CN211147908U - Wide-range piezoelectric film three-dimensional force sensor - Google Patents
Wide-range piezoelectric film three-dimensional force sensor Download PDFInfo
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- CN211147908U CN211147908U CN201922427309.XU CN201922427309U CN211147908U CN 211147908 U CN211147908 U CN 211147908U CN 201922427309 U CN201922427309 U CN 201922427309U CN 211147908 U CN211147908 U CN 211147908U
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Abstract
The utility model discloses a three-dimensional force transducer of wide range piezoelectric film belongs to sensor and observes and controls technical field. The structure includes screw, piezoelectric film group, upper cover, casing. When the sensor upper cover is subjected to space force (F x 、F y 、F z ) When acting, the upper laminated piezoelectric film in the piezoelectric film group is directly measuredF z The piezoelectric film of the middle layer (lower layer) is loaded by bending moment acting on the piezoelectric film groupM y （M x ) Converted to act on the upper cover of the sensorF y （F x ) A second electrode sheet (fourth electrode sheet) and a third electrode sheet (fifth electrode sheet)Electrode plate) outputs charges with equal size and opposite directions, the charges are converted into voltage through charge amplification, D/A conversion and data acquisition and analysis, and then indirect measurement is carried outF y （F x ) (ii) a The utility model discloses can realize the measurement to transient, strong impact, high dynamic response and the three-dimensional power of wide range.
Description
Technical Field
The utility model belongs to the technical field of sensor and observing and controlling, a three-dimensional force transducer of wide range piezoelectric film that space wide range load dynamic measurement that in particular to transition, strong impact and high dynamic response characteristic required used.
Background
The cold heading machine tool is high-efficiency and automatic forging and pressing equipment and can continuously produce standard parts such as steel balls, bolts, nuts, pins, rollers and the like. A large number of simulation analysis and experimental data show that the steel ball can instantly bear heavy load and strong impact load during cold heading forming, the cold heading force of the steel ball with the diameter phi of 7.938mm can reach 110kN, the cold heading force of the steel ball with the diameter phi of 19.75mm can reach 640kN, the stress of a blank is changed in real time in the whole rolling process, and the stress condition of the blank is changed into a multidirectional pressure stress state from a starting unidirectional pressure state. The lack of detection capability becomes a bottleneck restricting the development of the steel ball blank making industry in China, the most urgent and most needed problem of the steel ball manufacturing industry in China is to apply an online detection technology to a steel ball production line, develop a novel detection instrument and provide a scientific detection means, so that online measurement becomes a main measurement means.
Chinese patent 200710011275 discloses a micro-force loading device for a piezoelectric film cantilever beam type micro-force sensor, which is suitable for static and quasi-static tests and calibration of the piezoelectric film cantilever beam type micro-force sensor. Chinese patent 201510810324.6 discloses a piezoelectric flexible three-dimensional tactile sensor array and a method for manufacturing the same, wherein the tactile sensor array is composed of a PDMS surface bump layer, an upper electrode layer, a PVDF piezoelectric film layer, a lower electrode layer, and a PDMS flexible substrate layer in sequence from top to bottom. The problem that the existing rigid touch sensing array is difficult to load on the surfaces of artificial fingers, robot fingers and body curved surfaces is solved, but the measurement range is small, and the preparation is complex. Chinese patent 201110410811.5 discloses a piezoelectric film force sensor and chinese patent 201320151877.1 discloses a PVDF piezoelectric film force sensor for dynamic measurement of impact force, which all use a single piezoelectric film to measure a wide range impact load, in particular to a cold forging press device such as: the piezoelectric film force sensor of the steel ball cold forging machine can be used for measuring space wide-range impact load, and has a good effect. The above patent is deficient in that only one-way impact load can be measured. At present, no application report of a large-range three-dimensional force sensor for dynamically measuring the impact force is available.
In order to solve the problems of transient, strong impact and high dynamic response characteristics of the sensor, a novel structural form wide-range piezoelectric film three-dimensional force sensor needs to be researched.
Disclosure of Invention
The utility model aims to overcome above-mentioned piezoelectric film force transducer's defect, provide a technical performance is good, easily installation and maintenance, and sensitivity that the facilitate promotion used is high, wide range, dynamic behavior are good, can realize that the equipment process is succinctly changed, and the piezoelectric film three-dimensional force transducer that the reliability is high. Transient, strong impact and high dynamic response are realized through combined measurement of a plurality of groups of piezoelectric films.
The utility model provides a technical scheme that its technical problem adopted is: a wide-range piezoelectric film three-dimensional force sensor is characterized by structurally comprising a screw 1, a piezoelectric film group 2, an upper cover 3 and a shell 4; the piezoelectric film group 2 consists of an insulating film 5, a piezoelectric film 6, a grounding electrode plate 7, a first electrode plate 8, a second electrode plate 9, a third electrode plate 10, a fourth electrode plate 11 and a fifth electrode plate 12; the piezoelectric film 6 is divided into three layers including an uppermost piezoelectric film, a middle piezoelectric film and a lowermost piezoelectric film; the grounding electrode plate 7 and the first electrode plate 8 of the uppermost piezoelectric film of the piezoelectric film 6 are complete, the grounding electrode plate 7 of the middle piezoelectric film is complete, the second electrode plate 9 and the third electrode plate 10 are symmetrically distributed along the Y direction, the grounding electrode plate 7 of the lowermost piezoelectric film is complete, the fourth electrode plate 11 and the fifth electrode plate 12 are symmetrically distributed along the X direction, the second electrode plate 9 is vertical to the fourth electrode plate 11, the third electrode plate 10 is vertical to the fifth electrode plate 12, and the insulating film 5 is slightly larger than the piezoelectric film 6 and plays an insulating protection role; the left side and the right side of the shell 4 are provided with wire holes 15 for wires to pass through, the wire holes 15 are through holes for the wires to pass through, a first groove 16 is arranged in contact with the wire holes 15, a circular boss 17 is arranged in the middle of the shell 4 and used for placing a piezoelectric film set, the lower surface 14 of the piezoelectric film set is in contact with the boss 17, a first through hole 18 for a jacking rod to pass through is arranged in the middle of the boss 17, a second through hole 19 is arranged above the shell 4 and used for fixing the shell 4, a first load distribution surface 20 of the shell 4 is in contact with the lower surface 26 of an upper cover, a second load distribution surface 21 of the shell 4 is in contact with a third load distribution surface 28 of the upper cover, the upper surface 13 of the piezoelectric film set is in contact with the third load distribution surface 28 of the upper cover, and 4 stepped holes 25; a third through hole 27 is formed in the center of the upper cover 3 for the ejector rod to pass through, threaded holes 29 are formed in the periphery of the upper cover 3, and the second groove 23 is in contact with the side face of the upper cover 3; the screw 1 penetrates through the stepped hole 25 and the threaded hole 29 to install the upper cover 3, the piezoelectric thin film group 2 and the shell 4 together, the screw 1 is used for adjusting the pre-tightening force of the piezoelectric thin film group 2, and the screw 1 cannot be higher than the lower surface 24 of the shell and the upper surface 30 of the upper cover; a wide-range piezoelectric film three-dimensional force sensor can realize measurement of transient, strong impact, high dynamic response and wide-range three-dimensional force.
Compared with the prior art, the utility model discloses an advantage is with positive effect:
the utility model discloses a wide range piezoelectric film three-dimensional force transducer adopts upper cover and casing support formula elastomer structural style, has the characteristics of wide range, high linearity, high natural frequency, high sensitivity, high rigidity, because simple structure, so the cost of this sensor greatly reduces, it has higher power-electricity conversion efficiency;
2 the utility model discloses a wide range piezoelectric film three-dimensional force transducer passes through the piezoelectric film group, can dynamically measure three-dimensional transient, wide range, strong impact load's size and direction, has simple structure, rigidity good, the manufacturability good, easily make, convenient operation, sensitivity is high, easily advantage promoted;
3 the utility model discloses a wide range piezoelectric film three-dimensional force transducer can be used to forging machinery, high-speed mechanical press, punch press, jump bit, pile driver etc. heavy load strong impact equipment transient range shock load dynamic measurement, also can regard as other on-line monitoring device or adaptive control system feedback element, the usage is extensive;
the utility model discloses a three-dimensional force transducer measuring principle of wide range piezoelectric film is through solving one-way load to moment of flexure load reversal, belongs to indirect measurement method, and measuring result is more accurate.
Drawings
Fig. 1 is an overall assembly view of the preferred embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a piezoelectric thin film module according to a preferred embodiment of the present invention.
Fig. 3 is a side view of the housing according to the preferred embodiment of the present invention.
Fig. 4 is a side view of the upper cover shaft according to the preferred embodiment of the present invention.
Fig. 5 is a measurement schematic diagram of the preferred embodiment of the present invention.
In the figure: the novel piezoelectric film module comprises a screw 1, a piezoelectric film module 2, an upper cover 3, a shell 4, an insulating film 5, a piezoelectric film 6, a grounding electrode plate 7, a first electrode plate 8, a second electrode plate 9, a third electrode plate 10, a fourth electrode plate 11, a fifth electrode plate 12, a piezoelectric film module upper surface 13, a piezoelectric film module lower surface 14, a wire hole 15, a first groove 16, a boss 17, a first through hole 18, a second through hole 19, a first loading surface 20, a second loading surface 21, a shell upper surface 22, a second groove 23, a shell lower surface 24, a stepped hole 25, an upper cover lower surface 26, a third through hole 27, a third loading surface 28, a threaded hole 29 and an upper cover upper surface 30.
Detailed Description
The invention will be described in further detail with reference to the drawings and preferred embodiments.
As shown in fig. 1 to 5, the structure comprises a screw 1, a piezoelectric film group 2, an upper cover 3 and a shell 4. The piezoelectric film group 2 is composed of an insulating film 5, a piezoelectric film 6, a grounding electrode plate 7, a first electrode plate 8, a second electrode plate 9, a third electrode plate 10, a fourth electrode plate 11 and a fifth electrode plate 12. The piezoelectric film 6 is divided into three layers including an uppermost piezoelectric film, a middle piezoelectric film and a lowermost piezoelectric film.
The grounding electrode plate 7 and the first electrode plate 8 of the uppermost piezoelectric film of the piezoelectric film 6 are complete, the grounding electrode plate 7 of the middle piezoelectric film is complete, the second electrode plate 9 and the third electrode plate 10 are symmetrically distributed along the Y direction, the grounding electrode plate 7 of the lowest piezoelectric film is complete, the fourth electrode plate 11 and the fifth electrode plate 12 are symmetrically distributed along the X direction, the second electrode plate 9 is perpendicular to the fourth electrode plate 11, the third electrode plate 10 is perpendicular to the fifth electrode plate 12, and the insulating film 5 is slightly larger than the piezoelectric film 6 and plays an insulating protection role.
The utility model discloses a support shell 4, including casing 4, wire guide 15, lead hole 15, first recess 16, supply the wire to pass through, circular boss 17 has been arranged in the middle of the casing 4, be used for placing piezoelectric film group, piezoelectric film group lower surface 14 and boss 17 contact, be the first through-hole 18 that supplies the ejector beam to pass through in the middle of the boss 17, second through-hole 19 above the casing 4, be used for fixed casing 4, casing 4's first load-sharing face 20 and upper cover lower surface 26 contact, casing 4's second load-sharing face 21 and the third load-sharing face 28 contact of upper cover, piezoelectric film group upper surface 13 and the third load-sharing face 28 contact of upper cover, 4 shoulder holes 25 have evenly been arranged to casing lower surface 24, for set screw 1.
The center of the upper cover 3 is provided with a third through hole 27 for the ejector rod to pass through, threaded holes 29 are arranged around the third through hole, and the second groove 23 is in contact with the side surface of the upper cover 3.
The screw 1 penetrates through the stepped hole 25 and the threaded hole 29 to install the upper cover 3, the piezoelectric thin film group 2 and the shell 4 together, the screw 1 is used for adjusting the pre-tightening force of the piezoelectric thin film group 2, and the screw 1 cannot be higher than the lower surface 24 of the shell and the upper surface 30 of the upper cover; a wide-range piezoelectric film three-dimensional force sensor is used for measuring wide-range transient strong impact load.
The working principle of the utility model is: when the sensor upper cover 3 is subjected to space forceF x 、F y 、F z When acting, the pulling and pressing effect of the piezoelectric film group 2 outputs the acting force in the form of corresponding electric charge quantity through the lead, wherein the upper laminated piezoelectric film 6 in the piezoelectric film group 2 directly measuresF z The piezoelectric film 6 of the middle layer is formed by loading bending moment acting on the piezoelectric film group 2M y Converted to act on the sensor cover 3F y The second electrode plate 9 and the third electrode plate 10 output charges with equal size and opposite directions, and the charges are converted into voltage through charge amplification, D/A conversion and data acquisition and analysis, so that indirect measurement is performedF y The piezoelectric film 6 of the lower layer is loaded by bending moment acting on the piezoelectric film group 2M x Converted to act on the sensor cover 3F x The fourth electrode plate 11 and the fifth electrode plate 12 output charges with equal size and opposite directions, and the charges are converted into voltage through charge amplification, D/A conversion and data acquisition and analysis, so that indirect measurement is performedF x . The upper laminated film 6 has 2 output pins, the grounding electrode plate 7 is specified to be grounded, and the first electrode plate 8 outputs charge signals for measurementF z The middle-layer piezoelectric film 6 has 3 output pins, the grounding electrode plate 7 is specified to be grounded, and the second electrode plate 9 and the third electrode plate 10 output charge signals for measuringF y The lower piezoelectric film 6 has 3 output pins, the grounding electrode plate 7 is specified to be grounded, and the fourth electrode plate 11 and the fifth electrode plate 12 output charge signals for measurementF x 。
The pins of the grounding electrode plate 7 are combined into 1 wire for grounding treatment, the pins of the grounding electrode plate 7 and the pins of the first electrode plate 8 and the fifth electrode plate 12 are positioned at the same side of the sensor, 3 wires are output from wire holes 15 at the same side, and the pins of the second electrode plate 9, the third electrode plate 10 and the fourth electrode plate 11 are output from wire holes 15 at the other side.
The first electrode sheet 8 outputs the electric charge quantity ofQ 1The second electrode plate 9 outputs an electric charge ofQ 2The third electrode sheet 10 outputs the charge quantity ofQ 3The fourth electrode sheet 11 outputs an electric charge ofQ 4The amount of charge output from the fifth electrode plate 12 isQ 5Then the sensor is realizedF x 、F y 、F z The specific method of three-dimensional force measurement is as follows:
whereind 33In the formula of the piezoelectric constant, the piezoelectric constant is,rthe distance from the center of the piezoelectric thin film group 2 to the center of the boss 17,hthe vertical distance from the upper cover surface 30 to the lower surface 14 of the piezoelectric thin film stack.
The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above description is only the embodiments of the present invention, and is not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (1)
1. A wide-range piezoelectric film three-dimensional force sensor can realize measurement of transient, strong impact, high dynamic response and wide-range three-dimensional force, and is characterized in that the structure comprises a screw (1), a piezoelectric film group (2), an upper cover (3) and a shell (4); the piezoelectric film group (2) consists of an insulating film (5), a piezoelectric film (6), a grounding electrode plate (7), a first electrode plate (8), a second electrode plate (9), a third electrode plate (10), a fourth electrode plate (11) and a fifth electrode plate (12); the piezoelectric film (6) is divided into three layers, including an uppermost piezoelectric film, a middle piezoelectric film and a lowermost piezoelectric film; the grounding electrode plate (7) and the first electrode plate (8) of the uppermost piezoelectric film of the piezoelectric films (6) are complete, the grounding electrode plate (7) of the middle piezoelectric film is complete, the second electrode plate (9) and the third electrode plate (10) are symmetrically distributed along the Y direction, the grounding electrode plate (7) of the lowermost piezoelectric film is complete, the fourth electrode plate (11) and the fifth electrode plate (12) are symmetrically distributed along the X direction, the second electrode plate (9) is vertical to the fourth electrode plate (11), the third electrode plate (10) is vertical to the fifth electrode plate (12), the insulating film (5) is slightly larger than the piezoelectric films (6) and plays a role in insulation protection; the lead hole (15) for a lead to pass through is formed in the left side and the right side of the shell (4), the lead hole (15) is a through hole for the lead to pass through, a first groove (16) is arranged in contact with the lead hole (15), a circular boss (17) is arranged in the middle of the shell (4) and used for placing a piezoelectric film group, the lower surface (14) of the piezoelectric film group is in contact with the boss (17), a first through hole (18) for an ejector rod to pass through is arranged in the middle of the boss (17), a second through hole (19) is arranged above the shell (4) and used for fixing the shell (4), a first load distribution surface (20) of the shell (4) is in contact with the lower surface (26) of the upper cover, a second load distribution surface (21) of the shell (4) is in contact with a third load distribution surface (28) of the upper cover, the upper surface (13) of the piezoelectric film group is in contact with the third load distribution surface (28) of the upper cover, for fixing the screw (1); a third through hole (27) is formed in the center of the upper cover (3) and used for the ejector rod to pass through, threaded holes (29) are formed in the periphery of the upper cover, and the second groove (23) is in contact with the side face of the upper cover (3); the screw (1) penetrates through the stepped hole (25) and the threaded hole (29) to install the upper cover (3), the piezoelectric thin film group (2) and the shell (4) together, the screw (1) is used for adjusting the pre-tightening force of the piezoelectric thin film group (2), and the screw (1) cannot be higher than the lower surface (24) of the shell and the upper surface (30) of the upper cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201922427309.XU CN211147908U (en) | 2019-12-30 | 2019-12-30 | Wide-range piezoelectric film three-dimensional force sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922427309.XU CN211147908U (en) | 2019-12-30 | 2019-12-30 | Wide-range piezoelectric film three-dimensional force sensor |
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| CN211147908U true CN211147908U (en) | 2020-07-31 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110887587A (en) * | 2019-12-30 | 2020-03-17 | 济南大学 | Wide-range piezoelectric film three-dimensional force sensor and measuring method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110887587A (en) * | 2019-12-30 | 2020-03-17 | 济南大学 | Wide-range piezoelectric film three-dimensional force sensor and measuring method thereof |
| CN110887587B (en) * | 2019-12-30 | 2024-05-14 | 济南大学 | Large-range piezoelectric film three-dimensional force sensor and measuring method thereof |
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