CN210727894U - Super-hydrophobic medical instrument - Google Patents

Super-hydrophobic medical instrument Download PDF

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CN210727894U
CN210727894U CN201822071845.6U CN201822071845U CN210727894U CN 210727894 U CN210727894 U CN 210727894U CN 201822071845 U CN201822071845 U CN 201822071845U CN 210727894 U CN210727894 U CN 210727894U
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oxide layer
layer
fluorine
diamond
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唐永炳
石磊
蒋春磊
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Abstract

The utility model provides a super hydrophobic medical apparatus, a serial communication port, medical apparatus includes the medical apparatus basement, combines the oxide layer on medical apparatus basement surface combines the oxide layer deviates from the fluorine doping diamond-like carbon layer on medical apparatus basement surface, wherein, fluorine doping diamond-like carbon layer includes relative first surface and the second surface that sets up, first surface and oxide layer combine, the second surface deviates from the oxide layer, just the second surface is the micro-nano structure surface.

Description

Super-hydrophobic medical instrument
Technical Field
The utility model belongs to the technical field of the diamond-like coating, especially, relate to a super hydrophobic medical instrument.
Background
In recent years, super-hydrophobic materials with special wetting performance are widely concerned by people, and the super-hydrophobic materials have extremely wide application prospects in medical biology, industrial and agricultural production and daily life, such as self-cleaning materials, oil-water separation materials, anti-fouling woven fabrics, anti-drag materials and the like. However, the currently researched super-hydrophobic material has a complex preparation process and high cost, and the prepared super-hydrophobic material has low hardness and cannot meet the requirement of material diversification. Therefore, the development of a method for preparing a high-hardness and super-hydrophobic material has important promotion and significance for wide application of materials with special wetting performance.
Diamond-like carbon (DLC) film is an amorphous film, and is well suited as a wear-resistant coating due to its high hardness and high elastic modulus, low friction factor, wear resistance and good vacuum tribological properties, thus attracting attention from the tribological community and having a wide application prospect in the fields of tools, molds, parts and biomedical devices. In particular, diamond-like carbon has excellent properties such as high hardness, good wear resistance, good stability, good biocompatibility and the like, can be made into an ultra-sharp blade or plated on a surgical knife in the form of a film to prolong the service life of the knife, can be used as a coating for a human body implantation material to alleviate rejection, and can also be used as a targeting material for transporting drugs and marking characteristics. However, when diamond-like carbon is used as a medical device, the risk of microbial infection cannot be effectively reduced due to poor hydrophobicity.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a super hydrophobic medical apparatus aims at solving the problem that current medical apparatus that contains diamond-like carbon layer is hydrophobic.
In order to realize the purpose of the utility model, the utility model adopts the following technical scheme:
the utility model discloses an aspect provides a medical apparatus, medical apparatus includes the medical apparatus basement, combines the oxide layer on medical apparatus basement surface combines the oxide layer deviates from the fluorine doping diamond-like carbon layer on medical apparatus basement surface, wherein, fluorine doping diamond-like carbon layer includes relative first surface and the second surface that sets up, first surface and oxide layer combine, the second surface deviates from the oxide layer, just the second surface is the micro-nano structure surface.
Preferably, the surface of the oxide layer combined with the fluorine-doped diamond-like carbon layer is a micro-nano structure surface; the first surface and the second surface in the fluorine doped diamond-like carbon layer are parallel to each other.
Preferably, the thickness of the oxide layer is 0.3 to 2 micrometers.
Preferably, the thickness of the fluorine-doped diamond-like carbon layer is 0.1 to 1 micron.
Preferably, the thickness of the oxide layer is 1 to 1.5 micrometers.
Preferably, the thickness of the fluorine-doped diamond-like carbon layer is 0.3 to 0.7 microns.
Preferably, the medical device substrate is selected from one of a dental bur substrate, a scalpel substrate, and a forceps substrate.
Preferably, the dental bur substrate is selected from a cemented carbide substrate and a high-speed steel substrate, the scalpel substrate is selected from a stainless steel substrate, and the forceps substrate is selected from a stainless steel substrate.
Preferably, the oxide layer is an oxide layer of an oxide layer composed of titanium oxide, or the oxide layer is an oxide layer composed of titanium oxide and boron oxide.
Preferably, the medical device is composed of a medical device substrate, an oxide layer bonded on the surface of the medical device substrate, and a fluorine-doped diamond-like carbon layer bonded on the surface of the oxide layer, which faces away from the medical device substrate.
The utility model provides a medical apparatus forms the composite bed on medical apparatus basement surface, the composite bed includes the oxide layer and the fluorine doping diamond-like carbon layer of inter combination, and the oxide layer combines at medical apparatus basement surface, fluorine doping diamond-like carbon layer deviates from the surface of oxide layer is the micro-nano structure surface. The fluorine-doped diamond-like layer can improve surface hydrophobic properties compared to conventional diamond-like layers. On the basis, the fluorine-doped diamond-like carbon layer has a micro-nano structure surface, so that the hydrophobic effect of the diamond-like carbon layer can be further improved. The contact angle experiment shows that the contact angle (surface of the diamond-like carbon layer) of the diamond-like carbon composite layer is 150.0-155.0 degrees. In conclusion, the medical apparatus has excellent hydrophobic performance through fluorine doping and double-layer modification of a surface micro-nano structure, and the risk of bacterial infection in the medical process can be reduced.
Drawings
Fig. 1 is a schematic structural diagram of a diamond-like carbon composite layer according to an embodiment of the present invention;
fig. 2 is a graph showing a contact angle test result of the diamond-like carbon composite layer provided in embodiment 1 of the present invention.
Detailed Description
In order to make the technical problem, technical scheme and beneficial effect that the utility model will solve more clearly understand, combine the embodiment below, it is right the utility model discloses further detailed description proceeds. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it is to be understood that the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
With reference to fig. 1, an embodiment of the present invention provides a medical device, the medical device includes a medical device substrate 10, an oxide layer 20 bonded on a surface of the medical device substrate 10, and a fluorine-doped diamond-like carbon layer 30 bonded on a surface of the oxide layer 20 away from the medical device substrate 10, wherein the fluorine-doped diamond-like carbon layer 30 includes a first surface and a second surface which are oppositely disposed, the first surface is bonded with the oxide layer 20, the second surface is away from the oxide layer 20, and the second surface is a micro-nano structure surface.
The medical device substrate 10 and a composite layer structure bonded to the surface of the medical device substrate 10. The composite layer structure comprises a two-layer structure, specifically, an oxide layer 20 bonded to the surface of the medical device substrate 10, and a fluorine-doped diamond-like carbon layer 30 disposed on the surface of the oxide layer 20 facing away from the surface of the medical device substrate 10. The layers are described in detail below.
Medical device substrate 10
In the embodiment of the present invention, there is no strict limitation on the selection of the medical device substrate 10, and a composite coating layer may be formed on the surface of the conventional medical device substrate.
Specifically, the medical device base 10 is selected from one of a dental bur base, a scalpel base, and a forceps base. To the shape of dental drill basement, scalpel basement, surgical forceps basement, the utility model discloses do not have strict restriction, as long as can improve hydrophobic effect after forming oxide layer 20 fluorine doping diamond-like carbon layer 30 on its surface can. Further, the dental drill substrate is selected from a hard alloy substrate and a high-speed steel substrate, the scalpel substrate is selected from a stainless steel substrate, and the forceps substrate is selected from a stainless steel substrate.
In a specific embodiment, the dental bur substrate may be a cemented carbide substrate, a high speed steel substrate, or the like, and the oxide layer 20 of the diamond-like composite layer is bonded to the surface of the substrate; the scalpel substrate can be a stainless steel substrate such as a stainless steel 6Cr13 substrate, a stainless steel 440C substrate, a stainless steel 18/10 substrate and the like, and the oxide layer 20 in the diamond-like carbon composite layer is bonded on the surface of the substrate; the surgical clamp base may be a stainless steel base such as: stainless steel 316 substrate, stainless steel 346L substrate, stainless steel 304 substrate, etc., the oxide layer 20 in the diamond-like composite layer being bonded to the substrate surface.
Oxide layer 20
The embodiment of the utility model provides an in, oxide layer 20 is as the bearing layer of fluorine doping diamond-like carbon composite bed, and the transition layer between fluorine doping diamond-like carbon composite bed and the medical apparatus basement 10 is regarded as simultaneously, not only has better cohesion with medical apparatus basement 10, moreover with fluorine doping diamond-like carbon layer 30 between have better cohesion. Specifically, the oxide layer 20 is the oxide layer 20 composed of titanium oxide, or the oxide layer 20 is the oxide layer 20 composed of titanium oxide and boron oxide.
In some embodiments, the surface of the oxide layer 20 bonded to the fluorine doped diamond-like carbon layer 30 is a flat surface. The flat surface referred to herein means that the surface of the oxide layer 20 does not have a micro-nano structure, and does not mean that the surface of the oxide layer 20 may not form a curved surface or other shapes. In other embodiments, the surface of the oxide layer 20 combined with the fluorine-doped diamond-like carbon layer 30 is a micro-nano structure surface. The surface morphology of the oxide layer 20 itself does not greatly affect the hydrophobic properties of the diamond-like composite layer. However, it is difficult to make a surface micro-nano structure with obvious hydrophobic property by using a single diamond-like carbon layer. Therefore, the oxide layer 20 may be treated to form a micro-nano structured surface on at least one surface of the oxide layer 20. And then in the process of preparing the diamond-like carbon layer, the oxide layer 20 with the micro-nano structure surface is used as a template of the diamond-like carbon layer, and the diamond-like carbon layer with the micro-nano structure surface is formed by means of shaping of the micro-nano structure surface of the oxide layer 20.
Preferably, the thickness of the oxide layer 20 is between 0.3 microns and 2 microns, and more preferably, the thickness of the oxide layer 20 is between 1 micron and 1.5 microns. Titanium oxide of suitable thickness2The layer can effectively support the fluorine-doped diamond-like carbon composite layer, and can be used as a transition layer to be combined on the surface of other substrates. If the thickness of the oxide layer 20 is too thin, the film is brittle and does not support the fluorine doped diamond-like layer 30.
Fluorine doped diamond-like carbon layer 30
In the embodiment of the present invention, the fluorine doped diamond-like carbon layer 30 is a diamond-like carbon layer doped with fluorine. By fluorine doping, the hydrophobicity of the diamond-like carbon layer can be increased. Specifically, the fluorine-doped diamond-like carbon layer 30 includes a first surface and a second surface which are oppositely arranged, the first surface is combined with the oxide layer 20, the second surface is away from the oxide layer 20, and the second surface is a micro-nano structure surface. The fluorine-doped diamond-like carbon layer 30 improves the hydrophobic property thereof through the micro-nano structure of the second surface.
The present invention is not strictly limited to the surface structure of the first surface, which in some embodiments is a flat surface; the flat surface referred to herein means that the first surface does not have a micro-nano structure, and does not mean that the first surface may not form a curved surface or other shapes. In other embodiments, the first surface is a surface having a micro-nano structure. Of course, it is difficult to form a surface micro-nano structure having a good hydrophobic property by performing surface treatment on the diamond-like carbon layer or the fluorine-doped diamond-like carbon layer 30, and therefore, when the fluorine-doped diamond-like carbon layer 30 having a micro-nano structure surface is formed by the oxide layer 20, the first surface of the fluorine-doped diamond-like carbon layer 30 also has a micro-nano structure correspondingly.
In some embodiments, the surface of the oxide layer 20 bonded to the fluorine-doped diamond-like carbon layer 30 is a micro-nano structure surface, and the thickness of the fluorine-doped diamond-like carbon layer 30 is the same everywhere, that is, the thickness of the fluorine-doped diamond-like carbon layer 20 is the same everywhere. At this time, the second surface of the fluorine-doped diamond-like carbon layer 30 completes the duplication of the micro-nano structure surface of the oxide layer 20, thereby being beneficial to improving the hydrophobic effect thereof.
Preferably, the thickness of the fluorine-doped diamond-like carbon layer 30 is 0.1 to 1 micron, and the thickness range has good universal adaptability and can basically meet the requirements of using diamond-like carbon coatings in the medical appliance industry. More preferably, the fluorine-doped diamond-like carbon layer 30 has a thickness of 0.3 to 0.7 μm.
Further preferably, the thickness of the oxide layer 20 is 1 to 1.5 micrometers, and the thickness of the fluorine-doped diamond-like carbon layer 30 is 0.3 to 0.7 micrometers.
On the basis of the above examples, as a particularly preferred embodiment, the medical device is composed of a medical device substrate 10, an oxide layer 20 bonded on the surface of the medical device substrate 10, and a fluorine-doped diamond-like carbon layer 30 bonded on the surface of the oxide layer 20 facing away from the medical device substrate 10.
The embodiment of the utility model provides a medical apparatus forms the composite bed on medical apparatus basement 10 surface, the composite bed includes oxide layer 20 and the fluorine doping diamond-like carbon layer 30 that mutually combine, and oxide layer 20 combines on medical apparatus basement 10 surface, and fluorine doping diamond-like carbon layer 30 deviates from the surface of oxide layer 20 and is receiving the structure surface a little. The fluorine-doped diamond-like layer 30 can improve surface hydrophobic properties compared to a conventional diamond-like layer. On the basis, the fluorine-doped diamond-like carbon layer 30 has a micro-nano structure surface, so that the hydrophobic effect of the diamond-like carbon layer can be further improved. The contact angle experiment shows that the contact angle (surface of the diamond-like carbon layer) of the diamond-like carbon composite layer is 150-155.0 deg. In conclusion, the medical apparatus has excellent hydrophobic performance through fluorine doping and double-layer modification of a surface micro-nano structure, and the risk of bacterial infection in the medical process can be reduced.
The embodiment of the utility model provides a medical apparatus can obtain through following method preparation.
Accordingly, a second aspect of the embodiments of the present invention provides a method for manufacturing a medical apparatus, including the following steps:
s01, providing a medical apparatus substrate, and sequentially carrying out pretreatment, glow cleaning and ion etching cleaning on the medical apparatus substrate;
s02, placing the cleaned medical apparatus substrate in a deposition chamber, and preparing a metal boride layer on the surface of the medical apparatus substrate by adopting a magnetron sputtering method;
s03, placing the sample deposited with the metal boride layer in a heating device for annealing treatment, and preparing an oxide layer with a micro-nano structure on the surface, wherein the annealing treatment method comprises the following steps: preserving the heat for 1 to 8 hours at the temperature of 450 to 650 ℃;
s04, carrying out surface cleaning treatment on the oxide layer, placing the oxide layer in a deposition chamber, and depositing a fluorine-doped diamond-like carbon layer on the surface of the oxide layer.
The embodiment of the utility model provides a preparation method of diamond-like carbon composite bed, earlier prepare metal boride layer through magnetron sputtering method, then through annealing under specific high temperature condition, through boron, titanium oxidation changes metal boride coating surface topography structure, form the oxide layer that has micro-nano structure, prepare fluorine-doped diamond-like carbon layer on the oxide layer surface that has micro-nano structure at last, can form the fluorine-doped diamond-like carbon layer of surface unevenness, make micro-nano structure and fluoridize diamond-like carbon film combine to show improvement hydrophobic property, reach super hydrophobic effect, thereby solve the poor problem of individual layer diamond-like carbon coating hydrophobicity. The contact angle experiment shows that the diamond-like carbon composite layer prepared by the method has excellent hydrophobic property. The contact angle experiment shows that the contact angle (surface of the diamond-like carbon layer) of the diamond-like carbon composite layer is 150.0-155.0 degrees.
Specifically, in step S01, the medical device substrate is selected as described above. Sequentially carrying out pretreatment, glow cleaning and ion etching cleaning on the provided medical appliance substrate, and removing organic matters, particularly oil stains, on the surface of the medical appliance substrate through the pretreatment; the uneven parts of the surface of the substrate, such as residual moisture, gas and the like in scratches, are removed through glow cleaning and ion etching cleaning, so that the adhesion effect of the coating is improved. By cleaning gradually, the best cleaning effect is achieved, and the coating has the best binding force on the cleaned medical appliance substrate.
In some embodiments, the method of pretreating the medical device substrate is: and (2) carrying out ultrasonic cleaning on the medical instrument substrate by using distilled water, acetone and absolute ethyl alcohol in sequence, fully removing organic matters, particularly oil stains on the surface of the medical instrument substrate, and then drying and drying.
In a specific embodiment, the medical apparatus substrate is placed in distilled water for ultrasonic cleaning for 5-30 min, then placed in an acetone solution for ultrasonic cleaning for 5-30 min, and then placed in an absolute ethyl alcohol solution for ultrasonic cleaning for 5-30 min; and after cleaning, drying the surface of the substrate by using dry nitrogen, and finally, drying the sample in an air-blast drying oven at 80-150 ℃. Fixing the dried medical apparatus substrate on a rotating stand in ion source/arc ion plating composite coating equipment; closing the door of the vacuum chamber, pumping high vacuum and heating to 200-500 ℃.
After the medical instrument substrate is pretreated, glow cleaning is further performed. In some embodiments, the medical device substrate is glow cleaned with pure argon gas.
In a specific embodiment, the glow cleaning method comprises the following steps: opening a main valve, a pressure reducing valve, an ion source valve, an arc valve, a target valve and a mass flowmeter of an argon bottle, introducing argon into the vacuum chamber, controlling the flow of the argon to be 300-500 sccm, controlling the working pressure to be 1.0-1.7 Pa, and controlling the substrate bias voltage to be-500-800V, and performing glow cleaning on the substrate of the medical apparatus for 10-30 min. The glow cleaning is carried out under the conditions, so that the moisture and gas which are stored on the uneven surface of the medical apparatus substrate, particularly in scratches, can be quickly removed, the phenomenon that the adhesion force of the film layer is insufficient when the transition layer is deposited by combining the ion source and the arc ion plating in the follow-up process is prevented, and the bonding force of the film layer on the medical apparatus substrate is improved.
In order to further ensure that the moisture and the gas in the uneven surface of the medical apparatus substrate, particularly in the scratch, are sufficiently removed, after the glow cleaning is finished, the medical apparatus substrate is subjected to ion etching cleaning, and the moisture and the gas in the uneven surface of the medical apparatus substrate, particularly in the scratch, are completely removed in a relatively soft mode.
In some embodiments, the ion etching cleaning method includes: and after glow cleaning is finished, starting an ion source to perform ion bombardment cleaning on the sample, wherein the voltage of the ion source is 50-90V, the argon flow is 70-500 sccm, the working pressure is 0.5-1.7 Pa, and the bias voltage of the substrate is 100-800V. Under the above conditions, the moisture and gas that are not removed during the glow cleaning process can be completely removed. Preferably, the cleaning time of the ion bombardment cleaning is 10-30 min.
The embodiment of the utility model can remove various attachments on the surface of the medical appliance substrate step by step and with different forces by sequentially carrying out pretreatment, glow cleaning and ion etching cleaning on the medical appliance substrate, thereby improving the adhesive force of the coating on the surface of the medical appliance substrate; meanwhile, the surface of the medical appliance substrate is cleaned according to the method, and the timeliness is good.
In the step S02, in the embodiment of the present invention, the cleaned substrate of the medical device is placed in the deposition chamber, argon gas is introduced, the flow rate of argon gas is controlled to be 50 to 400sccm, the pressure of the vacuum chamber is adjusted to be 0.2 to 1.3Pa, the metal boride target is opened, the target power is controlled to be 0.5 to 3KW, the substrate is biased to be-10 to-200V, and the metal boride layer is prepared on the surface of the substrate of the medical device.
In embodiments of the invention, the metal boride in the metal boride layer is selected from TiB2、WB、WB2、CrB、ZrB2At least one of; more preferably TiB2
Preparation of metal boride layers, especially TiB2The vacuum chamber pressure, target power and substrate bias voltage in the layer step together determine the quality of the metal boride layer. Specifically, the substrate bias affects the bonding force of the metal boride layer on the substrate of the medical apparatus, and the embodiment of the invention is under the condition that the substrate bias is-10 to-200VAnd the obtained metal boride layer has high density and good binding force. If the substrate bias voltage is too low, the metal boride layer has poor bonding force; if the substrate bias is too high, on the one hand, sputtering to form a film is difficult due to too large stress, and on the other hand, the resulting film layer is too brittle and easily comes off the surface of the substrate of the medical device. The deposition rate is influenced by the pressure intensity of the vacuum chamber and the target power, and the deposition rate is too high or too low, which is not favorable for forming a film layer with good bonding force. The embodiment of the utility model provides a regulation and control the flow of argon gas is 50 ~ 400sccm to provide suitable real empty room pressure.
In the step S03, the sample deposited with the metal boride layer is placed in a heating device for annealing, and the TiB having a micro-nano structure on the surface is prepared by controlling the temperature and time of the annealing2And (3) a layer. Specifically, the annealing treatment method comprises the following steps: keeping the temperature for 1 to 8 hours at the temperature of 450 to 650 ℃. In the temperature range, the boron and the titanium in the metal boride layer are oxidized successively to form a micro-nano structure oxide, and the nano boron oxide formed after boron oxidation volatilizes at a high temperature to form an oxide layer with a micro-nano structure.
Further preferably, the annealing treatment method comprises: and preserving the heat for 5 to 8 hours at the temperature of 500 to 600 ℃, thereby forming a surface micro-nano structure which is more beneficial to improving the hydrophobic property of the fluorine-doped diamond-like carbon layer.
In a preferred embodiment, to heat TiB in a relatively gentle heating environment2The boron on layer is evenly oxidized and gradually volatilizes to form the oxide layer with micro-nano structure evenly distributed, the embodiment of the utility model provides an in the step that the sample carries out annealing treatment, with the rate of rise of temperature 1-10 ℃/min with the temperature rise to annealing temperature.
In the embodiment of the present invention, the annealing treatment is performed in an aerobic environment, and specifically may be performed in an air atmosphere. The heating device is not limited strictly, and a conventional heating device such as a tube furnace or a muffle furnace may be selected.
In step S04, the oxide layer is subjected to a surface cleaning treatment, which may be performed by the pretreatment and the glow cleaning treatment described above. Further, it is preferable to perform ion etching cleaning after glow cleaning.
And placing the cleaned oxide layer in a deposition chamber, and depositing a fluorine-doped diamond-like carbon layer on the surface of the oxide layer to form a surface with the same structure as the oxide layer.
Preferably, in the step of depositing the fluorine-doped diamond-like carbon layer on the surface of the oxide layer, a graphite target is started, and the power of the graphite target is adjusted to be 0.5-2 KW; introducing argon and tetrafluoromethane gas into the deposition chamber, adjusting the pressure of the vacuum chamber to be 0.5-1.0 Pa, the voltage of an ion source to be 50-100V and the substrate bias voltage to be 0-200V, and depositing a fluorine-doped diamond-like carbon layer on the surface of the oxide layer.
In the step of preparation fluorine doping diamond-like carbon layer, the basement biasing pressure influences the cohesion of fluorine doping diamond-like carbon layer on the oxide layer, the embodiment of the utility model provides a under the basement biasing pressure is 0 ~ -200V's condition, deposit fluorine doping diamond-like carbon layer, the cohesion of fluorine doping diamond-like carbon layer on the oxide layer that obtains is better.
In addition, in the step of preparing the fluorine-doped diamond-like carbon layer, the pressure intensity of the vacuum chamber has certain influence on the quality of the obtained fluorine-doped diamond-like carbon layer. The embodiment of the utility model provides an adjust real empty room pressure and be 0.5 ~ 1.0Pa, the fluorine doping diamond-like carbon layer that obtains strengthens at the cohesion of oxide layer surface. If the pressure of the vacuum chamber is too high, the deposition speed is too high, the obtained fluorine-doped diamond-like carbon layer has disordered lattices and irregular arrangement, and the bonding force of the fluorine-doped diamond-like carbon layer on the oxide layer can be reduced.
In the embodiment of the present invention, in the step of depositing the fluorine-doped diamond-like carbon layer on the surface of the self-supporting substrate, the deposition time is 20 to 100 minutes, thereby obtaining the fluorine-doped diamond-like carbon layer with a suitable thickness. Specifically, the thickness of the fluorine-doped diamond-like carbon layer is 0.1 to 1 micron.
The following description will be given with reference to specific examples.
Example 1
A dental bur comprising a bur substrate, an oxide layer bonded to a surface of the bur substrate, a fluorine doped diamond-like carbon layer bonded to a surface of the oxide layer facing away from the bur substrate,
the fluorine-doped diamond-like carbon layer comprises a first surface and a second surface which are oppositely arranged, the first surface is combined with the oxide layer, the second surface is deviated from the oxide layer, and the second surface is a micro-nano structure surface,
wherein the thickness of the oxide layer is 1.2 microns, and the thickness of the fluorine-doped diamond-like carbon layer is 0.5 microns.
Example 2
A scalpel comprising a scalpel substrate, an oxide layer bonded to a surface of the scalpel substrate, a fluorine doped diamond-like carbon layer bonded to the oxide layer facing away from the surface of the scalpel substrate,
the fluorine-doped diamond-like carbon layer comprises a first surface and a second surface which are oppositely arranged, the first surface is combined with the oxide layer, the second surface is deviated from the oxide layer, and the second surface is a micro-nano structure surface,
wherein the thickness of the oxide layer is 1.3 microns, and the thickness of the fluorine-doped diamond-like carbon layer is 0.6 microns.
Example 3
A surgical clamp comprising a hand-operated surgical clamp substrate, an oxide layer bonded to a surface of the surgical clamp substrate, a fluorine-doped diamond-like carbon layer bonded to a surface of the oxide layer facing away from the surgical clamp substrate,
the fluorine-doped diamond-like carbon layer comprises a first surface and a second surface which are oppositely arranged, the first surface is combined with the oxide layer, the second surface is deviated from the oxide layer, and the second surface is a micro-nano structure surface,
wherein the thickness of the oxide layer is 1.0 micron, and the thickness of the fluorine-doped diamond-like carbon layer is 0.5 micron.
Comparative example 1
A medical apparatus comprises a medical apparatus substrate, an oxide layer combined on the surface of the medical apparatus substrate, and a fluorine-doped diamond-like carbon layer combined on the surface of the oxide layer, which is far away from the surface of the medical apparatus substrate, wherein the fluorine-doped diamond-like carbon layer comprises a first surface and a second surface which are oppositely arranged, the first surface is combined with the oxide layer, the second surface is far away from the oxide layer, and the second surface is a micro-nano structure surface, wherein the thickness of the oxide layer is 1.2 micrometers, and the thickness of the fluorine-doped diamond-like carbon layer is 0.5 micrometer.
The medical devices provided in examples 1 to 3 and comparative example 1 were subjected to a water contact angle test experiment.
The test results are shown in table 1 below, in which the test results of example 1 are shown in fig. 2.
TABLE 1
Water contact Angle (°)
Example 1 152.036
Example 2 153.235
Example 3 155.012
Comparative example 1 90.524
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (9)

1. The medical apparatus is characterized by comprising a medical apparatus substrate, an oxide layer combined on the surface of the medical apparatus substrate, and a fluorine-doped diamond-like carbon layer combined on the surface, facing away from the medical apparatus substrate, of the oxide layer, wherein the fluorine-doped diamond-like carbon layer comprises a first surface and a second surface which are oppositely arranged, the first surface is combined with the oxide layer, the second surface faces away from the oxide layer, and the second surface is a micro-nano structure surface.
2. The medical apparatus according to claim 1, wherein the surface of the oxide layer bonded to the fluorine-doped diamond-like carbon layer is a micro-nano structured surface; the thickness of the fluorine doped diamond-like carbon layer is consistent.
3. The medical device of claim 1, wherein the oxide layer has a thickness of 0.3 to 2 microns.
4. The medical device of claim 1, wherein the fluorine doped diamond-like carbon layer has a thickness of 0.1 to 1 micron.
5. The medical device of any one of claims 1 to 4, wherein the oxide layer has a thickness of 1 micron to 1.5 microns.
6. The medical device of any one of claims 1 to 4, wherein the fluorine doped diamond-like carbon layer has a thickness of 0.3 to 0.7 microns.
7. The medical device of any one of claims 1 to 4, wherein the medical device substrate is selected from one of a dental bur substrate, a scalpel substrate, and a forceps substrate.
8. The medical instrument of claim 7, wherein the dental bur substrate is selected from the group consisting of cemented carbide substrates, high speed steel substrates, the scalpel substrate is selected from the group consisting of stainless steel substrates, and the forceps substrate is selected from the group consisting of stainless steel substrates.
9. The medical device of any one of claims 1 to 4, wherein the medical device is comprised of a medical device substrate, an oxide layer bonded to a surface of the medical device substrate, a fluorine doped diamond-like carbon layer bonded to a surface of the oxide layer facing away from the medical device substrate.
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WO2023045835A1 (en) * 2021-09-24 2023-03-30 北京北方华创微电子装备有限公司 Preparation method for metal compound film
CN116288347A (en) * 2023-03-01 2023-06-23 纳狮新材料有限公司杭州分公司 Method for reducing corrosive wear and marine environment surface corrosion wear resistant fluorocarbon base film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023045835A1 (en) * 2021-09-24 2023-03-30 北京北方华创微电子装备有限公司 Preparation method for metal compound film
CN116288347A (en) * 2023-03-01 2023-06-23 纳狮新材料有限公司杭州分公司 Method for reducing corrosive wear and marine environment surface corrosion wear resistant fluorocarbon base film

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