CN211005716U - Stove with heating function - Google Patents

Stove with heating function Download PDF

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Publication number
CN211005716U
CN211005716U CN201922190459.3U CN201922190459U CN211005716U CN 211005716 U CN211005716 U CN 211005716U CN 201922190459 U CN201922190459 U CN 201922190459U CN 211005716 U CN211005716 U CN 211005716U
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China
Prior art keywords
graphite
heater
electrode
furnace
rod
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CN201922190459.3U
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Chinese (zh)
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张春伟
汪勋
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Jiangsu Gcl Special Material Technology Co ltd
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Jiangsu Gcl Special Material Technology Co ltd
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Abstract

The utility model discloses a furnace with heating function, the bottom of the furnace is fixedly connected with a copper electrode, and the furnace also comprises a graphite electrode and a graphite rod; wherein the bottom of the graphite electrode is fixedly connected with the copper electrode; the top of the graphite electrode is connected with the bottom of the graphite rod in an embedded manner; the top of the graphite rod is fixedly connected with the heater. Compared with the prior art, the utility model has the advantages of as follows: (1) during installation, the cylindrical heater is lifted, the inner cone of the graphite rod connected to the heater is gradually sleeved on the outer cone of the graphite electrode fixed on the copper electrode, the upper edge of the heater is lightly knocked by a rubber hammer, the graphite rod and the graphite electrode are connected more closely, and the installation of the heater is finished. (2) When in maintenance, the heater can be taken out only by directly lifting the cylindrical heater, which is very convenient; after the heater is taken out, the cooling speed of the heater can be accelerated, and the overhauling efficiency is improved.

Description

Stove with heating function
Technical Field
The utility model belongs to the technical field of czochralski silicon single crystal thermal field, in particular to a furnace with heating function.
Background
In crystal pulling production, in order to improve production efficiency, regular loading and unloading and inspection of heaters are one of the essential steps, the diameter and height of a side barrel type heater are gradually increased along with the increase of the charging amount, and a heater bottom is usually connected with a graphite electrode fixed on a copper electrode in a furnace barrel at the bottom so as to stably fix the heater and transmit current through the graphite electrode. At present, the conventional connection mode of the graphite electrode and the heater is bolt connection. However, the height of the cylindrical heater is increased, so that workers have to drill into the furnace cylinder to disassemble and assemble the bolts, which is very inconvenient. In addition, because the cooling time of the heater is long, if the heater enters the furnace for disassembly after being completely cooled, a large amount of waiting time is wasted, and the production efficiency is reduced; if the heater gets into in a trade when the temperature is higher, then easily cause personnel scald accident at the dismantlement bolt in-process. Therefore, it is urgently needed to develop a convenient and fast connection mode.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: the utility model aims to solve the technical problem that the prior art is not enough, a stove with heating function is provided.
In order to solve the technical problem, the utility model discloses a furnace with heating function, the inside of the furnace is provided with a heater 4, the bottom of the furnace is fixedly connected with a copper electrode 3, and the furnace also comprises a graphite electrode 1 and a graphite rod 2; wherein, the bottom of the graphite electrode 1 is fixedly connected with the copper electrode 3; the top of the graphite electrode 1 is connected with the bottom of the graphite rod 2 in an embedded manner; the top of the graphite rod 2 is fixedly connected with a heater 4.
Wherein the bottom of the graphite electrode 1 is in threaded connection with the copper electrode 3; the bottom of the graphite electrode 1 is provided with a threaded hole with an internal thread; the copper electrode 3 is provided with a thread matched with the threaded hole.
The top of the graphite electrode 1 is conical, and the bottom of the graphite rod 2 is a taper hole matched with the conical taper.
When the cone is a convex cone, the taper hole is a concave taper hole matched with the taper of the convex cone; when the cone is a concave cone, the taper hole is a convex taper hole matched with the taper of the concave cone.
Preferably, the diameter of the top of the outer cone of the graphite electrode 1 is larger than that of the bottom of the inner cone of the graphite rod 2; if the diameters of the two are the same, the fit of the conical surface is affected.
Wherein, the graphite rod 2 can be formed by fixedly connecting a graphite connecting rod 2-1 and a graphite screw rod 2-2; wherein the fixed connection is a threaded connection; the top of the graphite connecting rod 2-1 is provided with a threaded hole, the side of the graphite screw rod 2-2 is provided with a thread matched with the threaded hole, and the bottom of the graphite screw rod 2-2 is in threaded connection with the graphite connecting rod 2-1 through the thread; the upper part of the graphite screw rod 2-2 is in threaded connection with the heater 4 through the thread.
Wherein the top of the graphite rod 2 is in threaded connection with a heater 4; the heater 4 is provided with a threaded hole, and the top of the graphite rod 2 is provided with a thread matched with the threaded hole.
The heater 4 is a cylindrical heater, which is a main heating component in the furnace and is resistance heating, and various dusts and other impurities are adhered to the surface of the heater at high temperature, so that the heating effect is affected, and the heater needs to be cleaned regularly.
Wherein, the side of the graphite electrode 1 is provided with two or more than two grooves 5; wherein, four concave grooves which are evenly distributed are preferred (figure 4); wherein, the utility model discloses length, width and the degree of depth to the depressed groove do not have specific requirement, and it is mainly because the stove bottom is darker in order to solve, and the workman stands and directly goes dismouting graphite electrode with the hand outside the stove section of thick bamboo, consequently, is equipped with the depressed groove at the lateral part of graphite electrode, through the frock with its looks adaptation, inserts it in the depressed groove, can the direct rotation installation or dismantle graphite electrode for graphite electrode fixes on copper electrode with threaded connection, or the screw thread is rotatory to be dismantled from copper electrode.
Wherein, the side of the graphite electrode 1 is provided with an exhaust hole 6, and the exhaust hole 6 is communicated with the bottom of the graphite electrode 1 through a threaded hole; the lower thread of the graphite electrode 1 is fixedly connected with the copper electrode, so that a closed space is formed, and air in the space is expanded by heating and needs to be exhausted through the exhaust hole.
Wherein, it also comprises graphite paper 7; among them, graphite paper is required to have good flexibility and conductivity, and its conductivity is similar to that of graphite.
Wherein, the graphite paper 7 is arranged at the joint of the graphite electrode 1 and the graphite rod 2 or/and the joint of the graphite rod 2 and the heater 4. When in use, the graphite paper is rolled into a cone shape and is placed between the graphite electrode 1 and the graphite rod 2, so that the graphite electrode 1 and the graphite rod 2 are ensured to be tightly connected and have good conductivity; or/and the graphite rod 2 and the heater 4 are/is padded between the graphite rod 2 and the heater 4, so that the graphite rod 2 and the heater 4 are tightly connected, and the electric conductivity is good.
The application of the device in the thermal field of the single crystal furnace is also within the protection scope of the utility model.
During installation, the graphite rod is connected with the heater in a threaded manner in advance, the graphite electrode is connected to a copper electrode fixed at the bottom of the furnace in a threaded manner by using a tool matched with the concave groove arranged on the side part of the graphite electrode, then the installed heater is fixed on an outer cone of the graphite electrode through an inner cone of the graphite rod, the upper edge of the heater is lightly knocked by using a rubber hammer, so that the connection between the graphite rod and the graphite electrode is tighter, and the installation of the heater is finished; graphite paper may be added if desired. And, because the taper connection, the heater can not move from front to back and left to right, and the heater is above, because of self gravity, can accomplish close connection.
When the maintenance is needed, after the cylindrical heater is lifted up through a special tool, the graphite rod can be lifted out of the furnace along with the heater because the graphite rod and the heater are connected together through threads, and only the graphite electrode and the copper electrode are fixed in the furnace; when the temperature of the heater is reduced to a certain degree, the heater is overhauled. If necessary, the graphite electrode can be disassembled from the copper electrode at the bottom of the furnace through the screw thread rotation of the graphite electrode by the tool matched with the concave groove arranged at the side part of the graphite electrode.
Has the advantages that: compared with the prior art, the utility model has the advantages of as follows:
(1) during installation, the cylindrical heater is lifted, the inner cone of the graphite rod connected to the heater is gradually sleeved on the outer cone of the graphite electrode fixed on the copper electrode, the upper edge of the heater is lightly knocked by a rubber hammer, the graphite rod and the graphite electrode are connected more closely, and the installation of the heater is finished.
(2) When in maintenance, the heater can be taken out only by directly lifting the cylindrical heater, which is very convenient; compare in present mode through the bolt fastening heater, save time and laborsaving, simultaneously, take out the back with the heater, it can accelerate the refrigerated speed of heater, improves the efficiency of overhauing.
(3) The graphite paper is adopted to ensure the connection stability of the heater and the copper electrode.
Drawings
Fig. 1 is a cross-sectional view of a furnace containing a heater.
Fig. 2 is a sectional view of a cartridge type heater.
Fig. 3 is a partially enlarged view of a portion of the ring B in fig. 2.
Fig. 4 is a top view of a graphite electrode.
Detailed Description
The invention will be better understood from the following examples. However, those skilled in the art will readily appreciate that the description of the embodiments is only for illustrating the present invention and should not be taken as limiting the invention as detailed in the claims.
Fig. 1 shows a furnace with heating function, fig. 2 is a specific structure diagram of the furnace, the height of the furnace cylinder 8 is 1600mm, the bottom of the furnace is fixedly connected with a copper electrode 3, a cylinder type heater is contained in the furnace, the height of the cylinder type heater is 700mm, the cylinder type heater is a main heating part of a thermal field of a single crystal furnace, the lower part of the furnace is provided with four supporting legs, and the four supporting legs are connected with the graphite electrode through graphite connecting rods as shown in fig. 2, fig. 3 and fig. 4, and finally connected with the copper electrode, and comprise a graphite electrode 1, a graphite connecting rod 2-1, a graphite screw 2-2 and graphite paper 7. The bottom of the graphite electrode 1 is provided with a threaded hole, the side part of the graphite electrode 1 is provided with an exhaust hole 6, the exhaust hole 6 is connected with the threaded hole at the bottom of the graphite electrode 1, the top of the graphite electrode 1 is in a convex conical shape, and the side part of the graphite electrode 1 is provided with four concave grooves which are uniformly distributed; the bottom of the graphite connecting rod 2-1 is in a concave cone shape matched with the conical degree of the convex cone shape, the diameter of the top of the graphite electrode 1 is larger than that of the bottom of the graphite connecting rod 2-1, and the top of the graphite connecting rod 2-1 is provided with an internal threaded hole; the side part of the graphite rod 2-2 is provided with a thread.
During specific installation, the graphite connecting rod 2-1 is in threaded connection with the bottom of the graphite screw rod 2-2, the top of the graphite screw rod 2-2 is in threaded connection with the bottom supporting leg of the cylindrical heater, and graphite paper 7 matched with the top of the graphite screw rod 2-2 is placed between the graphite connecting rod and the cylindrical heater and used for ensuring that two graphite pieces are tightly connected and have a good conductive effect. The graphite electrode 1 is screwed and fastened to a copper electrode 3 fixed to the bottom of the furnace using a tool (four cylinders are provided on the tool and inserted into four grooves) fitted into a recessed groove provided on the side of the graphite electrode 1. And (3) manufacturing conical graphite paper, and embedding the graphite paper into the graphite connecting rod 2-1 to ensure that the graphite paper and the inner cone of the connecting rod are tightly attached. Lifting the cylindrical heater, slowly putting the heater 4 into the furnace, gradually sleeving the inner cone of the graphite connecting rod 2-1 connected to the heater 4 on the outer cone of the graphite electrode 1 fixed on the copper electrode 3, lightly knocking the upper edge of the heater by a rubber hammer to enable the graphite connecting rod 2-1 and the graphite electrode 1 to be connected more tightly, and finishing the installation of the heater.
In a working state, the temperature of the furnace is 1500 ℃, when maintenance is needed, the furnace cover is opened, after the cylindrical heater 4 is lifted up through a special tool, the graphite connecting rod 2-1, the graphite screw rod 2-2 and the heater 4 are connected together through threads, so that the graphite connecting rod 2-1 and the graphite screw rod 2-2 can be lifted out of the furnace along with the heater 4, and only the graphite electrode 1 and the copper electrode 3 are fixed in the furnace; after the temperature of the taken-out heater is reduced to room temperature, overhauling is carried out; if necessary, the graphite electrode 1 can be disassembled from the copper electrode at the bottom of the furnace by rotating the threads through a tool matched with the concave groove arranged at the side part of the graphite electrode.
The utility model provides a thought and method of stove with heating function, the method and the way that realize this technical scheme are many specifically, it is above only the utility model discloses a preferred embodiment, it should point out, to the ordinary technical personnel in this technical field, not deviating from the utility model discloses under the prerequisite of principle, can also make a plurality of improvements and moist decorations, these improvements should also regard as with moist decorations the utility model discloses a protection scope. All the components not specified in the present embodiment can be realized by the prior art.

Claims (10)

1. A furnace with a heating function is provided with a heater (4) inside, and the bottom of the furnace is fixedly connected with a copper electrode (3), and is characterized by further comprising a graphite electrode (1) and a graphite rod (2);
wherein the bottom of the graphite electrode (1) is fixedly connected with the copper electrode (3); the top of the graphite electrode (1) is connected with the bottom of the graphite rod (2) in an embedded manner; the top of the graphite rod (2) is fixedly connected with the heater (4).
2. Furnace with heating function according to claim 1, characterized in that the bottom of the graphite electrode (1) is screwed with the copper electrode (3).
3. Furnace with heating function according to claim 2, characterized in that the bottom of the graphite electrode (1) is provided with a threaded hole and the copper electrode (3) is provided with a thread adapted to the threaded hole.
4. The furnace with heating function as claimed in claim 1, wherein the top of the graphite electrode (1) is conical, and the bottom of the graphite rod (2) is a conical hole matched with the conical degree.
5. A furnace with heating function according to claim 1, characterized in that the top of the graphite rod (2) is screwed with the heater (4).
6. A furnace with heating function as claimed in claim 5, characterized in that the heater (4) is provided with a threaded hole, and the top of the graphite rod (2) is provided with a thread matched with the threaded hole.
7. Furnace with heating function according to claim 1, characterized in that the side of the graphite electrode (1) is provided with two or more grooves (5).
8. The furnace with the heating function as recited in claim 1, wherein the side of the graphite electrode (1) is provided with an exhaust hole (6), and the exhaust hole (6) is communicated with a threaded hole formed in the bottom of the graphite electrode (1).
9. Oven with heating function according to claim 1, characterized in that it further comprises graphite paper (7).
10. Furnace with heating function according to claim 9, characterized in that the graphite paper (7) is placed at the junction of the graphite electrode (1) and the graphite rod (2) or/and at the junction of the graphite rod (2) and the heater (4).
CN201922190459.3U 2019-12-10 2019-12-10 Stove with heating function Active CN211005716U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922190459.3U CN211005716U (en) 2019-12-10 2019-12-10 Stove with heating function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922190459.3U CN211005716U (en) 2019-12-10 2019-12-10 Stove with heating function

Publications (1)

Publication Number Publication Date
CN211005716U true CN211005716U (en) 2020-07-14

Family

ID=71500628

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922190459.3U Active CN211005716U (en) 2019-12-10 2019-12-10 Stove with heating function

Country Status (1)

Country Link
CN (1) CN211005716U (en)

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