CN211652717U - Long-term uninterrupted separation system for sulfide gas in GIS gas chamber - Google Patents
Long-term uninterrupted separation system for sulfide gas in GIS gas chamber Download PDFInfo
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- CN211652717U CN211652717U CN201922100235.9U CN201922100235U CN211652717U CN 211652717 U CN211652717 U CN 211652717U CN 201922100235 U CN201922100235 U CN 201922100235U CN 211652717 U CN211652717 U CN 211652717U
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Abstract
The utility model provides a long-term incessant piece-rate system about sulphide gas in GIS air chamber, the six-way valve of system links to each other with the GIS air chamber, the six-way valve is connected to ten-way valve A through first ration pipe, and the six-way valve is connected to ten-way valve B through second ration pipe; the first carrier gas pipeline is connected to the first quantitative pipe through the ten-way valve A, the second carrier gas pipeline is sequentially connected with the ten-way valve A and the ten-way valve B, the third carrier gas pipeline is connected to the second quantitative pipe through the ten-way valve B, and the fourth carrier gas pipeline is connected to the temperature-controlled chromatographic column box; the ten-way valve A and the ten-way valve B are connected through a first communicating pipe and a second communicating pipe; the ten-way valve A is connected with the first chromatographic column, and the ten-way valve B is connected with the second chromatographic column and the helium ionization detector. The utility model discloses can carry out long-term incessant separation to detecting gas and detect, make component mutual interference, undistorted response is detected the content change of component.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a gaseous long-term incessant piece-rate system of sulphide in about GIS air chamber.
[ background of the invention ]
SF in GIS gas cell6Gas, under high-temperature and high-pressure discharge, produces SF6Decomposition products are respectively as follows: h2S、COS、SO2F2、SO2F、SO2Etc. by detecting SF since sulfide components are key to judging failure6Judging whether the power equipment has potential faults or not according to the content of the decomposition products, so as to prevent the generation of the faults;
the main problems of the existing chromatographic analysis are that sulfide components can not be completely analyzed, the components interfere with each other, the component content can not be accurately analyzed, and the like.
[ summary of the invention ]
The to-be-solved technical problem of the utility model lies in providing a long-term incessant piece-rate system of sulphide gas in about the GIS air chamber, can carry out long-term incessant separation to detecting gas and detect, makes component mutual interference, and undistorted response is detected the content change of component.
The utility model discloses a realize like this:
a long-term uninterrupted separation system for sulfide gas in a GIS gas chamber comprises an air-isolated carrier gas device, a central separation device, a gas supply device, a temperature-controlled chromatographic column box and a helium ionization detector,
the air-isolated type carrier gas device comprises a six-way valve, a first quantitative pipe and a second quantitative pipe, the central separation device comprises a ten-way valve A and a ten-way valve B, the gas supply device comprises a gas supply bottle group, a first carrier gas pipeline, a second carrier gas pipeline, a third carrier gas pipeline and a fourth carrier gas pipeline, the first carrier gas pipeline, the second carrier gas pipeline, the third carrier gas pipeline and the fourth carrier gas pipeline are connected with the gas supply bottle group, and the temperature control chromatographic column box comprises a first chromatographic column and a second chromatographic column;
the six-way valve is connected with the GIS air chamber, the six-way valve is connected to the ten-way valve A through a first quantitative pipe, and the six-way valve is connected to the ten-way valve B through a second quantitative pipe; the first carrier gas pipeline is connected to the first quantitative tube through a ten-way valve A, the second carrier gas pipeline is sequentially connected with the ten-way valve A and a ten-way valve B, the third carrier gas pipeline is connected to the second quantitative tube through the ten-way valve B, and the fourth carrier gas pipeline is connected to the temperature-controlled chromatographic column box; the ten-way valve A and the ten-way valve B are connected through a first communicating pipe and a second communicating pipe; the ten-way valve A is connected with the first chromatographic column, and the ten-way valve B is connected with the second chromatographic column and the helium ionization detector.
Further, the first chromatographic column environmental parameter is: column temperature 80 °, flow rate 15ml/min, fraction separation: h2S、COS、SO2F2、SO2F;
The second chromatographic column environmental parameters are as follows: column temperature 40 °, flow rate 5ml/min, fraction separation: SO (SO)2。
Further, the helium ionization detector is a PDD detector.
Furthermore, the gas cylinder group comprises a helium gas cylinder group and an air cylinder group, the helium gas cylinder group comprises a plurality of helium gas cylinders connected in series, the air cylinder group comprises at least one air cylinder, the helium gas cylinder group is connected with the first carrier gas pipeline, the second carrier gas pipeline and the third carrier gas pipeline, and the air cylinder group is connected with the fourth carrier gas pipeline.
Further, when the separation system starts the activation treatment, the first chromatographic column and the second chromatographic column output air flow rate of 0.5MPa and 50ml/min under the control of the air bottle group, and the temperature is controlled to carry out the activation of the chromatographic columns by the temperature rise process of 50-300 ℃.
The utility model has the advantages of as follows:
the utility model utilizes the switching of various valves and the separation effect of chromatographic columns on detection samples, can continuously separate and detect the sulfide gas in the GIS air chamber, and can respond the content and the change of the components of the detected object without distortion; and when the performance of the chromatographic column is reduced, activation treatment can be carried out to achieve the performance resetting effect, and high-response separation and long-term separation detection of the components of the sample to be detected are realized.
[ description of the drawings ]
The invention will be further described with reference to the following examples with reference to the accompanying drawings.
Fig. 1 is the utility model relates to a sampling circuit diagram about the long-term incessant piece-rate system of sulphide gas in GIS air chamber.
Fig. 2 is a circuit diagram of a sample introduction circuit of a first chromatographic column of a long-term uninterrupted separation system for sulfide gas in a GIS gas chamber.
Fig. 3 is a second chromatographic column sample feeding circuit diagram of a long-term uninterrupted separation system for sulfide gas in a GIS gas chamber.
The reference numbers are as follows:
1-temperature control chromatographic column box, 2-helium ionization detector, 3-six-way valve, 4-first quantitative tube, 5-second quantitative tube, 6-ten-way valve A, 7-ten-way valve B, 8-gas supply bottle group, 9-first carrier gas pipeline, 10-second carrier gas pipeline, 11-third carrier gas pipeline, 12-fourth carrier gas pipeline, 13, first chromatographic column, 14-second chromatographic column, 15-first communicating pipe, 16-second communicating pipe, 81-helium bottle group and 82-air bottle group
[ detailed description ] embodiments
Referring to fig. 1-3, the present invention relates to a long-term uninterrupted separation system for sulfide gas in a GIS gas chamber, which comprises an air-isolated carrier gas device, a central separation device, a gas supply device, a temperature-controlled chromatographic column box 1 and a helium ionization detector 2,
the air-isolated carrier gas device comprises a six-way valve 3, a first quantitative pipe 4 and a second quantitative pipe 5, the central separation device comprises a ten-way valve A6 and a ten-way valve B7, the gas supply device comprises a gas supply bottle group 8, a first carrier gas pipeline 9, a second carrier gas pipeline 10, a third carrier gas pipeline 11 and a fourth carrier gas pipeline 12 which are connected with the gas supply bottle group 8, and the temperature-controlled chromatographic column box 1 comprises a first chromatographic column 13 and a second chromatographic column 14;
the six-way valve 3 is connected with the GIS air chamber, the six-way valve 3 is connected to the ten-way valve A6 through a first quantitative pipe 4, and the six-way valve 3 is connected to the ten-way valve B7 through a second quantitative pipe 5; the first carrier gas pipeline 9 is connected to the first quantitative tube 4 through a ten-way valve A6, the second carrier gas pipeline 10 is sequentially connected with the ten-way valve A6 and a ten-way valve B7, the third carrier gas pipeline 11 is connected to the second quantitative tube 5 through the ten-way valve B7, and the fourth carrier gas pipeline 12 is connected to the temperature-controlled chromatographic column box 1; the ten-way valve A6 is connected with the ten-way valve B7 through a first communicating pipe 15 and a second communicating pipe 16; the ten-way valve A6 is connected with the first chromatographic column 13, and the ten-way valve B7 is connected with the second chromatographic column 14 and the helium ionization detector 2.
The first chromatographic column 13 environmental parameters: column temperature 80 °, flow rate 15ml/min, fraction separation: h2S、COS、SO2F2、SO2F;
Environmental parameters of the second chromatography column 14: column temperature 40 °, flow rate 5ml/min, fraction separation: SO (SO)2。
The helium ionization detector 2 is a PDD detector.
The gas cylinder group 8 comprises a helium gas cylinder group 81 and an air cylinder group 82, the helium gas cylinder group 81 comprises a plurality of helium gas cylinders connected in series, the air cylinder group 82 comprises at least one air cylinder, the helium gas cylinder group 81 is connected with a first carrier gas pipeline 9, a second carrier gas pipeline 10 and a third carrier gas pipeline 11, and the air cylinder group 82 is connected with a fourth carrier gas pipeline 12.
When the separation system starts the activation treatment, the first chromatographic column 13 and the second chromatographic column 14 control and output air flow rate of 0.5MPa and 50ml/min through the air bottle group 82, and the temperature is controlled to carry out chromatographic column activation by the temperature rise process of 50-300 ℃.
The working process of the utility model is as follows:
step 1, referring to fig. 1, when sampling is performed: gas in the GIS gas chamber sequentially passes through the ports 2 and 3 of the six-way valve 3, the ports 3 and 2 of the ten-way valve A6, the first quantitative pipe 4, the ports 5 and 4 of the ten-way valve A6, the ports 3 and 2 of the ten-way valve B7, the second quantitative pipe 5 and the ports 5 and 4 of the ten-way valve B7, finally returns to the port 6 of the six-way valve 3, is discharged through the port 1 of the six-way valve 3, and when the first quantitative pipe 4 and the second quantitative pipe 5 are filled with samples, the six-way valve 3 switches valve ports to cut off gas and isolate air;
And finally, combining the detection results of the two times to obtain the component content of the sample to be detected.
And continuously circulating the steps.
When the system is in sampling operation, the second carrier gas pipeline 10 is sequentially connected with the ports 8 and 9 of the ten-way valve A6 and the ports 8 and 9 of the ten-way valve B7, and is finally connected to the PDD detector; when the ten-way valve A6 is in sample injection operation, the second carrier gas conduit 10 is connected to the 8 port of the ten-way valve A6 and directly evacuated through the 7 port of the ten-way valve A6.
When the chromatographic column needs to be activated, the air bottle group 82 is adjusted to control and output the air flow rate of 0.5MPa and 50ml/min, the first chromatographic column 13 and the second chromatographic column 14 of the temperature-controlled chromatographic column box 1 are supplied with air through the fourth carrier gas pipeline 12, and the temperature is controlled to carry out the chromatographic column activation through the temperature rise process of 50-300 ℃.
The utility model utilizes the switching of various valves and the separation effect of chromatographic columns on detection samples, can continuously separate and detect the sulfide gas in the GIS air chamber, and can respond the content and the change of the components of the detected object without distortion; and when the performance of the chromatographic column is reduced, activation treatment can be carried out to achieve the performance resetting effect, and high-response separation and long-term separation detection of the components of the sample to be detected are realized.
Although specific embodiments of the present invention have been described, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, and that equivalent modifications and variations can be made by those skilled in the art without departing from the spirit of the invention, which is to be limited only by the claims appended hereto.
Claims (5)
1. A long-term uninterrupted separation system for sulfide gas in a GIS gas chamber is characterized in that: the system comprises an air-isolated carrier gas device, a central separation device, a gas supply device, a temperature-controlled chromatographic column box and a helium ionization detector,
the air-isolated type carrier gas device comprises a six-way valve, a first quantitative pipe and a second quantitative pipe, the central separation device comprises a ten-way valve A and a ten-way valve B, the gas supply device comprises a gas supply bottle group, a first carrier gas pipeline, a second carrier gas pipeline, a third carrier gas pipeline and a fourth carrier gas pipeline, the first carrier gas pipeline, the second carrier gas pipeline, the third carrier gas pipeline and the fourth carrier gas pipeline are connected with the gas supply bottle group, and the temperature control chromatographic column box comprises a first chromatographic column and a second chromatographic column;
the six-way valve is connected with the GIS air chamber, the six-way valve is connected to the ten-way valve A through a first quantitative pipe, and the six-way valve is connected to the ten-way valve B through a second quantitative pipe; the first carrier gas pipeline is connected to the first quantitative tube through a ten-way valve A, the second carrier gas pipeline is sequentially connected with the ten-way valve A and a ten-way valve B, the third carrier gas pipeline is connected to the second quantitative tube through the ten-way valve B, and the fourth carrier gas pipeline is connected to the temperature-controlled chromatographic column box; the ten-way valve A and the ten-way valve B are connected through a first communicating pipe and a second communicating pipe; the ten-way valve A is connected with the first chromatographic column, and the ten-way valve B is connected with the second chromatographic column and the helium ionization detector.
2. The system of claim 1 for long term uninterrupted separation of sulphide gases in a GIS chamber, wherein: the first chromatographic column environmental parameter: column temperature 80 °, flow rate 15ml/min, fraction separation: h2S、COS、SO2F2、SO2F;
The second chromatographic column environmental parameters are as follows: column temperature 40 °, flow rate 5ml/min, fraction separation: SO (SO)2。
3. The system of claim 1 for long term uninterrupted separation of sulphide gases in a GIS chamber, wherein: the helium ionization detector is a PDD detector.
4. The system of claim 1 for long term uninterrupted separation of sulphide gases in a GIS chamber, wherein: the gas cylinder group comprises a helium gas cylinder group and an air cylinder group, the helium gas cylinder group comprises a plurality of helium gas cylinders connected in series, the air cylinder group comprises at least one air cylinder, the helium gas cylinder group is connected with a first carrier gas pipeline, a second carrier gas pipeline and a third carrier gas pipeline, and the air cylinder group is connected with a fourth carrier gas pipeline.
5. The system of claim 4 for long term uninterrupted separation of sulphide gases in a GIS gas chamber, wherein: when the separation system starts the activation treatment, the first chromatographic column and the second chromatographic column output air flow rate of 0.5MPa and 50ml/min under the control of the air bottle group, and the temperature is controlled to carry out the activation of the chromatographic columns by the temperature rise process of 50-300 ℃.
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CN110927295A (en) * | 2019-11-28 | 2020-03-27 | 福建亿榕信息技术有限公司 | Long-term uninterrupted separation system for sulfide gas in GIS gas chamber |
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CN110927295A (en) * | 2019-11-28 | 2020-03-27 | 福建亿榕信息技术有限公司 | Long-term uninterrupted separation system for sulfide gas in GIS gas chamber |
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