CN211426786U - Detection module and detection device - Google Patents

Detection module and detection device Download PDF

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Publication number
CN211426786U
CN211426786U CN201921624414.6U CN201921624414U CN211426786U CN 211426786 U CN211426786 U CN 211426786U CN 201921624414 U CN201921624414 U CN 201921624414U CN 211426786 U CN211426786 U CN 211426786U
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light
lens group
detection module
face
light beam
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CN201921624414.6U
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Chinese (zh)
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董帅
黄淮
洪小平
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SZ DJI Technology Co Ltd
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SZ DJI Technology Co Ltd
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Abstract

The application discloses survey module and detection device. The detection module comprises a light source, a semi-transparent and semi-reflective mirror, a gluing lens group and a light detector. The gluing lens group at least comprises a plurality of lenses which are sequentially attached, light beams emitted by the light source reach the gluing lens group after being transmitted by the semi-transparent and semi-reflective mirror, then are collimated by the gluing lens group and then are emitted to a target object, and the light beams reflected by the target object are converged to the semi-transparent and semi-reflective mirror by the gluing lens group and then are reflected to the light detector by the semi-transparent and semi-reflective mirror. The detection module and the detection device of the embodiment of the application adopt the cemented lens group, and compared with the aspheric lens, the cemented lens group has the advantages of large caliber, strong received signal and low cost; compared with the separated multiple lens groups, the cemented lens group has the advantages of large tolerance, compact volume and controllable cost, and is suitable for batch production.

Description

Detection module and detection device
Technical Field
The application relates to the technical field of radar detection, in particular to a detection module and a detection device.
Background
The conventional laser radar detection system mostly adopts an aspheric lens. However, when the aperture of the lens is increased to a certain range, the processing difficulty and cost of the aspheric lens grinding tool are multiplied, and the aspheric lens grinding tool is not suitable for batch production.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a detection module and a detection device.
The embodiment of the application provides a survey module, survey the module and include light source, semi-transparent semi-reflecting mirror, veneer lens group and photo detector, the veneer lens group includes a plurality of lenses of laminating in proper order at least, the light beam of light source transmission passes through arrive behind the transmission of semi-transparent semi-reflecting mirror the veneer lens group, again by on the outgoing to the target object behind the collimation of veneer lens group, by the light beam that the target object reflects back is by the veneer lens group assembles to semi-transparent semi-reflecting mirror, again by semi-transparent semi-reflecting mirror reflection extremely photo detector.
In some embodiments, the plurality of lenses of the cemented lens group are cemented by a cemented material, and the cemented lens group has a caliber range greater than or equal to 45 mm.
In some embodiments, the plurality of lenses includes a positive lens and a negative lens, the positive lens includes a first face and a second face opposite to each other, the negative lens includes a third face and a fourth face opposite to each other, the light beam emitted by the light source sequentially passes through the first face, the second face, the third face and the fourth face, and the second face and the third face are cemented by a cementing material.
In some embodiments, the positive lens is a biconvex lens and the negative lens is a meniscus lens.
In some embodiments, the refractive index of the positive lens is less than the refractive index of the negative lens.
In some embodiments, the positive lens has a refractive index of 1.80 to 1.87, and the negative lens has a refractive index of 1.98 to 2.30.
In some embodiments, the positive lens has a center thickness of 10 ± 0.03mm to 15 ± 0.03mm, and the negative lens has a center thickness of 1.5 ± 0.03mm to 5 ± 0.03 mm.
In some embodiments, the curvature of the third face is the same as the curvature of the second face.
In some embodiments, the first face has a curvature of 58mm to 62mm, the second face has a curvature of 60mm to 64mm, and the fourth face has a curvature of 950mm to 1150 mm.
In some embodiments, at least one of the first surface, the second surface, the third surface, and the fourth surface is provided with an antireflection dielectric film, and the wavelength of light transmitted by the antireflection dielectric film ranges from 880nm to 950 nm.
In some embodiments, the bonding material is a photosensitive glue having a refractive index greater than 1.6.
In some embodiments, the cemented lens group has an optical axis, the cemented lens group includes a central region proximate the optical axis and a marginal region distal from the optical axis, the marginal region being provided with ink.
This application embodiment still provides a detection device, detection device includes casing, scanning module and above-mentioned arbitrary embodiment the detection module, detect the module with scanning module respectively with the casing combines, detect the module be used for to scanning module transmission beam, scanning module is used for changing the transmission direction back outgoing of light beam, the light beam process that reflects back through the target object incides behind the scanning module to detect the module, it is used for the basis to detect the module the light beam of reflection back confirms the target object is relative detection device's distance and/or direction.
In some embodiments, the scanning module comprises a moving optical element for changing the propagation direction of the light beam from the detection module and then emitting the light beam.
In some embodiments, the scanning module further comprises a driving element for driving the optical element to move.
The detection module and the detection device of the embodiment of the application adopt the cemented lens group, and compared with the aspheric lens, the cemented lens group has the advantages of large caliber, strong received signal and low cost; compared with the separated multiple lens groups, the cemented lens group has the advantages of large tolerance, compact volume and controllable cost, and is suitable for batch production.
Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block schematic diagram of a probing apparatus according to certain embodiments of the present application;
FIG. 2 is a schematic structural diagram of a probing module according to some embodiments of the present disclosure;
FIG. 3 is a schematic structural diagram of a probing module according to some embodiments of the present disclosure;
FIG. 4 is a schematic structural diagram of a probing module according to some embodiments of the present disclosure;
FIG. 5 is a schematic structural diagram of a probing module according to some embodiments of the present disclosure;
FIG. 6 is a schematic structural diagram of a probing module according to some embodiments of the present disclosure;
FIG. 7 is a schematic diagram of a probe module according to some embodiments of the present disclosure;
FIG. 8 is a schematic diagram of a cemented lens assembly according to some embodiments of the present application;
FIG. 9 is a schematic diagram of a cemented lens assembly according to some embodiments of the present application;
FIG. 10 is an exploded schematic view of a cemented lens of certain embodiments of the present application;
FIG. 11 is a schematic diagram illustrating the detection principle of the detection device according to some embodiments of the present application;
fig. 12 is a schematic diagram illustrating the detection principle of the detection device according to some embodiments of the present application.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the embodiments of the present application.
Referring to fig. 1, the present application provides a detecting device 1000, and the detecting device 1000 can be used to determine the distance and/or direction of a detecting object relative to the detecting device 1000. The detection device 1000 may be an electronic device such as a laser radar, a laser ranging device, or the like. In one embodiment, the detection device 1000 may be used to sense external environmental information, such as distance information, orientation information, reflection intensity information, velocity information, etc., of environmental objects. In one implementation, the detection apparatus 1000 may detect the distance from the target object to the detection apparatus 1000 by measuring a Time-of-Flight (TOF) that is a Time of Flight (Time-of-Flight) of light between the detection apparatus 1000 and the target object. Alternatively, the detection device 1000 may detect the distance from the target object to the detection device 1000 by other techniques, such as a distance measurement method based on phase shift (phase shift) measurement or a distance measurement method based on frequency shift (frequency shift) measurement, which is not limited herein. The distance and orientation detected by the detection device 1000 can be used for remote sensing, obstacle avoidance, mapping, modeling, navigation, and the like. In one embodiment, the detection device 1000 according to the embodiment of the present invention may be applied to a mobile platform, and the detection device 1000 may be mounted on a platform body of the mobile platform. The mobile platform with the detection device 1000 can measure the external environment, for example, measure the distance between the mobile platform and an obstacle for obstacle avoidance, and perform two-dimensional or three-dimensional mapping on the external environment. In certain embodiments, the mobile platform comprises at least one of an unmanned aerial vehicle, an automobile, a remote control car, a robot, a camera. When the detection device 1000 is applied to an unmanned aerial vehicle, the platform body is a fuselage of the unmanned aerial vehicle. When the detecting device 1000 is applied to an automobile, the platform body is the body of the automobile. The vehicle may be an autonomous vehicle or a semi-autonomous vehicle, without limitation. When the detecting device 1000 is applied to a remote control car, the platform body is a car body of the remote control car. When the detecting device 1000 is applied to a robot, the platform body is a robot. When the detecting device 1000 is applied to a camera, the platform body is the camera itself.
The detecting device 1000 includes a housing 200, a scanning module 300 and a detecting module 100, wherein the detecting module 100 and the scanning module 300 are respectively combined with the housing 200, the detecting module 100 is configured to emit a light beam to the scanning module 300, the scanning module 300 is configured to change a transmission direction of the light beam and then emit the light beam, the light beam reflected by the target object passes through the scanning module 300 and then enters the detecting module 100, and the detecting module 100 is configured to determine a distance and/or a direction of the target object relative to the detecting device 1000 according to the reflected light beam. By "determining the distance and/or direction" is herein understood that the detection module 100 may be adapted to determine one or both of the distance or direction of the target object relative to the detection apparatus 1000 from the reflected light beam, or both the distance and direction may be determined.
Referring to fig. 2, the detecting module 100 includes a light source 110, a transflective mirror 120, a cemented lens assembly 130, and a light detector 140. The cemented lens assembly 130 includes at least a plurality of lenses that are sequentially attached. The light beam emitted from the light source 110 is transmitted by the half-transparent and half-reflective mirror 120, then reaches the cemented lens group 130, is collimated by the cemented lens group 130, and then is emitted to the target object, and the light beam reflected by the target object is converged to the half-transparent and half-reflective mirror 120 by the cemented lens group 130, and then is reflected by the half-transparent and half-reflective mirror 120 to the light detector 140.
It is understood that conventional lidar detection systems often employ aspheric lenses or separate multi-lens configurations. However, when the aperture of the lens is increased to a certain range, the processing difficulty and the cost of the aspheric lens grinding tool are multiplied and increased, and the aspheric lens grinding tool is not suitable for batch production; the distance tolerance and the assembly requirement between the lens of many lens battery structures of separation are all higher, and the quantity of lens is more than when two, and the cost of manufacture is higher, and the volume of system is also great, can not satisfy the radar application to integrating and the volume requirement is higher.
The detection module 100 and the detection device 1000 of the embodiment of the application adopt the cemented lens group 130, and compared with an aspheric lens, the cemented lens group 130 has the advantages that the aperture of the cemented lens group 130 can be made very large, the received signal is strong, and the cost is low; compared with the separated multiple lens groups, the cemented lens group 130 has the advantages of large tolerance, compact volume and controllable cost, and is suitable for mass production.
The light source 110 is configured to emit a light beam (i.e., a sequence of light pulses), optionally the light beam emitted by the light source 110 is a narrow bandwidth light beam having a wavelength outside the visible range, e.g., the light beam emitted by the light source 110 has a wavelength of 905 nm. In some embodiments, the light source 110 may include a Laser diode (Laser diode) through which a light beam is emitted in the order of nanoseconds.
The transflective mirror 120 is disposed on an exit light path of the light source 110 and is used to combine an exit light path of the light source 110 with a receiving light path of the light detector 140. Specifically, the half-transparent half-mirror 120 is disposed at one side of the cemented lens group 130, and is located between the light source 110 and the cemented lens group 130. The light path of the light source 110 and the light path of the light detector 140 are coaxial, and referring to fig. 2, a central axis 111 of the light beam emitted from the light source 110 in the detection module 100 and a central axis 112 of the light beam reflected by the half-transparent mirror 120 may be coincident. Fig. 2-7 show schematic diagrams of various embodiments of the detection module 100 of the present application that employ coaxial optical paths. The semi-transparent and semi-reflective mirror 120 combines the transmitting light path and the receiving light path in the detection module 100 before the optical detector 140, so that the transmitting light path and the receiving light path can share the same cemented lens group 130, the light path is more compact, the size of the detection module 100 can be reduced, and the complexity and the cost of the system are reduced.
Referring to FIG. 2, in one embodiment, the transflective mirror 120 includes a transparent portion 121 and a reflective portion 122, the transparent portion 121 may be a through hole formed by mechanical drilling, and the light beam emitted from the light source 110 can directly pass through the transparent portion 121. The reflective portion 122 includes a substrate 123, and the substrate 123 may be made of metal having low light transmittance, such as copper or aluminum. The substrate 123 further includes a first face 1231 and a second face 1232 opposite to each other, the first face 1231 is opposite to the light source 110, and the second face 1232 is opposite to the cemented lens assembly 130.
Further, the reflective portion 122 may further include a reflective film 124 disposed on the substrate 123. In some examples, the reflective film 124 may be disposed on a side of the substrate 123 facing away from the light source 110, i.e., on the second face 1232. In other examples, the reflective film 124 may also be disposed on the first face 1231. The reflective film 124 may be made of a metal material such as aluminum, gold, silver, palladium, or titanium.
In the detection module 100 of the embodiment of the present application, when the light emitted by the light source 110 passes through the half-transparent half-mirror 120, part of the light emitted by the light source 110 can penetrate through the light-transmitting part 121 of the half-transparent half-mirror 120, and the light emitted by the light source 110 to the edge of the half-transparent half-mirror 120 is blocked by the reflective film 124 on the reflective part 122 of the half-transparent half-mirror 120, and the reflective film 124 can also reflect most or almost all of the light (return light) incident from the outside of the detection device 1000, the received signal of the detection module 100 is stronger, which is favorable for the accuracy of the detection data of the detection module 100.
Referring to FIG. 3, in another embodiment, the transflective mirror 120 includes a substrate 125 and a reflective film 126 (e.g., a high-reflectivity film) formed on the substrate 125.
The substrate 125 is flat, and the substrate 125 includes a light-transmitting region 1251. The light-transmitting region 1251 is used for light beams emitted from the light source 110 to pass through. The light-transmitting region 1251 is a region made of a light-transmitting material, for example, the light-transmitting region 1251 may be made of a material having high light transmittance, such as plastic, resin, or glass. The area of the substrate 125 except for the light-transmitting area 1251 is a peripheral area, which may be made of a metal with low light transmittance, such as copper or aluminum; alternatively, the peripheral region is also made of the same light-transmitting material as described above, and the peripheral region is integrally formed of the same material as the light-transmitting region 1251. Substrate 125 also includes first and second opposing faces 1252 and 1253, first face 1252 being opposite light source 110 and second face 1253 being opposite cemented lens group 130.
The reflective film 126 is disposed on a side of the substrate 125 facing away from the light source 110, i.e., on the second face 1253. In some examples, reflective film 126 may also be disposed on first face 1252. The reflective film 126 is provided with a light transmitting hole 1261. The transparent region 1251 is the region of the substrate 125 corresponding to the light hole 1261. The light pulse train emitted from the light source 110 passes through the light-transmitting region 1251 and the light-transmitting hole 1261 and then exits. The reflective film 126 may be made of metal materials such as aluminum, gold, silver, palladium or titanium, and when the peripheral region is the same as the light-transmitting region 1251, the light emitted from the light source 110 can be blocked by the reflective film 126, and the reflective film 126 can also reflect most or almost all of the light (return light) incident from the outside of the detection device 1000, so that the received signal of the detection module 100 is stronger, which is favorable for the accuracy of the detection data of the detection module 100.
Referring to fig. 4 to 6, when the reflective film 126 has a light hole 1261, in one embodiment, the transflective mirror 120 further includes an antireflection film 1254 (i.e., an antireflection film) formed on the light-transmitting area 1251. The antireflection film 1254 is provided on a side of the light-transmitting region 1251 facing the light source 110 (as shown in fig. 4), that is, on the first face 1252; alternatively, the antireflection film 1254 is disposed on a side (as shown in fig. 5) of the light-transmitting region 1251 facing away from the light source 110, that is, on the second face 1253, in which case, the antireflection film 1254 may be located in the light-transmitting hole 1261; alternatively, the antireflection film 1254 may be provided on both the side of the light-transmitting region 1251 facing the light source 110 and the side of the light-transmitting region 1251 facing away from the light source 110 (as shown in fig. 6), that is, on both the first face 1252 and the second face 1253, and in this case, the antireflection film 1254 provided on the second face 1253 may be located in the light-passing hole 1261. The material of the antireflective film 1254 may be SiO2, SiN, ZnO, SiON, TiO2, Al2O3, MgF, or ZnS, or a combination of one or more thereof. It will be appreciated that due to the presence of the substrate 125, the light pulse train emitted from the light source 110 will be reflected at the first surface 1252 and the second surface 1253 of the substrate 125, reducing the energy of the emitted light. The side of the light-transmitting region 1251 opposite to the light source 110 is coated with an antireflection film 1254, which can reduce the reflection from the substrate 125 to the air interface (specifically, the reflection from the second surface 1253 to the air interface), and improve the energy of the emergent light passing through the half-transparent and half-reflective mirror 120. Similarly, a reflection reducing film 1254 is coated on a side of the light-transmitting region 1251 facing the light source 110, so as to reduce reflection from the air interface to the substrate 125 (specifically, reflection from the air interface to the first surface 1252), and further improve the energy of the emergent light passing through the half-mirror 120.
Referring to fig. 7, when the reflective film 126 has a light hole 1261, in one embodiment, the light transmissive region 1251 has a polarization transmissive film 127. The polarization transmission film 127 may be specifically disposed on a side of the light transmission region 1251 facing the light source 110 or a side of the light transmission region 1251 facing away from the light source 110 (as shown in fig. 7, in this case, the polarization transmission film 127 may be located in the light transmission hole 1261). In this embodiment, the light source 110 is configured to emit a light pulse train having a predetermined polarization direction, and the polarization transmissive film 127 is configured to transmit the light pulse train having the predetermined polarization direction. The polarizing transmission film 127 may be made of resin, glass, or the like. It can be understood that when the light-transmitting region 1251 is coated with the polarization-transmitting film 127 for transmitting the optical pulse train with a predetermined polarization direction, the polarization direction of the optical pulse train reflected after the optical pulse train emitted from the detection apparatus 1000 hits the object to be detected will be changed to some extent, and when the optical pulse train hits the polarization-transmitting film 127 again, the transmittance will be reduced, and a part of the energy will be reflected to the optical detector 140, so that the echo (return light) receiving ratio is increased.
It is to be noted that the antireflection film 1254 and the polarization transmission film 127 may be used in combination. For example, the antireflection film 1254 is provided on the side of the light-transmitting region 1251 facing the light source 110, and the polarization transmission film 127 is provided on the side of the light-transmitting region 1251 facing away from the light source 110; alternatively, the polarization transmission film 127 is disposed on a side of the light-transmitting region 1251 facing the light source 110, and the antireflection film 1254 is disposed on a side of the light-transmitting region 1251 facing away from the light source 110.
In the detection module 100 of the embodiment of the application, the substrate 125 of the half-transparent half-reflective mirror 120 is not perforated but the reflective film 126 formed on the substrate 125 is provided with the light through hole 1261, so that compared with the perforation of the substrate 125, the light scattering phenomenon at the perforated position can be greatly reduced, and the scattered light is prevented from striking the light detector 140 and interfering the detection of the echo (i.e., the return light) by the light detector 140, thereby greatly improving the distance measurement accuracy. It can be appreciated that the intensity of the optical pulse train reflected back through the probe is many orders of magnitude lower than the optical pulse train emitted from the light source 110, and thus stray light caused by the internal structure of the probe module 100 may interfere with the echo measurement. The thickness of the substrate 125 is at least in millimeter order, if the substrate 125 is perforated, the scattering cross section (cross section in the thickness direction of the substrate 125) is large, the light pulse sequence reflected by the probe will have strong light scattering at the perforated position, while the thickness of the reflective film 126 is in micrometer order, or even thinner, and the scattering cross section (cross section in the thickness direction of the reflective film 126) is much smaller than that of the perforated substrate 125, so that the light scattering at the perforated position can be greatly reduced by arranging the light through hole 1261 on the reflective film 126.
The cemented lens group 130 is located on an exit light path of the light source 110. Specifically, the cemented lens group 130 is disposed on a side of the transflective mirror 120 facing away from the light source 110. The cemented lens group 130 is used to collimate the light beam emitted from the light source 110, i.e., to collimate the light beam emitted from the light source 110 into parallel light. The cemented lens group 130 is also used to focus the light reflected back by the object to the transflective mirror 120. The aperture range of the cemented lens group 130 is greater than or equal to 45mm, that is, the aperture of the cemented lens group 130 is 45mm or more. For example, the aperture of the cemented lens group 130 may be 45mm, 46mm, 48mm, 50mm, 52mm, 55mm, 58mm, 60mm, 70mm, 80mm, or the like. The aperture range of the cemented lens group 130 is greater than or equal to 45mm, so that the received signal of the detection device 1000 is stronger, the processing and the batch production are convenient, and the cemented lens group is particularly suitable for some large-aperture laser radar ranging systems.
The cemented lens group 130 includes at least a plurality of lenses 131 sequentially attached.
In one embodiment, the cemented lens group 130 includes a plurality of sequentially cemented lenses 131, for example, in fig. 8, the cemented lens group 130 includes two sequentially cemented lenses 131. Of course, in other embodiments, the cemented lens group 130 may also include three or more lenses 131 attached in sequence. The plurality of lenses 131 attached in sequence are coaxially arranged, and no gap is formed between the plurality of lenses 131. This makes the cemented lens assembly 130 more compact and small, which is beneficial to the miniaturization of the detection module 100.
In another embodiment, the cemented lens group 130 includes a plurality of cemented lenses, each of which is constructed by a plurality of lenses 131 cemented together. The plurality of cemented lenses are coaxially disposed and spaced apart from each other, for example, adjacent cemented lenses may be spaced apart by a predetermined distance. The coaxial arrangement of a plurality of cemented lenses is favorable to detecting the spatial arrangement of module 100 more rationally, is favorable to detecting the miniaturized design of module 100. In addition, the spacing of the plurality of cemented lenses makes the light beam more uniform when passing through the cemented lens assembly 130, thereby avoiding the mutual interference between the light beams and facilitating the accuracy of the detection data of the detection module 100.
In yet another embodiment, the cemented lens group 130 includes a plurality of sequentially cemented lenses 131 and one or more discrete lenses, for example, in fig. 9, the cemented lens group 130 includes two sequentially cemented lenses 131 and one discrete lens. Of course, in other embodiments, the cemented lens group 130 may also include three or more lenses 131 attached in sequence, and two or more discrete lenses. A plurality of sequentially attached lenses 131, and one or more discrete lenses are coaxially arranged. The plurality of lenses 131 and one or more discrete lenses which are sequentially attached are coaxially arranged to facilitate the spatial arrangement of the detection module 100, so that the space arrangement is more reasonable, and the miniaturization design of the detection module 100 is facilitated. The three or more lenses 131 and two or more discrete lenses which are sequentially attached are arranged, so that the phenomenon of mutual interference between light rays can be effectively avoided, and the accuracy of detection data of the detection module 100 is improved.
The present embodiment will be described by taking an example in which the cemented lens group 130 includes a plurality of lenses 131 bonded in sequence.
The plurality of lenses 131 of the cemented lens group 130 are cemented by a cementing material. The bonding material may be a high refractive index photosensitive glue, for example, a photosensitive glue with a refractive index greater than 1.6, that is, the refractive index of the bonding material is any value of 1.6 or more. For example, the refractive index may be 1.62, 1.65, 1.70, 1.75, 1.80, 1.85, 1.90, 1.95, 2.00, 2.05, and the like. The refractive index of the photosensitive glue greater than 1.6 can effectively reduce the reflectivity of the light beam at the cemented interface between the lenses 131. It is understood that the plurality of lenses 131 of the cemented lens group 130 each have a high refractive index, and if the refractive index of the cemented material is low, since the light beam passing between the high refractive index and the low refractive index material will generate reflection at the interface (the reflectivity of glass to air is about 4%), when the light beam passes between the lenses 131, the light beam will be affected by the cemented material to generate reflection at the cemented interface between the lenses 131 and the cemented material, which is not favorable for the light to transmit through the cemented lens group 130. Therefore, the glue material adopts the photosensitive glue with high refractive index, thereby reducing the reflection of the light beam on the glue interface, ensuring that the emergent signal and the receiving signal are stronger when the detection module 100 measures the distance, and being beneficial to the accuracy of the detection module 100 in detecting the data.
The cemented lens assembly 130 has the advantages of large tolerance, compact volume and controllable cost, and the cemented lens assembly 130 is made of easily available materials, has mature processing scheme, is convenient for batch production, and is particularly suitable for some large-caliber laser radar ranging systems.
Referring to fig. 8 and 10, the plurality of lenses 131 in the cemented lens group 130 include a positive lens 134 and a negative lens 135. The refractive index of the positive lens 134 is smaller than that of the negative lens 135, so that light rays at the edges of the positive lens 134 and the negative lens 135 are better corrected, spherical aberration generated during imaging is smaller, and the imaging quality is improved. More specifically, the refractive index of the positive lens 134 may be 1.80-1.87, that is, the refractive index of the positive lens 134 may be any value in the range of 1.80 to 1.87. For example, the refractive index of the positive lens 134 may be 1.80, 1.81, 1.82, 1.83, 1.84, 1.85, 1.855, 1.86, 1.865, 1.87, and so on. The refractive index of the negative lens 135 may be 1.98-2.30, that is, the refractive index of the negative lens 135 may be any value within a range of 198 to 2.30. For example, the negative lens 135 may have a refractive index of 1.98, 1.99, 2.00, 2.01, 2.02, 2.03, 2.04, 2.05, 2.10, 2.20, etc. The higher the refractive index of the positive lens 134 and the negative lens 135 as a whole, the better. It can be understood that the higher the refractive index of the whole of the positive lens 134 and the negative lens 135, the greater the light beam transmittance of the positive lens 134 and the negative lens 135, that is, the stronger the transmission signal and the reception signal of the detection device 1000, which is beneficial to improving the detection accuracy. If the refractive index of the whole of the positive lens 134 and the negative lens 135 is lower, the convex degree of the convex lens surface in the positive lens 134 needs to be larger and the concave degree of the concave lens surface in the negative lens 135 needs to be larger, so that the spot generated by the light beam after passing through the positive lens 134 and the negative lens 135 is larger, the spherical aberration is reduced, the transmitting signal and the receiving signal of the detection device 1000 are stronger, the detection accuracy is improved, but the thickness and the volume of the cemented lens group 130 are increased due to the large convex degree of the convex lens surface in the positive lens 134 and the large concave degree of the concave lens surface in the negative lens 135, the volume of the detection module 100 is increased, and the manufacturing cost is increased. In the embodiment of the present application, when the refractive index of the positive lens 134 and the refractive index of the negative lens 135 satisfy the above values, the refractive index of the positive lens 134 and the refractive index of the negative lens 135 are higher, which can effectively reduce spherical aberration and improve the optical performance of the detection module 100.
The center thickness of the positive lens 134 is 10 ± 0.03mm to 15 ± 0.03mm, that is, the center thickness of the positive lens 134 is any value in the range of 9.97mm to 15.03 mm. For example, the center thickness of the positive lens 134 may be 9.97mm, 10mm, 10.03mm, 11.03mm, 12.03mm, 13.03mm, 14.03mm, 14.97mm, 15mm, 15.03mm, and the like. The center thickness of the negative lens 135 is 1.5 ± 0.03mm to 5 ± 0.03mm, that is, the center thickness of the negative lens 135 is any value in the range of 1.47mm to 5.03 mm. For example, the center thickness of the negative lens 135 may be 1.47mm, 1.5mm, 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm, 5mm, 5.03mm, and the like. The central thicknesses of the positive lens 134 and the negative lens 135 satisfy the above values, so that the cost can be reduced and the volume of the cemented lens group 130 can be reduced on the premise of satisfying the optical requirements, thereby reducing the manufacturing cost of the detection module 100 and reducing the volume of the detection module 100.
The positive lens 134 includes first and second opposing faces 1341 and 1342, and the negative lens 135 includes third and fourth opposing faces 1351 and 1352. The light beam emitted from the light source 110 passes through the first face 1341, the second face 1342, the third face 1351, and the fourth face 1352 in this order. The second face 1342 and the third face 1351 may be glued by a glue material. The curvature of the first face 1341 is 58mm to 62mm, that is, the curvature of the first face 1341 is any value in the range of 58mm to 62 mm. For example, the curvature of the first face 1341 may be 58mm, 58.50mm, 59mm, 59.50mm, 60mm, 60.50mm, 61mm, 61.50mm, 61.90mm, 62mm, and the like. The curvature of the second face 1342 is 60mm to 64mm, that is, the curvature of the second face 1342 is any value in the range of 60mm to 64 mm. For example, the curvature of the second face 1342 may be 60mm, 60.25mm, 60.50mm, 61mm, 61.50mm, 62mm, 62.50mm, 63mm, 63.50mm, 64mm, and the like. The curvature of fourth face 1352 is 950mm to 1150mm, that is, the curvature of fourth face 1352 is any value in the range of 950mm to 1150 mm. For example, the curvature of fourth face 1352 may be 950mm, 960mm, 970mm, 980mm, 990mm, 1000mm, 1010mm, 1020mm, 1030mm, 1040mm, 1050mm, or the like. The curvature of the third face 1351 may be the same as the curvature of the second face 1342, that is, the curvature of the third face 1351 is also in the range of 60mm to 64mm, so as to effectively ensure that there is no air gap when the second face 1342 and the third face 1351 are glued together, so that the positive lens 134 and the negative lens 135 are tightly glued together, and the cemented lens assembly 130 has a more compact structure and a reduced volume.
In the embodiment of the present application, the positive lens 134 may be a biconvex lens, and the negative lens 135 may be a meniscus lens, i.e., the first face 1341 and the second face 1342 of the positive lens 134 are convex, the third face 1351 of the negative lens 135 is concave, and the fourth face 1352 is convex. The positive lens 134 has a positive refractive power and the negative lens 135 has a negative refractive power, which is advantageous for reducing spherical aberration of the scattered light generated by the positive lens 134 and the negative lens 135 due to the condensed light, that is, the point at which the light beam passes through the condensed light of the positive lens 134 and the negative lens 135 is minimized. It is understood that the light beam emitted from the light source 110 has different light-converging capacities at different points on the spherical surface of the positive lens 134 and the spherical surface of the negative lens 135, and the light beam is converged on the image plane and cannot be converged into one point, but forms a symmetrical scattered spot centered on the optical axis, and such aberration is called spherical aberration. The positive lens 134 and the negative lens 135 in the cemented lens group 130 according to the embodiment of the present invention are biconvex lenses and meniscus lenses, that is, the positive lens 134 has positive diopter, and the negative lens 135 has negative diopter, which can reduce spherical aberration, so that the spherical aberration of the light beam emitted from the cemented lens group 130 on the target object is the minimum.
In other embodiments, the positive lens 134 can also be a convex-concave lens, and the negative lens 135 can be a biconcave lens, i.e., the first face 1341 of the positive lens 134 is convex, the second face 1342 is concave, and the third face 1351 and the fourth face 1352 of the negative lens 135 are both concave. At this time, the positive lens 134 still has positive diopter, and the negative lens 135 still has negative diopter, which can reduce spherical aberration, so that the transmitted signal and the received signal of the detection device 1000 are both relatively accurate, and the reliability of the detection data of the detection device 1000 is increased.
Referring to fig. 10, at least one of the first face 1341, the second face 1342, the third face 1351 and the fourth face 1352 is provided with an anti-reflection dielectric film 160. The wavelength range that antireflective dielectric film 160 allows transmission is 880nm to 950nm, that is, the wavelength that antireflective dielectric film 160 allows transmission is any value in the range of 880mm to 950 mm. For example, antireflective dielectric film 160 may be transmissive at 880nm, 890nm, 900nm, 910nm, 920nm, 930nm, 935nm, 940nm, 945nm, 950nm, and the like.
Specifically, at least one of the first face 1341, the second face 1342, the third face 1351, and the fourth face 1352 provided with the antireflection dielectric film 160 includes: one face is provided with antireflection dielectric film 160, or two faces are provided with antireflection dielectric film 160, or three faces are provided with antireflection dielectric film 160, or four faces are provided with antireflection dielectric film 160. For example, first surface 1341 is provided with antireflection dielectric film 160, or first surface 1341 and second surface 1342 are both provided with antireflection dielectric film 160, or first surface 1341, second surface 1342 and third surface 1351 are all provided with antireflection dielectric film 160, or first surface 1341, second surface 1342, third surface 1351 and fourth surface 1352 are all provided with antireflection dielectric film 160, etc., which are not listed here.
In the embodiment of the present application, the more antireflection dielectric films 160 are disposed on the surfaces of the positive lens 134 and the negative lens 135, the higher the transmittance of the light beam emitted from the light source 110 and the transmittance of the return light reflected by the object to be detected are at the positive lens 134 and the negative lens 135, so that the signal transmitted by the detection module 100 is stronger and the detection accuracy of the detection module 100 is improved. In addition, the wavelength of the light beam emitted by the light source 110 is 905nm, and the allowed transmission wavelength range of the anti-reflection dielectric film 160 is 880nm to 950nm, so that almost all the light beam emitted by the light source 110 can be ensured to transmit through the positive lens 134 and the negative lens 135, and the light beam which transmits outside the wavelength range of 880nm to 950nm cannot transmit, which is beneficial to stronger transmission and reception signals of the detection device 1000, and further improves the detection accuracy of the detection device 1000.
Referring to fig. 8 and 9, the cemented lens assembly 130 has an optical axis 136, the cemented lens assembly 130 includes a central region close to the optical axis 136 and an edge region 1361 far from the optical axis 136, the edge region 1361 is provided with ink, or the edge region 1361 may be provided with special optical ink having low reflectivity and high absorptivity at a wavelength of 880nm to 950 nm. The arrangement of the ink or the ink dedicated for optics in the edge area 1361 of the cemented lens group 130 can make the reflectance of the light beam emitted from the light source 110 lower in the edge area 1361, and the light beam does not diverge in the edge area 1361, thereby ensuring that the transmittance of the light beam passing through the cemented lens group 130 (including the light beam incident on the cemented lens group 130 and the return light received by the cemented lens group 130) approaches 100%, making both the emitted signal and the received signal of the detecting device 1000 stronger, and increasing the accuracy of the detected data of the detecting device 1000. In addition, the ink or the ink dedicated for optics disposed in the edge area 1361 can prevent the light beam emitted to the cemented lens group 130 from being interfered by the external light, which is beneficial to improving the accuracy of the signal emitted and received by the detecting module 100. Furthermore, disposing ink or ink dedicated to optics on the edge area 1361 of the cemented lens group 130 can make the cemented lens group 130 more beautiful in appearance, and the ink or ink dedicated to optics can protect the cemented lens group 130.
Referring to FIG. 2, the light detector 140 is disposed on a side of the transflective mirror 120 opposite to the light source 110 and on a side of the cemented lens assembly 130, and is disposed between the transflective mirror 120 and the cemented lens assembly 130. The light beam reflected by the object is reflected by the reflective film 124 and then received by the light detector 140, and the light detector 140 is configured to determine the distance and/or the direction of the object with respect to the detection module 100 according to the received light beam, that is, the light detector 140 may determine the distance of the object with respect to the detection module 100, or determine the direction of the object with respect to the detection module 100, or determine the distance and the direction of the object with respect to the detection module 100.
When the detection module 100 is in operation, the light source 110 emits a light beam, the light beam passes through the light-transmitting portion 121 (as shown in fig. 2) or the light-transmitting region 1251 (as shown in fig. 3 to 7) of the semi-transparent mirror 120 and is collimated by the cemented lens group 130, the collimated light beam is projected onto a detection object, the light beam reflected by the detection object passes through the cemented lens group 130 and is converged by the cemented lens group 130 to the reflecting portion 122 of the semi-transparent mirror 120, at least a portion of the reflected light is reflected to the light detector 140 by the reflective film 124 (as shown in fig. 2) or the reflective film 126 (as shown in fig. 3 to 7) on the reflecting portion 122, the light detector 140 converts at least a portion of the reflected light into an electrical signal pulse, and the detection module 100 determines the receiving time of the light beam pulse by the rising edge time and/or the falling edge time of. In this way, the detection module 100 can determine the distance from the detection object to the detection device 1000 by calculating the flight time using the pulse reception time information and the pulse emission time information, and can also determine the direction of the detection object with respect to the detection device 1000 from the light pulse trains in different directions.
Referring to fig. 11 and 12, the scanning module 300 is disposed opposite to the detecting module 100 with a gap therebetween, such that the detecting module 100 and the scanning module 300 are independent from each other, and when the detecting device 1000 works, the scanning module 300 can move relative to the detecting module 100.
The scanning module 300 includes a moving optical element 310, a driving element 320, and a controller 330. The optical element 310 is used for changing the propagation direction of the light beam from the detection module 100 and then emitting the light beam. Wherein the optical element 310 can change the propagation path of the light beam by reflecting, refracting, diffracting, etc. the optical element 310 moving can reflect, refract, or diffract the light beam to different directions at different times. The Optical element 310 may be a lens, a mirror, a prism, a grating, an Optical Phased Array (Optical Phased Array), or any combination of the above Optical elements 310. The driving element 320 may drive the optical element 310 to rotate, vibrate, move cyclically along a predetermined track, or move back and forth along a predetermined track, which is not limited herein. The controller 330 may control rotation parameters, such as a rotation direction (i.e., a rotation direction), a rotation speed (i.e., a rotation speed), a rotation angle, a rotation duration, etc., of the optical element 310 driven by the driving element 320 to rotate. The following description will be given by way of example, in which the optical element 310 includes a prism. The prism is positioned on an emergent light path of the optical pulse sequence. The prism can change the transmission direction of the light beam passing through the prism when rotating.
The optical element 310 includes at least one light refracting element, and referring to fig. 11, the optical element 310 includes a first light refracting element 311 and a second light refracting element 312 disposed opposite to each other. The first and second light refracting elements 311 and 312 each include a pair of opposing non-parallel surfaces. Specifically, the first light refracting element 311 is formed with a first inclined surface 3111 and a first vertical surface 3112 which are opposite to each other. The first inclined surface 3111 is inclined with respect to the rotation axis 314, that is, the angle between the first inclined surface 3111 and the rotation axis 314 is not 0 degree or 90 degrees; first vertical plane 3112 is perpendicular to rotational axis 314, i.e., first vertical plane 3112 is at a 90 degree angle to rotational axis 314. The light pulse train passes through first vertical surface 3112 and first inclined surface 3111. Since the first inclined surface 3111 is not parallel to the first vertical surface 3112, the thickness of the first photorefractive element 311 is not uniform, that is, the thickness of the first photorefractive element 311 is not equal everywhere, and there are a position with a larger thickness and a position with a smaller thickness. In one example, the thickness of the first light refracting element 311 gradually increases in one direction. Similarly, the second light refracting element 312 is formed with a second inclined surface 3121 and a second vertical surface 3122, which are opposite. The second inclined surface 3121 is inclined with respect to the rotation axis 314, that is, the angle between the second inclined surface 3121 and the rotation axis 314 is not 0 degree or 90 degrees; the second vertical surface 3122 is perpendicular to the rotation axis 314, i.e., the angle between the second vertical surface 3122 and the rotation axis 314 is 90 degrees. The light pulse train passes through the second inclined surface 3121 and the second vertical surface 3122. Since the second inclined surface 3121 is not parallel to the second vertical surface 3122, the thickness of the second light refracting element 312 is not uniform, i.e., the thickness of the second light refracting element 312 is not equal everywhere, there are a position with a larger thickness and a position with a smaller thickness. In one example, the thickness of the second light refracting element 312 gradually increases in one direction.
Referring to fig. 12, in addition to the first light refracting element 311 and the second light refracting element 312, the optical element 310 may further include a third light refracting element 313 juxtaposed to the first light refracting element 311 and the second light refracting element 312. The third light refracting element 313 includes a pair of opposing non-parallel surfaces. Specifically, the third light refracting element 313 is formed with a third inclined face 3131 and a third vertical face 3132, which are opposite to each other. The third inclined surface 3131 is inclined with respect to the rotation axis 314, that is, the angle between the third inclined surface 3131 and the rotation axis 314 is not 0 degree or 90 degrees; the third vertical surface 3132 is perpendicular to the rotation axis 314, i.e. the included angle between the third vertical surface 3132 and the rotation axis 314 is 90 degrees. The light pulse train passes through the third inclined plane 3131 and the third vertical plane 3132. Since the third inclined plane 3131 is not parallel to the third vertical plane 3132, the thickness of the third light refractive element 313 is not uniform, i.e. the thickness of the third light refractive element 313 is not equal everywhere, there are a position with a larger thickness and a position with a smaller thickness. In one example, the thickness of the third light refracting element 313 gradually increases in one direction.
Further, when the optical element 310 includes the first light refracting element 311 and the second light refracting element 312, the first inclined surface 3111 may be non-parallel to the second inclined surface 3121, and the first vertical surface 3112 may be parallel to the second vertical surface 3122. The rotation axes 314 of the first and second light refracting elements 311 and 312 may be the same, and both the first and second light refracting elements 311 and 312 rotate around the same rotation axis 314; the axes of rotation 314 of the first and second light refracting elements 311, 312 may also be different, with the first and second light refracting elements 311, 312 rotating about different axes of rotation 314 (the respective axes of rotation 314).
When the optical element 310 includes the first light refracting element 311, the second light refracting element 312, and the third light refracting element 313, the first inclined surface 3111 may be non-parallel to the second inclined surface 3121, the second inclined surface 3121 may be parallel to the third inclined surface 3131, and the first vertical surface 3112, the second vertical surface 3122, and the third vertical surface 3132 may be parallel to each other. The rotation axes 314 of the first, second and third light refracting elements 311, 312 and 313 may be the same, and the first, second and third light refracting elements 311, 312 and 313 all rotate around the same rotation axis 314; the rotation axes 314 of the first light refracting element 311, the second light refracting element 312, and the third light refracting element 313 may also be different, and the first light refracting element 311, the second light refracting element 312, and the third light refracting element 313 rotate around different rotation axes 314 (respective rotation axes 314).
The first light refracting element 311, the second light refracting element 312, and the third light refracting element 313 may be wedge-angle prisms. The first, second and third photorefractive elements 311, 312, 313 can rotate at different speeds but in the same direction with respect to the corresponding rotation axis 314; the first, second and third photorefractive elements 311, 312, 313 may also be rotated in different directions but at the same speed with respect to the corresponding rotation axes 314; the first, second and third light refracting elements 311, 312, 313 may also be rotated at different speeds and in different directions relative to the corresponding rotational axes 314. For example, the first and second photorefractive elements 311, 312 are rotated forward relative to the rotational axis 314, and the third photorefractive element 313 is rotated backward relative to the rotational axis 314; for another example, the first photorefractive element 311 rotates with respect to the corresponding rotation axis 314 at a first speed, the second photorefractive element 312 rotates with respect to the corresponding rotation axis 314 at a second speed, and the third photorefractive element 313 rotates with respect to the corresponding rotation axis 314 at a third speed, and the first speed, the second speed, and the third speed may be all the same, all different, or some of the same or some of different. In one example, the rotation speed of the first and second photorefractive elements 311 and 312 may be determined according to the region and pattern desired to be scanned in the actual application.
The driving element 320 is used to drive the first, second and third light refracting elements 311, 312, 313 to rotate at different speeds and/or directions. Specifically, the driving element 320 may include a first driver 321, a second driver 322, and a third driver 323, the first driver 321 is used for driving the first light refracting element 311 to rotate around the rotation axis 314, the second driver 322 is used for driving the second light refracting element 312 to rotate around the rotation axis 314, and the third driver 323 is used for driving the third light refracting element 313 to rotate around the rotation axis 314. After the direction of the light pulse sequence is changed by one prism, the direction of the light pulse sequence can be changed again by another prism or another two prisms, so that the capability of changing the propagation direction of the light beam of the whole scanning module 300 is increased, a large space range can be scanned, and the light pulse sequence can scan a preset scanning shape by setting different rotating speeds and/or rotating directions. The first driver 321, the second driver 322, and the third driver 323 may all be motors or other drivers. It is understood that in other embodiments, the first photorefractive element 311, the second photorefractive element 312, and the third photorefractive element 313 may also be driven by a common one of the actuators.
The controller 330 is connected to the driving element 320, specifically, the controller 330 is connected to the first driver 321, the second driver 322, and the third driver 323 respectively, and the controller 330 is configured to control the first driver 321, the second driver 322, and the third driver 323 to drive the first light refracting element 311, the second light refracting element 312, and the third light refracting element 313 to rotate respectively according to the control instruction. Specifically, the controller 330 can control the rotation parameters (rotation direction, rotation speed, rotation angle, rotation duration, etc., the same applies hereinafter) of the first driver 321 for driving the first light refracting element 311 to rotate, control the rotation parameters of the second driver 322 for driving the second light refracting element 312 to rotate, and control the rotation parameters of the third driver 323 for driving the third light refracting element 313 to rotate.
In the description herein, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims (15)

1. The utility model provides a detect module, its characterized in that includes light source, semi-transparent half mirror, veneer lens group and light detector, the veneer lens group includes a plurality of lenses of laminating in proper order at least, the light beam of light source transmission passes through reach behind the transmission of semi-transparent half mirror the veneer lens group, again by on the collimating back outgoing to the target object of veneer lens group, by the light beam that the target object reflects back is by the veneer lens group assemble to the semi-transparent half mirror, again by the semi-transparent half mirror reflection extremely light detector.
2. The detection module according to claim 1, wherein the plurality of lenses of the cemented lens group are cemented by a cemented material, and a caliber range of the cemented lens group is greater than or equal to 45 mm.
3. The detection module according to claim 1 or 2, wherein the plurality of lenses comprises a positive lens and a negative lens, the positive lens comprises a first face and a second face opposite to each other, the negative lens comprises a third face and a fourth face opposite to each other, the light beam emitted by the light source sequentially passes through the first face, the second face, the third face and the fourth face, and the second face and the third face are glued by a gluing material.
4. The detection module of claim 3, wherein the positive lens is a biconvex lens and the negative lens is a meniscus lens.
5. The detection module of claim 3, wherein the refractive index of the positive lens is less than the refractive index of the negative lens.
6. The detection module according to claim 5, wherein the positive lens has a refractive index of 1.80-1.87, and the negative lens has a refractive index of 1.98-2.30.
7. The detection module of claim 3, wherein the positive lens has a central thickness of 10 ± 0.03mm to 15 ± 0.03mm, and the negative lens has a central thickness of 1.5 ± 0.03mm to 5 ± 0.03 mm.
8. The detection module of claim 3, wherein the curvature of the third face is the same as the curvature of the second face.
9. The detection module of claim 3, wherein the curvature of the first surface is 58mm to 62mm, the curvature of the second surface is 60mm to 64mm, and the curvature of the fourth surface is 950mm to 1150 mm.
10. The detection module according to claim 3, wherein at least one of the first surface, the second surface, the third surface, and the fourth surface is provided with an antireflection dielectric film, and the wavelength of light transmitted by the antireflection dielectric film is 880nm to 950 nm.
11. The detection module according to claim 2, wherein the adhesive material is a photosensitive adhesive having a refractive index greater than 1.6.
12. The detection module of claim 2, wherein the cemented lens group has an optical axis, the cemented lens group including a central region proximate the optical axis and an edge region distal from the optical axis, the edge region being provided with ink.
13. A probe apparatus, comprising:
a housing;
a scanning module; and
the detection module of any one of claims 1 to 12, wherein the detection module and the scanning module are respectively combined with the housing, the detection module is configured to emit a light beam to the scanning module, the scanning module is configured to change a transmission direction of the light beam and then emit the light beam, the light beam reflected by the target object passes through the scanning module and then enters the detection module, and the detection module is configured to determine a distance and/or a direction of the target object relative to the detection device according to the reflected light beam.
14. The detection apparatus according to claim 13, wherein the scanning module comprises a moving optical element for changing the propagation direction of the light beam from the detection module and then emitting the light beam.
15. The detection apparatus according to claim 14, wherein the scanning module further comprises a driving element for driving the optical element to move.
CN201921624414.6U 2019-09-26 2019-09-26 Detection module and detection device Expired - Fee Related CN211426786U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114023473A (en) * 2021-11-03 2022-02-08 哈尔滨工程大学 Measuring device based on meniscus compensation method
CN115825916A (en) * 2021-12-03 2023-03-21 深圳市速腾聚创科技有限公司 Optical receiving device and optical sensing device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114023473A (en) * 2021-11-03 2022-02-08 哈尔滨工程大学 Measuring device based on meniscus compensation method
CN114023473B (en) * 2021-11-03 2024-06-11 哈尔滨工程大学 Measuring device based on meniscus compensation method
CN115825916A (en) * 2021-12-03 2023-03-21 深圳市速腾聚创科技有限公司 Optical receiving device and optical sensing device
CN115825916B (en) * 2021-12-03 2024-02-06 深圳市速腾聚创科技有限公司 Optical receiving device and optical sensing device

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