CN211603214U - Grating waveguide microfluid detection system - Google Patents
Grating waveguide microfluid detection system Download PDFInfo
- Publication number
- CN211603214U CN211603214U CN202020111435.4U CN202020111435U CN211603214U CN 211603214 U CN211603214 U CN 211603214U CN 202020111435 U CN202020111435 U CN 202020111435U CN 211603214 U CN211603214 U CN 211603214U
- Authority
- CN
- China
- Prior art keywords
- grating
- waveguide
- layer
- grating waveguide
- microchannel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model provides a grating waveguide microfluid detection system, which comprises a microfluid chip, a microscope, a measuring device and an analysis device; the microfluidic chip includes: grating waveguide and microchannel, grating waveguide includes the emergent grating, and the emergent grating is located the microchannel below is used for upwards leading-in light along the vertical direction in the microchannel still includes: the grating waveguide comprises a substrate, a lower cladding, a waveguide layer, a protective layer, an upper cladding and a flow channel cover plate which are arranged from bottom to top in sequence, wherein the waveguide layer is used for forming the grating waveguide; the protective layer is used for covering the grating waveguide and protecting the emergent grating; the micro-channel penetrates through the upper cladding layer to expose the protective layer. Has the advantages that: the chip-level optical detection system is produced, the traditional desktop or even large-scale optical system is reduced to the chip size, the equal or even more excellent analysis performance is ensured, the high-flux chip-level optical detection and analysis integrated system of the biological sample under the micro-nano scale is realized, and the system cost is greatly reduced.
Description
Technical Field
The utility model relates to a grating waveguide microfluid detecting system especially relates to a grating waveguide microfluid biological detection system.
Background
In modern biochemical analysis procedures, high-throughput detection devices have been widely used. Most of these devices use biochips based on microfluidic technology or microwell arrays, loaded in high performance optical systems, to perform analysis of biological samples of different sizes, such as nucleic acids, proteins, viruses, bacteria, cells, etc. The design of these optical systems is usually based on complex geometric optics, which is bulky, costly, requires optical alignment, and is costly to maintain.
In the precise medical age, miniaturized, high-performance, low-cost and mobile integrated analysis systems are of great concern. In particular, the lab on chip concept has advanced a lot of progress in manipulating a biological sample based on a microfluidic technology after decades of development, but a real lab on chip system still lacks an integrated system for chip-level on-chip optical detection and analysis of a high-throughput biological sample on a micro-nano scale.
SUMMERY OF THE UTILITY MODEL
The device aims to solve a series of new requirements of miniaturization, mobility, integration and the like of the modern biochemical analysis instrument which is large in size and high in cost and meets the requirements of the precise medical era. The utility model discloses an integrated circuit volume production technology produces this kind of chip level optical detection and analytic system, and the function with traditional optical system is realized through integrated optics or on-chip optical device, not only can narrow down traditional desk-top even large-scale optical system to the chip size, but also guarantees equal more outstanding analytical performance even, realizes receiving the biological sample's under the yardstick high flux chip level optical detection and analysis integrated system a little, reduces system's cost by a wide margin.
The utility model provides a grating waveguide microfluid detecting system, include: microfluidic chips, microscopes, measurement devices and analysis devices; the microfluidic chip includes: the optical grating waveguide comprises an exit grating, and is characterized in that the exit grating is positioned below the microchannel and used for guiding light into the microchannel upwards along the vertical direction, the microscope is used for collecting optical signals in the microchannel and transmitting the optical signals to the measuring device, the measuring device is used for processing the optical signals, generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device, and the analyzing device analyzes the signals to be analyzed to form a spectrum;
the microfluidic chip further comprises: the grating waveguide comprises a substrate, a lower cladding, a waveguide layer, a protective layer, an upper cladding and a flow channel cover plate which are arranged from bottom to top in sequence, wherein the waveguide layer is made of silicon nitride materials and is used for forming the grating waveguide; the protective layer is made of silicon dioxide materials and is used for covering the grating waveguide and protecting the emergent grating;
the micro-channel penetrates through the upper cladding to expose the protective layer;
the flow channel cover plate covers the upper opening of the micro flow channel, and the micro flow channel cover plate comprises a liquid injection port for injecting a solution containing the biomolecules to be detected into the micro flow channel;
the lower cladding is silica with the thickness of 2-3 mu m, the upper cladding is a high polymer material with the thickness of 15-30 mu m, and the width of the micro-channel is 10-100 mu m.
Preferably, a plurality of the grating waveguides are parallel to each other to guide light into the micro channel, and the width of the grating waveguide is 300-600 nm.
Preferably, the refractive index of the waveguide layer is 1.75-2.2.
Preferably, the waveguide layer has a thickness of 150nm to 1000 nm.
Preferably, the micro-channel optical waveguide further comprises an incident grating made of silicon nitride material to form a coupling grating waveguide with the grating waveguide, and the light above the upper cladding layer is guided into the grating waveguide until being guided into the micro-channel upwards along the vertical direction; the protective layer covers and protects the incident grating.
Preferably, a plurality of said coupling grating waveguides are included, parallel to each other.
Preferably, the thickness of the waveguide layer is 150nm-1000nm, and the width of the coupling grating waveguide is 300-600 nm.
Preferably, the optical fiber is optically connected with the grating waveguide.
Preferably, the substrate is a silicon substrate.
Preferably, the high molecular polymer material is SU-8 resin, polyimide, polydimethylsilane, polyethylene or benzocyclobutene.
The utility model provides a grating waveguide microfluid detecting system has beneficial effect: the chip-level optical detection system is produced, the traditional desktop or even large-scale optical system is reduced to the chip size, the equal or even more excellent analysis performance is ensured, the high-flux chip-level optical detection and analysis integrated system of the biological sample under the micro-nano scale is realized, and the system cost is greatly reduced.
Drawings
FIG. 1 is a side view of the grating waveguide microfluidic detection system of the present invention;
FIG. 2 is a side view of the coupled grating waveguide microfluidic detection system of the present invention;
FIG. 3 is a top view of the microfluidic chip of FIG. 1;
FIG. 4 is a side view of the grating waveguide microfluid of FIG. 1;
figure 5 is a side view of the coupled grating waveguide microfluidics of figure 2.
Detailed Description
The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.
In the drawings, the dimensional ratios of layers and regions are not actual ratios for the convenience of description. When a layer (or film) is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. In addition, when a layer is referred to as being "under" another layer, it can be directly under, and one or more intervening layers may also be present. In addition, when a layer is referred to as being between two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. Like reference numerals refer to like elements throughout. In addition, when two components are referred to as being "connected," they include physical connections, including, but not limited to, electrical connections, contact connections, and wireless signal connections, unless the specification expressly dictates otherwise.
The utility model provides a perpendicular grating waveguide microfluid detecting system will receive the optical detection chip on the piece of the chip level of the high flux biological sample under the yardstick of a little and include detection and analytic system. The vertical grating waveguide is a grating waveguide for guiding light upward into the microchannel in a vertical direction.
As shown in fig. 1 to 3, a grating waveguide microfluid detection system includes: a microfluidic chip (not shown), a microscope 3, a measuring device 4 and an analyzing device 5; the microfluidic chip includes: the grating waveguide 1311, 1312 … 131n and the microchannel 2, the grating waveguide 1311, 1312 … 131n includes an exit grating 1310, the exit grating 1310 is located below the microchannel 2 to guide light into the microchannel 2 upwards along the vertical direction, a new design scheme and idea are provided for different complex integrated structures, exit gratings with different exit directions can be designed, flexibility of detection means is increased, the microscope 3 is used for collecting optical signals in the microchannel 2 and transmitting the optical signals to the measurement device 4, the measurement device 4 is used for processing the optical signals and generating signals to be analyzed and transmitting the signals to be analyzed to the analysis device 5, and the analysis device 5 analyzes the signals to be analyzed to form a spectrum; it should be noted that, the above "upward the light along the vertical direction" may be strictly vertically upward, or may be obliquely upward, and the present invention is not limited herein.
The microfluidic chip further comprises: the substrate 11, the lower cladding 141, the waveguide layer 13, the protective layer 12, the upper cladding 142 and the flow channel cover plate 15 are sequentially arranged from bottom to top, the waveguide layer 13 is made of silicon nitride, and the waveguide layer 13 is used for forming the grating waveguides 1311 and 1312 … 131 n; the protective layer 12 is made of silicon dioxide, has light transmittance, and is used for covering the grating waveguides 1311, 1312 … 131n and protecting the exit grating 1310;
the micro flow channel 2 penetrates through the upper cladding 142 to expose the protective layer 12;
the flow channel cover plate 15 covers the upper opening of the micro flow channel 2, and the micro flow channel cover plate 15 comprises a liquid injection port 151 used for injecting a solution containing biomolecules to be detected into the micro flow channel 2; it should be noted that, a liquid outlet (not shown) is further included to form a circulation system corresponding to the liquid injection port 151 one by one, and the liquid outlet may be an opening on the flow passage cover plate 15; this liquid outlet also can be the opening at 2 both ends of miniflow channel, the utility model discloses do not do the restriction here.
The lower cladding 141 is silicon dioxide with the thickness of 2-3 mu m, the upper cladding 142 is a high polymer material with the thickness of 15-30 mu m, the width of the micro-channel 2 is 10-100 mu m, the size of a traditional desktop or even large-scale optical system is reduced to the size of a chip, the same or even more excellent analysis performance is ensured, a high-throughput chip for biological sample detection under the micro-nano scale is realized, and the system cost is greatly reduced.
Wherein the light source direction is different according to the introduced grating waveguide set 131, such as: fig. 1 is a diagram illustrating a light source introduced from an optical fiber (not shown) at the left end of the grating waveguide set 131, and fig. 2 is a diagram illustrating a light source introduced from above the grating waveguide set 131, which are described separately.
Fig. 1 is described below, i.e., the present grating waveguide microfluidic chip with light source introduced from the optical fiber (not shown) at the left end of the grating waveguide set 131:
as shown in fig. 1 and 3, the grating waveguide set 131 on one microfluid includes several, e.g., n, grating waveguides 1311, 1312 … 131n parallel to each other to guide light vertically upwards into the microchannel 2, in the actual detection, for biomolecules with different labels in the microchannel 2, the grating waveguides 1311, 1312 … 131n can guide light with wavelengths λ 1, λ 2 … λ n vertically upwards into the microchannel 2, respectively, and the labeled biomolecules 21 with different labels excited by light with different wavelengths can simultaneously identify these biomolecules, while the non-excited biomolecules 20 in the excitation light field guided by the grating waveguides 1311, 1312 … 131n will not be identified, and the non-excited biomolecules 20 are normal biomolecules without labels or biomolecules that are labeled but outside the light field and are not excited; wherein, as shown in FIG. 3, the width of the grating waveguides 1311, 1312 … 131n is 300-600 nm.
As shown in fig. 1 to 3, the waveguide layer 13 has a thickness of 150nm to 1000nm, i.e., the thickness of the horizontal portion of the grating waveguides 1311, 1312 … 131n in fig. 1 to 3 is 150nm to 1000 nm.
The optical fiber is optically connected with the grating waveguide set 131, and further optically connected with the grating waveguides 1311, 1312 … 131n in the grating waveguide set 131.
FIG. 2 is described below, which is the present grating waveguide microfluidic chip with light source introduced from above the upper cladding 142:
as shown in fig. 2, the optical fiber module further includes an incident grating 1310' made of silicon nitride material to form a coupling grating waveguide with the grating waveguides 1311, 1312 … 131n, and guides light above the upper cladding 142 into the grating waveguides 1311, 1312 … 131n until the light is guided upward in the vertical direction into the micro channel 2, and the upper cladding 142 is a light-transmissive layer; the protective layer 12 covers and protects the incident grating 1310'.
As shown in fig. 2 and 3, the grating waveguide set 131 on one microfluid includes several, e.g. n, coupling grating waveguides (including grating waveguides 1311, 1312 … 131n) parallel to each other, to guide light vertically upward into the microchannel 2, in actual detection, for biomolecules with different labels in the micro flow channel 2, n coupled grating waveguides (including grating waveguides 1311 and 1312 … 131n) can guide light with wavelengths λ 1 and λ 2 … λ n vertically upwards into the micro flow channel 2, and the labeled biomolecules 21 with different labels can be excited by the light with different wavelengths to simultaneously identify the biomolecules, while the non-excited biomolecules 20 that are not in the excited light field introduced by the coupling grating waveguides 1311, 1312 … 131n will not be recognized, the non-excited biomolecules 20 being unlabeled normal biomolecules or biomolecules that are labeled but outside the light field and not excited; wherein, as shown in FIG. 3, the width of the n coupled grating waveguides (each including the grating waveguides 1311, 1312 … 131n) is 300-600nm, and wherein, as shown in FIG. 2, the thickness of the waveguide layer 13 is 150-1000 nm, i.e., the thickness of the horizontal portion of the grating waveguides 1311, 1312 … 131n is 150-1000 nm.
In the present invention, the substrate 11 is a silicon substrate; preferably, the substrate 11 is a 4, 8, 12 inch silicon wafer.
In the present invention, the polymer material is SU-8 resin, polyimide, polydimethylsilane, polyethylene or benzocyclobutene.
In the present invention, the flow channel cover plate 15 is made of PDMS or quartz, or may be made of the above-mentioned polymer material.
In the present invention, the silicon nitride waveguide layer 13 is a silicon nitride thin film layer having a thickness of 150nm to 1000nm formed at a low deposition temperature of 25 to 150 ℃; the refractive index of the silicon nitride film is 1.75-2.2. The silicon nitride film may be a film having a uniform refractive index, or may be a film having a non-uniform refractive index, such as a silicon nitride film having a layered refractive index structure.
Circulating tumor cells are a general term for various tumor cells that leave the tumor tissue and enter the blood circulation system of the human body. By detecting trace circulating tumor cells in peripheral blood and monitoring the trend of the change of the types and the quantity of the circulating tumor cells, the tumor dynamics can be monitored in real time, the treatment effect can be evaluated, and the real-time individual treatment can be realized. The following describes an embodiment of the present invention for detecting and analyzing circulating tumor cells by using the grating waveguide microfluid detection system, which comprises the following main steps:
the first step is as follows: the method comprises the following steps of (1) sorting and enriching various tumor cells possibly existing in collected patient blood samples by adopting an immunomagnetic bead technology (such as immunomagnetic bead positive sorting) or a microfluidic technology to obtain a solution containing circulating tumor cells, or directly adopting the patient blood samples;
the second step is that: adding an antibody group which can be specifically combined with surface antigens of various tumor cells or an aptamer group which can be combined with the surfaces of various tumor cells into the solution or the blood sample containing the circulating tumor cells, wherein the antibody group and the aptamer group modify marks, and the antibody combined with specific tumor cells or the modified marks on the aptamer have uniqueness, so as to obtain the solution or the blood sample containing the marked circulating tumor cells; the labels are n, and can be target probes of fluorescent molecules;
the third step: as shown in fig. 1 and 3, the solution or blood sample obtained in the second step is added into the micro flow channel 2 from the liquid injection port 151, an optical fiber (not shown) guides n different wavelength lights corresponding to the n labels into the grating waveguides 1311, 1312 … 131n in the grating waveguide set 131 and further vertically upwards into the micro flow channel 2, the labeled biomolecules 21 containing different fluorescent molecular labels are circulating tumor cells excited by the different wavelength lights to emit fluorescence with specific wavelength, the microscope 3 is used for collecting fluorescence (optical signal) with specific wavelength and transmitting the fluorescence to the measuring device 4, the measuring device 4 processes and collects fluorescence (optical signal) with specific wavelength and generates a signal to be analyzed and transmits the signal to be analyzed to the analyzing device 5, the analyzing device 5 analyzes the signal to be analyzed to form a spectrum of fluorescence with specific wavelength, the variety of the circulating tumor cells in the solution or the blood sample can be judged by reading the spectrum, various tumor circulating cells can be detected respectively at one time, and the high-flux chip for detecting various tumor cells under the micro-nano scale is realized, so that the tumor dynamics is monitored in real time, the treatment effect is evaluated, and the real-time individual treatment is realized.
The grating waveguide microfluid detection system has the beneficial effects that: the chip-level optical detection system is produced, the traditional desktop or even large-scale optical system is reduced to the chip size, the equal or even more excellent analysis performance is ensured, the high-flux chip-level optical detection and analysis integrated system of the biological sample under the micro-nano scale is realized, and the system cost is greatly reduced.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A grating waveguide microfluidic detection system, comprising: microfluidic chips, microscopes, measurement devices and analysis devices; the microfluidic chip includes: the optical grating waveguide comprises an exit grating, and is characterized in that the exit grating is positioned below the microchannel and used for guiding light into the microchannel upwards along the vertical direction, the microscope is used for collecting optical signals in the microchannel and transmitting the optical signals to the measuring device, the measuring device is used for processing the optical signals, generating signals to be analyzed and transmitting the signals to be analyzed to the analyzing device, and the analyzing device analyzes the signals to be analyzed to form a spectrum;
the microfluidic chip further comprises: the grating waveguide comprises a substrate, a lower cladding, a waveguide layer, a protective layer, an upper cladding and a flow channel cover plate which are arranged from bottom to top in sequence, wherein the waveguide layer is made of silicon nitride materials and is used for forming the grating waveguide; the protective layer is made of silicon dioxide materials and is used for covering the grating waveguide and protecting the emergent grating;
the micro-channel penetrates through the upper cladding to expose the protective layer;
the flow channel cover plate covers the upper opening of the micro flow channel, and the micro flow channel cover plate comprises a liquid injection port for injecting a solution containing the biomolecules to be detected into the micro flow channel;
the lower cladding is silica with the thickness of 2-3 mu m, the upper cladding is a high polymer material with the thickness of 15-30 mu m, and the width of the micro-channel is 10-100 mu m.
2. The system as claimed in claim 1, wherein a plurality of the grating waveguides are parallel to each other to guide light into the micro flow channel, and the width of the grating waveguides is 300-600 nm.
3. The system of claim 1, wherein the index of refraction of the waveguide layer is 1.75-2.2.
4. A system according to claim 2 or 3, wherein the waveguide layer has a thickness of 150nm-1000 nm.
5. The system of claim 1, further comprising an incident grating of silicon nitride material to form a coupled grating waveguide with the grating waveguide, light above the upper cladding layer being directed into the grating waveguide until directed upward in a vertical direction into the microchannel; the protective layer covers and protects the incident grating.
6. The system of claim 5, comprising a plurality of said coupled grating waveguides parallel to each other.
7. The system as claimed in claim 5, wherein the waveguide layer has a thickness of 150nm-1000nm, and the width of the coupling grating waveguide is 300-600 nm.
8. The system of claim 1, further comprising an optical fiber optically coupled to the grating waveguide.
9. The system of claim 1, wherein the substrate is a silicon substrate.
10. The system of claim 1, wherein the polymeric material is SU-8 resin, polyimide, polydimethylsilane, polyethylene, or benzocyclobutene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020111435.4U CN211603214U (en) | 2020-01-17 | 2020-01-17 | Grating waveguide microfluid detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020111435.4U CN211603214U (en) | 2020-01-17 | 2020-01-17 | Grating waveguide microfluid detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211603214U true CN211603214U (en) | 2020-09-29 |
Family
ID=72579513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020111435.4U Active CN211603214U (en) | 2020-01-17 | 2020-01-17 | Grating waveguide microfluid detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211603214U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157732A (en) * | 2020-01-17 | 2020-05-15 | 上海新微技术研发中心有限公司 | Grating waveguide microfluid detection system |
-
2020
- 2020-01-17 CN CN202020111435.4U patent/CN211603214U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157732A (en) * | 2020-01-17 | 2020-05-15 | 上海新微技术研发中心有限公司 | Grating waveguide microfluid detection system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111229336B (en) | Method for manufacturing optical waveguide multi-micro-channel chip | |
| JP5157629B2 (en) | Channel substrate | |
| CN211603214U (en) | Grating waveguide microfluid detection system | |
| CN111157734A (en) | Grating waveguide microfluid detection system based on CMOS image sensing | |
| CN211826084U (en) | Grating waveguide microfluid detection system | |
| CN211785572U (en) | Optical waveguide microfluid detection system | |
| CN211603213U (en) | Optical waveguide multi-micro-channel detection system | |
| CN211785573U (en) | Grating waveguide microfluid detection system based on CMOS image sensing | |
| CN111157728A (en) | Optical waveguide microfluid detection system | |
| CN212134710U (en) | Grating waveguide multi-micro-channel detection system based on CMOS image sensing | |
| CN211826083U (en) | Optical waveguide multi-micro-channel detection system based on CMOS image sensing | |
| CN211826082U (en) | Optical waveguide microfluid detection system | |
| CN111157729A (en) | Optical waveguide microfluid detection system based on CMOS image sensing | |
| CN211877769U (en) | Grating waveguide multi-micro-channel detection system | |
| CN211826081U (en) | Optical waveguide multi-micro-channel detection system | |
| CN211785134U (en) | Grating waveguide multi-micro-channel detection system | |
| CN111157732A (en) | Grating waveguide microfluid detection system | |
| CN111157731A (en) | Optical waveguide multi-micro-channel detection system based on CMOS image sensing | |
| CN111190009A (en) | Grating waveguide multi-micro-channel detection system based on CMOS image sensing | |
| CN111151317B (en) | Method for manufacturing grating waveguide multi-micro-channel chip | |
| CN111229342B (en) | Method for manufacturing grating waveguide multi-micro-channel chip based on CMOS image sensing | |
| CN212180820U (en) | Optical waveguide microfluid detection system based on CMOS image sensing | |
| CN111157733A (en) | Grating waveguide microfluid detection system | |
| CN111229341B (en) | Method for manufacturing grating waveguide multi-micro-channel chip | |
| CN212167469U (en) | Grating waveguide microfluid chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211117 Address after: 201800 J, building 1, No. 2222, Huancheng Road, Jiading District, Shanghai Patentee after: Shanghai Jinguan Technology Co.,Ltd. Address before: 201800 Building 1, No. 235, Chengbei Road, Jiading District, Shanghai Patentee before: Shanghai Industrial UTechnology Research Institute |
|
| TR01 | Transfer of patent right |