CN210773099U

CN210773099U - High-efficiency drying device used after cleaning of cleaning machine

Info

Publication number: CN210773099U
Application number: CN201920909158.9U
Authority: CN
Inventors: 刘耀峰
Original assignee: Wuxi Rongneng Semiconductor Material Co ltd
Current assignee: Wuxi Rongneng Semiconductor Material Co ltd
Priority date: 2019-06-17
Filing date: 2019-06-17
Publication date: 2020-06-16
Anticipated expiration: 2029-06-17

Abstract

The utility model discloses a cleaning machine washs back high efficiency drying device relates to silicon chip production and processing technical field. The improved drying device comprises a base, the upper end fixedly connected with stoving case of base, the upper end fixedly connected with heating device of stoving case, the equal fixedly connected with circulating fan in upper end both sides of base, the both sides of stoving case are all through fixed establishment fixedly connected with blast pipe, and circulating fan's air outlet and blast pipe fixed connection, the inside top fixedly connected with defeated tuber pipe of stoving case, the lower extreme outside of defeated tuber pipe is rotated through ball bearing and is connected with the rolling disc. Through setting up stoving case, circulating fan and rolling disc, utilize circulating fan and heating device to provide hot-blast to drying device's inside, then drive rolling disc and air knife through driving motor and rotate, can adjust the direction of stoving air current to realize the stoving of blowing of different angles, improved the efficiency of drying, reduced manual work and manufacturing cost.

Description

High-efficiency drying device used after cleaning of cleaning machine

Technical Field

The utility model relates to a silicon chip production and processing technology field specifically is a cleaning machine washs back high efficiency drying device.

Background

With the development of science and technology, silicon wafers are applied more and more widely and are applied in various fields, the silicon wafers are strictly cleaned in the production of semiconductor devices, the devices are also failed due to trace pollution, the cleaning aims at removing surface pollution impurities, and the cleaned silicon wafers need to be dried after the cleaning is finished, but the drying device for processing the silicon wafers in the prior art has the following two problems:

1. in the prior art, the existing drying device dries the silicon wafer in a spin-drying mode, and the spin-drying efficiency is low, so that the labor cost and the production cost are increased;

2. in the prior art, the silicon wafer cannot be dried uniformly by spin-drying, so that partial silicon wafer is not dried completely.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The not enough to prior art, the utility model provides a cleaning machine washs back high efficiency drying device possesses drying efficiency height and diversely dries advantages such as, has solved the inefficiency of spin-drying and the not thorough problem of drying.

(II) technical scheme

In order to realize the purpose of drying with diversified above-mentioned drying efficiency height, the utility model provides a following technical scheme: a high-efficiency drying device after cleaning of a cleaning machine comprises a base, wherein a drying box is fixedly connected to the upper end of the base, a heating device is fixedly connected to the upper end of the drying box, circulating fans are fixedly connected to both sides of the upper end of the base, air supply pipes are fixedly connected to both sides of the drying box through a fixing mechanism, air outlets of the circulating fans are fixedly connected with the air supply pipes, an air conveying pipe is fixedly connected to the top end of the interior of the drying box, a rotating disc is rotatably connected to the outer side of the lower end of the air conveying pipe through a ball bearing, a driving motor is fixedly connected to the right half portion of the top end of the interior of the drying box, a gear is fixedly connected to the end portion of an output shaft of the driving motor, the gear is meshed with the side wall of the rotating disc, air knives are fixedly connected to both sides of the lower, first air outlet and second air outlet have all been seted up to first one and the lower half inboard of air knife, the seat is placed to the inside bottom fixedly connected with of stoving case, the first layer of placing of upper end fixedly connected with of placing the seat, the first layer of placing is placed to the upper end fixedly connected with second of placing the layer, the first upper end of placing the layer and placing the layer with the second all is equipped with the standing groove, the switch that is used for controlling fan, driving motor and heating device has been inlayed to the upper end of base.

As a preferred technical scheme of the utility model, heating device's inside is equipped with the heating pipe, and the heating pipe is equipped with four, and the heating pipe is established to the U type.

As the utility model discloses a preferred technical scheme, fixed establishment includes the fixing clip, the fixing clip passes through the bolt with blast pipe fixed connection in the both sides of stoving case.

As a preferred technical scheme of the utility model, the aperture of first air outlet is half bigger than the bore of second air outlet, the layer is placed than the second to the first layer of placing and the layer is lower half, and first air outlet places the layer with the second and is corresponding, and the second air outlet is corresponding with the first layer of placing.

As a preferred technical scheme of the utility model, the drainage groove has been seted up to the inside bottom of stoving case, and the drainage groove runs through the base, be equipped with the water collector under the drainage groove.

As an optimized technical scheme of the utility model, supplementary wind gap has been seted up to the lower extreme of rolling disc, and supplementary wind gap is equipped with threely.

(III) advantageous effects

Compared with the prior art, the utility model provides a cleaning machine washs back high efficiency drying device possesses following beneficial effect:

1. this cleaning machine washs back high efficiency drying device through setting up stoving case, circulating fan and rolling disc, utilizes circulating fan and heating device to provide hot-blast to drying device's inside, then drives rolling disc and air knife through driving motor and rotates, can adjust the direction of stoving air current to realize the stoving of blowing of different angles, improved the efficiency of drying, reduced manual work and manufacturing cost.

2. This cleaning machine washs back high efficiency drying device places the layer through setting up first air outlet, second air outlet, first layer and the second of placing, and the aperture of first air outlet is than the big half of bore of second air outlet, and the layer is placed than first layer height half of placing to the second, can be according to the size of silicon chip with silicon chip classification place dry to make the suitability better, the stoving effect is better.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic diagram of the internal structure of the present invention.

In the figure: 1. a base; 2. a drying box; 3. a heating device; 4. a circulating fan; 5. a fixing mechanism; 6. an air supply pipe; 7. a wind delivery pipe; 8. a ball bearing; 9. rotating the disc; 10. a drive motor; 11. a gear; 12. an air knife; 13. a ventilation cavity; 14. a first air outlet; 15. a second air outlet; 16. a placing seat; 17. a first placement layer; 18. a second placement layer; 19. a placement groove; 20. a switch; 21. heating a tube; 22. fixing the card; 23. a drainage groove; 24. a water pan; 25. and an auxiliary tuyere.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, a high-efficiency drying device after being cleaned by a cleaning machine comprises a base 1, a drying box 2 is fixedly connected to the upper end of the base 1, a heating device 3 is fixedly connected to the upper end of the drying box 2, circulating fans 4 are fixedly connected to both sides of the upper end of the base 1, the type of the circulating fans 4 is df-6750W, the rated voltage is 220V, air supply pipes 6 are fixedly connected to both sides of the drying box 2 through fixing mechanisms 5, an air outlet of the circulating fans 4 is fixedly connected with the air supply pipes 6, an air delivery pipe 7 is fixedly connected to the top end inside the drying box 2, a rotating disc 9 is rotatably connected to the outer side of the lower end of the air delivery pipe 7 through a ball bearing 8, a driving motor 10 is fixedly connected to the right side of the top end inside the drying box 2, the type of the driving motor 10 is 5IK90A-CF, a gear 11 is fixedly connected to the end portion, and the gear 11 is connected with the lateral wall meshing of rolling disc 9, the equal fixedly connected with air knife 12 in lower extreme both sides of rolling disc 9, ventilation chamber 13 has all been seted up to the inside of rolling disc 9 and air knife 12, first air outlet 14 and second air outlet 15 have all been seted up to first one and the lower half inboard of air knife 12, the seat 16 is placed to the inside bottom fixedly connected with of stoving case 2, the first layer 17 of placing of upper end fixedly connected with of placing seat 16, the first layer 18 is placed to the upper end fixedly connected with second of placing layer 17, the first upper end of placing layer 17 and second and placing layer 18 all is equipped with standing groove 19, the switch 20 that is used for controlling fan, driving motor 10 and heating device 3 has been inlayed to the upper end of base 1.

Specifically, heating pipe 21 is arranged in heating device 3, and the model of heating pipe 21 is GYS2, and heating pipe 21 is equipped with four, and heating pipe 21 sets up to the U type.

In this embodiment, the four heating pipes 21 improve the efficiency of heating the air by heating the air flow of the air by the heating pipes 21.

Specifically, the fixing mechanism 5 comprises a fixing clip 22, and the fixing clip 22 fixedly connects the air supply pipe 6 to two sides of the drying box 2 through bolts.

In this embodiment, the air supply duct 6 is fixed by the fixing clip 22, and the entire structure of the device is reinforced.

Specifically, the aperture of the first air outlet 14 is one half larger than the aperture of the second air outlet 15, the first placing layer 17 is one half lower than the second placing layer 18, the first air outlet 14 corresponds to the second placing layer 18, and the second air outlet 15 corresponds to the first placing layer 17.

In this embodiment, the aperture of the first air outlet 14 is one half larger than the aperture of the second air outlet 15, and the second placing layer 18 is one half higher than the first placing layer 17, so that the silicon wafers can be placed in a classified manner according to the sizes of the silicon wafers to be dried, thereby facilitating the drying of the silicon wafers.

Specifically, drainage groove 23 has been seted up to the inside bottom of stoving case 2, and drainage groove 23 runs through base 1, be equipped with water collector 24 under the drainage groove 23.

In this embodiment, through drainage groove 23 with the bottom of drop of water drainage to base 1, made things convenient for the collection to the drop of water.

Specifically, the lower end of the rotating disc 9 is provided with three auxiliary air ports 25, and the number of the auxiliary air ports 25 is three.

In this embodiment, the drying of the silicon wafer can be enhanced through the auxiliary tuyere 25, which is beneficial to increasing the drying efficiency.

The utility model discloses a theory of operation and use flow: when the silicon wafer drying machine is used, firstly, silicon wafers to be dried are placed in a first placing layer 17 and a second placing layer 18 in a classified mode, then the circulating fan 4 is controlled through the switch 20, the heating device 3 and the driving motor 10 work, circulating air is sent into the heating device 3 through the air supply pipe 6 by the circulating fan 4, air flow is heated through the heating pipe 21 in the heating device 3, after heating, the air flow is sent into the ventilation cavity 13 in the rotating disc 9 and the air knife 12 through the air supply pipe 6, the rotating disc 9 and the air knife 12 are driven to rotate by the driving motor 10, hot air flow is blown out from the first air outlet 14 and the second air outlet 15, the purpose of drying the silicon wafers is achieved, water receiving discs 24 at the lower ends of the bases 1 can collect water drops on the surfaces of the silicon wafers through the drainage grooves 23, and the phenomenon that the water drops affect the ground to enable the.

In summary, the high-efficiency drying device after cleaning of the cleaning machine utilizes the circulating fan 4 and the heating device 3 to provide hot air for the interior of the drying device by arranging the drying box 2, the circulating fan 4 and the rotating disc 9, and then drives the rotating disc 9 and the air knife 12 to rotate through the driving motor 10, so that the direction of drying air flow can be adjusted, blowing and drying at different angles are realized, the drying efficiency is improved, and the labor cost and the production cost are reduced; through setting up first air outlet 14, second air outlet 15, first layer 17 and the second of placing place layer 18, the aperture of first air outlet 14 is one half bigger than the bore of second air outlet 15, and the second is placed layer 18 and is one half higher than first layer 17 of placing, can be according to the size of silicon chip with silicon chip classification place dry to make the suitability better, the stoving effect is better.

It should be noted that, in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a cleaning machine washs back high efficiency drying device, includes base (1), its characterized in that: the drying device is characterized in that a drying box (2) is fixedly connected to the upper end of a base (1), a heating device (3) is fixedly connected to the upper end of the drying box (2), circulating fans (4) are fixedly connected to both sides of the upper end of the base (1), air supply pipes (6) are fixedly connected to both sides of the drying box (2) through fixing mechanisms (5), an air outlet of each circulating fan (4) is fixedly connected with the air supply pipes (6), an air conveying pipe (7) is fixedly connected to the top end inside the drying box (2), a rotating disc (9) is rotatably connected to the outer side of the lower end of the air conveying pipe (7) through a ball bearing (8), a driving motor (10) is fixedly connected to the right half portion of the top end inside the drying box (2), a gear (11) is fixedly connected to the end portion of an output shaft of the driving motor (10), and the gear (11) is meshed with, the utility model discloses a drying cabinet, including the lower extreme of rolling disc (9), the equal fixedly connected with air knife (12) in lower extreme both sides of rolling disc (9), ventilation chamber (13) have all been seted up to the inside of rolling disc (9) and air knife (12), first air outlet (14) and second air outlet (15) have all been seted up to the first and lower half inboard of air knife (12), seat (16) are placed to the inside bottom fixedly connected with of stoving case (2), the first layer (17) of placing of upper end fixedly connected with of seat (16), layer (18) are placed to the first upper end fixedly connected with second of placing layer (17), the first upper end of placing layer (17) and second and placing layer (18) all is equipped with standing groove (19), the switch (20) that are used for controlling fan, driving motor (10) and heating device (3) have been inlayed to the upper end of base (1).

2. The high-efficiency drying device for the washed washer of claim 1, wherein: heating pipes (21) are arranged inside the heating device (3), four heating pipes (21) are arranged, and the heating pipes (21) are U-shaped.

3. The high-efficiency drying device for the washed washer of claim 1, wherein: the fixing mechanism (5) comprises a fixing clamp (22), and the fixing clamp (22) fixedly connects the air supply pipe (6) to two sides of the drying box (2) through bolts.

4. The high-efficiency drying device for the washed washer of claim 1, wherein: the aperture of the first air outlet (14) is one half larger than that of the second air outlet (15), the first placing layer (17) is one half lower than that of the second placing layer (18), the first air outlet (14) corresponds to the second placing layer (18), and the second air outlet (15) corresponds to the first placing layer (17).

5. The high-efficiency drying device for the washed washer of claim 1, wherein: drainage groove (23) have been seted up to the inside bottom of stoving case (2), and drainage groove (23) run through base (1), be equipped with water collector (24) under drainage groove (23).

6. The high-efficiency drying device for the washed washer of claim 1, wherein: the lower end of the rotating disc (9) is provided with three auxiliary air ports (25), and the number of the auxiliary air ports (25) is three.