CN210690939U - Array beam wavefront correction system based on integrated corrector - Google Patents
Array beam wavefront correction system based on integrated corrector Download PDFInfo
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- CN210690939U CN210690939U CN201921490405.2U CN201921490405U CN210690939U CN 210690939 U CN210690939 U CN 210690939U CN 201921490405 U CN201921490405 U CN 201921490405U CN 210690939 U CN210690939 U CN 210690939U
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Abstract
The utility model discloses an array beam wavefront correction system based on integration corrector, including integration distorting lens, the integration sensor, first spectroscope, the second spectroscope, the beam contracting telescope, computer and high-voltage amplifier, the space of each recess of integration distorting lens is arranged and is arranged the one-to-one with the space of each beamlet of array beam, the array beam is reflected to the integration sensor through integration distorting lens, the integration sensor feeds back array beam wavefront distortion information to the computer, each channel voltage of computer according to wavefront distortion information control high-voltage amplifier, output for the driver in each recess of integration distorting lens, realize the independent correction in each beamlet wavefront of array beam. This system carries out integration with the independent wave-front correction device of many sets that correspond each beamlet in traditional array beam self-adaptation optical system, simple structure, easily assembly control has improved system work efficiency greatly, the utility model discloses but wide application in incoherent or coherent array beam field.
Description
Technical Field
The utility model belongs to the technical field of the adaptive optics field and specifically relates to a compact structure's adaptive optics system for array beam.
Background
The laser with multiple paths of lower power is synthesized into one beam for output, and the method is an effective way for improving far-field energy concentration of a laser emission system. In the actual beam combining process, aberration is inevitably introduced, and the beam quality is affected. Taking the output of the fiber laser matched collimator as an example, when the assembly in the axial direction has errors, the beam focus can generate axial offset, defocusing aberration occurs, and the focus position cannot be accurately positioned at a target; when there is an error in the assembly in the vertical axis direction, aberrations such as astigmatism and coma will be generated, so that the far field light spot of the light beam is dispersed, and the energy concentration is affected. Therefore, aberration correction of the array beam is the key to improving beam quality of the composite array beam system.
The self-adaptive optical system realizes beam aberration correction by utilizing the cooperation of the wavefront corrector and the sensor, and is an effective way for improving the beam quality. There are two basic requirements for wavefront correction of array beams. First, the array beam is an array set of multiple sub-beams, and the aperture of the beam is larger than that of a single beam, and the corresponding wavefront corrector and sensor also need to be made into a large aperture. The aperture of a common wavefront corrector, such as a micro-electromechanical deformable mirror, a spatial light modulator, a double piezoelectric plate deformable mirror, etc., is limited by the manufacturing process, and cannot meet the requirement of large aperture. Second, each sub-beam of the multi-beam is independent, and each sub-beam needs to be corrected independently in order to realize correct wavefront correction quickly. In the traditional wave-front corrector, the electrodes and the substrate are uniformly distributed, and the deformation of each area of the continuous mirror surface is connected, so that the independent deformation of each area is difficult to realize. Therefore, in this case, it is common practice to provide an independent adaptive optical device for each sub-beam for wavefront correction of the array beam. Therefore, the traditional array beam wavefront correction system becomes very large and complex, each beam of sub-beam is independently provided with a set of wavefront corrector and a wavefront sensor, the optical path is complex, the adjustment, assembly and maintenance of the system are very time-consuming, and the control procedure is very complicated.
SUMMERY OF THE UTILITY MODEL
The present invention aims at solving at least one of the technical problems in the related art to a certain extent. To this end, it is an object of the present invention to provide an array beam wavefront correction system based on an integrated corrector.
The utility model adopts the technical proposal that:
an array beam wavefront correction system based on an integrated corrector comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;
the first spectroscope is used for reflecting the array light beam to the integrated deformable mirror so that the array light beam is normally incident to the integrated deformable mirror;
the integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;
the second spectroscope is used for dividing the corrected array beam into at least two beams, wherein the two beams comprise a first beam and a second beam, and the first beam is condensed by the beam condensing telescope and enters the integrated sensor;
the integrated sensor is used for detecting the light spot form of each sub-beam of the array light beam after correction and acquiring the wavefront distortion information of each sub-beam;
the control unit is electrically connected with the integrated deformable mirror and is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.
Further, the system also comprises a quality evaluation unit which is arranged on the light path of the second light beam and is used for acquiring the target spot image of the corrected incoherent array light beam.
Still further, the quality evaluation unit includes a lens and a CCD camera, and the second light beam is converged onto the CCD camera target surface through the lens.
Furthermore, the control unit is electrically connected with the CCD camera and is also used for receiving the target light spot image acquired by the quality evaluation unit and evaluating the light spot quality according to the target light spot image.
Preferably, the control unit comprises a high-voltage amplifier and a computer, the number of channels of the high-voltage amplifier is not less than the number of grooves of the integrated deformable mirror, and the drivers in the grooves of the integrated deformable mirror are electrically connected with the channels of the high-voltage amplifier through the electric connection assembly.
Preferably, the drivers in the grooves of the integrated deformable mirror comprise a bimorph driver, a microelectromechanical driver and a spatial light modulation driver.
Preferably, the spatial position of each honeycomb mirror body of the integrated deformable mirror corresponds to the spatial position of each sub-beam of the incoherent array beam in a one-to-one manner.
The utility model has the advantages that:
the utility model discloses utilize its mirror surface deformation's of integration deformable mirror subregion isolation characteristic, overcome traditional array beam wavefront regulation and control system's numerous and diverse nature problem, solved the contradiction of independent control and system simplification in each sub-beam wavefront of array beam, provide a simple structure, easy to carry out, can each sub-beam wavefront array beam self-adaptation control system of independent control.
Drawings
Fig. 1 is a schematic diagram of an array beam adaptive wavefront control system based on an integrated deformable mirror in the present invention;
fig. 2 is a schematic diagram of spatial arrangement of array light beams in the present invention;
fig. 3 is a schematic rear view of an integrated deformable mirror of the present invention;
fig. 4 is a schematic perspective view of an integrated deformable mirror of the present invention.
Description of reference numerals:
1. an integrated deformable mirror; 2. an integral sensor; 3. a quality evaluation unit; 4. a control unit; 41. a computer; 42. a high voltage amplifier; 6. a first beam splitter; 7. a second beam splitter; 8. a beam-shrinking telescope; 9. a first light beam; 10. a second light beam; 11. a central recess; 12. a central sub-beam; 13. a central shaft of the integrated deformable mirror; 22. a driver; 31. a lens; a CCD camera.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
Example 1
As shown in fig. 1, in this embodiment, the array beam wavefront correction system based on the integrated corrector includes an integrated deformable mirror 1, an integrated sensor 2, a quality evaluation unit 3, a control unit 4, a first spectroscope 6, a second spectroscope 7, and a beam reduction telescope 8, where the control unit 4 includes a computer 4 and a high-voltage amplifier 5, the quality evaluation unit 3 includes a lens 31 and a CCD camera 32, the array beam is reflected by the first spectroscope 6, the second spectroscope 7 is transmitted to the integrated deformable mirror 1, the incident direction is normal incidence, the integrated deformable mirror 1 is controlled by each channel voltage of the high-voltage amplifier 5 to deform, the wavefront phase correction is independently performed on each sub beam of the array beam incident thereon, and the corrected array beam is reflected to the second spectroscope 7. The second beam splitter 7 splits the corrected array light beam into two light beams, including a reflected first light beam 9 and a transmitted second light beam 10, wherein the first light beam 9 is focused by the lens 31 and converged to a target surface of the CCD camera 32 for imaging, and the CCD camera 32 sends the acquired target light spot image to the computer 4. The second light beam 10 is transmitted through the first beam splitter 6, then is condensed by the beam condensing telescope 8, and enters the integrated sensor 2. The integrated sensor 2 detects the spot form of each sub-beam of the array beam, calculates the optical axis offset, acquires the wavefront distortion information of each sub-beam, and sends the wavefront distortion information to the computer 4. The computer 4 carries out light beam quality evaluation according to the image of the target light spot sent by the CCD camera 32, judges whether to start a wavefront correction program according to the light beam quality, if so, converts received wavefront distortion information from the integrated sensor 2 into voltage information by using a recovery algorithm and outputs the voltage information to the high-voltage amplifier 5, and each channel of the high-voltage amplifier 5 is respectively and electrically connected with the driver 22 in each groove of the integrated deformable mirror 1 and is used for providing driving voltage for each driver 22 so that each driver 22 generates different deformation amounts under different voltage environments and dragging the substrate reflecting layer at the position of each driver 22 to generate deformation so as to correct the wavefront aberration of each corresponding sub-light beam in the array light beam; if not, the voltage of each channel of the high-voltage amplifier 5 is kept unchanged. This system adopts the design method of integration, is used for the wavefront correction of array beam with integration ametropia mirror 1, is used for the wavefront information detection of array beam with integration sensor 2, compares in traditional array beam self-adaptation optical system, the embodiment of the utility model provides a wavefront correction system obtains very big simplification structurally, integrates the many sets of independent wavefront correction equipment that are used for each sub-beam wavefront correction originally, replaces a plurality of ametropia mirrors and a plurality of sensors with integration ametropia mirror and integration sensor, has not only saved the space that the system occupy greatly, and has reduced the system debugging and the assembly degree of difficulty, makes the system easily control and maintain, improves system work efficiency. In this embodiment, the system uses the CCD camera 32 to perform beam quality evaluation on the target spot image, so as to monitor the beam quality and prevent the adaptive optical device from being in a working state all the time, thereby improving the system efficiency.
The embodiment of the utility model provides a spatial arrangement of array beam, as shown in FIG. 2, this array beam is by seven bundles of sub-beam synthesizations, and sub-beam 12 is located the center, and all the other six bundles of sub-beams evenly arrange around central sub-beam 12. In other embodiments, the number and arrangement of the sub-beams may be designed as desired. The embodiment of the utility model provides an in, array beam's synthesis is selected and is used fiber laser as the light source, and each fiber laser is used for exporting high power laser sub-beam, and these sub-beams make the optical axis direction parallel to each other through the collimation of collimation system, and the beam combining device carries out space group and restraints the output again and give the utility model discloses wavefront correction system's first beam splitter 6.
Based on the spatial arrangement of the sub-beams of the array beam, the structure schematic diagram of the integrated deformable mirror specifically selected in this embodiment is shown in fig. 3 and 4. The specific structure of the integrated deformable mirror 1 in the embodiment is the same as that of the utility model application CN 109725415A. As shown in fig. 3, a schematic rear view structure of an integrated deformable mirror 1 is shown, where the integrated deformable mirror 1 includes a substrate, the substrate is generally made of a ceramic material with a certain thickness, the substrate has an upper surface, a lower surface, or a front surface and a rear surface, one surface of the substrate is coated with a reflective layer as a deformable mirror surface, and the other surface is provided with at least one groove;
seven grooves are formed in a base material, regular hexagonal shapes with the same size are adopted, one groove is arranged in the center of the base, and the other six grooves are closely and uniformly distributed around the base. And a round boss is arranged at the bottom of each groove and used for connecting each piezoelectric driver. The size of each notch is set to be larger than that of each sub-beam of the array beam, the spatial distribution of each hexagonal groove is consistent with that of the sub-beams of the array beam, namely when the sub-beams 12 of the array beam are normally incident to the mirror surface area corresponding to the honeycomb groove 11 in the center of the integrated deformable mirror, the sub-beams can be in one-to-one correspondence with the honeycomb mirror bodies only by rotating the integrated deformable mirror by a proper angle around the central axis 13.
The embodiment of the utility model provides an integration distorting lens be honeycomb groove specific structure not injecing, still can be circular, square etc. and the quantity in honeycomb groove is not injecing yet, can arrange and quantity according to the space of synthetic beam array and carry out random adjustment. In addition, the adaptive wavefront control system of the embodiment of the present invention does not limit the spatial arrangement and coherence of the array beams, and is not limited to the spatial arrangement of the incoherent array beams in some embodiments, nor to the number of sub-beams in the embodiments. The embodiment of the utility model provides an in every honeycomb groove driver of integration deformable mirror, be not limited to the two bimorph structures in above-mentioned embodiment, still can be for multiple modes such as micro-electromechanical, integrated form.
While the preferred embodiments of the present invention have been described, the present invention is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.
Claims (7)
1. An array beam wavefront correction system based on an integrated corrector is characterized by comprising an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;
the first spectroscope is used for reflecting the array light beam to the integrated deformable mirror so that the array light beam is normally incident to the integrated deformable mirror;
the integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;
the second spectroscope is used for dividing the corrected array beam into at least two beams, wherein the two beams comprise a first beam and a second beam, and the first beam is condensed by the beam condensing telescope and enters the integrated sensor;
the integrated sensor is used for detecting the light spot form of each sub-beam of the array light beam after correction and acquiring the wavefront distortion information of each sub-beam;
the control unit is electrically connected with the integrated sensor, the control unit is electrically connected with the integrated deformable mirror, and the control unit is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.
2. The array beam wavefront correction system of claim 1, further comprising a quality evaluation unit disposed on the optical path of the second beam for acquiring the corrected array beam to-target spot image and sending to the control unit.
3. The array beam wavefront correction system of claim 2, wherein the quality assessment unit comprises a lens and a CCD camera, the second beam being converged onto the CCD camera target surface via the lens.
4. The array beam wavefront correction system of claim 3, wherein the control unit is electrically connected to the CCD camera, and the control unit is further configured to receive the target spot image obtained by the quality evaluation unit and perform spot quality evaluation according to the target spot image.
5. The array beam wavefront correction system of any one of claims 1-4, wherein the control unit comprises high voltage amplifiers and a computer, the number of channels of the high voltage amplifiers is not less than the number of grooves of the integrated deformable mirror, and the drivers in the grooves of the integrated deformable mirror are electrically connected with the channels of the high voltage amplifiers through the electrical connection components.
6. The array beam wavefront correction system of claim 5, wherein the actuators in the grooves of the integral deformable mirror comprise bimorph actuators, microelectromechanical actuators, spatial light modulation actuators.
7. The array beam wavefront correction system of claim 5, wherein the number of the integrated deformable mirror grooves is equal to the number of the array beam sub-beams, and the spatial positions of the grooves of the integrated deformable mirror correspond to the spatial positions of the sub-beams of the array beam one to one.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921490405.2U CN210690939U (en) | 2019-09-06 | 2019-09-06 | Array beam wavefront correction system based on integrated corrector |
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| CN201921490405.2U CN210690939U (en) | 2019-09-06 | 2019-09-06 | Array beam wavefront correction system based on integrated corrector |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579873A (en) * | 2019-09-06 | 2019-12-17 | 中国人民解放军国防科技大学 | array beam wavefront correction system and method based on integrated corrector |
| CN111928960A (en) * | 2020-08-19 | 2020-11-13 | 深圳元戎启行科技有限公司 | Wavefront detection device and imaging system based on wavefront detection |
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2019
- 2019-09-06 CN CN201921490405.2U patent/CN210690939U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579873A (en) * | 2019-09-06 | 2019-12-17 | 中国人民解放军国防科技大学 | array beam wavefront correction system and method based on integrated corrector |
| CN110579873B (en) * | 2019-09-06 | 2024-04-02 | 中国人民解放军国防科技大学 | Array beam wavefront correction system and method based on integrated corrector |
| CN111928960A (en) * | 2020-08-19 | 2020-11-13 | 深圳元戎启行科技有限公司 | Wavefront detection device and imaging system based on wavefront detection |
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