CN210475896U

CN210475896U - OLED cutting equipment compensating system

Info

Publication number: CN210475896U
Application number: CN201920524915.0U
Authority: CN
Inventors: 汪玉树; 孙琳琳; 雷程锁
Original assignee: Suzhou Maxwell Technologies Co Ltd
Current assignee: Maiwei Technology Zhuhai Co ltd
Priority date: 2019-04-18
Filing date: 2019-04-18
Publication date: 2020-05-08
Anticipated expiration: 2029-04-18

Abstract

The utility model discloses a OLED cutting equipment compensating system belongs to OLED equipment field. Aiming at the problem that products are poor due to focus directivity deviation in repeated cutting of the existing multi-type laser, the OLED cutting equipment compensation system is provided, the focus position of the CO2 laser is tested for a long time for 0.5-10 hours through a light spot analyzer 10, the position coordinate of the position of a focus at X, Y in a certain time interval is recorded, data collection is carried out on recorded X, Y coordinate values through light spot analysis software, the deviation is worked out and arranged, the position relation between the laser focus and the time is worked out, the maximum deviation and the minimum deviation of the laser focus position are worked out, and deviation values are taken to carry out deviation rectification processing on an XY galvanometer of equipment. The application achieves the deviation rectifying treatment of the cutting position by properly adjusting the XY galvanometer position of the laser equipment, so that the cutting positions of the focuses of the double lasers are overlapped, and the problem of poor cutting is solved.

Description

OLED cutting equipment compensating system

Technical Field

The utility model relates to a OLED equipment field, more specifically say, relate to an OLED cutting equipment compensating system.

Background

In the OLED laser cutting project, in order to improve efficiency and ensure cutting effect, two lasers (a CO2 laser and a UV laser) are used to cut materials respectively.

The process flow comprises the following steps: the material was half-cut with a CO2 laser and then cut with a UV laser at the same location as the CO2 laser cut. Therefore, in order to meet the requirement, it is necessary to ensure that the focal center of the CO2 laser and the focal center of the UV laser coincide completely.

However, due to the influence of the CO2 laser directivity, the focal position may shift after focusing, so that the UV laser cannot be overlapped with the line cut by the CO2 laser during cutting, the cutting position is deviated and the cutting is continuous, and the yield is affected.

As shown in fig. 1, 2 and 3, the two lasers respectively perform half-cut and full-cut on the material by moving the shaft to the cutting position so as to meet the efficiency and process requirements. As shown in fig. 4, 5 and 6, the focal point directivity of the CO2 laser is shifted, so that the focal point centers of the two lasers cannot be overlapped, which affects the cutting-through of the material and the requirement for the effect, and causes a defect.

The Chinese patent application, application number 201410660600.0, published 2015, 3 and 25 discloses a laser real-time deviation rectifying device and a deviation rectifying method thereof.A cross beam is arranged above a moving working platform, an alignment high-speed lens and a laser processing head are mounted on the cross beam, the alignment high-speed lens and the laser processing head are aligned to the moving working platform, the alignment high-speed lens and the laser processing head are in communication connection with a computer, evision pattern recognition computing software is mounted on the computer, the computer is in communication connection with a movement control unit, and the movement control unit is in control connection with the moving working platform; the real-time processing of rectifying of laser is based on the platform motion in-process, shoots fast through the high-speed camera lens of counterpoint of installing on the marble crossbeam and snatchs the image and give the computer, handles to calculate positional deviation, gives the motion control unit with the skew instruction again, is compensated motion work platform motion by motion control unit give-out order, realizes the accurate processing of laser high accuracy. The real-time correction is completed in the process of machining movement, so that the time consumption is extremely short, and the machining efficiency is greatly improved. But the system structure is complex, and the cutting deviation rectifying device is complex.

SUMMERY OF THE UTILITY MODEL

1. Technical problem to be solved

The problem that focus directive property skew that exists leads to the product to be bad is cut repeatedly to current polymorphic type laser, provides an OLED cutting equipment compensating system, and this application reaches the processing of rectifying of cutting position through the suitable regulation to laser equipment XY galvanometer position to make the cutting position coincidence of twin laser focus, solve the problem of cutting badly.

2. Technical scheme

The purpose of the utility model is realized through the following technical scheme.

The OLED cutting equipment compensation system comprises a compensation detection system for detecting the focal position of a CO2 laser

And processing to obtain a deviation value, and performing deviation rectification processing on the cutting equipment according to the deviation value.

Furthermore, the compensation detection system is connected with the control system, the control system obtains the deviation correction data of the compensation detection system, the control system is connected with the cutting equipment, and the deviation correction of the cutting equipment is controlled through the deviation correction data.

Furthermore, the compensation detection system comprises a CO2 laser, a beam expander connected with the CO2 laser, a galvanometer system connected with the beam expander and a field lens connected with the galvanometer system, wherein a light spot analyzer is arranged right below the field lens.

Furthermore, the action material is arranged at the focal position of the spot analyzer.

Furthermore, the device also comprises a photographing detection device or an amplification device, and the photographing detection or the amplification device is used for photographing and detecting or amplifying the detection image in the detection process.

The compensation detection system detects the focal position of a CO2 laser and performs data processing to obtain focal position deviation value data of a plurality of CO2 lasers, and performs deviation rectification processing on the cutting equipment through deviation intermediate values.

Further, the detection step is as follows,

step one, arranging an acting material below a field lens and fixing the acting material;

secondly, drawing line segments at the same position of the action material by using CO2 laser and UV laser respectively; secondly, drawing line segments at the same position of the action material by using CO2 laser and UV laser respectively; the scribing length of the UV laser is larger than that of the CO2, the line segment drawn by the UV laser penetrates through the line segment drawn by the carbon dioxide laser, the penetration is partially overlapped, and the center position deviation can be conveniently measured according to the specific length. The specific values may vary according to requirements.

Thirdly, photographing the scribed action material;

thirdly, photographing the scribed action material;

recording position data of the line segment center of the lineation, and storing the data record;

and step five, arranging according to the obtained measurement data, and obtaining the calculated deviation amount once, thereby finishing the deviation rectifying treatment of the cutting equipment.

Further, the method also comprises the step of repeating the processes from the second step to the fourth step; and (4) sorting the measurement data obtained after repeated for many times to obtain a position change rule, calculating the deviation amount, and taking a deviation intermediate value so as to finish the deviation rectifying treatment of the cutting equipment.

Further, the third step and the fourth step are replaced by measuring the deviation value of the line drawn by the two types of lasers by using a measuring instrument under a magnifying glass;

furthermore, the CCD camera is used for photographing in the third step, and measurement is carried out simultaneously.

Furthermore, during deviation correction, deviation correction treatment is carried out on an XY galvanometer or a moving shaft of the cutting equipment.

3. Advantageous effects

Compared with the prior art, the utility model has the advantages of:

this scheme reaches the processing of rectifying of cutting position through the suitable regulation to laser equipment XY galvanometer position to the cutting position coincidence of making the dual laser focus solves the bad problem of cutting, and holistic equipment is simple, and it is effectual to rectify.

Drawings

FIG. 1 is a schematic structural view of a conventional laser cutting device without deviation;

FIG. 2 is an enlarged view of the working material at the cutting position where the focal centers of the CO2 laser and the UV laser are completely overlapped;

FIG. 3 is a schematic diagram of the coincidence of the laser light emitted by the CO2 laser head and the UV laser head in the moving direction of the action material;

FIG. 4 is a schematic diagram of a conventional laser cutting deviation situation;

FIG. 5 is an enlarged view showing the case where the centers of the CO2 laser and UV laser are deviated from each other at the cutting position of the work material;

FIG. 6 is a schematic diagram of the deviation of the laser light emitted by the CO2 laser head and the UV laser head in the direction of movement of the active material;

FIG. 7 is a schematic view of the offset testing apparatus of the present system;

FIG. 8 is a schematic diagram of the rectification compensation process of the system;

FIG. 9 is a schematic diagram of the deskew compensation system of the present system;

FIG. 10 is an enlarged schematic view of the working material in which the deviation of the focal centers of the CO2 laser and UV laser is corrected at the cutting position;

fig. 11 is a schematic diagram showing that the deviation of the laser light emitted from the CO2 laser head and the UV laser head in the moving direction of the action material is corrected.

The reference numbers in the figures illustrate:

1. a UV laser; 2. a CO2 laser; 3. a beam expander; 4. a total reflection mirror; 5. a galvanometer system; 6. a field lens; 7. a system operating position; 8. an active material; 9. a light emitting path before rectification; 10. and a light spot analyzer.

Detailed Description

The invention is described in detail below with reference to the drawings and specific examples.

Example 1

Due to the influence of the directional deviation change of the CO2 laser, when the action material is cut, the cutting positions of the two types of lasers cannot be overlapped, and the product defect is influenced.

Therefore, in order to achieve the cutting effect, the cutting positions of the two types of lasers are overlapped. According to the focus directivity offset of the CO2 laser measured by a facula analyzer and the like, the offset is compensated by adopting a software algorithm and acts on an XY galvanometer or a moving shaft.

Specifically, as shown in fig. 7, the compensation system for the OLED cutting device includes a compensation detection system, which detects and processes a focal position of a CO2 laser to obtain a deviation value, and performs deviation rectification processing on the cutting device according to the deviation intermediate value. The compensation detection system is connected with the control system, the control system obtains the correction data of the compensation detection system, the control system is connected with the cutting equipment, and the correction of the cutting equipment is controlled through the correction data. The compensation detection system comprises a CO2 laser 2, a beam expander 3 connected with the CO2 laser 2, a galvanometer system 5 connected with the beam expander 3 and a field lens 6 connected with the galvanometer system 5, wherein the field lens 6 is a flat field focusing lens, and a light spot analyzer 10 is arranged right below the field lens 6. The spot analyzer 10 monitors the position analysis of the focus of the CO2 laser in real time: and analyzing the deviation of the focal position of the CO2 laser, thereby rectifying the focal position of the CO2 laser according to the monitored data. The field lens 6 is arranged at the position of the system working position 7, and the action material 8 is arranged at the focal position of the spot analyzer 10. The system also comprises a photographing detection device or an amplification device, and the photographing detection or the amplification device is used for photographing and detecting or amplifying the detection image in the detection process.

As shown in fig. 8, 9, 10 and 11, the compensation detection system performs focus position detection of the CO2 laser and data processing to obtain focus position deviation value data of a plurality of CO2 lasers, and performs deviation correction processing on the cutting equipment through deviation intermediate values by adopting the OLED cutting equipment compensation method corresponding to the system.

The focus position of the CO2 laser is tested for a long time for 0.5-10 hours by the facula analyzer 10, X, Y position coordinates of the focus in a certain time interval are recorded, data collection is carried out on recorded X, Y coordinate values by facula analysis software, deviation is worked out and worked out, the position relation of the laser focus and the time is worked out, the maximum deviation and the minimum deviation of the laser focus position are worked out, and deviation intermediate values are taken to carry out deviation rectification processing on the XY galvanometer of the equipment.

Whether the focus offset is regular or irregular can be obtained through a long-time data testing method, and therefore corresponding deviation rectification is carried out according to the change. The position of the test focus changes over time. On the basis of the calculated deviations, the cutting position is compensated in real time by means of a scanning galvanometer system or a movement axis during the actual action on the material.

According to the scheme, the cutting position is corrected through the system and the method, so that the cutting superposition for two times is achieved, and the purpose of improving the product yield is achieved.

Example 2

The detection steps of the specific compensation detection system are as follows,

step one, arranging an acting material below a field lens 6 and fixing;

secondly, drawing line segments at the same position of the action material by using CO2 laser and UV laser respectively; here the CO2 laser draws a 5mm line and the UV laser draws a 10mm line segment standard: the scribing length of the UV laser is larger than that of the CO2, the line segment drawn by the UV laser penetrates through the line segment drawn by the carbon dioxide laser, and the specific length is convenient for measuring the central position deviation. The specific values may vary according to requirements.

Thirdly, photographing the scribed action material; this embodiment application CCD camera is shot, measures simultaneously.

and fifthly, sorting according to the obtained measurement data, calculating the deviation amount, and taking the deviation intermediate value to finish the deviation rectifying treatment of the cutting equipment.

And carrying out corresponding deviation rectifying treatment by the method. The problem of cutting badness is solved, and holistic equipment is simple, and it is effectual to rectify.

Example 3

Unlike embodiment 2, embodiment 3 further includes the steps of repeating the processes of step two to step four; and (4) sorting the measurement data obtained after repeated for many times to obtain a position change rule, calculating the deviation amount, and taking a deviation intermediate value so as to finish the deviation rectifying treatment of the cutting equipment. And (3) carrying out deviation rectification treatment on the XY galvanometer or the moving shaft of the cutting equipment during deviation rectification. The light path 9 is corrected to be a normal path before correction.

Example 4

Different from the

embodiment

2 or 3, the embodiment 4 adopts the method of magnifying the image by the magnifying glass and then performing the deviation value of the lines, and the specific method is as follows,

step one, arranging an acting material below a field lens 6 and fixing;

secondly, drawing line segments with different lengths at the same position of the action material by using CO2 laser and UV laser respectively; here the CO2 laser draws a 5mm line and the UV laser draws a 10mm line segment standard: the scribing length of UV will be greater than CO 2's scribing length, and the convenient volume is got the central point and is put the deviation can, and specific numerical value can change according to the demand.

Measuring the deviation value of the scribed line of the two types of lasers under a magnifier;

step four, the process from step two to step three;

and fifthly, sorting the measurement data obtained after repeated for many times to obtain a position change rule, calculating the deviation amount, and taking a deviation intermediate value to finish the deviation rectifying treatment of the cutting equipment. And obtaining the normal distribution of the deviation to obtain a position rule, calculating the deviation by using an average value method to obtain a final deviation result, and performing deviation rectification treatment on an XY galvanometer or a moving shaft of the cutting equipment during deviation rectification. The light path 9 is corrected to be a normal path before correction.

In the mode, the steps from the second step to the third step can be omitted, and corresponding deviation values can be obtained directly through once scribing, so that the deviation correction processing of the cutting equipment is completed.

The deviation values analyzed in different modes act on an XY galvanometer or a moving shaft of the equipment so as to finish the deviation correction processing of the laser focus deviation. The positions of the cutting marks of the two types of lasers acting on the material are overlapped, and an ideal cutting effect is achieved through measurement and judgment.

The invention and its embodiments have been described above schematically, without limitation, and the invention can be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The representation in the drawings is only one of the embodiments of the invention, the actual construction is not limited thereto, and any reference signs in the claims shall not limit the claims concerned. Therefore, if a person skilled in the art receives the teachings of the present invention, without inventive design, a similar structure and an embodiment to the above technical solution should be covered by the protection scope of the present patent. Furthermore, the word "comprising" does not exclude other elements or steps, and the word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. Several of the elements recited in the product claims may also be implemented by one element in software or hardware. The terms first, second, etc. are used to denote names, but not any particular order.

Claims

1. The utility model provides a OLED cutting equipment compensating system, its characterized in that, includes compensation detecting system, compensation detecting system detects and handles the focus position of CO2 laser instrument in it, obtains the deviation value, carries out the processing of rectifying according to this deviation value to cutting equipment, compensation detecting system is connected with control system, control system obtains compensation detecting system data of rectifying, compensation detecting system, including beam expanding lens (3) that CO2 laser instrument (2) are connected, shake mirror system (5) and field lens (6) of being connected with shake mirror system (5) of being connected with beam expanding lens (3), be provided with facula analysis appearance (10) under field lens (6).

2. The OLED cutting equipment compensation system as claimed in claim 1, wherein the control system is connected to the cutting equipment, and controls the cutting equipment to correct the deviation through the deviation correction data.

3. The compensation system of claim 2, wherein the active material (8) is arranged at the focal position of the spot analyzer (10).

4. The OLED cutting device compensation system as claimed in claim 1, further comprising a photo detection device or an amplification device for photo detection or amplification of the detected image during the detection process.