CN210833862U

CN210833862U - Optical power detection device

Info

Publication number: CN210833862U
Application number: CN201921806737.7U
Authority: CN
Inventors: 王乡
Original assignee: Zhuhai Multiscale Optoelectronics Technology Co ltd
Current assignee: Zhuhai Multiscale Optoelectronics Technology Co ltd
Priority date: 2019-10-24
Filing date: 2019-10-24
Publication date: 2020-06-23
Anticipated expiration: 2029-10-24

Abstract

The utility model relates to an optical power detects technical field, discloses an optical power detection device, can improve detection efficiency. The utility model comprises a plurality of cross-shaped brackets which are mutually spliced in an array distribution mode; the probes are respectively fixed on the middle part of each bracket; and the data processing system is electrically connected with each probe respectively. The utility model discloses utilize the support that a plurality of each other splice formed, can realize the multiple spot simultaneously and detect on the face of illumination of lithography machine, the support adopts the same size simultaneously, can make adjacent probe distance the same to make the probe evenly distributed on the face of illumination of lithography machine, thereby can detect out the distribution condition of the luminous power value on the face of illumination of lithography machine, in addition, because adopt the mode of concatenation between the support, can convenience of customers will the utility model discloses accomodate or assemble, improved the convenience.

Description

Optical power detection device

Technical Field

The utility model relates to an optical power detects technical field, especially an optical power detection device.

Background

At present, the common method for measuring the light power value on the illumination surface of the lithography machine is to place a single probe in the illumination surface for point-by-point measurement, so the detection efficiency is low.

Disclosure of Invention

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides an optical power detection device can improve detection efficiency.

According to the utility model discloses an optical power detection device of first aspect embodiment, include: the plurality of cross-shaped brackets are mutually spliced in an array distribution mode; the probes are respectively fixed on the middle part of each bracket; and the data processing system is electrically connected with each probe respectively.

According to the utility model discloses optical power detection device has following beneficial effect at least: utilize the support that a plurality of mutual concatenations formed, can realize the multiple spot simultaneously and detect on the face of shining of lithography machine, the support adopts the same size simultaneously, can make adjacent probe distance the same to make the probe evenly distribute on the face of shining of lithography machine, thereby can detect out the distribution condition of the luminous power value on the face of shining of lithography machine, in addition, because adopt the mode of concatenation between the support, can convenience of customers accomodate or assemble it, improved the convenience.

According to some embodiments of the invention, the middle part of the support is provided with a groove for accommodating the probe. Be provided with the recess, can make the position reciprocal anchorage between probe and the support, ensure that mutual probe distance is the same, can further improve the precision of detecting.

According to the utility model discloses a some embodiments, two of them tip that the support is adjacent are provided with the card post, two other tip of support be provided with respectively with card post assorted draw-in groove, two adjacent the support is through relative the card post with the draw-in groove splices each other. Utilize draw-in groove and card post, can realize quick concatenation and dismantlement, improved the efficiency of equipment or dismantlement effectively.

According to some embodiments of the utility model, the support is located be provided with U type groove on the tip at card post place, the one end of card post rotate connect in the open end in U type groove. The position that can be convenient for card post is adjusted as required to the connection of adopting to rotate, because the support is whole to form with the concatenation of array mode, consequently can rotate the card post on the support that is in the outside to the support inboard to make the support whole can prevent to block the post and accomodate the in-process and cause the rupture because of the collision with the area phase-match who looks at the face completely, set up U type groove, can make the card post accomodate in U type inslot, further improved the convenience.

According to the utility model discloses a some embodiments, data processing system includes singlechip, memory and a plurality of signal amplification unit, a plurality of at least signal amplification unit respectively with a plurality of probe electric connection. The signal amplification units are adopted, so that the analog signals of each probe can be amplified and converted into digital signals, and the single chip microcomputer can conveniently collect and store the signals in the memory.

According to some embodiments of the utility model, data processing system still include respectively with singlechip electric connection's button unit and display screen. The addition of the key unit can facilitate the operation of a user on the data processing system, and the detected optical power value can be directly displayed on the display screen, so that the user can conveniently and visually read related data.

According to some embodiments of the utility model, data processing system still include respectively with singlechip electric connection's touch-sensitive screen. The convenience of operation can be further improved by using the touch screen.

According to some embodiments of the present invention, the probe and the data processing system adopt a plug-in electric connection mode. Adopt the electric connection mode of plug-in, can further improve the utility model discloses a convenience of accomodating or assembling.

According to some embodiments of the invention, the probe is a PIN photodiode. The detectable wavelength range of the PIN photodiode is 355-420nm, and the detection requirement of the light power value of the illumination surface of the photoetching machine can be met.

According to some embodiments of the invention, the probe is coated with a metal shell. Set up metal casing, not only can play the guard action to the probe, can also realize shielding signal interference and fully radiating effect simultaneously, further improved the reliability and the precision of probe.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a schematic structural diagram of an optical power detection apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic block circuit diagram of the optical power detection apparatus shown in FIG. 1;

FIG. 3 is a schematic view of the optical power detection apparatus shown in FIG. 1 with one of the brackets assembled with the probe head;

FIG. 4 is a plan view of the bracket shown in FIG. 3 in a state of being connected to the clip;

FIG. 5 is a side view of the bracket shown in FIG. 3 in a state of being connected to a catch;

FIG. 6 is a schematic diagram of the optical power detection apparatus shown in FIG. 1 applied to a photo-etching machine;

fig. 7 is a schematic view of a state in which an optical power detection apparatus according to another embodiment of the present invention is applied to a photo-etching machine.

Reference numerals: the device comprises a bracket 100, a groove 110,

clamping columns

120 and 130, a U-shaped groove 140, a cylinder 150, a probe 200, a data processing system 300, a single chip microcomputer 310, a memory 320, a signal amplification unit 330, a key unit 340 and a display screen 350.

Detailed Description

This section will describe in detail the embodiments of the present invention, preferred embodiments of the present invention are shown in the attached drawings, which are used to supplement the description of the text part of the specification with figures, so that one can intuitively and vividly understand each technical feature and the whole technical solution of the present invention, but they cannot be understood as the limitation of the protection scope of the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, a plurality of means are one or more, a plurality of means are two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number.

In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.

Referring to fig. 1, a preferred embodiment is an optical power detection apparatus, according to an embodiment of the present invention, the optical power detection apparatus includes a plurality of cross-shaped supports 100 spliced to each other in an array distribution manner, a plurality of probes 200 respectively fixed to a middle portion of each of the supports 100, and a data processing system 300 electrically connected to each of the probes 200, referring to fig. 1, the cross-shaped supports 100 and the probes 200 are respectively provided with nine, and the nine supports 100 are spliced to each other in an array manner of 3 × 3, so that the embodiment can simultaneously realize nine-point simultaneous detection on an illumination surface of a lithography machine, and the nine detection points are uniformly distributed on the illumination surface, and it is conceivable that the size of the supports 100 can be correspondingly adjusted according to the size and area of the illumination surface, so that the probes 200 can be uniformly distributed on the illumination surface.

Utilize the support 100 that a plurality of mutual concatenations formed, can realize the multiple spot simultaneously and detect on the face of illumination of lithography machine, support 100 adopts the same size simultaneously, can make adjacent probe 200 apart from the same, thereby make probe 200 evenly distributed on the face of illumination of lithography machine, thereby can detect out the distribution condition of the luminous power value on the face of illumination of lithography machine, in addition, because adopt the mode of concatenation between the support 100, can make things convenient for the user to accomodate or assemble it, the convenience has been improved.

Referring to fig. 2, in some embodiments of the present invention, the data processing system 300 at least includes a single chip 310, a memory 320 and a plurality of signal amplification units 330, and the plurality of signal amplification units 330 are electrically connected to the plurality of probes 200 respectively. By adopting the signal amplification units 330, the analog signal of each probe 200 can be amplified and converted into a digital signal, which is convenient for the single chip microcomputer 310 to collect and store the signal in the memory 320. Specifically, the models of the single chip 310 and the memory 320 may be selected and matched according to the technical means known by those skilled in the art, and the signal amplification unit 330 is also a related circuit structure for signal amplification adopted by those skilled in the art, and will not be described herein again.

Referring to fig. 2, in some embodiments of the present invention, the data processing system 300 further includes a key unit 340 and a display 350 electrically connected to the single chip microcomputer 310 respectively. The addition of the key unit 340 facilitates the user to operate the data processing system 300, and the detected optical power value can be directly displayed on the display 350, thereby facilitating the user to intuitively read the relevant data.

In some embodiments of the present invention, the data processing system 300 further includes a touch screen (not shown in the figures) electrically connected to the single-chip microcomputer 310 respectively. The convenience of operation can be further improved by using the touch screen.

In some embodiments of the present invention, the probe 200 and the data processing system 300 are electrically connected by a plug-in connection. Adopt the electric connection mode of plug-in, can further improve the utility model discloses a convenience of accomodating or assembling. Specifically, a first connection interface (not shown in the figures) may be disposed at an end of the probe 200, a corresponding through hole is disposed in the middle of the groove 110 on the bracket 100, and a second connection interface (not shown in the figures) is also disposed on the data processing system 300, and the probe 200 and the data processing system 300 can be electrically connected by electrically connecting the corresponding first connection interface and the second connection interface through a connection line with a plug; it is contemplated that the hardware associated with data processing system 300 may be integrated into a housing (not shown) and then a second connection interface may be provided directly on the housing to electrically connect probe 200 to data processing system 300.

In some embodiments of the present invention, the probe 200 is a PIN photodiode. The detectable wavelength range of the PIN photodiode is 355-420nm, and the detection requirement of the light power value of the illumination surface of the photoetching machine can be met. Specifically, when each probe 200 detects an optical power value, the analog signal is converted into a digital signal and sent to the single chip microcomputer 310, and the single chip microcomputer 310 converts the digital signal into a corresponding voltage value according to a conventional program, and combines with a photoelectric characteristic curve of the PIN photodiode, so as to obtain a corresponding optical power value. Specifically, the conversion algorithm is a commonly used algorithm, and those skilled in the art can implement the conversion algorithm by combining with the photoelectric characteristic curve of the PIN photodiode.

In some embodiments of the present invention, the exterior of the probe 200 is clad with a metal shell (not shown in the figures). Set up metal casing, not only can play the guard action to probe 200, can also realize shielding signal interference and fully radiating effect simultaneously, further improved probe 200's reliability and precision.

Referring to fig. 3, in some embodiments of the present invention, the middle of the bracket 100 is provided with a groove 110 for accommodating the probe 200. The groove 110 is provided to fix the position of the probe 200 and the bracket 100 to each other, so as to ensure that the distance between the probes 200 is the same, thereby further improving the detection accuracy. It is contemplated that the fixed connection between the holder 100 and the probe 200 may be achieved by welding or screwing.

Referring to fig. 4, in fig. 4, the position of the bracket 100 at the fastening post 120 is in a perspective state, in some embodiments of the present invention, two adjacent ends of the bracket 100 are provided with fastening posts 120, two other ends of the bracket 100 are respectively provided with fastening slots 130 matched with the fastening posts 120, and two adjacent brackets 100 are spliced with each other through the fastening posts 120 and the fastening slots 130 opposite to each other. By using the clamping groove 130 and the clamping column 120, rapid splicing and disassembly can be realized, and the assembly or disassembly efficiency is effectively improved. In the splicing process, two adjacent supports 100 can make relative calorie of post 120 and draw-in groove 130 lock each other to make two adjacent supports 100 can splice together, specifically, calorie post 120 is a square column body, draw-in groove 130 is a groove with square column body external form assorted, calorie post 120 and draw-in groove 130 are equallyd divide and are set up respectively in the outside of support 100 tip, and the side and the upper end of draw-in groove 130 are open opening, in the splicing process, the calorie post 120 of one of them support 100 is gone down along the draw-in groove 130 upper end of another support 100 and is blocked in, thereby accomplish the concatenation of two supports 100.

Referring to fig. 5, the left and right ends of the bracket 100 of fig. 5 are in a perspective state; in some embodiments of the present invention, the end of the bracket 100 where the clamping column 120 is located is provided with a U-shaped groove 140, and one end of the clamping column 120 is rotatably connected to the open end of the U-shaped groove 140. The position of the clamping column 120 can be conveniently adjusted as required by adopting rotary connection, and the support 100 is integrally spliced in an array mode, so that the clamping column 120 on the support 100 positioned on the outermost side can be rotated towards the inner side of the support 100, the support 100 can be completely matched with the area of the illuminated surface, the clamping column 120 can be prevented from being broken due to collision in the storage process, the U-shaped groove 140 is arranged, the clamping column 120 can be stored in the U-shaped groove 140, and the convenience is further improved. Specifically, a cylinder 150 may be disposed at an opening close to the U-shaped groove 140, and one end of the clamping column 120 is rotatably connected to the cylinder 150 through a bearing, so that the clamping column 120 is rotatably connected to the bracket 100.

Referring to fig. 6, for an embodiment application mode of the present invention, totally nine supports 100 are arranged on the illumination surface in an array mode of 3 × 3, the clamping column 120 abutting against the side of the illumination surface of the lithography machine can be directly accommodated in the U-shaped groove 140 of the corresponding support 100, so that nine points can be used to simultaneously detect corresponding optical power values on the illumination surface of the lithography machine, voltage values corresponding to the optical power values at different points can be obtained, the optical power values corresponding to the detection points can be known by using the voltage values, and the distribution of the optical power values on the illumination surface can be obtained.

Referring to fig. 7, for an embodiment application mode of the present invention, sixteen supports 100 are arranged on the illumination surface in an array manner of 4 × 4, and similarly, the clamp posts 120 abutting against the side surface of the illumination surface of the lithography machine can be directly accommodated in the U-shaped grooves 140 of the corresponding supports 100, so that sixteen points can be simultaneously detected on the illumination surface of the lithography machine, and accordingly, voltage values corresponding to the optical power values of different detection points can be obtained, and the optical power values of the corresponding detection points can be known by using the voltage values, so that the distribution of the optical power values on the illumination surface can be obtained.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.

Claims

1. An optical power detection apparatus, comprising:

the plurality of cross-shaped brackets are mutually spliced in an array distribution mode;

the probes are respectively fixed on the middle part of each bracket;

and the data processing system is electrically connected with each probe respectively.

2. The optical power detection device according to claim 1, wherein: the middle part of the bracket is provided with a groove for accommodating the probe.

3. The optical power detection device according to claim 1, wherein: two of them tip that the support is adjacent are provided with the card post, two other tip of support are provided with respectively with card post assorted draw-in groove, two adjacent the support through relative the card post with the draw-in groove splices each other.

4. The optical power detection device according to claim 3, wherein: the support is located be provided with U type groove on the tip at card post place, the one end of card post rotate connect in the open end in U type groove.

5. The optical power detection device according to claim 1, wherein: the data processing system at least comprises a single chip microcomputer, a memory and a plurality of signal amplification units, wherein the single chip microcomputer is electrically connected with the memory and the plurality of signal amplification units respectively, and the plurality of signal amplification units are electrically connected with the plurality of probes respectively.

6. The optical power detection device according to claim 5, wherein: the data processing system also comprises a key unit and a display screen which are respectively and electrically connected with the singlechip.

7. The optical power detection device according to claim 5, wherein: the data processing system also comprises a touch screen which is respectively and electrically connected with the single chip microcomputer.

8. The optical power detection device according to claim 1, wherein: the probe and the data processing system adopt a plug-in type electric connection mode.

9. The optical power detection device according to claim 1 or 8, wherein: the probe is a PIN photodiode.

10. The optical power detection device according to claim 9, wherein: the exterior of the probe is coated with a metal shell.