CN210633703U - Robot arm and wafer processing apparatus - Google Patents
Robot arm and wafer processing apparatus Download PDFInfo
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- CN210633703U CN210633703U CN201920967295.8U CN201920967295U CN210633703U CN 210633703 U CN210633703 U CN 210633703U CN 201920967295 U CN201920967295 U CN 201920967295U CN 210633703 U CN210633703 U CN 210633703U
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- 238000004519 manufacturing process Methods 0.000 abstract description 4
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- 238000000034 method Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
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- 238000009434 installation Methods 0.000 description 3
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
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Abstract
The utility model relates to a robotic arm and wafer processing apparatus, wherein robotic arm includes: an arm body; the power supply block is mounted to the arm body, a conductive column is arranged on the surface of the power supply block, and the power supply block is used for supplying power to the arm body and can move along with the arm body; the driver is electrically connected to the power supply block and used for driving the arm body to move; the mounting bracket for installing the arm body includes: the supporting track is arranged on the surface of one side, facing the mechanical arm, of the mounting rack and used for providing support for the arm body, and the arm body is mounted to the supporting track; the conductive bar is arranged on the mounting frame, faces to one side where the power supply block is located, is parallel to the length direction of the support track in the length direction, and is used for being in electrical contact with the conductive column of the power supply block; the arm body can move along the length direction of the support track. The mechanical arm and the wafer processing device can solve the problem of cable damage, reduce consumption of material cost and prolong total production time of the machine table.
Description
Technical Field
The utility model relates to a wafer manufacture processing equipment field, concretely relates to robotic arm and wafer processing apparatus.
Background
Traditional robotic arm all is connected with the control host computer platform through power cord and signal line, and at the during operation, the robotic arm comes the motion of returning, can drag to be connected to the power cord and the signal line back and forth movement of control host computer platform cause the damage of cable very easily, need people to maintain, change it, when needing to consume the material cost, also very occupation time, influence the total production of this board for a long time.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a robotic arm and wafer processing apparatus can solve the problem that the cable damaged, reduces the consumption to material cost, and is long when increasing the total production of board.
In order to solve the above technical problem, the following provides a robot arm, including: an arm body; the power supply block is mounted to the arm body, a conductive column is arranged on the surface of the power supply block, and the power supply block is used for supplying power to the arm body and can move along with the arm body; the driver is electrically connected to the power supply block and used for driving the arm body to move; the mounting bracket for installing the arm body includes: the supporting track is arranged on the surface of one side, facing the mechanical arm, of the mounting rack and used for providing support for the arm body, and the arm body is mounted to the supporting track; the conductive bar is arranged on the mounting frame, faces to one side where the power supply block is located, is parallel to the length direction of the support track in the length direction, and is used for being in electrical contact with the conductive column of the power supply block; the arm body can move along the length direction of the support track.
Optionally, the mounting bracket further includes an electric power channel disposed on a surface of a side facing the robot arm, and configured to mount the conductive strip, where a length direction of the electric power channel is identical to a length direction of the support track, and the length of the electric power channel is greater than or equal to the length of the support track.
Optionally, the conducting strip is a U-shaped conducting strip, the head and the tail of the conducting strip bend towards one side where the mechanical arm is located, the U-shaped conducting strip is arranged in the electric power channel, an area where the U-shaped conducting strip does not bend faces towards one side where the power supply block is located, and the length of the area is consistent with that of the support track.
Optionally, the number of the conductive strips is three, the number of the power channels is also three, each conductive strip is correspondingly arranged in one power channel, and the three conductive strips are respectively used for being connected to a live wire, a zero wire and a ground wire of a mains supply.
Optionally, the number of the conductive pillars is 3, and the relative positions of the three conductive pillars correspond to the relative positions of the three conductive bars, and each conductive pillar is electrically connected to one conductive bar.
Optionally, the driver includes: the driving motor is electrically connected with the power supply block, is connected to the arm body and is used for driving the arm body to move along the length direction of the support track; the robotic arm further comprises: and the bearing is connected to an output shaft of the driving motor, can move along with the output shaft, is used for converting the rotation of the output shaft into the movement of the bearing along the length direction of the support track, and is installed in the support track when the mechanical arm works.
Optionally, the method further includes: the fixed block, set up in the support track, can follow support track's length direction motion, including the orientation the fixed column that one side at robotic arm place set up, the fixed column is used for fixing the bearing.
Optionally, the fixing column is adapted to the size of the bearing, and is used for being inserted into the bearing to achieve installation of the mechanical arm.
Optionally, the method further includes: the wireless signal transmitter is used for being connected to an external control host machine and transmitting a control signal transmitted by the control host machine to the mechanical arm; and the wireless signal receiver is electrically connected to the power supply block and used for receiving the control signal sent by the wireless signal transmitter so as to control the mechanical arm.
In order to solve the above technical problem, a wafer processing apparatus is further provided below, including the robot arm.
The utility model discloses a robotic arm and wafer processing apparatus pass through the electrical contact between power supply piece and the busbar, the use power cord has been avoided, thereby when having avoided using the power cord to provide the required electric energy of robotic arm, the cable conductor is dragged by the arm body of back and forth movement, also make a round trip reciprocating motion and the emergence of the phenomenon of the cable conductor damage that causes, the consumption to the material has been reduced, the required time of maintaining the cable has been reduced, robotic arm's length of work has been increased, the side has improved productivity ratio, and simple structure, and the function is convenient. Further, set up wireless signal transmitter and wireless signal receiver for transmission control the required control signal of robotic arm has avoided using the signal line, thereby has avoided the signal line to be in reciprocating dragging and the emergence of the phenomenon of cable damage that causes is made a round trip in the motion process of arm body.
Drawings
Fig. 1 is a schematic front view of a robot arm according to an embodiment of the present invention.
Fig. 2 is a schematic side view of a robot arm according to an embodiment of the present invention.
Fig. 3 is a schematic perspective view of the bus bar according to an embodiment of the present invention.
Detailed Description
The present invention provides a robot arm and a wafer processing apparatus, which will be described in detail below with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1 and 2, fig. 1 is a schematic front view of a robot according to an embodiment of the present invention, and fig. 2 is a schematic side view of the robot according to an embodiment of the present invention.
In this particular embodiment, a robot arm is provided, comprising: an arm body 101; the power supply block 102 is mounted on the arm body 101, a conductive column 201 is arranged on the surface of the power supply block 102, and the power supply block 102 is used for supplying power to the arm body 101 and can move along with the arm body 101; a driver 106 electrically connected to the power supply block 102 for driving the arm body 101 to move; the mounting bracket 103 is used for mounting the arm body 101, and includes: a support rail 105, disposed toward a side where the robot arm is located, for providing support for the arm body 101, wherein the arm body 101 is mounted to the support rail 105; the conductive bar 204 is mounted on the mounting frame 103, is disposed toward the side where the power supply block 102 is located, and has a length direction parallel to the length direction of the support rail 105, and is configured to electrically contact the conductive post 201 of the power supply block 102; the arm body 101 is movable along the length direction of the support rail 105.
Robotic arm in this embodiment is provided with conducting bar 204 and power supply block 102, and use conducting bar 204, through the electrical contact between power supply block 102 and the conducting bar 204, provide the required electric energy of robotic arm motion, when having avoided using the power cord to provide the required electric energy of robotic arm, the cable conductor is dragged by back and forth movement's arm body 101, also carry out the reciprocating motion back and forth and the emergence of the phenomenon of the cable conductor damage that causes, the consumption to the material has been reduced, the required time of carrying out the maintenance to the cable has been reduced, robotic arm's length of work has been increased, the side has improved productivity ratio, moreover, the steam generator is simple in structure, and convenient functions.
In one embodiment, the inner surface of the support track 105 is smooth to reduce friction on the parts of the arm body 101 that contact the support track 105 during movement of the arm body 101 along the support track 105. The surface of the conductive strip 204 is also smooth to reduce the friction force applied to the power supply block 102 during the movement of the arm body 101 along the support track 105.
In a specific embodiment, the mounting frame 103 further includes a power channel 104 disposed on a surface facing a side where the robot arm is located, for mounting the conductive strip 204, and a length direction of the power channel 104 is identical to a length direction of the support rail 105, and the length is greater than or equal to the length of the support rail 105. In this way, no matter where the arm body 101 moves along the length direction of the support rail 105, the conductive column 201 of the power supply block 102 can be in electrical contact with the conductive strip 204, and the power supply block 102 is supplied with power from the conductive strip 204.
Please refer to fig. 3, which is a schematic perspective view of a conductive bar according to an embodiment of the present invention. In this specific embodiment, the conductive strip 204 is a U-shaped conductive strip, the head and the tail of the conductive strip are bent towards the side where the robot arm is located, the U-shaped conductive strip is disposed in the electric power channel 104, the non-bent area of the U-shaped conductive strip is disposed towards the side where the power supply block is located, and the length of the non-bent area of the U-shaped conductive strip is consistent with the length of the support track 105.
In one embodiment, each conductive strip 204 is mounted at the deepest portion of each power channel 104. When the conductive strip 204 is a U-shaped conductive strip, the bent head and tail of the U-shaped conductive strip are perpendicular to the non-bent region of the U-shaped conductive strip, and are attached to the side walls at the head and tail ends of the power channel 104.
In one embodiment, the conductive strip 204 is affixed to an inner surface of the power channel 104. In other embodiments, the conductive strip 204 may also be welded or embedded to the inner surface of the power channel 104.
In one embodiment, the number of the conductive strips 204 is three, which are respectively used for connecting to the live wire, the neutral wire and the ground wire of the commercial power. The number of the electric power channel 104 is also three, and each conductive strip 204 is correspondingly disposed in one electric power channel 104, so that the conductive strips 204 can be isolated from each other, and the conductive strips 204 can be prevented from contacting each other to cause short circuit or open circuit.
In one embodiment, the power channels 104 in which the three conductive strips 204 are located have different depths. In one embodiment, the three conductive strips 204 are disposed in a delta shape after being disposed in the respective power channels 104 when viewed from the side, and the uppermost conductive strip 204 and the lowermost conductive strip 204 are shallower than the middle conductive strip 204 in the depth of the power channel 104. In one embodiment, when the conductive strip 204 is a U-shaped conductive strip, the tips of the bent ends of the uppermost U-shaped conductive strip and the lowermost U-shaped conductive strip are flush with the plane where the power channel 104 is disposed. In fact, the distribution of the three conductive strips 204 can be set according to the requirement.
In one embodiment, the number of the conductive pillars 201 is 3, and the relative positions of three conductive pillars 201 correspond to the relative positions of three conductive bars 204, and each conductive pillar 201 is electrically connected to one conductive bar 204. When the power channels 104 in which the three conductive bars 204 are located have different depths, the three conductive posts 201 also have different lengths so as to electrically contact the three conductive posts 201 disposed at different depths, respectively.
In one embodiment, the conductive strip 204 is made of a conductive material, including copper, silver, iron, and the like. The conductive post 201 is also made of a conductive material.
In fact, the number of the conductive strips 204 and the conductive pillars 201 may also be two. In this particular embodiment, the conductive strip 204 is not connected to ground, but only to the live and neutral wires. In other embodiments, the number of the conductive strips 204 is 3, and the number of the conductive posts 201 is two. In this case, the conductive post 201 is not in electrical contact with the conductive strip 204 connected to ground, but only with the conductive strip 204 connected to the live and neutral conductors.
Note that the conductive posts 201 are insulated from each other.
In one embodiment, the driver 106 comprises: the driving motor is electrically connected with the power supply block 102, is connected to the arm body 101, and is used for driving the arm body 101 to move along the length direction of the support track 105; the robotic arm further comprises: and a bearing 202 connected to an output shaft 203 of the driving motor and capable of following the output shaft 203 for converting the rotation of the output shaft 203 into the movement of the bearing 202 along the length direction of the support rail 105, wherein the bearing 202 is installed in the support rail 105 when the robot arm works.
In one embodiment, the robot further comprises: and the fixing block 206 is arranged in the support rail 105, can move along the length direction of the support rail 105, and comprises a fixing column 205 arranged towards one side where the mechanical arm is located, and the fixing column 205 is used for fixing the bearing 202. The arm body 101 is mounted to the support rail 105 by a combination of a drive motor, bearings 202, and a fixed block 206 within the support rail 105.
In one embodiment, when the bearing 202 moves along the length of the support rail 105, the fixing block 206 also follows the bearing 202 to move along the length of the support rail 105. Thus, when the bearing 202 drives the arm body 101 with a large mass to move along the length direction of the support rail 105, there is an action point disposed inside the support rail 105 to help the bearing 202 stabilize the position, and the bearing 202 does not fall off the support rail 105.
In one embodiment, the fixing post 205 is adapted to the size of the bearing 202 for inserting into the bearing 202 to achieve the installation of the robot arm. Specifically, the fixing post 205 is inserted into an inner ring of the bearing 202 to fix a relative position between the fixing post 206 and the bearing 202.
In one embodiment, the robot further comprises: the wireless signal transmitter is used for being connected to an external control host machine and transmitting a control signal transmitted by the control host machine to the mechanical arm; and the wireless signal receiver is electrically connected to the power supply block 102 and is used for receiving the control signal sent by the wireless signal transmitter so as to control the mechanical arm.
Set up wireless signal transmitter and wireless signal receiver for transmission control the required control signal of robotic arm has avoided using the signal line, thereby has avoided the signal line to be in the phenomenon that the cable that causes was damaged in the reciprocating drag that makes a round trip in the motion process of arm body 101 takes place.
In one embodiment, the wireless signal transmitter includes a power modem, modulates the control signal into a certain signal frequency range, and loads the control signal into the power propagated through the conductive strip 204 for transmission, and the transmission of the control information is realized following the propagation of the power. In this particular embodiment, the wireless signal transmitter is connected to the conductive strip 204.
The wireless signal receiver comprises means for demodulating the modulated control signal, such as a wireless router, or a 4G network receiver, which may be used to demodulate the modulated control signal. Since the wireless signal receiver is connected to the power supply block 102, when the wireless signal transmitter is a modem, the wireless signal receiver can also acquire a modulated signal added to the power received by the power supply block 102, perform a corresponding demodulation operation, demodulate the modulated signal into a control signal, and control the operation of the robot arm.
In practice, the wireless signal transmitter may be a wireless bridge, and the wireless signal receiver may be a device capable of receiving and analyzing the signal transmitted by the wireless bridge.
In a specific implementation manner, the wireless signal transmitter is connected to a sending device of the control signal, such as a portable device like a tablet computer, so that the motion state of the mechanical arm can be adjusted in real time through the portable device, which is more convenient and faster.
In order to solve the above technical problem, a wafer processing apparatus is further provided below, including the robot arm.
Wafer processing apparatus among this embodiment is provided with robotic arm wafer processing apparatus passes through robotic arm carries the in-process of wafer 107, the required electric energy of robotic arm motion is provided through the electrical contact between power supply piece 102 and the conducting bar 204, when having avoided using the cable conductor to provide the required electric energy of robotic arm, the cable conductor is dragged by back and forth movement's arm body 101, also carry out the reciprocating motion and the emergence of the phenomenon of the cable conductor damage that causes, the consumption to the material has been reduced, the required time of maintenance has been reduced to the cable, robotic arm's operating time has been increased, the side has improved productivity ratio, and simple structure, and the function is convenient.
In a specific embodiment, the mounting frame 103 further includes a power channel 104 disposed on a surface facing a side where the robot arm is located, for mounting the conductive strip 204, and a length direction of the power channel 104 is identical to a length direction of the support rail 105, and the length is greater than or equal to the length of the support rail 105. In this way, no matter where the arm body 101 moves along the length direction of the support rail 105, the conductive column 201 of the power supply block 102 can be in electrical contact with the conductive strip 204, and the power supply block 102 is supplied with power from the conductive strip 204.
Please refer to fig. 3, which is a schematic perspective view of a conductive bar according to an embodiment of the present invention. In this specific embodiment, the conductive strip 204 is a U-shaped conductive strip, the head and the tail of the conductive strip are bent towards the side where the robot arm is located, the U-shaped conductive strip is disposed in the electric power channel 104, the non-bent area of the U-shaped conductive strip is disposed towards the side where the power supply block is located, and the length of the non-bent area of the U-shaped conductive strip is consistent with the length of the support track 105.
In one embodiment, each conductive strip 204 is mounted at the deepest portion of each power channel 104. When the conductive strip 204 is a U-shaped conductive strip, the bent head and tail of the U-shaped conductive strip are perpendicular to the non-bent region of the U-shaped conductive strip, and are attached to the side walls at the head and tail ends of the power channel 104.
In one embodiment, the conductive strip 204 is affixed to an inner surface of the power channel 104. In other embodiments, the conductive strip 204 may also be welded or embedded to the inner surface of the power channel 104.
In one embodiment, the number of the conductive strips 204 is three, which are respectively used for connecting to the live wire, the neutral wire and the ground wire of the commercial power. The number of the electric power channel 104 is also three, and each conductive strip 204 is correspondingly disposed in one electric power channel 104, so that the conductive strips 204 can be isolated from each other, and the conductive strips 204 can be prevented from contacting each other to cause short circuit or open circuit.
In one embodiment, the power channels 104 in which the three conductive strips 204 are located have different depths. In one embodiment, the three conductive strips 204 are disposed in a delta shape after being disposed in the respective power channels 104 when viewed from the side, and the uppermost conductive strip 204 and the lowermost conductive strip 204 are shallower than the middle conductive strip 204 in the depth of the power channel 104. In one embodiment, when the conductive strip 204 is a U-shaped conductive strip, the tips of the bent ends of the uppermost U-shaped conductive strip and the lowermost U-shaped conductive strip are flush with the plane where the power channel 104 is disposed. In fact, the distribution of the three conductive strips 204 can be set according to the requirement.
In one embodiment, the number of the conductive pillars 201 is 3, and the relative positions of three conductive pillars 201 correspond to the relative positions of three conductive bars 204, and each conductive pillar 201 is electrically connected to one conductive bar 204. When the power channels 104 in which the three conductive bars 204 are located have different depths, the three conductive posts 201 also have different lengths so as to electrically contact the three conductive posts 201 disposed at different depths, respectively.
In one embodiment, the conductive strip 204 is made of a conductive material, including copper, silver, iron, and the like. The conductive post 201 is also made of a conductive material.
In fact, the number of the conductive strips 204 and the conductive pillars 201 may also be two. In this particular embodiment, the conductive strip 204 is not connected to ground, but only to the live and neutral wires. In other embodiments, the number of the conductive strips 204 is 3, and the number of the conductive posts 201 is two. In this case, the conductive post 201 is not in electrical contact with the conductive strip 204 connected to ground, but only with the conductive strip 204 connected to the live and neutral conductors.
Note that the conductive posts 201 are insulated from each other.
In one embodiment, the driver 106 comprises: the driving motor is electrically connected with the power supply block 102, is connected to the arm body 101, and is used for driving the arm body 101 to move along the length direction of the support track 105; the robotic arm further comprises: and a bearing 202 connected to an output shaft 203 of the driving motor and capable of following the output shaft 203 for converting the rotation of the output shaft 203 into the movement of the bearing 202 along the length direction of the support rail 105, wherein the bearing 202 is installed in the support rail 105 when the robot arm works.
In one embodiment, the robot further comprises: and the fixing block 206 is arranged in the support rail 105, can move along the length direction of the support rail 105, and comprises a fixing column 205 arranged towards one side where the mechanical arm is located, and the fixing column 205 is used for fixing the bearing 202.
In one embodiment, when the bearing 202 moves along the length of the support rail 105, the fixing block 206 also follows the bearing 202 to move along the length of the support rail 105. Thus, when the bearing 202 drives the arm body 101 with a large mass to move along the length direction of the support rail 105, there is an action point disposed inside the support rail 105 to help the bearing 202 stabilize the position, and the bearing 202 does not fall off the support rail 105.
In one embodiment, the fixing post 205 is adapted to the size of the bearing 202 for inserting into the bearing 202 to achieve the installation of the robot arm. Specifically, the fixing post 205 is inserted into an inner ring of the bearing 202 to fix a relative position between the fixing post 206 and the bearing 202.
In one embodiment, the robot further comprises: the wireless signal transmitter is used for being connected to an external control host machine and transmitting a control signal transmitted by the control host machine to the mechanical arm; and the wireless signal receiver is electrically connected to the power supply block 102 and is used for receiving the control signal sent by the wireless signal transmitter so as to control the mechanical arm.
Set up wireless signal transmitter and wireless signal receiver for transmission control the required control signal of robotic arm has avoided using the signal line, thereby has avoided the signal line to be in the phenomenon that the cable that causes was damaged in the reciprocating drag that makes a round trip in the motion process of arm body 101 takes place.
In one embodiment, the wireless signal transmitter includes a power modem, modulates the control signal into a certain signal frequency range, and loads the control signal into the power propagated through the conductive strip 204 for transmission, and the transmission of the control information is realized following the propagation of the power. In this particular embodiment, the wireless signal transmitter is connected to the conductive strip 204.
The wireless signal receiver comprises a device for demodulating the modulated control signal, and the wireless signal receiver is connected with the power supply block 102, so that when the wireless signal transmitter is a power modem, the wireless signal receiver can also acquire the modulated signal attached to the power received by the power supply block 102, so as to perform corresponding demodulation operation, demodulate the modulated signal into the control signal, and control the action of the mechanical arm.
In practice, the wireless signal transmitter may be a wireless bridge, and the wireless signal receiver may be a device capable of receiving and analyzing the signal transmitted by the wireless bridge.
In a specific implementation manner, the wireless signal transmitter is connected to a sending device of the control signal, such as a portable device like a tablet computer, so that the motion state of the mechanical arm can be adjusted in real time through the portable device, which is more convenient and faster.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A robot arm, comprising:
an arm body;
the power supply block is mounted to the arm body, a conductive column is arranged on the surface of the power supply block, and the power supply block is used for supplying power to the arm body and can move along with the arm body;
the driver is electrically connected to the power supply block and used for driving the arm body to move;
the mounting bracket for installing the arm body includes:
the supporting track is arranged on the surface of one side, facing the mechanical arm, of the mounting rack and used for providing support for the arm body, and the arm body is mounted to the supporting track;
the conductive bar is arranged on the mounting frame, faces to one side where the power supply block is located, is parallel to the length direction of the support track in the length direction, and is used for being in electrical contact with the conductive column of the power supply block;
the arm body can move along the length direction of the support track.
2. The mechanical arm according to claim 1, wherein the mounting frame further comprises an electric channel disposed on a surface facing a side of the mechanical arm for mounting the conductive strip, and a length direction of the electric channel is identical to a length direction of the support rail, and the length of the electric channel is greater than or equal to the length of the support rail.
3. The mechanical arm according to claim 2, wherein the conductive strips are U-shaped conductive strips, the ends of the conductive strips are bent towards the side where the mechanical arm is located, the U-shaped conductive strips are arranged in the electric power channel, the non-bent areas of the U-shaped conductive strips are arranged towards the side where the power supply block is located, and the length of the non-bent areas of the U-shaped conductive strips is consistent with the length of the support tracks.
4. The robotic arm of claim 3, wherein the number of said strips is three, and the number of said power channels is also three, each strip being disposed in a corresponding one of said power channels, said strips being adapted to be connected to a line, a neutral and a ground of a utility power supply, respectively.
5. The robot arm as claimed in claim 4, wherein the number of the conductive pillars is 3, and the relative positions of the three conductive pillars correspond to the relative positions of the three conductive bars, and each conductive pillar is electrically connected to one conductive bar.
6. The robotic arm of claim 1, wherein the driver comprises:
the driving motor is electrically connected with the power supply block, is connected to the arm body and is used for driving the arm body to move along the length direction of the support track;
the robotic arm further comprises:
and the bearing is connected to an output shaft of the driving motor, can move along with the output shaft, is used for converting the rotation of the output shaft into the movement of the bearing along the length direction of the support track, and is installed in the support track when the mechanical arm works.
7. The robot arm of claim 6, further comprising:
the fixed block, set up in the support track, can follow support track's length direction motion, including the orientation the fixed column that one side at robotic arm place set up, the fixed column is used for fixing the bearing.
8. A robot arm as claimed in claim 7, characterized in that the fixing posts are adapted to the dimensions of the bearing for insertion into the bearing for mounting of the robot arm.
9. The robot arm of claim 1, further comprising:
the wireless signal transmitter is used for being connected to an external control host machine and transmitting a control signal transmitted by the control host machine to the mechanical arm;
and the wireless signal receiver is electrically connected to the power supply block and used for receiving the control signal sent by the wireless signal transmitter so as to control the mechanical arm.
10. A wafer processing apparatus comprising a robot as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920967295.8U CN210633703U (en) | 2019-06-25 | 2019-06-25 | Robot arm and wafer processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920967295.8U CN210633703U (en) | 2019-06-25 | 2019-06-25 | Robot arm and wafer processing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210633703U true CN210633703U (en) | 2020-05-29 |
Family
ID=70791336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920967295.8U Expired - Fee Related CN210633703U (en) | 2019-06-25 | 2019-06-25 | Robot arm and wafer processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210633703U (en) |
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2019
- 2019-06-25 CN CN201920967295.8U patent/CN210633703U/en not_active Expired - Fee Related
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