CN211005605U - Visual structure for observing rotating cathode end - Google Patents
Visual structure for observing rotating cathode end Download PDFInfo
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- CN211005605U CN211005605U CN201921987809.2U CN201921987809U CN211005605U CN 211005605 U CN211005605 U CN 211005605U CN 201921987809 U CN201921987809 U CN 201921987809U CN 211005605 U CN211005605 U CN 211005605U
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- glass
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- rotating cathode
- end cover
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Abstract
The utility model discloses a visual structure for observing rotatory cathode end relates to coating equipment technical field, the primary structure is including setting up the observation window on water and electricity end cover board, be provided with toughened doubling glass on the observation window, it explodes in order to prevent the toughened glass collision to set up the protection pad around the toughened doubling glass, and set up splint in water and electricity end cover inboard, be fixed in between water and electricity end cover board and the splint with toughened doubling glass through the bolt, when being convenient for observe the water and electricity end condition of leaking, can also make toughened doubling glass simple to operate, and the outward appearance is brief generous.
Description
Technical Field
The utility model relates to a coating equipment technical field especially relates to a visual structure for surveing rotatory cathode end.
Background
The rotating cathode is widely applied in L ow-e film coating industry due to high utilization rate, high sputtering efficiency and stable power, but the rotating end is expensive and complicated to maintain, so the using state of the rotating end needs to be particularly noticed in daily use, and the existing cavity cover needs to consider the safety problem, the water and electricity end with the end exposed outside is completely sealed or is not sealed and protected.
Disclosure of Invention
In order to solve the technical problem, the utility model provides a visual structure for observing rotatory cathode end, the convenience is promptly observed the water and electricity end, does not have the potential safety hazard again.
In order to achieve the above object, the utility model provides a following scheme:
the utility model provides a visual structure for observing rotatory cathode end, including setting up the observation window on water and electricity end cover plate, be provided with glass on the observation window.
Optionally, the observation window inboard is provided with the splint, glass set up in the splint with between the water and electricity end cover board.
Optionally, the splint for set up in the board type spare at both ends about the observation window is inboard, board type spare one end with water electricity end cover fixed connection.
Optionally, the water and electricity end cover board with the corresponding through-hole that is provided with on the plate type spare, through to set up the bolt in the through-hole, will glass card extremely be in water and electricity end cover board with between the plate type spare.
Optionally, protective pads are arranged around two sides of the glass.
Optionally, the protective pad is a rubber pad.
Optionally, the observation window is arranged above the ventilation opening of the hydroelectric end cover plate.
Optionally, the glass is tempered laminated glass.
Optionally, the glass is 280mm × 280mm toughened laminated glass with the total thickness of 6-10 mm.
The utility model discloses for prior art gain following technological effect:
the utility model provides a visual structure primary structure for observing rotatory cathode end is including setting up the observation window on water and electricity end cover board, be provided with toughened doubling glass on the observation window, it explodes to set up the protection pad around the toughened doubling glass in order to prevent the toughened glass collision, and set up splint inboard at water and electricity end cover board, be fixed in between water and electricity end cover board and the splint with toughened doubling glass through the bolt, when being convenient for observe the water and electricity end condition of leaking, can also make toughened doubling glass simple to operate, and the outward appearance is brief generous, use doubling glass to prevent under the special circumstances that toughened glass from bursting and fall into end base damage end or cause the potential safety hazard.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a visual structure for observing a rotating cathode end according to the present invention;
fig. 2 is a schematic top view of the visual structure for observing the rotating cathode end according to the present invention.
Description of reference numerals: 1. a hydroelectric end cover plate; 2. an observation window; 3. a bolt; 4. a vent; 5. a nut; 6. a splint; 7. tempering the laminated glass; 8. a protective pad.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The first embodiment is as follows:
as shown in fig. 1, the present embodiment provides a visual structure for observing a rotating cathode tip, which includes an observation window 2 disposed on a water and electricity end cover plate 1, wherein a tempered laminated glass 7 is disposed on the observation window 2.
In this embodiment, as shown in fig. 1, a clamping plate 6 is arranged on the inner side of the observation window 2, the glass is arranged between the clamping plate 6 and the water and electricity end cover plate 1, the clamping plate 6 is a plate-shaped member arranged on the left end and the right end of the inner side of the observation window 2, one end of the plate-shaped member is fixedly connected with the water and electricity end cover plate 1, a through hole is correspondingly arranged on the water and electricity end cover plate 1 and the plate-shaped member, a bolt 3 is arranged in the through hole, a nut 5 is screwed at one end of the bolt 3, which is located on the inner side of the clamping plate, so that the glass is clamped between the water and electricity end cover plate 1 and the plate-shaped member, a protective pad 8 is arranged on the periphery of two sides of the glass, the protective pad 8 is a rubber pad, the observation window 2 is arranged above the ventilation opening 4 of the water and electricity end cover plate 1, the toughened laminated glass.
The visual structure for observing the rotating cathode end in the embodiment well solves the problem that the water leakage condition of the end cannot be observed after the end is sealed, meanwhile, the problem that equipment is damaged due to short circuit and the like caused by water leakage is avoided, the appearance is simple and elegant, and the installation is convenient.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the concrete implementation and the application scope. In summary, the content of the present specification should not be construed as a limitation of the present invention.
Claims (9)
1. The utility model provides a visual structure for observing rotating cathode end, its characterized in that, is including setting up the observation window on water and electricity end cover board, be provided with glass on the observation window.
2. A visual structure for observing a rotating cathode end as claimed in claim 1 wherein a clamping plate is provided inside the observation window, the glass being provided between the clamping plate and the hydro-electric end cover plate.
3. The visual structure for observing the rotating cathode end as claimed in claim 2, wherein the clamping plates are plate-shaped members disposed at the left and right ends inside the observation window, and one end of the plate-shaped member is fixedly connected with the water and electricity end cover plate.
4. A visual arrangement for observing a rotating cathode end as claimed in claim 3, wherein said hydro end cover plate and said plate shaped member are correspondingly provided with through holes, and said glass is clamped between said hydro end cover plate and said plate shaped member by providing bolts into said through holes.
5. The visual structure for observing a rotating cathode end as claimed in claim 1, wherein protective pads are disposed around both sides of the glass.
6. A visualization structure for visualizing a rotating cathode end as in claim 5, wherein said protective pad is a rubber pad.
7. A visual arrangement for viewing a rotating cathode end as claimed in claim 1 wherein the viewing window is provided above the ventilation opening of the hydroelectric end cover plate.
8. The visual structure for observing a rotating cathode tip as claimed in claim 1, wherein the glass is tempered laminated glass.
9. The visual structure for observing a rotating cathode end as claimed in claim 1, wherein the glass is 280mm × 280mm toughened laminated glass with a total thickness of 6-10 mm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201921987809.2U CN211005605U (en) | 2019-11-18 | 2019-11-18 | Visual structure for observing rotating cathode end |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201921987809.2U CN211005605U (en) | 2019-11-18 | 2019-11-18 | Visual structure for observing rotating cathode end |
Publications (1)
Publication Number | Publication Date |
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CN211005605U true CN211005605U (en) | 2020-07-14 |
Family
ID=71481969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201921987809.2U Active CN211005605U (en) | 2019-11-18 | 2019-11-18 | Visual structure for observing rotating cathode end |
Country Status (1)
Country | Link |
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CN (1) | CN211005605U (en) |
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2019
- 2019-11-18 CN CN201921987809.2U patent/CN211005605U/en active Active
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