CN210467868U

CN210467868U - In-groove heating module

Info

Publication number: CN210467868U
Application number: CN201921775465.9U
Authority: CN
Inventors: 杨飞云
Original assignee: Ideal Energy Sunflower Vacuum Equipment Taixing Ltd
Current assignee: Ideal Energy Sunflower Vacuum Equipment Taixing Ltd
Priority date: 2019-10-17
Filing date: 2019-10-17
Publication date: 2020-05-05
Anticipated expiration: 2029-10-17

Abstract

The utility model provides an in-groove heating module. The in-groove heating module comprises an electric heater arranged in a groove and at least one metal elastic piece arranged around the electric heater, and the at least one metal elastic piece is in contact with the electric heater and the side wall of the groove. The in-groove heating module of the utility model can effectively reduce the surface temperature of the electric heater, further reduce the leakage current of the electric heater, change the heat transfer mode from heat radiation to thermal contact, improve the thermal contact area and increase the heat transfer efficiency; the utility model discloses can utilize the elasticity of an at least metal elastic component and make electric heater heat expand more freely, can not make electric heater bulge out in the recess.

Description

In-groove heating module

Technical Field

The utility model relates to a solar cell manufacture equipment, in particular to in-groove heating module for PECVD equipment.

Background

The thin film/crystalline silicon heterojunction solar cell (which can be called as a heterojunction or HIT solar cell for short) belongs to the third-generation high-efficiency solar cell technology, combines the advantages of the first-generation crystalline silicon and the second-generation silicon thin film, has the characteristics of high conversion efficiency, low temperature coefficient and the like, particularly has the conversion efficiency of the double-sided heterojunction solar cell reaching more than 26 percent, and has wide market prospect.

In the field of HIT solar cell manufacturing, the production capacity of key PECVD equipment is high, the beat is fast, a tray enters a preheating cavity or a process cavity every dozens or hundreds of seconds, and a cold tray or a low-temperature tray needs to be preheated. As shown in fig. 1, in a chamber such as a preheating chamber or a process chamber, an in-tank heating module is generally disposed in a recess 10 of a side wall or a top wall or a bottom wall 1 thereof to heat the relevant chamber, the in-tank heating module in fig. 1 only includes an electric heater 20, and in order to avoid damage to the side wall of the recess 10 or to the electric heater 20 due to a difference in coefficient of expansion of materials when heating, the electric heater 20 in fig. 1 is generally disposed to be spaced apart from the side wall of the recess, so that the heat transfer manner of the electric heater 20 is mainly heat radiation.

The electric heater 20 needs to preheat the tray to a certain fixed temperature, such as over 200 deg.c, for about several hundred seconds. The total time of hundreds of seconds is less than the time of transferring the tray into and out, so the effective time of the tray contacting with the preheating cavity is reduced by dozens of seconds, and the tray needs to provide high energy quickly in a short time to absorb the energy, thereby heating the tray. This situation places high demands on the power of the electric heater 20, and the power density of the heater with the same wire diameter due to the limited size can be as high as 4W/cm when the heater provides high power²Leakage currents as high as several hundred mA may be generated when the heater is used for a long time. Such high leakage currents are unacceptable when PECVD equipment is in operation.

Therefore, how to provide an in-tank heating module to reduce the leakage current and provide the heating efficiency has become an urgent technical problem to be solved in the industry.

SUMMERY OF THE UTILITY MODEL

To the above-mentioned problem of prior art, the utility model provides an in-groove heating module, it is including setting up the electric heater in the recess, in-groove heating module is still including setting up an at least metal elastic component around the electric heater, an at least metal elastic component with the electric heater and the lateral wall of recess contacts.

In one embodiment, the at least one metal elastic member includes a first metal elastic member and a second metal elastic member respectively disposed at both sides of the electric heater, and the first metal elastic member and the second metal elastic member are respectively in contact with the electric heater and a sidewall of the groove.

In one embodiment, the electric heater is disposed at the bottom of the groove and in contact with the bottom wall of the groove, and the first and second metal elastic members are disposed on the electric heater and are each in contact with the side wall of the groove and the electric heater, the electric heater being spaced apart from both side walls of the groove.

In one embodiment, the first and second metal elastic members are disposed at the bottom of the groove, and the electric heater is disposed on the first and second metal elastic members, the first and second metal elastic members each contacting the bottom wall and the side wall of the groove and the electric heater, the electric heater being spaced apart from both the side walls of the groove and contacting the bottom wall of the groove.

In one embodiment, the electric heater has a cylindrical shape having an outer diameter of 2-8mm, and the first and second metal elastic members each have a diameter of 2-6 mm.

In one embodiment, the at least one metal elastic member includes an integral metal elastic member, the integral metal elastic member has an outer shape matching the shape of the groove and is adapted to be clamped in the groove in a manner of contacting with the side wall, the integral metal elastic member is provided with a concave portion matching the shape of the electric heater for accommodating the electric heater, and the electric heater contacts with the concave portion and the bottom wall of the groove.

In one embodiment, the electric heater is an armored heater, and the armored heater sequentially comprises a resistance wire positioned inside, an insulating layer positioned in the middle and a shell positioned outside from inside to outside.

In an embodiment, the groove body corresponding to the groove is made of aluminum, the shell of the electric heater is made of alloy steel, and the at least one metal elastic member is made of stainless steel.

In one embodiment, the groove is arranged on the side wall or the top wall or the bottom wall of a preheating cavity of the PECVD equipment, and the tray carrying the silicon wafer is in heat conduction with a groove body of the groove when being conveyed into the preheating cavity.

In one embodiment, the electric heater heats under a vacuum environment.

Compared with the prior art, the utility model discloses following beneficial effect has: the in-groove heating module comprises at least one metal elastic piece arranged around the electric heater, so that the surface temperature of the electric heater can be effectively reduced, the leakage current of the electric heater is reduced, the heat transfer mode is changed from heat radiation to heat contact, the heat contact area can be improved, and the heat transfer efficiency is increased; the utility model discloses can also utilize the elasticity of an at least metal elastic component and make electric heater heat expand more freely, can not make electric heater bulge out in the recess.

Drawings

The above features and advantages of the present invention will be better understood upon reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings. In the drawings, components are not necessarily drawn to scale, and components having similar relative characteristics or features may have the same or similar reference numerals.

FIG. 1 is a schematic block diagram of an embodiment of a prior art in-tank heating module;

FIGS. 2 and 3 are schematic structural views of a first embodiment of an in-tank heating module according to the present invention;

FIG. 4 is a schematic structural diagram of a second embodiment of an in-tank heating module according to the present invention;

FIG. 5 is a schematic structural diagram of a third embodiment of an in-tank heating module according to the present invention; and

fig. 6 is a schematic structural view of a fourth embodiment of an in-tank heating module according to the present invention.

Detailed Description

The present invention will be described in detail below with reference to the attached drawings and specific embodiments so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the aspects described below in connection with the figures and the specific embodiments are exemplary only, and should not be construed as limiting the scope of the invention in any way. The singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.

Referring to fig. 2 and 3, there are shown schematic structural components of a first embodiment of an in-tank heating module 2 of the present invention. The in-tank heating module 2 includes an electric heater 20 disposed in a recess and at least one metal elastic member 22 disposed around the electric heater 20, the at least one metal elastic member 22 being in contact with the electric heater 20 and a sidewall of the tank 10. In the first embodiment, the groove 10 is arranged on the side wall or the top wall or the bottom wall of a preheating cavity of the PECVD equipment, the in-groove heating module 2 is correspondingly arranged in the preheating cavity of the PECVD equipment, and a tray bearing silicon wafers is contacted with a groove body of the groove 10 and conducts heat when being conveyed into the preheating cavity. In other embodiments, the recess 10 is provided on a side wall or a top wall or a bottom wall of a reaction chamber of a PECVD apparatus without direct contact with the reaction gas, and the in-tank heating module 2 is correspondingly provided in the reaction chamber of the PECVD apparatus.

In the first embodiment, the electric heater 20 may be an armored heater, which includes an inner resistance wire, an insulating layer in the middle, and an outer casing in sequence from inside to outside.

In the first embodiment, the material of the groove 10 is aluminum, the material of the casing of the electric heater 20 is alloy steel, and the material of the at least one metal elastic member 22 is stainless steel.

As shown in fig. 3, the at least one metal elastic member 22 includes a first metal elastic member 220 and a second metal elastic member 222, and each of the first metal elastic member 220 and the second metal elastic member 222 is in contact with the electric heater 20 and the side wall of the recess 10. The electric heater 20 is disposed at the bottom of the recess 10 and contacts the bottom wall thereof, and the first and second metal

elastic members

220 and 222 are disposed on the electric heater 20 and supported by the left and right sidewalls of the recess 10 and the electric heater 20, respectively, with the electric heater 20 spaced apart from both sidewalls of the recess 10. In the first embodiment, the first metal elastic member 220 and the second metal elastic member 222 are both stainless steel springs.

Fig. 4 shows a schematic structural diagram of a second embodiment of the in-tank heating module 2 according to the present invention, and unlike fig. 3 in which only the electric heater 20 is disposed at the bottom of the recess 10, the first metal elastic member 220, the second metal elastic member 222 and the electric heater 20 in fig. 4 are disposed at the bottom of the recess 10, that is, all three are in contact with the bottom wall of the recess 10. The first and second metal

elastic members

220 and 222 are in contact with the side wall of the recess 10 and the electric heater 20. The electric heater 20 is spaced apart from both sidewalls of the recess 10. In the second embodiment, the first metal elastic member 220 and the second metal elastic member 222 are stainless steel springs.

The electric heater 20 of fig. 3 and 4 has a cylindrical shape having an outer diameter of 2-8mm, and the first and second metal

elastic members

220 and 222 each have a diameter of 2-6 mm. The diameter of the electric heater 20 may be one to five times that of the first metal elastic member 220 or the second metal elastic member 222.

In other embodiments of the present invention, a single metal elastic member may be provided only on one side of the electric heater 20, and the single metal elastic member may contact the electric heater 20 and one sidewall of the groove 10 as described above.

Fig. 5 is a schematic structural view showing a third embodiment of the in-tank heating module of the present invention. As shown in fig. 5, the in-tank heating module 2 ″ includes an electric heater 20 for being disposed in the recess 10 and an integral metal elastic member 24 disposed around the electric heater 20, the integral metal elastic member 24 having an outer shape matching the shape of the recess 10 and adapted to be caught in the recess 10 in contact with a side wall thereof, the integral metal elastic member 24 being provided with a recess 240 for accommodating the electric heater 20 and having a shape matching the electric heater 20. When the electric heater is installed, the electric heater 20 and the integrated metal elastic piece 24 are sequentially placed in the groove 10, the electric heater 20 is placed in the concave portion 240, two sides of the integrated metal elastic piece 24 are abutted against the side wall of the groove 10 under the action of elastic force, so that the integrated metal elastic piece 24 is clamped and fixed in the groove 10, and the electric heater 20 is in contact with the concave portion 240 and the bottom wall of the groove 10. In a third embodiment, the integral metal spring 24 is a coiled stainless steel spring.

Fig. 6 is a schematic structural view showing a fourth embodiment of the in-tank heating module according to the present invention. As shown in fig. 6, the in-slot heating module 2' includes an electric heater 20 for being disposed in the recess 10 and an integral metal elastic member 26 disposed around the electric heater 20, the integral metal elastic member 26 having an outer shape matching the shape of the recess 10 and adapted to be caught in the recess 10 in contact with a side wall thereof, the integral metal elastic member 26 being provided with a recess 260 having a shape matching the electric heater 20 for accommodating the electric heater 20. The fourth embodiment is mounted in a manner similar to that of the third embodiment, and after the mounting is completed, the integrated metal elastic member 26 is snapped into the groove 10 by an elastic force, and the electric heater 20 is in contact with the concave portion 260 and the bottom wall of the groove 10. In the fourth embodiment, the one-piece metal elastic member 26 is an integrally formed stainless steel elastic sheet.

The utility model discloses an in-groove heating module is when heating its cavity that corresponds, sets up an at least metal elastic component 22 around electric heater 20 can solve corresponding equipment because of the instantaneous high-power big problem that leads to the earth leakage to flow through of needs that fast beat brought to can effectively improve heat transfer efficiency, electric heater 20 is when cold tray gets into the cavity, and the temperature can drop a few degrees less.

The in-groove heating module of the utility model comprises at least one metal elastic part arranged around the electric heater, which can effectively reduce the surface temperature of the electric heater, further reduce the leakage current of the electric heater, change the heat transfer mode from heat radiation to heat contact, improve the heat contact area and increase the heat transfer efficiency; the utility model discloses can also utilize the elasticity of an at least metal elastic component and make electric heater heat expand more freely, can not make electric heater bulge out in the recess.

The above-described embodiments are provided to enable persons skilled in the art to make or use the invention, and many modifications and variations may be made to the above-described embodiments by persons skilled in the art without departing from the inventive concept of the present invention, so that the scope of the invention is not limited by the above-described embodiments, but should be accorded the widest scope consistent with the innovative features set forth in the claims.

Claims

1. An in-groove heating module comprising an electric heater disposed in a recess, wherein the in-groove heating module further comprises at least one metal elastic member disposed around the electric heater, the at least one metal elastic member being in contact with the electric heater and a sidewall of the recess.

2. The in-tank heating module of claim 1, wherein said at least one metal spring comprises first and second metal springs disposed on opposite sides of said electric heater, respectively, each of said first and second metal springs being in contact with said electric heater and with side walls of said recess.

3. The in-tank heating module of claim 2, wherein said electric heater is disposed at a bottom of said recess and in contact with a bottom wall of said recess, said first and second metal springs being disposed on said electric heater and in contact with both side walls of said recess and said electric heater, said electric heater being spaced apart from both side walls of said recess.

4. The in-tank heating module of claim 2, wherein said first and second metal springs are disposed at a bottom of said recess, and said electric heater is disposed on said first and second metal springs, said first and second metal springs each being in contact with a bottom wall and side walls of said recess and said electric heater, said electric heater being spaced from and in contact with both side walls of said recess.

5. An in-tank heating module as claimed in claim 2, characterised in that said electric heater is cylindrical with an outer diameter of 2-8mm, said first and second metal springs each having a diameter of 2-6 mm.

6. An in-tank heating module as claimed in claim 1, wherein said at least one metal spring comprises a one-piece metal spring having an outer shape matching the shape of said recess and adapted to be captured in said recess in contact with the side wall, said one-piece metal spring being provided with a recess matching in shape to receive said electric heater, said electric heater being in contact with said recess and the bottom wall of said recess.

7. An in-tank heating module as claimed in claim 1, characterised in that the electric heater is an sheathed heater comprising, in order from the inside outwards, an inner resistive wire, a central insulating layer and an outer sheath.

8. The in-tank heating module of claim 1 or 7, wherein the tank body corresponding to the groove is made of aluminum, the housing of the electric heater is made of alloy steel, and the at least one metal elastic member is made of stainless steel.

9. The in-bath heating module of claim 1, wherein said pocket is provided in a side or top or bottom wall of a preheating chamber of a PECVD apparatus, and a tray bearing a silicon wafer is thermally conductive with the body of said pocket as it is conveyed into said preheating chamber.

10. The in-bath heating module of claim 1, wherein said electric heater heats in a vacuum environment.