CN211554146U - Conductive film multi-probe measuring device - Google Patents
Conductive film multi-probe measuring device Download PDFInfo
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- CN211554146U CN211554146U CN202020125069.8U CN202020125069U CN211554146U CN 211554146 U CN211554146 U CN 211554146U CN 202020125069 U CN202020125069 U CN 202020125069U CN 211554146 U CN211554146 U CN 211554146U
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Abstract
A conductive film multi-probe measuring device relates to the technical field of film detection and solves the technical problem of controlling probe force. The device comprises a measuring base and a probe seat; the device comprises a probe seat, a measuring base, a plurality of elastic force applying parts, a plurality of elastic return parts and a plurality of elastic force applying parts, wherein the probe seat is provided with a plurality of probes, each probe is provided with an elastic force applying part, the measuring base is provided with a movable seat capable of moving up and down, the measuring base is provided with an elastic return part for driving the movable seat to return upwards, and the probe seat is fixed on the movable seat; the measuring base is provided with a push rod and a push rod driving part used for driving the push rod to slide up and down, the lower end of the push rod props against the movable seat, and the push rod is provided with a pressure sensor used for detecting the vertical pressure born by the push rod. The device provided by the utility model, be applicable to and measure conductive film square resistance.
Description
Technical Field
The utility model relates to a film detection technology especially relates to a conductive film multi-probe measuring device's technique.
Background
The four-probe measurement method is widely applied to measurement of the block resistance Rs in various fields, and is a necessary means for detection of related preparation processes of various conductive films particularly in production and manufacturing of semiconductor integrated circuit chips. The adoption of four probes to measure the square resistance requires accurate control of the penetration depth of the probes into the sample so as to ensure the accuracy of the measurement result.
The traditional four-probe measuring device is characterized in that four probe heads are arranged on a lifting frame, the lifting frame is driven by an eccentric wheel (or other equipment) to move up and down to control the height of the probe heads, each probe head on the probe head is provided with a spring stress application mechanism, and when the device is used for measuring the square resistance of a sample, the force applied on the sample by the probe head is determined by the retraction stroke of the spring stress application mechanism.
In practical use, the elastic coefficient of the probe spring is not a simple linear function of the stroke, and a complex pre-calibration process is needed to establish the relationship between the stroke and the spring force; in addition, in long-time use, due to spring fatigue and other reasons, the elastic coefficient K may change, and the probe force is difficult to be accurately controlled.
SUMMERY OF THE UTILITY MODEL
To the defect that exists among the above-mentioned prior art, the utility model aims to solve the technical problem that a can accurate control visit many probes measuring device of conductive film to the sample pressure of being surveyed is provided.
In order to solve the technical problem, the utility model provides a conductive film multi-probe measuring device, which comprises a measuring base and a probe base; a plurality of probes capable of sliding up and down are arranged on the probe seat, each probe is provided with an elastic stressing component, the lower end of the elastic stressing component is connected with the probe, and the upper end of the elastic stressing component is connected with the probe seat; the lower end of each probe is lower than the lower end of the probe seat, and each probe can slide upwards until the lower end of the probe is flush with the lower end of the probe seat; the method is characterized in that:
the measuring base is provided with a movable seat capable of moving up and down, the measuring base is provided with an elastic return part for driving the movable seat to return upwards, one end of the elastic return part is connected with the measuring base, the other end of the elastic return part is connected with the movable seat, and the probe seat is fixed on the movable seat;
the measuring base is provided with a push rod capable of sliding up and down and a push rod driving part used for driving the push rod to slide up and down, the lower end of the push rod props against the movable seat, and the push rod is provided with a pressure sensor used for detecting the vertical pressure born by the push rod.
Furthermore, a height measurer for detecting the up-and-down sliding stroke of the push rod is arranged on the measuring base.
The utility model provides a conductive film multi-probe measuring device's measuring method, concrete step is as follows:
defining a starting point of a downward sliding stroke of the push rod as a point a, defining a critical point when the push rod slides downwards to enable the probe to just touch the surface of the sample but not apply pressure on the surface of the sample as a point b, and defining a critical point when the push rod slides downwards to enable the probe to just retract upwards to a stroke stop point as a point c;
defining a sliding stroke of the push rod sliding from the point a to the point b as a first-stage stroke; defining the downslide stroke of the push rod from the point b to the point c as a second-stage stroke;
the push rod driving component is used for driving the push rod to slide downwards, and the pressure sensor is used for measuring the vertical pressure born by the push rod;
calculating the stress of the probe in real time in the stroke of the second stage of the push rod, and stopping the push rod from sliding downwards when the calculated value of the stress of the probe reaches a required set value;
the force calculation formula of the probe in the second-stage stroke of the push rod is as follows:
dlt_F= F_meas-F_calculate
wherein dlt _ F is the stress value of the probe, F _ meas is the real-time value of the vertical pressure borne by the push rod in the second-stage stroke, and F _ calculate is the measured value of the vertical pressure borne by the push rod in the first-stage stroke.
Further, a downward sliding stroke of the push rod is measured by using a height measurer, and a probe stress curve in the stroke of the second stage of the push rod is obtained according to a measured value of the downward sliding stroke of the push rod in the stroke of the second stage and a measured value of the vertical pressure borne by the push rod in the stroke of the second stage.
The utility model provides a many probes of conducting film measuring device utilizes the power of elasticity thrust augmentation part on the probe to adjust, surveys the value according to the push rod gliding stroke and surveys the value with the push rod atress and realize the feedback control of lower needle stroke and probe power, can realize accurate stable probe force control.
Drawings
Fig. 1 is a schematic structural diagram of a conductive thin film multi-probe measurement apparatus according to an embodiment of the present invention;
fig. 2 and fig. 3 are simplified diagrams of the stress mode of the conductive film multi-probe measuring device according to the embodiment of the present invention during the measurement process;
fig. 4 is a schematic diagram of the relationship between the stroke of the push rod and the force applied to the push rod in the conductive film multi-probe measuring device according to the embodiment of the present invention.
Detailed Description
The following description is provided for further details of the embodiments of the present invention with reference to the accompanying drawings, but this embodiment is not intended to limit the present invention, and all similar structures and similar variations thereof adopted by the present invention should be included in the protection scope of the present invention.
As shown in fig. 1, the embodiment of the present invention provides a conductive film multi-probe measuring device, which includes a measuring base 1 and a probe holder 2;
a plurality of probes 3 capable of sliding up and down are arranged on the probe base 2, each probe is provided with an elastic stressing component 4, the lower end of each elastic stressing component 4 is connected with the probe 3, and the upper end of each elastic stressing component 4 is connected with the probe base 2; the lower end of each probe 3 is lower than the lower end of the probe seat 2, and each probe 3 can slide upwards until the lower end of the probe is flush with the lower end of the probe seat;
the measuring base 1 is provided with a movable seat 9 capable of moving up and down, the measuring base 1 is provided with an elastic return part (not shown) for driving the movable seat 9 to return upwards, one end of the elastic return part is connected with the measuring base 1, the other end of the elastic return part is connected with the movable seat 9, and the probe seat 2 is fixed on the movable seat 9;
the device is characterized in that a push rod 5 capable of sliding up and down and a push rod driving part 7 used for driving the push rod to slide up and down are arranged on the measuring base 1, the lower end of the push rod 5 props against the movable seat, a pressure sensor 6 used for detecting vertical pressure born by the push rod is arranged on the push rod 5, and a height measurer 8 used for detecting up-and-down sliding stroke of the push rod is arranged on the measuring base 1.
The embodiment of the utility model provides an in, elasticity afterburning part, elasticity return part are the spring, pressure sensor adopts be piezoelectric type pressure sensor, what high caliber adopted is laser range finder, what push rod driver part adopted is linear electric motor, the utility model discloses in other embodiments, elasticity afterburning part, elasticity return part also can adopt other elastomeric element, and pressure sensor also can adopt other current pressure sensor, and high caliber also can adopt other current range finding equipment such as displacement sensor, and other current power take off equipment such as cylinder also can be adopted to the push rod driver part.
The embodiment of the utility model provides a theory of operation as follows:
the movable seat 9, the probe seat 2 and the parts (the probe 3 and the elastic force application part 4) installed on the probe seat form a measuring probe, fig. 2 and 3 are simplified diagrams of a stress mode in the measuring process of the embodiment of the utility model, k1 in fig. 2 and 3 is an equivalent elastic coefficient of an elastic return part, k2 is an equivalent elastic coefficient of the elastic force application part, M is an equivalent mass of the measuring probe, F1 is the elastic force of the elastic return part acting on the movable seat, G is the equivalent gravity of the measuring probe, and F _ P is the downward thrust applied to the movable seat by the push rod;
in the initial state (the state shown in fig. 2), the push rod 5 does not apply downward pushing force to the movable seat 9, at this time, the elastic return component only receives the gravity of the measuring probe, at this time, F1 is equal to G in size and opposite in direction, at this time, the probe 3 is at a distance D0 from the surface of the sample;
the push rod driving part 7 is used for driving the push rod 5 to slide downwards, so that the push rod 5 pushes the movable seat 9 in the measuring probe to overcome the elastic force of the elastic return part to slide downwards, and further the measuring probe is pushed downwards;
when the lower end of the probe 3 of the measuring probe just contacts the surface of the sample (the state shown by 3a in fig. 3), F1 is proportional to the deformation extension range of the elastic return component, and has F1= G + k1 × D0, and the downward pushing force exerted by the push rod on the movable seat is as follows: f _ P = F1-G;
as the push rod continues to move downwards, the probe 3 starts to contract upwards under the resistance of the sample, the elastic force application part also starts to contract, so that an upward force is generated on the measuring probe, and when the probe 3 is just retracted upwards to the stroke stop point (in a state shown by 3b in fig. 3, the lower end of the probe is flush with the lower end of the probe seat), the elastic force of the elastic force application part is kept constant, and F _ pin = k2 × Δ D1 is provided, wherein F _ pin is the elastic force of the elastic force application part, and Δ D1 is the contraction length of the elastic force application part; when F1= G + k1 × (D0 + Δ D1);
with the continuous downward movement of the push rod, the elastic force F1 of the elastic return component and the downward pushing force F _ P of the push rod continue to increase, wherein F1= G + k1 × (D0 + Δ D1+ Δ D2), wherein D0+ Δ D1 is the total stroke of the downward movement of the measuring probe (also is the downward sliding stroke of the push rod), and the elastic force F1 of the elastic return component and the downward pushing force F _ P of the push rod counteract each other.
Fig. 4 is a schematic diagram of the relationship between the stroke of the push rod and the force applied to the push rod, the horizontal axis in fig. 4 is the downward sliding stroke of the push rod driven by the push rod driving component, the downward sliding stroke of the push rod can be measured by the height measurer 8, and the vertical axis in fig. 4 is the vertical pressure applied to the push rod, which can be measured by the pressure sensor 6;
in fig. 4, point a is the start point of the downward sliding stroke of the push rod, point b is the critical point when the push rod slides down to the point where the probe just touches the sample surface but no pressure is applied to the sample surface, point c is the critical point when the push rod slides down to the point where the probe just retracts upward to the stroke end, and point d is the end point of the downward sliding stroke of the push rod;
as shown in fig. 4, in the process of sliding the push rod downward, the process of the push rod being stressed is described by three oblique lines, where an oblique line section ab represents a stressed state of the push rod at a stage where the probe has not contacted the surface of the sample, an oblique line section bc represents a stressed state of the push rod at a stage where the probe retracts upward, and an oblique line section cd represents a stressed state of the push rod at a stage where the probe retracts completely;
it can be seen from fig. 4 that the slope of the oblique line section bc is significantly different from the slope of the oblique line section ab and the oblique line section cd, because the elastic force applying component retracts upwards along with the probe, the elastic force of the elastic force applying component also changes, and the force applied to the probe can be obtained by subtracting the actually measured force applied to the push rod from the force applied to the push rod in the stroke of the oblique line section ab.
The embodiment of the utility model provides a measuring method as follows:
defining a starting point of a downward sliding stroke of the push rod as a point a, defining a critical point when the push rod slides downwards to enable the probe to just touch the surface of the sample but not apply pressure on the surface of the sample as a point b, and defining a critical point when the push rod slides downwards to enable the probe to just retract upwards to a stroke stop point as a point c;
defining a downslide stroke of the putter from the point a to the point b as a first stage stroke (a diagonal line ab in fig. 4); a slide-down stroke of the putter from the point b to the point c is defined as a second-stage stroke (a diagonal segment bc in fig. 4);
the push rod 5 is driven to slide downwards by the push rod driving component 7 (so that the push rod 5 pushes the measuring probe to move downwards), the downward sliding stroke of the push rod is measured by the height measurer 8, and the vertical pressure born by the push rod is measured by the pressure sensor 6;
calculating the stress of the probe in real time in the stroke of the second stage of the push rod, and stopping the push rod from sliding downwards when the calculated value of the stress of the probe reaches a required set value;
the force calculation formula of the probe in the second-stage stroke of the push rod is as follows:
dlt_F= F_meas-F_calculate
wherein dlt _ F is the stress value of the probe, F _ meas is the real-time value of the vertical pressure borne by the push rod in the second-stage stroke, and F _ calculate is the measured value of the vertical pressure borne by the push rod in the first-stage stroke.
And in the second-stage stroke of the push rod, the probe stress value dlt _ F is gradually increased and reaches saturation, the probe stress curve in the second-stage stroke of the push rod can be obtained according to the measured value of the downward sliding stroke of the push rod in the second-stage stroke and the measured value of the vertical pressure borne by the push rod in the second-stage stroke, and if the initial distance between the sample and the probe is not changed in the next measurement, the stroke of the push rod can be directly obtained according to the set needle-inserting pressure and the recorded probe stress curve, and the push rod is directly controlled to reach the stroke.
Claims (2)
1. A conductive film multi-probe measuring device comprises a measuring base and a probe seat; a plurality of probes capable of sliding up and down are arranged on the probe seat, each probe is provided with an elastic stressing component, the lower end of the elastic stressing component is connected with the probe, and the upper end of the elastic stressing component is connected with the probe seat; the lower end of each probe is lower than the lower end of the probe seat, and each probe can slide upwards until the lower end of the probe is flush with the lower end of the probe seat; the method is characterized in that:
the measuring base is provided with a movable seat capable of moving up and down, the measuring base is provided with an elastic return part for driving the movable seat to return upwards, one end of the elastic return part is connected with the measuring base, the other end of the elastic return part is connected with the movable seat, and the probe seat is fixed on the movable seat;
the measuring base is provided with a push rod capable of sliding up and down and a push rod driving part used for driving the push rod to slide up and down, the lower end of the push rod props against the movable seat, and the push rod is provided with a pressure sensor used for detecting the vertical pressure born by the push rod.
2. The conductive thin film multi-probe measuring device according to claim 1, characterized in that: and a height measurer for detecting the up-and-down sliding stroke of the push rod is arranged on the measuring base.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020125069.8U CN211554146U (en) | 2020-01-20 | 2020-01-20 | Conductive film multi-probe measuring device |
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| CN202020125069.8U CN211554146U (en) | 2020-01-20 | 2020-01-20 | Conductive film multi-probe measuring device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077373A (en) * | 2020-01-20 | 2020-04-28 | 麦峤里(上海)半导体科技有限责任公司 | Conductive film multi-probe measuring device and measuring method thereof |
| CN115113011A (en) * | 2022-06-17 | 2022-09-27 | 上海泽丰半导体科技有限公司 | Probe card stroke compensation system and method |
-
2020
- 2020-01-20 CN CN202020125069.8U patent/CN211554146U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077373A (en) * | 2020-01-20 | 2020-04-28 | 麦峤里(上海)半导体科技有限责任公司 | Conductive film multi-probe measuring device and measuring method thereof |
| CN115113011A (en) * | 2022-06-17 | 2022-09-27 | 上海泽丰半导体科技有限公司 | Probe card stroke compensation system and method |
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