corresponding optical path structure is adjusted according to different surface shapes to be measured.
The utility model discloses a distance from the laser to the beam expander is prolonged through the turn-back light path of the right-angle prism, and the uniformity of the expanded beam facula is improved; the light intensity ratio of the reference light and the measuring light is adjusted by polarization, so that the contrast of the interference pattern can be adjusted; the method can be used for plane, spherical and paraboloid measurement under different scenes by combining a plane, spherical and paraboloid interference measurement method and a phase shift, Fourier carrier and RPT demodulation algorithm.
The laser turn-back beam expanding system comprises a He-Ne laser, a first plane reflector, a first right-angle prism, a second plane reflector and a laser beam expander which are sequentially arranged; and the Gaussian beam emitted by the He-Ne laser is folded back for multiple times in the laser folding-back beam expanding system and reaches the laser beam expander, so that the collimation of the expanded beam is realized.
The utility model discloses in, the beam expanding system that turns back of laser passes through the right angle prism light path that turns back, preferably, two wainscots of first right angle prism are plated and are increased anti-membrane, have prolonged the distance that the gaussian beam that the He-Ne laser sent reachs the laser beam expander, have promoted the homogeneity of the facula of expanding the beam.
The imaging system comprises an imaging mirror and a detector which are arranged in sequence; the interference field generated by the main interferometer system is imaged on the target surface of the detector through the imaging mirror to form a clear interference pattern, and the surface shape distribution of the surface to be detected can be recovered through a demodulation algorithm.
The phase modulation assembly comprises a reference mirror and piezoelectric ceramics, wherein the reference mirror is used for reflecting the vertical polarized light in the reference path back to the original path as the reference light after passing through a quarter-wave plate; the piezoelectric ceramic is positioned behind the reference mirror and used for moving the position of the reference mirror to perform phase modulation and demodulating the phase of the interference pattern.
The polarization modulation component is used for adjusting the contrast of the interference pattern; the angle relation between the polarizer and the analyzer is adjusted, the light intensity ratio of the reference light and the measuring light is changed, and the contrast of the interference pattern is adjustable.
The surface shape measuring component structure can be used for installing one of a plane measuring component, a spherical surface measuring component or a paraboloid measuring component according to an object to be measured; the plane measurement component is a plane to be measured; the spherical surface measuring component comprises a first spherical aberration eliminating lens and a spherical surface to be measured, wherein the focus of the first spherical aberration eliminating lens is superposed with the spherical center of the spherical surface to be measured; the paraboloid measuring component comprises a second aplanatic lens, a middle hole reflector and a paraboloid to be measured, wherein the focus of the second aplanatic lens is coincided with the focus of the paraboloid to be measured, and the middle hole reflector is arranged at the focus.
When in plane measurement, the surface shape measurement component is a plane to be measured, and the auto-collimation reflection of the measurement light beam is realized; when the spherical surface is measured, the surface shape measuring component comprises an aplanatic lens and a spherical surface to be measured, the focal point of the aplanatic lens is superposed with the spherical center of the spherical surface to be measured, the divergent wavefront of the measuring light is consistent with the surface shape of the spherical surface, and the auto-collimation reflection of the measuring light beam is realized; when the paraboloid is measured, the surface shape measuring assembly comprises an aplanatic lens, a middle hole reflector and a paraboloid to be measured, measuring light is converged by the aplanatic lens, the focus of the aplanatic lens is superposed with the focus of the paraboloid to be measured, the measuring light is reflected into parallel light by the paraboloid to be measured and then reflected by the middle hole reflector, and measuring beam auto-collimation reflection is realized;
the phase modulation component introduces different phase modulations corresponding to different demodulation algorithms; when a phase-shifting algorithm is adopted, the optical path difference between the reference light and the measuring light is changed through the piezoelectric ceramics, different phase-shifting quantities are introduced into the interferogram, a plurality of interferograms are collected for demodulation, and extremely high phase demodulation precision of the interferogram can be obtained in a stable environment; when a Fourier carrier algorithm is adopted, an inclined carrier is introduced into the interferogram by adjusting the angle of the reference mirror, and a single interferogram is acquired for demodulation, so that the demodulation speed is high, and the method can be used in a large-vibration environment; when the RPT demodulation algorithm is adopted, the single-amplitude interferogram is directly acquired for demodulation without any phase modulation, but the demodulation speed is low, so that the method is suitable for the vibration environment and the situation that the reference mirror is difficult to adjust.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model combines the plane, spherical surface and paraboloid interference measuring device, utilizes the right-angle prism of the laser turn-back beam expanding system to turn back the light path, prolongs the distance between the He-Ne laser and the laser beam expander and improves the uniformity of the expanded beam facula; the light intensity ratio of the reference light and the measuring light is changed by utilizing the polarization modulation component, so that the contrast of the interference pattern can be adjusted; the structure transformation of the surface shape measurement assembly is utilized to realize the light beam auto-collimation interference, and the non-universality of the existing interference structure for the measurement of different surface shapes is effectively solved; the phase modulation component can be used for modulating the phase by combining phase shift, Fourier and RPT demodulation algorithms, the phase recovery requirements under different environments can be met, and the high-precision measurement of the surface shape of the surface to be measured can be realized.
Drawings
FIG. 1 is a schematic diagram of the optical path structure of the interference measuring device of the present invention with a plane, a spherical surface and a paraboloid;
FIG. 2 is a schematic view of the optical path of the different surface shape measuring assembly of the present invention;
fig. 3 is an example of the measurement result of the plane mirror by using the fourier demodulation algorithm in the embodiment of the present invention;
fig. 4 is an example of the measurement result of the spherical mirror by using the RPT demodulation algorithm in the embodiment of the present invention;
fig. 5 is an example of a measurement result of a paraboloid by using a phase shift demodulation algorithm in the embodiment of the present invention.
In the figure: s1, laser retracing and beam expanding system; s2, a main interferometer system; s3, an imaging system; p1, a polarization modulation component, P2-a, a plane measurement component; p2-b, sphere measurement component; p2-c, parabolic measuring component; p3, phase modulation component; 1. a HeNe laser; 2. a first planar mirror; 3. a first right-angle prism; 4. a second right-angle prism; 5. a second planar mirror; 6. a laser beam expander; 7. a polarizer; 8. a polarization splitting prism; 9. a quarter wave plate; 10. an analyzer; 11. a reference mirror; 12. piezoelectric ceramics; 13. an imaging mirror; 14. a detector; 15. a plane to be measured; 16. a first aspherical lens; 17. a spherical surface to be detected; 18. a mesoporous mirror; 19. a paraboloid to be measured; 20. a second aspherical lens.
Detailed Description
The invention will be described in further detail with reference to the following figures and examples, which are intended to facilitate the understanding of the invention without limiting it.
As shown in FIG. 1, the plane, sphere and paraboloid combined interferometry device comprises three parts, namely a laser reentry beam expanding system S1, a main interferometer system S2 and an imaging system S3.
The laser reentry beam expanding system S1 includes a He-Ne laser 1, a first plane mirror 2, a first right-angle prism 3, a second right-angle prism 4, a second plane mirror 5, and a laser beam expander 6, which are arranged in this order. Two waist surfaces of the first right-angle prism 3 are plated with reflection increasing films, a Gaussian beam emitted by the He-Ne laser 1 is turned back for multiple times in a laser turn-back beam expanding system and reaches the laser beam expander 6, the Gaussian beam is turned back through the right-angle prism to prolong the propagation distance, the uniformity of a beam expanding light spot is improved, the defocusing distance adjustment is carried out on the laser beam expander 6, and the collimation of the beam expanding light beam is realized.
The master interferometer system S2 includes a polarization modulation assembly P1, a surface shape measurement assembly, and a phase modulation assembly P3. The polarization modulation component P1 comprises a polarizer 7, a polarization beam splitter prism 8, a quarter-wave plate 9 and an analyzer 10; the phase modulation assembly P3 includes a reference mirror 11 and a piezoelectric ceramic 12.
The collimated light beam enters a main interferometer system S2, is converted into linearly polarized light after passing through a polarizer 7, and is divided into measuring light and reference light by a polarization beam splitter prism 8, wherein the parallel polarization measuring light is transmitted through a quarter-wave plate 9 to be incident to a surface shape measuring assembly, is reflected by a surface to be measured in the assembly, and returns in the original path; the vertical polarized reference light is reflected by the reference mirror 11 through the quarter-wave plate 9 and returns to the original path; the measuring light and the reference light respectively pass through the quarter-wave plate 9 twice, the polarization states respectively rotate by 90 degrees, and the interference pattern is obtained after the measuring light and the reference light sequentially pass through the polarization beam splitter prism 8 and the analyzer 10.
The piezoelectric ceramic 12 is located behind the reference mirror and used for adjusting the position of the reference mirror 11 to perform phase modulation and demodulating the phase of the interferogram. The angle relation between the polarizer 7 and the analyzer 9 is adjusted in the interference system, the light intensity ratio of the reference light and the measuring light is changed, and the contrast of the interference pattern is adjustable; and adjusting the structure of the surface shape measuring component to deal with different surface shape measurements.
As shown in fig. 2, the plane measurement component P2-a is the plane 15 to be measured; the spherical surface measuring component P2-b comprises a first spherical aberration eliminating lens 16 and a spherical surface 17 to be measured, wherein the focus of the first spherical aberration eliminating lens 16 is coincided with the spherical center of the spherical surface 17 to be measured; the paraboloid measuring component P2-c comprises a second aplanatic lens 20, a middle hole reflector 18 and a paraboloid 19 to be measured, wherein the focal point of the second aplanatic lens 20 is coincident with the focal point of the paraboloid 19 to be measured, and the middle hole reflector 18 is arranged at the focal point.
For the phase modulation component P3, when a phase shift algorithm is adopted, the optical path difference between the reference light and the measuring light is changed through the piezoelectric ceramic 12, and different phase shift quantities are introduced into an interference pattern; when a Fourier carrier algorithm is adopted, inclined carriers are introduced into the interference pattern by adjusting the angle of the reference mirror 11; when the RPT demodulation algorithm is adopted, a single interference pattern is directly acquired for demodulation, different phase modulation is introduced corresponding to different demodulation algorithms, and demodulation of multiple demodulation algorithms including phase shifting, Fourier carrier and RPT is realized.
The imaging system S3 includes an imaging mirror 13 and a detector 14 arranged in sequence; the interference field is imaged on a target surface of a detector 14 through an imaging mirror 13 to form a clear interference pattern, and the surface shape distribution of the surface to be detected is recovered through a demodulation algorithm.
The steps of using the plane, spherical surface and paraboloid combined interference measuring device are as follows:
step 2, adjusting a polarizer 7 and an analyzer 10 in the polarization modulation component P1 to obtain higher interferogram contrast, and adjusting a phase modulation component P3 according to a demodulation algorithm to realize interferogram phase modulation;
and 3, recovering the surface shape distribution of the piece to be detected through a demodulation algorithm after the phase modulation interferogram is acquired.
For verifying the effectiveness of the device of the utility model, the interference measurement is carried out on a plane, a spherical surface and a paraboloid.
FIG. 3 is an example of the measurement result of the plane by the Fourier demodulation algorithm in the vibration environment of the present invention, when the Fourier demodulation algorithm is selected for plane measurement, the plane measurement component P2-a is adopted; the spatial position and the inclination state of the plane 15 to be measured are adjusted until a clear imaging interferogram with inclined straight fringes is obtained on the detector 14, and the angles of the polarizer 7 and the analyzer 10 in the polarization modulation assembly P1 are adjusted to enhance the contrast of the interferogram, as shown in (a) in fig. 3. After a fourier demodulation algorithm and wavefront fitting, Zernike polynomial coefficients are obtained, coefficients of the first three terms (which respectively represent a constant term, an x-direction inclination term and a y-direction inclination term) are removed, and corresponding calculation is performed, so that a plane mirror measurement result is obtained, as shown in fig. 3 (b), a peak-valley (PV) value is 0.3809 λ, and a root-mean-square (RMS) value is 0.0644 λ.
Fig. 4 is an example of the measurement result of the spherical surface by the RPT demodulation algorithm in the vibration environment of the present invention, and when the RPT demodulation algorithm is selected for the spherical surface measurement, the spherical surface measurement component P2-b is adopted; the focal length of the spherical aberration eliminating lens is 75mm, the spherical surface to be detected is a concave spherical surface, and the curvature radius of a top sphere is-90 mm; firstly, a plane mirror is placed at a position to be measured, and the plane mirror is adjusted to the detector 14 to generate sparse stripes as much as possible; a first spherical aberration elimination lens 16 is placed in front of the plane mirror, the plane mirror is moved to the focus of the first spherical aberration elimination lens 16, the spatial position and the inclination state of the first spherical aberration elimination lens 16 are adjusted, and the detector 14 generates the sparse stripes as far as possible; taking down the plane mirror, installing the spherical surface 17 to be measured, making the spherical center of the spherical surface 17 to be measured coincide with the focus of the first aplanatic lens 16, adjusting the spatial position and the inclination state of the spherical surface 18 to be measured, obtaining a clearly imaged interference pattern on the detector 14, adjusting the angles of the polarizer 7 and the analyzer 10 in the polarization modulation assembly P1, and enhancing the contrast of the interference pattern, as shown in (a) in FIG. 4; zernike polynomial coefficients are obtained through an RPT algorithm and wavefront fitting, coefficients of the first four terms (respectively representing a constant term, an x-direction inclination term, a y-direction inclination term and a defocus term) are removed, corresponding calculation is carried out, and a spherical mirror measurement result is obtained, wherein as shown in (b) in FIG. 4, the PV value is 0.5483 lambda, and the RMS value is 0.1057 lambda.
FIG. 5 is an exemplary measurement of a paraboloid using a phase-shift demodulation algorithm in a stable environment, wherein a paraboloid measuring component P2-c is used when the phase-shift demodulation algorithm is selected for paraboloid measurement; wherein the focal length of the spherical aberration eliminating lens is 75mm, and the curvature radius of the vertex sphere of the paraboloid to be measured is-90 mm; firstly, a plane mirror is placed at a position to be measured, and the plane mirror is adjusted to the detector 14 to generate sparse stripes as much as possible; a second spherical aberration elimination lens 20 is placed in front of the plane mirror, the plane mirror is moved to the focus of the second spherical aberration elimination lens 20, the spatial position and the inclination state of the second spherical aberration elimination lens 20 are adjusted, and the detector 14 generates the sparse stripes as far as possible; the plane mirror is taken down, and the middle hole reflector 18 is arranged at the position of the plane mirror, so that the converged light beam can pass through the middle of the middle hole reflector 18; the paraboloid 19 to be measured is installed, the focus of the paraboloid 19 to be measured is coincided with the focus of the second aspherical mirror 20, the spatial position and the inclination state of the paraboloid 19 to be measured and the inclination state of the mesoporous reflector 18 are adjusted, a clearly imaged interference pattern is obtained on the detector 14, the angles of the polarizer 7 and the analyzer 10 in the polarization modulation assembly P1 are adjusted, and the contrast of the interference pattern is enhanced, as shown in (a) in FIG. 5. The optical path difference between the reference light and the measuring light is changed by the piezoelectric ceramics 12 to obtain a plurality of phase-shifting interferograms; zernike polynomial coefficients are obtained through a phase shift algorithm and wavefront fitting, coefficients of the first four terms (respectively representing a constant term, an x-direction inclination term, a y-direction inclination term and a defocus term) are removed, corresponding calculation is carried out, and a result of parabolic mirror measurement is obtained, as shown in (b) in FIG. 5, the PV value of the parabolic mirror is 1.1569 lambda, and the RMS value is 0.2141 lambda.
To sum up, the utility model discloses plane, sphere, parabolic combination interferometry device, compact structure, accurate high efficiency, easy operation promotes the facula homogeneity through the light path of turning back, and the contrast is adjustable, can measure plane, sphere, the multiple shape of face of paraboloid, can utilize to shift looks, Fourier carrier, the multiple demodulation algorithm of RPT, applicable different measuring environment.
The above-mentioned embodiment is to the technical solution and the beneficial effects of the present invention have been described in detail, it should be understood that the above is only the specific embodiment of the present invention, not used for limiting the present invention, any modification, supplement and equivalent replacement made within the principle scope of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A plane, spherical surface and paraboloid combined interference measuring device is characterized by comprising a laser turn-back beam expanding system, a main interferometer system and an imaging system, wherein the laser turn-back beam expanding system is used for realizing collimation of a beam expanding beam;
the main interferometer system comprises a polarization modulation component, a surface shape measurement component and a phase modulation component; the polarization modulation component comprises a polarizer, a polarization splitting prism, a quarter wave plate and an analyzer;
after collimated light beams emitted by the laser retrace beam expanding system enter the main interference system, the collimated light beams are converted into linearly polarized light through the polarizer, and then are divided into two paths of light rays of a measuring path and a reference path through the polarization beam splitter prism, wherein the parallel polarized light of the measuring path penetrates through the quarter-wave plate to be incident to the surface shape measuring assembly, is reflected by a surface to be measured in the assembly, and returns to the original path to be used as measuring light; the vertical polarized light of the reference path is reflected by the phase modulation component through the quarter-wave plate and returns to the original path to be used as reference light; the measuring light and the reference light respectively pass through the quarter-wave plate twice, the polarization states respectively rotate by 90 degrees, and an interference pattern is formed in an imaging system after the measuring light and the reference light sequentially pass through the polarization beam splitter prism and the analyzer;
the surface shape measuring component is a plane measuring component, a spherical surface measuring component or a paraboloid measuring component, and the corresponding optical path structure is adjusted according to different surface shapes to be measured.
2. The combined planar, spherical and parabolic interferometry device according to claim 1, wherein said laser fold-back beam-expanding system comprises a He-Ne laser, a first planar mirror, a first right-angle prism, a second planar mirror and a laser beam expander, which are arranged in sequence; and the Gaussian beam emitted by the He-Ne laser is folded back for multiple times in the laser folding-back beam expanding system and reaches the laser beam expander, so that the collimation of the expanded beam is realized.
3. The combined planar, spherical and parabolic interferometry device according to claim 2, wherein both waist surfaces of said first right-angle prism are coated with a reflection increasing film.
4. The combined planar, spherical and parabolic interferometry device according to claim 1, wherein said imaging system comprises an imaging mirror and a detector arranged in sequence; the interference field generated by the main interferometer system is imaged on the target surface of the detector through the imaging mirror to form a clear interference pattern.
5. The combined planar, spherical and parabolic interferometer of claim 1, wherein the phase modulation module comprises a reference mirror and piezoelectric ceramics, the reference mirror is configured to reflect the vertically polarized light in the reference path back to the reference path as the reference light after passing through the quarter-wave plate; the piezoelectric ceramic is positioned behind the reference mirror and used for moving the position of the reference mirror to perform phase modulation and demodulating the phase of the interference pattern.
6. The planar, spherical and parabolic combined interferometry device of claim 1, wherein the planar measurement component is a plane to be measured; the spherical surface measuring component comprises a first spherical aberration eliminating lens and a spherical surface to be measured, wherein the focus of the first spherical aberration eliminating lens is superposed with the spherical center of the spherical surface to be measured; the paraboloid measuring component comprises a second aplanatic lens, a middle hole reflector and a paraboloid to be measured, wherein the focus of the second aplanatic lens is coincided with the focus of the paraboloid to be measured, and the middle hole reflector is arranged at the focus.
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| CN112557227A (en) * | 2020-11-02 | 2021-03-26 | 杭州电子科技大学 | Industrial robot electrical connector surface wear detection method and device |
| CN112557227B (en) * | 2020-11-02 | 2023-12-29 | 杭州电子科技大学 | Method and device for detecting surface abrasion of electric connector of industrial robot |
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