CN210579289U - Aluminum nitride ceramic heater - Google Patents

Aluminum nitride ceramic heater Download PDF

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Publication number
CN210579289U
CN210579289U CN201920245521.1U CN201920245521U CN210579289U CN 210579289 U CN210579289 U CN 210579289U CN 201920245521 U CN201920245521 U CN 201920245521U CN 210579289 U CN210579289 U CN 210579289U
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aluminum nitride
nitride ceramic
heating
ceramic heater
sheet
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CN201920245521.1U
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党桂彬
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Changzhou Lambda Ceramic Industry Co ltd
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Changzhou Lambda Ceramic Industry Co ltd
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Abstract

The utility model belongs to the technical field of the ceramic heater technique and specifically relates to an aluminum nitride ceramic heater, include the heating body that is formed by aluminum nitride powder and yttria powder homogeneous mixing, be used for electrically conductive nickel silk, and be used for hookup heating body and nickel silk's the pad of brazing, adopt aluminum nitride ceramic as insulating and heat conductive matrix material, same built-in metal tungsten or molybdenum heating resistance ohmic heating, because aluminum nitride ceramic thermal conductivity is high, thermal expansion coefficient is little, the difference in temperature that produces when high-power heating is less, the thermal stress of formation is also less relatively. The metal rhenium powder with the concentration not more than 2% is uniformly doped in the heating resistor of the metal tungsten or molybdenum, so that the resistance temperature coefficient of the heating resistor is adjusted, the stability of a heating circuit is improved, the effective service life of the ceramic heater at the highest working temperature is greatly prolonged, the heating speed of a product is higher, the immediate response is higher, and the ceramic heater can meet the more rigorous environmental requirements.

Description

Aluminum nitride ceramic heater
Technical Field
The utility model belongs to the technical field of ceramic heater technique and specifically relates to an aluminum nitride ceramic heater.
Background
At present, ceramic heaters are widely used as heating elements, such as an automobile oxygen sensor heater, a parking heater, a glow plug, an instant heating type intelligent household appliance, an intelligent bathroom and the like, the ceramic heaters usually adopt 92-96 alumina Al2O3 ceramic as an insulating and heat-conducting base material, a heating circuit with built-in metal tungsten or molybdenum is electrified for heating, a connecting lead is brazed by using a nickel wire, and due to the fact that the alumina ceramic has low heat conductivity (about 20W/m.k) and large thermal expansion coefficient (7.8 x10E-6/° C), large temperature difference and large thermal stress are easily generated during high-power heating, so that product failure is easily caused, and thus the power density of the alumina ceramic heater cannot be designed to be too large generally. The current design limit is that the general power density of water heating is 65W/square centimeter, the surface temperature limit of air dry burning is about 900 ℃, so the product volume is too large when high power is used, the surface temperature limit is not high enough when high temperature is used, and the temperature resistance is not enough.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides an aluminum nitride ceramic heater, which solves the problem through an aluminum nitride ceramic substrate.
The utility model provides a technical scheme that its technical problem adopted is: an aluminum nitride ceramic heater comprises aluminum nitride ceramic formed by uniformly mixing aluminum nitride powder and yttrium oxide powder in a weight ratio of 97:3, a nickel wire for conducting electricity and two brazing pads for connecting the aluminum nitride ceramic and the nickel wire, wherein the two brazing pads are welded and fixed at the end part of the aluminum nitride ceramic, the nickel wire is welded and fixed on the brazing pads, and the aluminum nitride ceramic is flaky or tubular.
Further, the flaky aluminum nitride ceramic comprises a bottom sheet and an upper sheet which are laminated in a hot pressing mode, and the bottom sheet and the upper sheet, on the surfaces of which heating circuits are printed, are aluminum nitride ceramic substrate plates prepared by a tape casting method.
Further, the tubular aluminum nitride ceramic comprises a tubular aluminum nitride ceramic inner core material prepared by a static pressure method and a sheet-shaped aluminum nitride ceramic surface base material prepared by a casting method, wherein the surface base material with a heating circuit printed on the surface is pressed on the outer surface of the inner core material in a hot pressing mode.
The beneficial effects of the utility model are that, because aluminium nitride ceramic thermal conductivity is high, the coefficient of thermal expansion is little, and the difference in temperature that produces when high-power heating is less, and the thermal stress of formation is also less relatively, and like this, aluminium nitride ceramic heater's power density is great that generally can design, and product overall dimension can design littleer when the same power like this, and the product rate of generating heat is faster, and immediate response is faster.
Drawings
The present invention will be further explained with reference to the drawings and examples.
FIG. 1 is a schematic structural view of a flaky aluminum nitride ceramic;
FIG. 2 is a schematic bottom sheet of a flaky aluminum nitride ceramic;
FIG. 3 is a schematic top sheet view of a sheeted aluminum nitride ceramic;
FIG. 4 is a schematic structural view of a tubular aluminum nitride ceramic;
FIG. 5 is a schematic view of an inner core of a tubular aluminum nitride ceramic;
FIG. 6 is a schematic view of a surface substrate of a tubular aluminum nitride ceramic.
In the figure, 1 is a bottom plate, 2 is an upper plate, 3 is an inner core material, 4 is a surface layer substrate, 5 is aluminum nitride ceramic, 6 is nickel wires, and 7 is a soldering pad.
Detailed Description
As shown in fig. 1 to 3, an aluminum nitride ceramic heater comprises an aluminum nitride ceramic 5 formed by uniformly mixing aluminum nitride powder and yttrium oxide powder in a weight ratio of 97:3, a nickel wire 6 for conducting electricity, and a brazing pad 7 for connecting the aluminum nitride ceramic 5 and the nickel wire 6, wherein the two brazing pads 7 are welded and fixed at the end part of the aluminum nitride ceramic 5, the nickel wire 6 is welded and fixed on the brazing pad 7, and the aluminum nitride ceramic 5 is in a sheet shape or a tubular shape. The flaky aluminum nitride ceramic 5 comprises a bottom sheet 1 and an upper sheet 2 which are laminated in a hot-pressing mode, the bottom sheet 1 is a heating resistance plate printed with a heating circuit, the heating circuit is made of metal tungsten or molybdenum, metal rhenium powder with the doping rate not greater than 2% is uniformly doped, the heating circuit is electrified and heated, the bottom sheet 1 and the upper sheet 2 are aluminum nitride ceramic substrate plates prepared by a tape casting method, and the bottom sheet 1 and the upper sheet 2 are used for insulation and heat conduction. The aluminum nitride powder and the yttrium oxide powder are uniformly mixed according to the weight ratio of 97:3, the powder granularity is 0.5-1 micron, the soft flaky aluminum nitride ceramic substrate is prepared by a tape casting method, the tape casting method sheet production process refers to that resin is melted and plasticized by an extruder, the melted and plasticized resin is extruded by a die orifice of a slit machine head, a molten material is attached to a cooling roller tightly, and the sheet is prepared by the procedures of stretching, trimming, coiling and the like. The base material is cut and punched according to the size to respectively manufacture a bottom sheet 1 and an upper sheet 2, heating resistance slurry is designed and printed on the bottom sheet 1, the slurry is generally metal tungsten or molybdenum, and is uniformly doped with the heating resistance slurry of metal rhenium powder with the concentration of not more than 2%, the upper sheet 2 and the bottom sheet 1 are laminated into a whole through hot pressing after drying, the hot pressing temperature is 55 ℃ and the pressure is 30Mpa, then the upper sheet 2 and the bottom sheet 1 are sintered at the high temperature of 1700-1900 ℃ under the protection of the pressure of 2-3KPa and the volume ratio of hydrogen to nitrogen of 5:95 in hydrogen-nitrogen mixed atmosphere, and then the lead wire of a nickel wire 6 is subjected to repeated flattening brazing to manufacture a flaky aluminum nitride ceramic heater, wherein the brazing refers to a welding method that the brazing filler metal and the welding piece with the melting point lower than the melting point of the welding piece are heated.
As shown in fig. 4 to 6, an aluminum nitride ceramic heater includes an aluminum nitride ceramic 5 formed by uniformly mixing aluminum nitride powder and yttrium oxide powder in a weight ratio of 97:3, a nickel wire 6 for conduction, and a brazing pad 7 for connecting the aluminum nitride ceramic 5 and the nickel wire 6, wherein two brazing pads 7 are welded and fixed at an end of the aluminum nitride ceramic 5, the nickel wire 6 is welded and fixed on the brazing pad 7, the aluminum nitride ceramic 5 is in a sheet or tube shape, the tubular aluminum nitride ceramic 5 includes a tubular aluminum nitride ceramic inner core material 3 prepared by a static pressure method and a sheet aluminum nitride ceramic surface layer base material 4 prepared by a casting method, and the surface layer base material 4 is pressed on an outer surface of the inner core material 3 by a hot pressing method. Aluminum nitride powder and yttrium oxide powder are uniformly mixed according to the weight ratio of 97:3, the powder granularity is 0.5-1 micron, a flexible flaky aluminum nitride ceramic surface layer base material 4 is prepared by a tape casting method, meanwhile, the powder is prepared into a rod-shaped or tubular aluminum nitride ceramic inner core material 3 by an isostatic pressing method, the isostatic pressing method refers to a forming method which leads the powder or mud to be subjected to equal hydrostatic pressure in all directions, liquid is used as a pressure transmission medium, the mud is filled into an elastic die and is pressed and formed in a high-pressure cylinder, the surface layer base material 4 is cut and punched according to the size and is printed with heating resistance slurry, the slurry is generally metal tungsten or molybdenum and is uniformly doped with heating resistance slurry of metal rhenium powder which is not more than 2 percent, the printed surface layer base material 4 is wrapped on the rod-shaped or tubular aluminum nitride ceramic inner core material 3, the temperature is 55 ℃ through hot pressing, pressing the surface layer base material 4 and the inner core material 3 into a whole under the pressure of 30Mpa, sintering at the high temperature of 1700-1900 ℃, usually 1850 ℃ under the protection of the hydrogen-nitrogen volume ratio of 5:95 and the air pressure of 2-3KPa in the hydrogen-nitrogen mixed atmosphere, and brazing a nickel lead to prepare the rod-shaped or tubular aluminum nitride ceramic heater.
Because the thermal conductivity of the aluminum nitride ceramic is about 100-150W/m.k, the thermal expansion coefficient is 4.5x 10E-6/DEG C, the temperature difference generated during high-power heating is small, and the formed thermal stress is relatively small, therefore, the power density of the aluminum nitride ceramic heater can be generally designed to heat 110W/square centimeter in larger water, the product outline size can be designed to be smaller under the same power, the product heating speed is higher, and the instant response is faster. The metal tungsten is uniformly doped with metal rhenium powder which is not more than 2% and is used for adjusting the temperature coefficient of resistance TCR of the heating resistor and improving the stability of the heating circuit. The ceramic heater has an effective service life of not less than 1000 hours at the maximum working temperature of 1300 ℃, and can meet more severe environmental requirements. Preparing an aluminum nitride surface layer base material by a tape casting method, preparing an aluminum nitride inner core material by an isostatic pressing method, preparing a metal tungsten heating resistor by a thick film printing process, forming in multiple steps, and finally sintering under the protection of nitrogen and air pressure. The product has high dimensional precision, does not need further grinding and processing, and realizes batch production with lower cost by the combination of advanced production processes.
The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (3)

1. The aluminum nitride ceramic heater is characterized by comprising aluminum nitride ceramic (5), a nickel wire (6) used for conducting electricity and two brazing welding pads (7) used for connecting the aluminum nitride ceramic (5) and the nickel wire (6), wherein the two brazing welding pads (7) are welded and fixed at the end part of the aluminum nitride ceramic (5), the nickel wire (6) is welded and fixed on the brazing welding pads (7), and the aluminum nitride ceramic (5) is flaky or tubular.
2. The aluminum nitride ceramic heater according to claim 1, wherein the aluminum nitride ceramic sheet (5) comprises a bottom sheet (1) and a top sheet (2) laminated by hot pressing, and the bottom sheet (1) and the top sheet (2) having the heating circuit printed on the surfaces thereof are aluminum nitride ceramic substrate plates prepared by a casting method.
3. The aluminum nitride ceramic heater according to claim 1, wherein the tubular aluminum nitride ceramic (5) comprises a tubular aluminum nitride ceramic inner core (3) prepared by a static pressure method and a sheet-like aluminum nitride ceramic surface base material (4) prepared by a casting method, and the surface base material (4) having a heat generating circuit printed on the surface thereof is press-bonded to the outer surface of the inner core (3) by a hot pressing method.
CN201920245521.1U 2019-02-27 2019-02-27 Aluminum nitride ceramic heater Active CN210579289U (en)

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Application Number Priority Date Filing Date Title
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Publications (1)

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CN210579289U true CN210579289U (en) 2020-05-19

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113061039A (en) * 2021-02-24 2021-07-02 福建华清电子材料科技有限公司 Preparation method of aluminum nitride ceramic heating body
CN114710847A (en) * 2022-04-09 2022-07-05 莱鼎电子材料科技有限公司 Electronic ceramic heater for semiconductor chip sealing and testing and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113061039A (en) * 2021-02-24 2021-07-02 福建华清电子材料科技有限公司 Preparation method of aluminum nitride ceramic heating body
CN114710847A (en) * 2022-04-09 2022-07-05 莱鼎电子材料科技有限公司 Electronic ceramic heater for semiconductor chip sealing and testing and preparation method thereof

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