CN210928016U

CN210928016U - Preparation mould for conductive lines of heater

Info

Publication number: CN210928016U
Application number: CN201921507222.7U
Authority: CN
Inventors: 何军舫
Original assignee: Boyu Tianjin Semiconductor Material Co ltd; Boyu Zhaoyang Semiconductor Technology Co ltd; Boyu Semiconductor Vessel Craftwork Technology Co ltd
Current assignee: Boyu Tianjin Semiconductor Material Co ltd; Boyu Zhaoyang Semiconductor Technology Co ltd; Boyu Semiconductor Vessel Craftwork Technology Co ltd
Priority date: 2019-09-10
Filing date: 2019-09-10
Publication date: 2020-07-03
Anticipated expiration: 2029-09-10

Abstract

A heater conductive pattern preparation mould comprises a first mould monomer (1) and a second mould monomer (2); the first mould single body (1) is detachably connected with the second mould single body (2); the first mould single body (1) and the second mould single body (2) enclose a closed accommodating space, and the accommodating space is used for accommodating a heater; through holes (3) are formed in the surfaces of the first die single body (1) and the second die single body (2); the through hole (3) is arranged corresponding to the conductive isolation area of the heater and used for conducting sand blasting and carving on the conductive coating exposed out of the through hole. Through designing this heater conductive texture preparation mould, can realize carrying out the sandblast sculpture on the coating, can obtain comparatively accurate electrically conductive isolation region, can effectively avoid because the layering phenomenon that machining heater leads to.

Description

Preparation mould for conductive lines of heater

Technical Field

The utility model belongs to the technical field of the material processing technique and specifically relates to a heater conductive line preparation mould is related to.

Background

In the prior art, a multilayer heater is researched and developed by a technician, the heater is manufactured by adopting a CVD method, pyrolytic boron nitride is taken as a substrate, Pyrolytic Graphite (PG) is taken as a conductive ceramic coating, a layer of pyrolytic boron nitride is covered outside the conductive ceramic coating to be an insulating layer, the purity of the used ceramic material can reach 99.999 percent, the thermal expansion coefficient at high temperature is small, the gas release amount is small, and the heater is of an integrated structure. However, the multilayer heater itself has the following drawbacks:

the pyrolytic boron nitride substrate and the pyrolytic graphite realizing the conductive function are both of a layered structure. In order to process the conductive coating, in the prior art, the conductive layer is processed in a mechanical processing manner to obtain the conductive texture, for example, a milling cutter is used to remove a part of the conductive layer in a cutting manner of a tearing layer to obtain the conductive texture, but this manner is very easy to cause a problem of breakage of a boron nitride layer structure due to an excessively fast processing speed, so that the surface layer of the boron nitride substrate and the pyrolytic graphite conductive layer fall off together. In the prior art, the milling cutter is set to be in a high spindle rotating speed and low feeding mode during machining, and the conducting layer is machined, so that the influence can be weakened to a certain extent, but the machining time is prolonged by tens of times; and adopt this kind of high rotational speed, the processing mode of low feed also can make the processing position roughness undersize and need carry out the coarsing to the processing position after accomplishing processing, otherwise can lead to the condition that the layering appears in last boron nitride coating (insulating layer) to this kind of processing mode also can make cutter wearing and tearing accelerate, need change a large amount of cutters in order to guarantee the result of working in the use. In addition, because the processing speed is too high, a certain vibration exists between the conductive layer of the heater and the substrate due to the mechanical processing mode, and the vibration exists for a long time due to long-time processing, so that the vibration is extremely unfavorable for the multilayer structure, and the multilayer structure is separated.

SUMMERY OF THE UTILITY MODEL

Objects of the invention

The utility model aims at providing a heater conductive lines preparation mould. This mould forms closed accommodation space through being provided with first mould monomer and second mould monomer, and this space is used for holding the heater, and first mould monomer and the free surface of second mould are provided with the through-hole, and the through-hole corresponds the setting with the electrically conductive isolation region of heater, can carry out the sandblast sculpture to the electrically conductive coating that the through-hole exposes out. Through designing this heater preparation mould, can realize carrying out the sandblast sculpture on the coating, can obtain comparatively accurate electrically conductive isolation region, can effectively avoid because the layering phenomenon that machining heater leads to.

(II) technical scheme

In order to solve the problems, the heater preparation mold comprises a first mold monomer and a second mold monomer; the first mould single body is detachably connected with the second mould single body; the first mould single body and the second mould single body enclose a closed accommodating space, and the accommodating space is used for accommodating the heater; through holes are formed in the surfaces of the first die single body and the second die single body; the through hole is arranged corresponding to the conductive isolation area of the heater and is used for performing sand blasting and carving on the conductive coating exposed out of the through hole.

Furthermore, the through holes are long and are provided with a plurality of through holes; reinforcing ribs are arranged at intervals in the length direction of the through hole and are connected with two side walls of the through hole; and/or the outer surface of the reinforcing rib and the outer wall of the first die single body are positioned on the same surface, and the inner surface of the reinforcing rib is retracted to the inner wall of the first die single body; or the outer surface of the reinforcing rib and the outer wall of the second die unit are positioned on the same surface, and the inner surface of the reinforcing rib is retracted to the inner wall of the second die unit.

Further, the first mold monomer and the second mold monomer have the same thickness; the thickness of the reinforcing rib is 10% -50% of the thickness of the first die single body.

Furthermore, the width of the reinforcing rib is 0.5-10 mm.

Further, the reinforcing ribs are arranged at intervals of 10-100mm in the length direction of the through holes.

Furthermore, the first die single body and the second die single body are respectively and oppositely provided with positioning holes corresponding to the electrode holes on the surface of the heater so as to position the heater; and/or the first die single body and the second die single body are respectively and oppositely provided with positioning holes corresponding to the mounting holes on the surface of the heater one by one.

Further, the buffer layer comprises a flexible buffer layer; one surface of the flexible buffer layer is attached to the surface of the first die unit and the second die unit, which are provided with accommodating spaces, and the other surface of the flexible buffer layer is abutted to the heater.

Further, the thickness of the flexible buffer layer is 0.05-10 mm.

Further, the flexible buffer layer is made of sponge or sand blasting tape.

Further, the shape of the first die monomer is an arc-shaped structure; the shape of the second die monomer is an arc-shaped structure; the closed accommodating space is cylindrical.

(III) advantageous effects

The above technical scheme of the utility model has following profitable technological effect:

the utility model discloses an embodiment provides a heater conductive lines preparation mould forms closed accommodation space through being provided with first mould monomer and second mould monomer, and this space is used for holding the heater, and in addition, first mould monomer and the free surface of second mould are provided with the through-hole, and the through-hole corresponds the setting with the electrically conductive isolation region of heater, can carry out the sandblast sculpture to the electrically conductive coating that the through-hole exposes. Through designing this heater preparation mould, can realize carrying out the sandblast sculpture on the coating, can obtain comparatively accurate electrically conductive isolation region, can effectively avoid because the layering phenomenon that machining heater leads to.

Drawings

Fig. 1 is a schematic structural view of a mold according to a first embodiment of the present invention;

fig. 2 is a front view of a first mold unit according to a first embodiment of the present invention;

FIG. 3 is an enlarged view of area A of FIG. 2;

fig. 4 is a top view of a first mold cell according to a first embodiment of the present invention;

fig. 5 is a left side view of a first mold cell according to a first embodiment of the present invention;

fig. 6 is a schematic flow chart of a method for manufacturing a heater according to a second embodiment of the present invention.

Reference numerals:

1: a first mold monomer; 2: a second mold monomer; 3: a through hole; 4: reinforcing ribs; 5: electrode positioning holes; 6: a substrate to be sandblasted; 7: a flexible buffer layer; 8: a first nut; 9: a second nut; 10: a spring washer; 11: a first bolt; 12: a first arcuate shim; 13: a gasket; 14: a second bolt; 15: a second arcuate shim; 16: and (4) a flange.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the description is intended to be illustrative only and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.

The structure schematic diagram according to the embodiment of the present invention is shown in the attached drawings. The figures are not drawn to scale, wherein certain details are exaggerated and possibly omitted for clarity. The shapes of various regions, layers, and relative sizes and positional relationships therebetween shown in the drawings are merely exemplary, and deviations may occur in practice due to manufacturing tolerances or technical limitations, and a person skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions, as actually required.

In the description of the present invention, it should be noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

Fig. 1 is a schematic structural view of a mold according to a first embodiment of the present invention. Fig. 2 is a front view of a first mold unit according to a first embodiment of the present invention; FIG. 3 is an enlarged view of area A of FIG. 2; fig. 4 is a top view of a first mold cell according to a first embodiment of the present invention; fig. 5 is a left side view of a first mold unit according to a first embodiment of the present invention.

As shown in fig. 1 to 5, the heater-preparing mold includes a first mold unit 1 and a second mold unit 2; the first mould single body 1 is detachably connected with the second mould single body 2; the first mould single body 1 and the second mould single body 2 enclose a closed accommodating space, and the accommodating space is used for accommodating a heater; through holes 3 are formed in the surfaces of the first mold single body 1 and the second mold single body 2; the through hole 3 is arranged corresponding to the conductive isolation area of the heater and used for conducting sand blasting and carving on the conductive coating exposed out of the through hole.

In the embodiment shown in fig. 1, the mold is cylindrical, that is, the first mold unit 1 and the second mold unit 2 are arc-shaped structures, such as "tile" shapes, but the present invention is not limited thereto, and the mold may also be other shapes, such as rectangular parallelepiped shapes.

In the embodiment shown in fig. 1, the first mold unit 1 and the second mold unit 2 are identical, and of course, the arc length of the first mold unit 1 may be larger than that of the second mold unit, and other shapes may also be used as long as the two units can enclose a closed accommodating space.

In one embodiment, the through holes 3 are long and are provided in a plurality; and reinforcing ribs 4 are arranged at intervals in the length direction of the through hole 3 and are connected with two side walls of the through hole 3. When the reinforcing rib is arranged on the first die unit 1, the outer surface of the reinforcing rib 4 and the outer wall of the first die unit 1 are located on the same surface, and the inner surface of the reinforcing rib 4 is retracted to the inner wall of the first die unit 1.

When the reinforcing rib 4 is arranged on the second die unit 2, the outer surface of the reinforcing rib 4 and the outer wall of the second die unit 2 are located on the same surface, and the inner surface of the reinforcing rib 4 is retracted into the inner wall of the second die unit 1.

It should be understood that in this embodiment, the outer surface of the reinforcing rib 4 is located on the same surface of the single mold body, and one surface may be a curved surface, a flat surface, or the like.

The single body 1 shown in fig. 2 is in a tile shape, a plurality of through holes 3 are formed in the length direction of the single body, the reinforcing ribs 4 are arranged on one surfaces (the inner walls of the first single body 1 and the second single body 2) of the first single body 1 and the second single body 2, which are formed with accommodating spaces, the thickness of the reinforcing ribs 4 is smaller than that of the single body, and the outer surface of the reinforcing ribs is in a plane with the outer surface of the first single body 1, so that the reinforcing ribs and the inner wall of the first single body or the second single body have certain spaces. When the sand is blasted on the surface of the mold, the sprayed sand can enter the certain space to polish the corresponding positions of the reinforcing ribs on the inner wall of the mold. So that the polished conductive isolation regions are coherent.

It should be understood that in the example shown in fig. 1, the through hole mentioned in the present application is an elongated shape, and may be a linear elongated shape, a zigzag elongated shape, a curved elongated shape, such as a wave shape, and the like.

Fig. 3 is an enlarged view of the region a shown in fig. 2. The location of the reinforcing bars 4 is clearly shown in figure 3.

In a specific embodiment, the first mold unit 1 and the second mold unit 2 have the same thickness; the thickness of the reinforcing ribs 4 is 10% -50% of the thickness of the first die unit 1.

In a preferred embodiment the width of the ribs 4 is 0.5-10 mm. It should be noted that, the reinforcing rib is in this range, the connection strength of each position of the mould can be ensured, and the interference to the sand blasting can not be generated. If the width of strengthening rib is less than 0.5mm, then can't play the effect of strengthening the connection, if the width of strengthening rib is higher than 10mm then can produce the sandblast process and block, be unfavorable for the sculpture of pattern.

Optionally, the reinforcing ribs 4 are arranged at intervals of 10-100mm in the length direction of the through hole 3. Generally speaking, the utility model relates to a length of strengthening rib and through-hole and the relation of thickness are according to the nonconformity of mould size, and the suitable interval of arranging of rotation in this scope could guarantee the joint strength of each position of mould to and do not influence the implementation of sandblast sculpture pattern.

In one embodiment, the first mold unit 1 and the second mold unit 2 are respectively provided with electrode positioning holes 5 corresponding to electrode holes on the surface of a heater to position the heater, thereby preventing portions not requiring sand blasting from being abraded.

In an alternative embodiment, the first die unit 1 and the second die unit 2 are respectively provided with positioning holes (not shown) corresponding to the mounting holes or the electrode holes on the surface of the heater in a one-to-one manner.

In one embodiment, a flexible buffer layer 7 is also included; one surface of the flexible buffer layer 7 is attached to the surface of the first die unit 1 and the second die unit 2, which are provided with accommodating spaces, and the other surface of the flexible buffer layer is abutted to the substrate 6 to be subjected to sand blasting. The flexible layer 7 may be made of sponge or sand-blasting tape or other flexible material with one side sticky.

In one embodiment, the first and second mold units are in the shape of "tiles", and the arc-shaped edges of the first and second mold units further extend to form a fixing portion, such as a flange 16, and the fixing portion is provided with a through hole, and the second nut 9 passes through the through hole and is rotatably connected with the second bolt 14 located outside the through hole of the flange of the second mold unit, so that the first and second mold units can be closed.

Optionally, in this embodiment, a spring washer 10 may be further disposed between the second nut 9 and the flange 16 to make the closing between the first mold unit and the second mold unit tighter. The purpose of the spring washer 10 is to avoid loosening of the bolts during use of the die, which can result in an unsatisfactory engraved pattern.

Optionally, in this embodiment, a gasket 13 may be disposed between the second bolt 14 and the flange 16, so as to further close the first mold unit and the second mold unit.

Of course, in some embodiments, the first mold unit and the second mold unit may be connected by a snap or the like.

In one embodiment, the first mold unit and the second mold unit are tile-shaped. The first die unit 1 is also provided with a mounting hole 5 corresponding to an electrode hole on a substrate to be subjected to sand blasting. The one side of keeping away from second mould monomer 2 at first mould monomer 1 still is provided with first arc gasket 12, and first bolt 11 passes this mounting hole 5 and electrode hole and mould monomer 1 inside first nut 8 swivelling joint through first arc gasket 12 for the fixed substrate of treating the sandblast. A second arc gasket 15 is arranged between the nut inside the first die unit and the inner wall of the first die unit; the nut and the bolt can be tightly connected through the second arc-shaped gasket 15.

In one embodiment, the first mold unit and the second mold unit are tile-shaped. The second die unit 2 is also provided with a mounting hole 5 corresponding to an electrode hole on a substrate to be sandblasted. The inner wall and the outer wall of the second mould single body 2 are respectively provided with a first arc gasket 12 and a second arc gasket 15, and the first mould single body and the second mould single body are used for positioning the substrate to be subjected to sand blasting through the matching of the first bolt 11, the first nut 8 and the first arc gasket and the second arc gasket.

It is understood that, in the above embodiment, the first mold unit 1 and the second mold unit 2 are in the form of tiles, and when the first mold unit 1 and the second mold unit 2 are in the form of, for example, rectangular structures with flat surfaces, the gasket may be in a flat shape, as long as the gasket is fitted to the shapes of the inner wall and the outer wall of the first mold unit.

Fig. 5 is a schematic flow chart of a method for manufacturing a heater according to a second embodiment of the present invention.

As shown in fig. 5, the method includes steps S101 to S104:

step S101, depositing a conductive layer on the surface of the substrate.

In one embodiment, the boron nitride substrate is suspended in a CVD apparatus for surface pyrolytic graphite deposition at a vacuum of 50-800Pa and at a temperature of 1250-₄：N₂1:0.5-20, deposition thickness 5-200 μm; and cooling the deposition furnace to room temperature, and taking out the coated substrate. Wherein the coating is an electrically conductive layer, i.e. a layer of pyrolytic graphite. The substrate may be a PBN substrate.

Step S102, the substrate with the conductive layer is mounted in the accommodating space of the mold as in the first embodiment. Wherein the conductive layer is attached to the inner wall of the mold.

The conductive layer is arranged in the mold, the shape of the preset isolation region is exposed through the through hole of the mold, the preset isolation region leaked from the surface of the mold is carved and removed in a sand blasting mode, the removed part is actually a naked substrate relative to the conductive layer, the naked substrate and the conductive layer form conductive lines of a heater (the part which is not carved by sand blasting is a moving path of electrons, the part of the naked substrate is an insulating part, and the electrons cannot pass through), the naked substrate serves as the isolation region, and then the conductive layer containing the isolation region is obtained.

Optionally, the mold unit 1 and the mold unit 2 may be manufactured by injection molding or 3D printing, and the material for manufacturing the mold is selected from materials which are wear-resistant, not easy to deform and have certain micro-elasticity, such as hard rubber, PVC material, and the like. The inner wall of the accommodating space of the mold is added with 0.01-2mm of flexible filler to ensure that the inner wall of the accommodating space of the mold can be completely attached to the outer wall of the substrate, and after the mold and the substrate are positioned through electrode holes or other positioning modes, the mold unit 1 and the mold unit 2 are closed and can be fastened through bolts or buckles. Wherein, the flexible filler can be sponge or sand blasting adhesive tape or other flexible materials with single-sided stickiness.

Step S103, performing sand blasting on the conductive layer on the substrate exposed from the through hole of the mold to carve the exposed portion of the mold surface through the through hole 3, thereby obtaining an isolation region carved on the surface of the conductive layer of the substrate by sand blasting.

Specifically, a mold with a built-in substrate and a shielding layer of pyrolytic graphite is fixed on a rotating table of a sand blasting machine, the equipment is started to rotate at the rotating speed of 0.5-50r/min, then sand grains with Mohs hardness of 3-9 and 30-500 meshes are adopted for surface sand blasting treatment, the sand blasting pressure is 0.1-5MPa, the sand blasting distance is 1-500mm, the sand blasting is stopped after the PBN substrate of the insulation part exposed out of the through hole 3 is completely leaked, and the substrate is taken out of the mold.

And step S104, depositing an insulating layer on the surface of the substrate with the conductive material layer.

Suspending the substrate with the pattern of the conductive isolation region engraved by sandblasting on the surface taken out from the mold into a deposition chamber of a CVD device for deposition of a surface pyrolytic boron nitride insulating layer, wherein the vacuum degree in the deposition chamber is 100-₂As the carrier gas, BCl is required₃：NH₃(0.1-10): and 1, cooling the deposition furnace to room temperature, and taking out the coated multilayer heater.

In one embodiment, the substrate is prepared as follows:

the method comprises the steps of taking boron trichloride and ammonia as reaction gases, taking nitrogen as a carrier gas, uniformly mixing the three gases, introducing the mixture into a high-temperature deposition furnace, suspending a deposition mold processed by high-quality graphite in the deposition furnace, reacting the reaction gases at 1200-1600 ℃, generating amorphous pyrolytic boron nitride, depositing the amorphous pyrolytic boron nitride on the surface of the deposition mold, depositing for 5-10 hours, then carrying out high-temperature sintering crystallization treatment on amorphous pyrolytic Boron Nitride (BN) at a higher temperature ranging from 1700 ℃ to 2200 ℃ for 2-15 hours, cooling the deposition furnace to room temperature, and taking out the deposition mold and a boron nitride substrate PBN of a heater to be processed.

In one embodiment, after preparing the boron nitride substrate of the heater to be processed, the surface of the boron nitride substrate is further subjected to surface roughness treatment, which comprises the following steps:

fixing the boron nitride substrate on a rotating frame of sand blasting equipment, starting the equipment to rotate at the rotating speed of 0.5-50r/min, and then carrying out surface sand blasting treatment by adopting sand grains with the Mohs hardness of 3-9 and the mesh number of 30-500, wherein the sand blasting pressure is 0.1-5MPa, the sand blasting distance is 1-500mm, and the roughness of the substrate surface after sand blasting is required to be 1-8 mu m.

The following will describe, by way of example, a method for manufacturing a heater according to an embodiment of the present invention.

Example 1

BCl3 and NH3 were fed into the heated deposition furnace using nitrogen as a carrier gas, and the ratio of BCl 3: NH3 ═ 2.5: 1, the temperature of a reaction cavity is 1600 ℃, the vacuum degree is 133pa, pyrolytic boron nitride with the thickness of 1.5mm is formed on the surface of a conventional graphite mold through deposition, then the temperature of the pyrolytic boron nitride matrix is raised to 1950 ℃ under vacuum, and the temperature is maintained for 3 hours, so that pyrolytic boron nitride used as a heater substrate is formed.

Fixing the pyrolytic boron nitride substrate on a rotating frame of sand blasting equipment, starting the equipment to rotate at the rotating speed of 10r/min, and then carrying out surface sand blasting treatment by using 120-mesh corundum sand, wherein the sand blasting pressure is 0.2MPa, the sand blasting distance is 250mm, and the roughness of the substrate surface after sand blasting is 3.42 mu m.

Then the processed boron nitride substrate is hung in a CVD device to carry out the deposition of surface pyrolytic graphite, and the vacuum degree is controlled to be 500pa, the temperature is controlled to be 1700 ℃, and the ratio of CH 4: n2 ═ 1:7.5, deposition thickness 85 μm; and cooling the deposition furnace to room temperature, and taking out the pyrolytic boron nitride substrate deposited with pyrolytic graphite after the coating is finished.

Fixing a mould for sand blasting on the outer surface of a substrate, adding a 0.2mm flexible filler on the inner wall, ensuring that the inner wall of the mould is completely attached to the outer wall of the substrate, positioning the mould and the substrate through an electrode hole, fixing the substrate which is fastened with the mould and coated with pyrolytic graphite on a rotary table of a sand blasting machine, starting equipment to rotate at the rotating speed of 10r/min, performing surface sand blasting treatment by using 120-mesh corundum sand, wherein the sand blasting pressure is 0.2MPa, the sand blasting distance is 250mm, stopping sand blasting after the PBN substrate of an insulating part is completely leaked, and taking out the substrate with an insulating area from the mould.

The substrate on which the insulating region was sandblasted and engraved was then suspended in a CVD apparatus to perform deposition of surface pyrolytic boron nitride at a vacuum degree of 133pa and a temperature of 1700 ℃, with nitrogen as a carrier gas, BCl 3: NH3 ═ 2.5: 1, after depositing pyrolytic boron nitride with the thickness of 150 mu m, cooling to room temperature, and taking out the multilayer heater with the finished coating.

It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.

Claims

1. The preparation mould of the heater conductive lines is characterized by comprising a first mould monomer (1) and a second mould monomer (2);

the first mould single body (1) is detachably connected with the second mould single body (2);

the first mould single body (1) and the second mould single body (2) enclose a closed accommodating space, and the accommodating space is used for accommodating a heater;

through holes (3) are formed in the surfaces of the first die single body (1) and the second die single body (2);

the through hole (3) is arranged corresponding to the conductive isolation area of the heater and used for conducting sand blasting and carving on the conductive coating exposed out of the through hole.

2. The die according to claim 1, wherein the through holes (3) are long and are provided in a plurality; and reinforcing ribs (4) are arranged at intervals in the length direction of the through hole (3), and are connected with two side walls of the through hole (3).

3. The mold according to claim 2,

the outer surface of the reinforcing rib (4) and the outer wall of the first die unit (1) are positioned on the same surface, and the inner surface of the reinforcing rib (4) is retracted to the inner wall of the first die unit (1); or the like, or, alternatively,

the outer surface of the reinforcing rib (4) and the outer wall of the second die single body (2) are located on the same surface, and the inner surface of the reinforcing rib (4) is retracted into the inner wall of the second die single body (2).

4. The mold according to claim 2,

the thicknesses of the first mould single body (1) and the second mould single body (2) are the same;

the thickness of the reinforcing ribs (4) is 10% -50% of the thickness of the first die single body (1).

5. The mold according to claim 4,

the width of the reinforcing rib (4) is 0.5-10 mm.

6. The mold according to any one of claims 2 to 5,

the reinforcing ribs are arranged at intervals of 10-100mm in the length direction of the through hole (3).

7. The mold according to claim 1,

the first die single body (1) and the second die single body (2) are respectively and oppositely provided with positioning holes corresponding to electrode holes on the surface of the heater so as to position the heater; and/or the first die single body (1) and the second die single body (2) are respectively and oppositely provided with positioning holes corresponding to the mounting holes on the surface of the heater one by one.

8. Mould according to claim 1, further comprising a flexible buffer layer (7);

one surface of the flexible buffer layer (7) is attached to the surface of the first die unit (1) and the second die unit (2) which are provided with accommodating spaces, and the other surface of the flexible buffer layer is abutted to the heater.

9. The mold according to claim 8,

the thickness of the flexible buffer layer (7) is 0.05-10 mm.

10. The mold according to claim 8 or 9,

the flexible buffer layer (7) is made of sponge or sand blasting adhesive tape.

11. The mold according to any one of claims 1 to 5, 7 to 9,

the shape of the first mould single body (1) is an arc-shaped structure;

the shape of the second die single body (2) is an arc-shaped structure;

the closed accommodating space is cylindrical.