CN210523274U - Component testing surface cleaning tool - Google Patents
Component testing surface cleaning tool Download PDFInfo
- Publication number
- CN210523274U CN210523274U CN201920953862.4U CN201920953862U CN210523274U CN 210523274 U CN210523274 U CN 210523274U CN 201920953862 U CN201920953862 U CN 201920953862U CN 210523274 U CN210523274 U CN 210523274U
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- Prior art keywords
- vacuum
- vacuum suction
- suction head
- connector
- test surface
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- Expired - Fee Related
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- 238000012360 testing method Methods 0.000 title claims abstract description 50
- 238000004140 cleaning Methods 0.000 title claims abstract description 29
- 239000004744 fabric Substances 0.000 claims abstract description 39
- 238000001179 sorption measurement Methods 0.000 claims abstract description 23
- 239000000428 dust Substances 0.000 abstract description 16
- 230000006378 damage Effects 0.000 abstract description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 208000027418 Wounds and injury Diseases 0.000 abstract description 2
- 208000014674 injury Diseases 0.000 abstract description 2
- 238000005253 cladding Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- Nozzles For Electric Vacuum Cleaners (AREA)
Abstract
The utility model discloses an element test surface cleaning tool relates to the clean technical field of semiconductor industry component. The utility model discloses be provided with the vacuum tube, the one end of vacuum tube and vacuum adsorption equipment such as outside vacuum pump or dust catcher, the other end of vacuum tube sets up the connector, the connector is used for connecting vacuum suction head, when using, wrap up dustless cloth on vacuum suction head, clean the test surface of component, can also dip in dustless cloth simultaneously and get alcohol, clean the test surface of component, the vacuum adsorption mouth has been seted up on vacuum suction head, to adhering to the more stubborn dust on the component test surface, can adopt the vacuum adsorption mouth, adsorb away the dust, the burnisher of this application clears up component test surface, do not need the outage to shut down in the clearance process, can not bring bodily injury to operating personnel, clearance convenient and fast.
Description
Technical Field
The present invention relates to a cleaning tool, and more particularly to a cleaning tool for semiconductor devices, and more particularly to a device testing surface cleaning tool.
Background
The semiconductor industry has been demanding production processes in which if foreign matter such as dust remains on the test surfaces of components, serious problems may be caused throughout the test process, such as damage to silicon wafers or equipment components.
At present to the clearance mode of remaining foreign matter on the component test surface, regularly clear up through the manual work, the manual work regularly clear up and generally adopts the dustless cloth of direct taking of staff to clean the component test surface, and this just must require when the manual work is cleared up, the cut off equipment power to lead to equipment outage time overlength, if need regularly wash all instruments, the produced influence of so washing test surface will be huge, the concrete expression does: frequent power outages, long-term power outage shutdowns, and the like. Frequent power outages may result in damage to some components, resulting in more machines failing and performing power outage maintenance, which is detrimental to the semiconductor industry.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects and shortcomings in the prior art, the invention provides a cleaning tool for the test surface of an element, which aims to solve the problem that the cleaning of foreign matters remained on the test surface of the element needs to be carried out power-off and shutdown treatment on the equipment, the cleaning tool is provided with a vacuum tube, one end of the vacuum tube is connected with vacuum adsorption equipment such as an external vacuum pump or a dust collector, the other end of the vacuum tube is provided with a connector, the connector is used for connecting a vacuum suction head, when in use, the vacuum suction head is wrapped with dust-free cloth to clean the test surface of the element, meanwhile, the dust-free cloth can be dipped in alcohol to clean the test surface of the element, a vacuum adsorption port is formed in the vacuum suction head, dust which is relatively stubborn on the test surface of the element can be adsorbed by adopting the vacuum adsorption port, and the cleaning tool can clean the test surface of the element, the cleaning machine does not need to be powered off and shut down in the cleaning process, does not bring personal injury to operators, and is convenient and quick to clean.
According to the utility model discloses a component testing surface cleaning tool, its characterized in that: the vacuum suction head is connected with the connector and mounted on the vacuum tube, an adsorption cavity is arranged in the vacuum suction head, and the vacuum channel in the vacuum tube is communicated with the adsorption cavity in the vacuum suction head; the vacuum suction head is provided with a vacuum suction port which communicates an internal suction cavity of the vacuum suction head with the outside. According to the utility model discloses an element test surface cleaning tool, its theory of operation is, adorns vacuum suction head on the connector of vacuum tube, adorns the vacuum tube on outside vacuum apparatus, vacuum apparatus can be the vacuum pump, also can be on equipment such as industrial dust catcher or domestic dust catcher, through vacuum adsorption power, go out the adnexed foreign matter absorption on the element test surface.
According to the utility model discloses an embodiment, vacuum suction head is the frustum form, has a bottom surface and four sides, sets up the connector on the vacuum suction head and bottom surface to the top surface that corresponds for be connected with the connector, the vacuum suction inlet sets up on one of four sides. Vacuum suction head becomes the frustum form in this application, can form one and clean the head, conveniently cleans component test surface, and vacuum suction inlet sets up on one of them side, sees from the vacuum suction head of frustum form, and the area of its bottom surface is the biggest, can wrap up dustless cloth in the bottom surface, conveniently cleans component test surface, can clean remaining foreign matter on the component test surface totally.
According to the utility model discloses an embodiment, the last cladding of vacuum cleaner has dustless cloth, the middle part cladding of dustless cloth is on vacuum cleaner's bottom surface, and the both ends of dustless cloth wind backward from the both sides of bottom surface respectively, and the cladding is on vacuum cleaner for the both sides face of bottom surface symmetry, and the both ends of dustless cloth are passed through the rubber ring and are fixed on the vacuum tube. In this application, adopt dustless cloth parcel on vacuum suction head, clean component test surface through dustless cloth, can simulate the action that the people hand cleaned component surface, also can reach the effect that the people hand dustless cloth cleaned component surface, when using, can dip in the sanitizer that is used for cleaning element such as alcohol and clean component test surface with dustless cloth and clean, the cleaning performance is better, clears up cleaner.
According to the utility model discloses an embodiment, two sides of dustless cloth cladding are in four sides except the side that is provided with the vacuum suction mouth and with the side of this side symmetry outside two symmetrical sides. In this application, the dustless cloth cladding is on two sides except the side that is provided with vacuum suction port and the side of symmetry, and after dustless cloth parcel is on vacuum suction head promptly, vacuum suction port that can not plug up vacuum suction port can not lead to the fact the influence to vacuum suction port's dust removal effect, can realize the dust absorption and clean two kinds of effects, and both combine to use, and the convenience is to the cleanness of component test surface, also can be with the cleaner of original paper test surface clearance.
According to the utility model discloses an embodiment, the connector is universal vacuum connector. The connector adopts universal vacuum connector in this application, and its effect can realize that vacuum suction head operates, realizes the cleanness at no dead angle for the universal rotation of vacuum tube, makes things convenient for operating personnel to operate.
Compared with the prior art, this application has designed a section and has been used for cleaning element test surface's burnisher, through burnisher's use in this application, when cleaning element test surface, need not carry out the outage and shut down, also can clear up the component surface under equipment running state, can not cause because of the outage shuts down frequently and cause the component to damage, because of the long production process that influences of outage down time.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of the vacuum tube of the present invention;
FIG. 3 is a schematic view of the vacuum cleaner head of the present invention;
FIG. 4 is a diagram illustrating the usage of the present invention;
reference numerals: 1. vacuum tube, 2, vacuum suction head, 3, connector, 4, vacuum suction port, 5, connector, 6, dust-free cloth.
Detailed Description
The technical scheme of the application is further elaborated in the following by combining the drawings in the specification.
Example 1
Referring to the accompanying drawings 1, 2 and 3, this embodiment discloses:
an element testing surface cleaning tool comprises a vacuum tube 1 and a vacuum suction head 2, wherein one end of the vacuum tube 1 is used for being connected with external vacuum equipment, a vacuum channel arranged along the axial direction is arranged in the vacuum tube 1, the other end of the vacuum tube 1 is provided with a connector 3, the vacuum suction head 2 is connected with the connector 3 and installed on the vacuum tube 1, an adsorption cavity is arranged in the vacuum suction head 2, and the vacuum channel in the vacuum tube 1 is communicated with the adsorption cavity in the vacuum suction head 2; the vacuum suction head 2 is provided with a vacuum suction port 4, and the vacuum suction port 4 communicates an internal adsorption cavity of the vacuum suction head 2 with the outside. According to the utility model discloses an element test surface cleaning tool, its theory of operation is, adorns vacuum suction head 2 on vacuum tube 1's connector 3, with vacuum tube 1 dress on outside vacuum apparatus, vacuum apparatus can be the vacuum pump, also can be on equipment such as industrial grade dust catcher or domestic dust catcher, through vacuum adsorption power, go out the adnexed foreign matter absorption on the element test surface.
Example 2
As another preferred embodiment of the present application, referring to fig. 1-4 of the specification, the present embodiment discloses:
as shown in fig. 1, an element testing surface cleaning tool comprises a vacuum tube 1 and a vacuum suction head 2, as shown in fig. 2, one end of the vacuum tube 1 is used for being connected with external vacuum equipment, a vacuum channel is arranged in the vacuum tube 1 along the axial direction, the other end of the vacuum tube 1 is provided with a connector 3, the vacuum suction head 2 is connected with the connector 3 and installed on the vacuum tube 1, an adsorption cavity is arranged in the vacuum suction head 2, and the vacuum channel in the vacuum tube 1 is communicated with the adsorption cavity in the vacuum suction head 2; the vacuum suction head 2 is provided with a vacuum suction port 4, and the vacuum suction port 4 communicates an internal adsorption cavity of the vacuum suction head 2 with the outside. According to the utility model discloses an element test surface cleaning tool, its theory of operation is, adorns vacuum suction head 2 on vacuum tube 1's connector 3, with vacuum tube 1 dress on outside vacuum apparatus, vacuum apparatus can be the vacuum pump, also can be on equipment such as industrial grade dust catcher or domestic dust catcher, through vacuum adsorption power, go out the adnexed foreign matter absorption on the element test surface.
According to an embodiment of the present invention, as shown in fig. 3, the vacuum cleaner head 2 is in the shape of a frustum having a bottom surface and four sides, and the vacuum cleaner head 2 is provided with a connection port 5 on the top surface corresponding to the bottom surface for connecting with the connection head 3, and the vacuum suction port 4 is provided on one of the four sides. Vacuum suction head 2 becomes frustum form in this application, can form one and clean the head, conveniently cleans component test surface, and vacuum suction port 4 sets up on one of them side, sees from vacuum suction head 2 of frustum form, and the area of its bottom surface is the biggest, can wrap up dustless cloth 6 in the bottom surface, conveniently cleans component test surface, can clean remaining foreign matter on the component test surface.
According to the utility model discloses an embodiment, as shown in fig. 4, the cladding has dustless cloth 6 on vacuum suction head 2, the middle part cladding of dustless cloth 6 is on vacuum suction head 2's bottom surface, and dustless cloth 6's both ends are respectively from the both sides of bottom surface around backward, and the cladding is on vacuum suction head 2 for the both sides face of bottom surface symmetry, and dustless cloth 6's both ends are passed through the rubber ring and are fixed on vacuum tube 1. In this application, adopt dustless cloth 6 parcel on vacuum suction head 2, clean component test surface through dustless cloth 6, can simulate the action that the people hand cleaned component surface, also can reach the effect that the people hand is cleaned dustless cloth 6 and is cleaned component surface, when using, can dip in the sanitizer that is used for cleaning element such as alcohol and clean component test surface with dustless cloth 6 and clean, clean effect is better, the clearance is cleaner.
Example 3
As another preferred embodiment of the present application, referring to fig. 1-4 of the specification, the present embodiment discloses:
as shown in fig. 1, an element testing surface cleaning tool comprises a vacuum tube 1 and a vacuum suction head 2, as shown in fig. 2, one end of the vacuum tube 1 is used for being connected with external vacuum equipment, a vacuum channel is arranged in the vacuum tube 1 along the axial direction, the other end of the vacuum tube 1 is provided with a connector 3, the vacuum suction head 2 is connected with the connector 3 and installed on the vacuum tube 1, an adsorption cavity is arranged in the vacuum suction head 2, and the vacuum channel in the vacuum tube 1 is communicated with the adsorption cavity in the vacuum suction head 2; the vacuum suction head 2 is provided with a vacuum suction port 4, and the vacuum suction port 4 communicates an internal adsorption cavity of the vacuum suction head 2 with the outside.
According to an embodiment of the present invention, as shown in fig. 3, the vacuum cleaner head 2 is in the shape of a frustum having a bottom surface and four sides, and the vacuum cleaner head 2 is provided with a connection port 5 on the top surface corresponding to the bottom surface for connecting with the connection head 3, and the vacuum suction port 4 is provided on one of the four sides.
According to the utility model discloses an embodiment, as shown in fig. 4, the cladding has dustless cloth 6 on vacuum suction head 2, the middle part cladding of dustless cloth 6 is on vacuum suction head 2's bottom surface, and dustless cloth 6's both ends are respectively from the both sides of bottom surface around backward, and the cladding is on vacuum suction head 2 for the both sides face of bottom surface symmetry, and dustless cloth 6's both ends are passed through the rubber ring and are fixed on vacuum tube 1.
According to an embodiment of the present invention, as shown in fig. 4, the two sides covered with the dust-free cloth 6 are two symmetrical sides of the four sides except the side provided with the vacuum suction port 4 and the side symmetrical to the side. In this application, dustless cloth 6 cladding is on two sides except the side that is provided with vacuum suction port 4 and the side of symmetry outside, dustless cloth 6 parcel promptly after vacuum suction head 2, can not plug up vacuum suction port 4 of vacuum suction head 2, can not lead to the fact the influence to vacuum suction port 4's dust removal effect, can realize the dust absorption and clean two kinds of effects, both combine to use, the convenience is to the cleanness of component test surface, also can be with the cleaner of original paper test surface clearance.
According to the utility model discloses an embodiment, connector 3 is universal vacuum connector 3. In this application connector 3 adopts universal vacuum connector 3, and its effect can realize vacuum suction head 2 for the universal rotation of vacuum tube 1, makes things convenient for operating personnel to operate, realizes the cleanness at no dead angle.
Claims (5)
1. A component testing surface cleaning tool, characterized by: the vacuum suction head comprises a vacuum tube (1) and a vacuum suction head (2), wherein a vacuum channel is axially arranged in the vacuum tube (1), one end of the vacuum tube (1) is used for being connected with external vacuum equipment, the other end of the vacuum tube is provided with a connector (3), the vacuum suction head (2) is connected with the connector (3) and is installed on the vacuum tube (1), an adsorption cavity is arranged in the vacuum suction head (2), and the vacuum channel in the vacuum tube (1) is communicated with the adsorption cavity in the vacuum suction head (2); the vacuum suction head (2) is provided with a vacuum suction port (4), and the vacuum suction port (4) is used for communicating an adsorption cavity inside the vacuum suction head (2) with the outside.
2. The component testing surface cleaning tool of claim 1, wherein: the vacuum suction head (2) is in a frustum shape and is provided with a bottom surface and four side surfaces, a connecting port (5) is arranged on the top surface, corresponding to the bottom surface, of the vacuum suction head (2) and is used for being connected with the connecting head (3), and the vacuum suction port (4) is arranged on one side surface of the vacuum suction head (2).
3. The component testing surface cleaning tool of claim 2, wherein: the vacuum suction head (2) is coated with dust-free cloth (6), the middle of the dust-free cloth (6) is coated on the bottom surface of the vacuum suction head (2), two ends of the dust-free cloth (6) are respectively wound backwards from two sides of the bottom surface and are coated on two side surfaces, symmetrical relative to the bottom surface, of the vacuum suction head (2), and two ends of the dust-free cloth (6) are fixed on the vacuum tube (1) through rubber rings.
4. The component testing surface cleaning tool of claim 3, wherein: the two sides covered by the dust-free cloth (6) are two symmetrical sides except the side provided with the vacuum suction port (4) and the side symmetrical to the side among the four sides.
5. The component testing surface cleaning tool of any one of claims 1-4, wherein: the connector (3) is a universal vacuum connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920953862.4U CN210523274U (en) | 2019-06-24 | 2019-06-24 | Component testing surface cleaning tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920953862.4U CN210523274U (en) | 2019-06-24 | 2019-06-24 | Component testing surface cleaning tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210523274U true CN210523274U (en) | 2020-05-15 |
Family
ID=70595690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920953862.4U Expired - Fee Related CN210523274U (en) | 2019-06-24 | 2019-06-24 | Component testing surface cleaning tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210523274U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112917939A (en) * | 2021-01-28 | 2021-06-08 | 东莞市鼎顺泰科技有限责任公司 | Plastic shell and silica gel combined treatment process |
-
2019
- 2019-06-24 CN CN201920953862.4U patent/CN210523274U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112917939A (en) * | 2021-01-28 | 2021-06-08 | 东莞市鼎顺泰科技有限责任公司 | Plastic shell and silica gel combined treatment process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200515 |