CN210773990U - Single crystal silicon rod cutting surface angle detection device and squaring machine - Google Patents
Single crystal silicon rod cutting surface angle detection device and squaring machine Download PDFInfo
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- CN210773990U CN210773990U CN201921854368.9U CN201921854368U CN210773990U CN 210773990 U CN210773990 U CN 210773990U CN 201921854368 U CN201921854368 U CN 201921854368U CN 210773990 U CN210773990 U CN 210773990U
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Abstract
The utility model discloses a single crystal silicon rod cutting surface angle detection device and an squaring machine, the squaring machine comprises the single crystal silicon rod cutting surface angle detection device, the single crystal silicon rod cutting surface angle detection device comprises a measuring piece, a vertical driving mechanism and a longitudinal driving mechanism; the vertical driving mechanism comprises a servo motor, a vertical screw rod, a connecting seat and a slide rail; the slide rail is vertically arranged at a clamping seat of the clamping mechanism; the connecting seat is provided with a sliding block which can be vertically and slidably arranged in the sliding rail; the servo motor is arranged at a clamping seat of the clamping mechanism, and an output shaft of the servo motor is vertically arranged; the vertical screw rod is coaxially connected with an output shaft of the servo motor, the connecting seat is provided with a vertical threaded hole, and the vertical screw rod penetrates through the threaded hole of the connecting seat in a threaded transmission manner; the longitudinal driving mechanism is used for driving the measuring piece to move; the measuring member is connected with the longitudinal driving mechanism. The utility model has the advantages of detecting whether the cutting surface of the single crystal silicon rod is horizontal.
Description
Technical Field
The utility model relates to a brittle and hard material cutting field especially relates to a single crystal silicon rod cutting plane angle detection device and squaring machine.
Background
In the existing single crystal silicon rod squaring machine, a tail end clamping mechanism and a front end clamping mechanism for clamping a single crystal silicon rod are both provided with sensors, the sensors are vertically arranged sensors, the tail end clamping mechanism and the front end clamping mechanism can drive the single crystal silicon rod to rotate along the central axis of the single crystal silicon rod, after the single crystal silicon rotates for a circle, the sensors can scan the shape characteristics of the single crystal silicon rod, and a control system can obtain the position of the central axis of the single crystal silicon rod through the shape characteristics to provide information for crystal line alignment.
After the crystal line of the single crystal silicon rod is aligned and the cutting of the first knife is finished, due to the fact that certain precision errors exist in the aspect of a transmission mechanism of equipment, the front-end clamping mechanism and the tail-end clamping mechanism have certain clamping failure possibility on the single crystal silicon rod, if the single crystal silicon rod is directly driven to rotate 90 degrees along the axis through the front-end clamping mechanism and the tail-end clamping mechanism, the plane of the cutting surface of the first knife is not necessarily in a horizontal state, and the direct cutting can cause the verticality deviation between the second knife after cutting and the cutting surface of the first knife to be large, so that the.
SUMMERY OF THE UTILITY MODEL
Therefore, the device for detecting the cutting surface angle of the silicon single crystal rod and the squaring machine are needed to be provided, so that the problem that after the squaring machine finishes one-time cutting and rotates the silicon single crystal rod in the prior art, the next cutting is directly carried out, and the verticality deviation of the cutting surface obtained by two times of cutting is large is solved.
In order to achieve the above object, the inventor provides a device for detecting the angle of a cutting surface of a single crystal silicon rod, which comprises a measuring part, a vertical driving mechanism and a longitudinal driving mechanism;
the vertical driving mechanism comprises a servo motor, a vertical screw rod, a connecting seat and a slide rail; the slide rail is vertically arranged at a clamping seat of the clamping mechanism; the connecting seat is provided with a sliding block, the connecting seat is arranged opposite to the sliding rail, and the sliding block can be vertically and slidably arranged in the sliding rail; the servo motor is arranged at a clamping seat of the clamping mechanism, and an output shaft of the servo motor is vertically arranged; the vertical screw rod is coaxially connected with an output shaft of the servo motor, the connecting seat is provided with a vertical threaded hole, and the vertical screw rod penetrates through the threaded hole of the connecting seat in a threaded transmission manner;
the longitudinal driving mechanism is arranged at the connecting seat and used for driving the measuring part to move in a direction vertical to the length direction of the silicon single crystal rod in a horizontal plane; the measuring piece is connected with the longitudinal driving mechanism and vertically protrudes upwards relative to the connecting seat.
As a preferred structure of the utility model, the slide rails are provided with two, the two slide rails are vertically arranged at the clamping seat of the clamping mechanism, and the vertical screw rod is positioned between the two slide rails; the connecting seat is provided with two sliding blocks, and the two sliding blocks are respectively vertically slidably installed in the two sliding rails.
As the utility model discloses a preferred structure still includes the speed reducer, servo motor passes through the speed reducer and is connected with vertical screw rod.
As a preferred structure of the utility model, vertical actuating mechanism is rodless cylinder, rodless cylinder sets up in connecting seat department, the measuring part is connected with the removal slider.
As a preferred structure of the utility model, the utility model also comprises a vertical screw rod fixing seat which is provided with a bearing; the vertical screw fixing seat is arranged at the clamping seat of the clamping mechanism and is opposite to the servo motor; and one end of the vertical screw rod, which is not connected with the servo motor, penetrates through the bearing.
As a preferred structure of the utility model, the connecting seat is provided with a transmission nut, and the threaded hole is arranged at the transmission nut; the vertical screw threads penetrate through the transmission nut.
The invention also provides an squaring machine, which comprises a squaring machine body and a single crystal silicon rod cutting surface angle detection device, wherein the single crystal silicon rod cutting surface angle detection device is any one of the single crystal silicon rod cutting surface angle detection devices; the cutting surface angle detection device of the silicon single crystal rod is arranged between the two clamping seats of the squarer body, is positioned below the silicon single crystal rod clamped by the two clamping mechanisms and is connected with the clamping seats.
Different from the prior art, the device for detecting the cutting surface angle of the silicon single crystal rod and the squaring machine in the technical scheme are characterized in that the squaring machine comprises a squaring machine body and the device for detecting the cutting surface angle of the silicon single crystal rod, and the device for detecting the cutting surface angle of the silicon single crystal rod comprises a measuring part, a vertical driving mechanism and a longitudinal driving mechanism; the vertical driving mechanism comprises a servo motor, a vertical screw rod, a connecting seat and a sliding rail. After the alignment of the central axis of the single crystal silicon rod and the clamping mechanism is completed, the whole single crystal silicon rod is in a horizontal state at the moment, whether the cutting surface of the single crystal silicon rod is in the horizontal state or not can be detected, the connecting seat and the measuring part are driven by the servo motor to vertically move close to the single crystal silicon rod, after the measuring part is abutted against the single crystal silicon rod and cannot move, the moment of the servo motor changes, the connecting seat and the measuring part reversely rotate, the rotation amount at the moment is obtained, and then a first moving path is obtained; after the servo motor is restored to the initial state, starting the longitudinal driving mechanism, driving the connecting seat and the measuring part to move for a certain distance in the horizontal plane along the length direction perpendicular to the single crystal silicon rod by the longitudinal driving mechanism, closing the longitudinal driving mechanism, starting the servo motor again, driving the connecting seat and the measuring part to move vertically close to the single crystal silicon rod by the servo motor again, after the measuring part is abutted against the single crystal silicon rod and cannot move, changing the moment of the servo motor, reversely rotating, obtaining the rotation amount at the moment, and further obtaining a second moving path; and then comparing whether the first moving path is consistent with the second moving path, if so, indicating that the cutting surface of the single crystal silicon rod is in a horizontal state, and if not, indicating that the cutting surface of the single crystal silicon rod is in a non-horizontal state, and adjusting the angle of the single crystal silicon rod. Before the next cutting step is carried out, the levelness of the cutting surface of the single crystal silicon rod is detected, whether angle adjustment needs to be carried out or not can be determined according to the detection result, and then the next cutting is carried out, so that the condition that the cutting surfaces are not perpendicular twice can be avoided, and the cutting quality of the single crystal silicon rod can be ensured.
Drawings
Fig. 1 is an installation schematic view of a device for detecting a cutting surface angle of a single crystal silicon rod according to an embodiment of the present invention;
fig. 2 is a partial sectional view of a-a of fig. 1 according to an embodiment of the present invention.
Description of reference numerals:
1. a bilateral wire saw running device;
2. a clamping mechanism;
21. a clamping seat;
3. a servo motor for driving the clamping mechanism to move;
4. a speed reducer for driving the clamping mechanism to move;
5. a transverse screw;
6. a slider;
7. a linear guide rail;
8. a machine base;
9. a device for detecting the cutting surface angle of the single crystal silicon rod;
91. a servo motor; 92. a speed reducer; 93. a vertical screw; 94. a rodless cylinder; 95. a measuring member; 96. a connecting seat; 97. a slide rail; 98. a vertical screw rod fixing seat;
10. a single crystal silicon rod.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Please refer to fig. 1 to 2, the utility model provides a cutting plane angle detection device 9 for after the alignment of the central axis of the single crystal silicon rod 10 and the clamping mechanism 2 is completed, whether the cutting plane of the single crystal silicon rod 10 is in the horizontal state is detected, whether the angle of the single crystal silicon rod 10 needs to be adjusted before the next cutting provides the judgment standard, so as to ensure that after the two times of cutting, the two times of cutting plane is in the vertical state, and ensure the cutting quality of the single crystal silicon rod 10.
In a specific embodiment, the device 9 for detecting the cutting surface angle of the single crystal silicon rod comprises a measuring part 95, a vertical driving mechanism and a longitudinal driving mechanism; the vertical driving mechanism is used for driving the measuring part 95 to vertically move, and the moving distance is obtained when the measuring part 95 abuts against the silicon single crystal rod; the longitudinal driving mechanism is used for driving the measuring part 95 to move in the horizontal plane along the length direction vertical to the single crystal silicon rod 10, and the measuring part 95 can stay at any specified position in the stroke.
The vertical driving mechanism comprises a servo motor 91, a vertical screw 93, a connecting seat 96 and a sliding rail 97; the slide rail 97 is vertically arranged at the clamping seat 21 of the clamping mechanism 2; the connecting seat 96 is provided with a sliding block, the connecting seat 96 is arranged opposite to the sliding rail 97, and the sliding block is vertically slidably arranged in the sliding rail 97; the servo motor 91 is arranged at the clamping seat 21 of the clamping mechanism 2, and an output shaft of the servo motor 91 is vertically arranged; the vertical screw 93 is coaxially connected with an output shaft of the servo motor 91, and specifically, the servo motor 91 is connected with the vertical screw 93 through a speed reducer 92. The connecting seat 96 is provided with a vertical threaded hole, the vertical screw 93 penetrates through the threaded hole of the connecting seat 96 in a threaded transmission manner, the vertical movement of the connecting seat 96 and the measuring piece 95 can be driven by the servo motor 91, so that the rotation amount of the servo motor 91 can be known, and the movement distance of the connecting seat 96 and the measuring piece 95 can be further known, specifically, the connecting seat 96 is provided with a transmission nut, and the threaded hole is formed in the transmission nut; the vertical screw threads penetrate through the transmission nut.
In order to ensure the accuracy and smoothness of the vertical movement, in a further embodiment, two slide rails 97 are provided, both the two slide rails 97 are vertically arranged at the clamping seat 21 of the clamping mechanism 2, and the vertical screw is located between the two slide rails 97; the connecting seat 96 is provided with two sliding blocks, and the two sliding blocks are respectively vertically slidably installed in the two sliding rails 97.
In a further embodiment, the device further comprises a vertical screw fixing seat 98, wherein the vertical screw fixing seat 98 is provided with a bearing; the vertical screw fixing seat 98 is arranged at the clamping seat 21 of the clamping mechanism 2 and is opposite to the servo motor 91; the one end that vertical screw 93 is not connected with servo motor 91 is worn in the bearing, and such setting not only can not influence vertical screw 93's normal rotation, can also vertical screw 93 be connected with fixture 2's holder 21 steadily, can avoid connecting seat 96 to deviate from outside vertical screw 93 again.
The longitudinal driving mechanism is arranged at the connecting seat 96 and is used for driving the measuring part 95 to move in a horizontal plane in a direction vertical to the length direction of the single crystal silicon rod 10; the measuring part 95 is connected with the longitudinal driving mechanism and vertically protrudes upwards relative to the connecting seat 96, so that the measuring part 95 can be moved to different positions, and the moving distance of the measuring part 95 moving to the cutting surface of the single crystal silicon rod at different positions is obtained under the cooperation of the measuring part and the servo motor 91.
In a preferred embodiment, the longitudinal driving mechanism is a rodless cylinder 94, the rodless cylinder 94 is disposed at the connecting seat 96, the measuring member 95 is connected with the moving slider, and after the rodless cylinder 94 is activated, the measuring member can be moved by the moving slider of the rodless cylinder 94.
After the alignment of the central axis of the silicon single crystal rod 10 and the clamping mechanism 2 is completed, and at the moment, the whole silicon single crystal rod 10 is in a horizontal state, whether the cutting surface of the silicon single crystal rod 10 is in a horizontal state or not can be detected, the servo motor 91 drives the connecting seat 96 and the measuring part 95 to vertically move close to the silicon single crystal rod 10, after the measuring part 95 abuts against the silicon single crystal rod 10 and cannot move, the moment of the servo motor 91 changes, the silicon single crystal rod rotates reversely, the rotation amount at the moment is obtained, and then a first moving path is obtained; after the servo motor 91 is restored to the initial state, starting the longitudinal driving mechanism, driving the connecting seat 96 and the measuring part 95 to move for a certain distance in the horizontal plane along the length direction perpendicular to the single crystal silicon rod 10 by the longitudinal driving mechanism, closing the longitudinal driving mechanism, starting the servo motor 91 again, driving the connecting seat 96 and the measuring part 95 to vertically move close to the single crystal silicon rod 10 by the servo motor 91 again, after the measuring part 95 abuts against the single crystal silicon rod 10 and cannot move, changing the moment of the servo motor 91, reversely rotating, obtaining the rotation amount at the moment, and further obtaining a second moving path; and then comparing whether the first moving path is consistent with the second moving path, if so, indicating that the cutting surface of the single crystal silicon rod 10 is in a horizontal state, and if not, indicating that the cutting surface of the single crystal silicon rod 10 is in a non-horizontal state, wherein the angle of the single crystal silicon rod 10 needs to be adjusted. Before the next cutting step, the levelness of the cutting surface of the single crystal silicon rod 10 is detected, whether angle adjustment needs to be carried out or not can be determined according to the detection result, and then the next cutting is carried out, so that the condition that the cutting surfaces are not perpendicular for two times can be avoided, and the cutting quality of the single crystal silicon rod 10 can be ensured.
The utility model also provides an squaring machine for cutting the silicon single crystal rod 10, in the specific embodiment, the squaring machine comprises a squaring machine body and a device 9 for detecting the cutting surface angle of the silicon single crystal rod, the squaring machine comprises a bilateral fretsaw running device 1, a clamping mechanism 2, a clamping seat 21, a servo motor 3 for driving the clamping mechanism to move, a speed reducer 4 for driving the clamping mechanism to move, a machine base 8 and a transverse screw 5; the two clamping mechanisms 2 and the two clamping seats 21 are arranged, the two clamping seats 21 are arranged on the base 8 in an opposite mode, and the two clamping seats 21 can be close to or far away from each other; the two clamping mechanisms 2 are respectively arranged at the two clamping seats 21, and the two clamping seats 21 are arranged oppositely; the transverse screw rod 5 sequentially penetrates through the two clamping seats 21, one clamping seat 21 can rotate, the other clamping seat 21 can perform threaded transmission, the servo motor 3 for driving the clamping mechanism to move is connected with the transverse screw rod 5 through the speed reducer, the transverse screw rod 5 can be driven to rotate after being driven by the servo motor 3 for driving the clamping mechanism to move, and the two clamping seats 21 are close to or far away from each other under the action of the threaded transmission, so that the clamping mechanism 2 can clamp or loosen the single crystal silicon rod 10. In order to enable the clamping seat 21 to move relative to the base 8, the base 8 is provided with a linear guide rail 7, a sliding block 6 is arranged in the linear guide rail 7, and the clamping seat 21 in threaded transmission connection with the transverse screw 5 is connected with the sliding block 6; the holder 21 is provided with a sensor for scanning the shape characteristics of the single crystal silicon rod 10.
The single crystal silicon rod cutting surface angle detection device 9 is any one of the single crystal silicon rod cutting surface angle detection devices 9; the cutting surface angle detection device 9 of the single crystal silicon rod is arranged between the two clamping seats 21 of the squarer body, is positioned below the single crystal silicon rod 10 clamped by the two clamping mechanisms 2, and is connected with the clamping seats 21. By the arrangement, whether the cutting surface of the single crystal silicon rod 10 is in a horizontal state or not can be detected, and a judgment standard is provided for judging whether the angle of the single crystal silicon rod 10 needs to be adjusted before the next cutting, so that the two cutting surfaces are in a vertical state after the two cutting, and the cutting quality of the single crystal silicon rod 10 is ensured.
It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the scope of the present invention.
Claims (7)
1. The device for detecting the cutting surface angle of the single crystal silicon rod is characterized by comprising a measuring part, a vertical driving mechanism and a longitudinal driving mechanism;
the vertical driving mechanism comprises a servo motor, a vertical screw rod, a connecting seat and a slide rail; the slide rail is vertically arranged at a clamping seat of the clamping mechanism; the connecting seat is provided with a sliding block, the connecting seat is arranged opposite to the sliding rail, and the sliding block can be vertically and slidably arranged in the sliding rail; the servo motor is arranged at a clamping seat of the clamping mechanism, and an output shaft of the servo motor is vertically arranged; the vertical screw rod is coaxially connected with an output shaft of the servo motor, the connecting seat is provided with a vertical threaded hole, and the vertical screw rod penetrates through the threaded hole of the connecting seat in a threaded transmission manner;
the longitudinal driving mechanism is arranged at the connecting seat and used for driving the measuring part to move in a direction vertical to the length direction of the silicon single crystal rod in a horizontal plane; the measuring piece is connected with the longitudinal driving mechanism and vertically protrudes upwards relative to the connecting seat.
2. The device for detecting the angle of the cutting surface of the single crystal silicon rod as claimed in claim 1, wherein two slide rails are provided, both of the two slide rails are vertically arranged at a clamping seat of the clamping mechanism, and the vertical screw is arranged between the two slide rails; the connecting seat is provided with two sliding blocks, and the two sliding blocks are respectively vertically slidably installed in the two sliding rails.
3. The device for detecting the cutting surface angle of the silicon single crystal rod according to claim 1, further comprising a speed reducer, wherein the servo motor is connected with the vertical screw through the speed reducer.
4. The device for detecting the cutting surface angle of the silicon single crystal rod as claimed in claim 1, wherein the longitudinal driving mechanism is a rodless cylinder, the rodless cylinder is arranged at the connecting seat, and the measuring part is connected with the movable sliding block.
5. The device for detecting the angle of the cutting surface of the single crystal silicon rod as claimed in claim 1, further comprising a vertical screw fixing seat provided with a bearing; the vertical screw fixing seat is arranged at the clamping seat of the clamping mechanism and is opposite to the servo motor; and one end of the vertical screw rod, which is not connected with the servo motor, penetrates through the bearing.
6. The device for detecting the cutting surface angle of the silicon single crystal rod according to claim 1, wherein the connecting seat is provided with a transmission nut, and the threaded hole is formed in the transmission nut; the vertical screw threads penetrate through the transmission nut.
7. An squaring machine is characterized by comprising a squaring machine body and a single crystal silicon rod cutting surface angle detection device, wherein the single crystal silicon rod cutting surface angle detection device is the single crystal silicon rod cutting surface angle detection device according to any one of claims 1 to 6; the cutting surface angle detection device of the silicon single crystal rod is arranged between the two clamping seats of the squarer body, is positioned below the silicon single crystal rod clamped by the two clamping mechanisms and is connected with the clamping seats.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921854368.9U CN210773990U (en) | 2019-10-31 | 2019-10-31 | Single crystal silicon rod cutting surface angle detection device and squaring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921854368.9U CN210773990U (en) | 2019-10-31 | 2019-10-31 | Single crystal silicon rod cutting surface angle detection device and squaring machine |
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| Publication Number | Publication Date |
|---|---|
| CN210773990U true CN210773990U (en) | 2020-06-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921854368.9U Active CN210773990U (en) | 2019-10-31 | 2019-10-31 | Single crystal silicon rod cutting surface angle detection device and squaring machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088040A (en) * | 2021-10-09 | 2022-02-25 | 银川隆基硅材料有限公司 | Square rod size measuring device and measuring method |
-
2019
- 2019-10-31 CN CN201921854368.9U patent/CN210773990U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088040A (en) * | 2021-10-09 | 2022-02-25 | 银川隆基硅材料有限公司 | Square rod size measuring device and measuring method |
| CN114088040B (en) * | 2021-10-09 | 2024-05-31 | 银川隆基硅材料有限公司 | Square bar size measuring device and measuring method |
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