CN210464023U - Vacuum baking tray furnace - Google Patents

Vacuum baking tray furnace Download PDF

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Publication number
CN210464023U
CN210464023U CN201921343558.4U CN201921343558U CN210464023U CN 210464023 U CN210464023 U CN 210464023U CN 201921343558 U CN201921343558 U CN 201921343558U CN 210464023 U CN210464023 U CN 210464023U
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Prior art keywords
vacuum
inner cavity
furnace body
vacuum pump
heating
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CN201921343558.4U
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陈善瑾
丁道路
刘汉东
郑宇鹏
陶毅
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Hefei Zhenping Electronic Technology Co ltd
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Hefei Zhenping Electronic Technology Co ltd
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Abstract

The utility model discloses a vacuum baking oven, which relates to the technical field of baking oven plates, comprising an oven body, a front oven door, a rear oven door, a temperature detection and control system, a vacuum system and a controller, wherein the oven body comprises a shell and an inner cavity, a channel for gas circulation is formed between the shell and the inner cavity and between the front oven door, the rear oven door and the inner cavity, the front end and the rear end of the inner cavity are both provided with vent holes, and the inner cavity is provided with a heating component; the utility model discloses an above-mentioned cooperation of relevant structure is used, when needing vacuum state in the furnace body, open the pneumatic valve, PLC can control rotary-vane vacuum pump or roots vacuum pump and take out from to the air in the furnace body, until taking out the furnace body to vacuum state, the temperature thermocouple can detect the temperature in the furnace body, then give thermometer and PLC with the temperature information in the furnace body in proper order, then PLC gives the outside touch-sensitive screen of furnace body with temperature information transfer, then touch-sensitive screen control PLC regulates and control the temperature in the furnace body.

Description

Vacuum baking tray furnace
Technical Field
The utility model relates to an oven dish technical field specifically is a vacuum oven dish stove.
Background
Vacuum baking pan stove equipment is a novel vacuum equipment of LED manufacturing industry, uses with MOCVO equipment is supporting, and the evacuation in the stove is worked as aiming at the furnace in, adopts the cleaning gas heating reaction mode to carry out dry-type washing (cleaning gas is nitrogen gas or hydrogen), mainly used effectively clears away gallium nitride and aluminium nitride etc. that MOCVO bore (SiC picture layer graphite plate or quartz plate), can reach effective clean effect, improves the purpose of goods quality.
However, when the conventional vacuum baking oven is used, the temperature in the oven body cannot be uniformly regulated, and the effect is not good when the vacuum is pumped, so that a vacuum baking oven needs to be designed to solve the problems.
SUMMERY OF THE UTILITY MODEL
To the deficiency of the prior art, the utility model provides a vacuum baking pan furnace, which solves the problem mentioned in the background technology.
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: a vacuum baking oven comprises an oven body, a front oven door, a rear oven door, a temperature detection and control system, a vacuum system and a controller;
the furnace body comprises a shell and an inner cavity, channels for gas circulation are formed between the shell and the inner cavity and between a front furnace door and a rear furnace door and between the inner cavity, ventilation holes are formed in the front end and the rear end of the inner cavity, a heating assembly is arranged in the inner cavity, the heating assembly comprises a plurality of heating rods powered by an external power supply, every two heating rods form a heating group, the middle parts of every two heating groups are connected through connecting seats, the connecting seats are installed on the inner wall of the inner cavity, the end parts of the two heating rods in one heating group are connected through connecting rods, an annular heating frame is formed among the plurality of heating groups through the connecting seats and the connecting rods, a fan is fixed on the outer side of the rear furnace door, the output end of the fan is connected with a ventilation pipe, and the ventilation pipe penetrates through the rear furnace door and extends to the ventilation holes;
the temperature detection and control system comprises a temperature measuring element and a temperature controller electrically connected with a controller, the temperature measuring element is arranged in the inner cavity, the temperature controller is electrically connected with the temperature measuring element on one hand, and is electrically connected with the heating assembly and the fan on the other hand, and the temperature measuring element is also electrically connected with an indicator lamp and a buzzer;
the vacuum system comprises a first vacuum pump, a second vacuum pump, an air valve and a vacuum detection element, wherein the first vacuum pump and the second vacuum pump are connected in series and then connected with a pipeline leading to the inner cavity, the air valve is installed in the pipeline, and the controller is electrically connected with the vacuum detection element on one hand and the first vacuum pump, the second vacuum pump and the air valve on the other hand respectively.
Preferably, the controller adopts a PLC, and the vacuum detection element adopts a resistance vacuum gauge.
Preferably, the temperature measuring element is an indexing thermocouple.
Preferably, the heating rod is a graphite rod.
Preferably, the first vacuum pump is a rotary vane vacuum pump, and the second vacuum pump is a roots vacuum pump.
Preferably, the outside fixed mounting of preceding furnace gate has the cylinder, the output of cylinder extends into the furnace body and fixedly connected with carries out the shutoff board of shutoff to the ventilation hole that is close to the cylinder.
Preferably, the outer side of the rear furnace door is also fixedly provided with a swing cylinder, the output end of the swing cylinder enters and exits the rear furnace door and is fixedly connected with an air-equalizing cover, and the air-equalizing cover is positioned in front of the ventilation pipe.
Preferably, the controller is electrically connected with a touch screen.
Compared with the prior art, the utility model following beneficial effect possesses:
(1) this kind of vacuum baking pan stove, when needing vacuum state in the furnace body, open the pneumatic valve, PLC can control first vacuum pump or second vacuum pump and take out from to the air in the furnace body, until taking out the furnace body to vacuum state for the evacuation effect in the furnace body is better, and then is better to the treatment effect of work piece.
(2) This kind of vacuum baking pan stove, temperature element can detect the temperature in the furnace body, then gives thermometer and PLC with the temperature information in the furnace body in proper order, then PLC gives the outside touch-sensitive screen of furnace body with temperature information transfer, then touch-sensitive screen control PLC regulates and control the temperature in the furnace body.
(3) This kind of vacuum baking pan stove, when the temperature in the furnace body need rise, PLC control is improved the temperature in the furnace body by the heating element work of external power supply power, and the heating frame is the setting of annular module ization, can be so that the heating in the furnace body is more even, the equipment of being convenient for simultaneously and dismantling.
(4) This vacuum baking pan stove, when the temperature in the furnace body needs to reduce, PLC control is cooled down in the furnace body by the fan work of external power supply power, and forms between frame and the inner chamber that the air feed body carries out the passageway that circulates and can make the cold wind that the fan blew off circulate in the furnace body, and then makes the cooling effect to the furnace body better, more even.
Drawings
FIG. 1 is a partial sectional view of the front view of the furnace body of the present invention;
FIG. 2 is a partial cross-sectional view of a rear oven door elevation view of the present invention;
FIG. 3 is a schematic structural view of the rear oven door of the present invention;
fig. 4 is an expanded view of the heating assembly of the present invention;
fig. 5 is a schematic structural view of the heating assembly of the present invention;
FIG. 6 is a schematic structural view of the front door of the present invention;
fig. 7 is a control schematic block diagram of the present invention.
In the figure: 1-furnace body, 2-front furnace door, 3-rear furnace door, 4-controller, 5-shell, 6-inner cavity, 7-channel, 8-vent hole, 9-heating rod, 10-connecting seat, 11-connecting rod, 12-temperature measuring element, 13-temperature controller, 14-solid relay, 15-blower, 16-ventilation pipe, 17-indicator, 18-buzzer, 19-first vacuum pump, 20-second vacuum pump, 21-air valve, 22-vacuum detecting element, 23-cylinder, 24-blocking plate, 25-swing cylinder, 26-air equalizing cover, 27-touch screen.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-7, the present invention provides a technical solution: a vacuum baking oven comprises an oven body 1, a front oven door 2, a rear oven door 3, a temperature detection and control system, a vacuum system and a controller 4:
the furnace body 1 comprises a shell 5 and an inner cavity 6, a channel 7 for gas circulation is formed between the shell 5 and the inner cavity 6 and between the rear furnace door 3 and the inner cavity 6, ventilation holes 8 are formed in the front end and the rear end of the inner cavity 6, a heating assembly is arranged in the inner cavity 6 and comprises a plurality of heating rods 9 powered by an external power supply, every two heating rods 9 form a heating group, the middle parts of every two heating groups are connected through a connecting seat 10, the connecting seat 10 is installed on the inner wall of the inner cavity 6, the end parts of the two heating rods 9 in one heating group are connected through a connecting rod 11, an annular heating frame is formed between the plurality of heating groups through the connecting seat 10 and the connecting rod 11, a fan 15 is fixed on the outer side of the rear furnace door 3, the output end of the fan 15 is connected with a ventilation pipe 16, and the ventilation pipe 16 penetrates through the rear furnace door 3 and;
the temperature detection and control system comprises a temperature measuring element 12 and a temperature controller 13 electrically connected with the controller 4, the temperature measuring element 12 is arranged in the inner cavity 6, the temperature controller 13 is electrically connected with the temperature measuring element 12 on one hand, and is respectively electrically connected with the heating component and the fan 15 on the other hand, and the temperature measuring element 12 is also electrically connected with an indicator lamp 17 and a buzzer 18;
the vacuum system comprises a first vacuum pump 19, a second vacuum pump 20, an air valve 21 and a vacuum detection element 22, wherein the first vacuum pump 19 and the second vacuum pump 20 are connected in series and then connected with a pipeline leading to the inner cavity 6, the air valve 21 is installed in the pipeline, and the controller 4 is electrically connected with the vacuum detection element 22 on one hand and is respectively electrically connected with the first vacuum pump 19, the second vacuum pump 20 and the air valve 21 on the other hand.
The controller 4 is a PLC, and the vacuum detecting element 22 is a resistance vacuum gauge.
The temperature measuring element 12 is an indexing thermocouple.
The heating rod 9 is a graphite rod.
The first vacuum pump 19 is a rotary-vane vacuum pump and the second vacuum pump 20 is a roots vacuum pump.
An air cylinder 23 is fixedly arranged on the outer side of the front furnace door 2, and the output end of the air cylinder 23 extends into the furnace body 1 and is fixedly connected with a plugging plate 24 for plugging the vent hole 8 close to the air cylinder 23.
The outer side of the rear furnace door 3 is also fixedly provided with a swing cylinder 25, the output end of the swing cylinder 25 enters and exits the rear furnace door 3 and is fixedly connected with an air equalizing cover 26, and the air equalizing cover 26 is positioned in front of the ventilation pipe 16.
The controller 4 is electrically connected to a touch screen 27.
When the furnace body 1 needs a vacuum state, the air valve 21 is opened, the external touch screen 27 inputs a hollow extraction instruction (the instruction can be input through the touch screen 27 arranged outside the furnace body 1, the touch screen 27 realizes the functions of data acquisition, data display, data recording, state analysis, parameter adjustment, curve memory and the like, and can carry out unified management on temperature control), the controller 4 can control the first vacuum pump 19 or the second vacuum pump 20 to start to extract air in the furnace body 1, the vacuum detection element 22 can detect the air state in the furnace body 1 in real time and transmit the detected data information to the controller 4, then the controller 4 transmits the information to the touch screen 27 again, and at this time, the staff judges whether to continue to control the first vacuum pump 19 or the second vacuum pump 20 to work according to the data displayed by the touch screen 27 until the furnace body 1 is pumped to a vacuum state.
The temperature measuring element 12 can detect the temperature in the furnace body 1, then transmit the temperature information in the furnace body 1 to the temperature meter 13 and the controller 4 in sequence, then the controller 4 transmits the temperature information to the touch screen outside the furnace body 1, and then the touch screen controls the controller 4 to regulate and control the temperature in the furnace body 1.
When the temperature in the furnace body 1 needs to rise, a worker controls the touch screen to input a temperature rising instruction, the controller 4 controls the solid-state relay 14 to be switched on, so as to control the heating component powered by an external power supply to work, the heating rods 9 on the heating component can be heated, the plurality of heating rods 9 form a heating frame through the action of the connecting seat 10 and the connecting rod 11, thus the heating component can quickly and uniformly heat up the furnace body 1, the effect is better, when the temperature in the furnace body 1 is heated through the heating component, the air cylinder 23 is started, the blocking plate 24 is pushed to block the ventilation hole 8, thus the heat is effectively prevented from being diffused into the channel 7 from the hearth, the heat is dissipated, the temperature rising rate of the furnace body 1 is slowed, when the temperature in the furnace body 1 is too high, the temperature measuring element 12 can transfer the temperature to the controller 4, then the controller 4 can control the indicator lamp 17 to light, the buzzer 18 is controlled to give an alarm to remind the staff.
After the work piece is taken out after furnace body 1 handles, when reducing the temperature in the furnace body 1, staff control touch-sensitive screen 27 inputs the cooling instruction, controller 4 control is by the work of fan 15 of external power supply power, blow in cold wind in to furnace body 1, cool down the inside of furnace body 1, cylinder 23 starts, shutoff board 24 no longer carries out the shutoff to ventilation hole 8, and shell 5 (be provided with the water-cooling wall in the shell 5, can cooperate inner chamber 6 to cool down furnace body 1) and inner chamber 6 between form the passageway 7 that the air feed body carries out the circulation can make the cold wind that fan 7 blew out circulate in furnace body 1, start the effect that drives equal fan housing 26 at cooperation tilt 25, make the cold wind diffusion that fan 15 blew out more even, finally make the cooling effect to furnace body 1 better.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The utility model provides a vacuum baking pan stove, is including furnace body, preceding furnace gate, back furnace gate, temperature detection and control system, vacuum system, controller, its characterized in that:
the furnace body comprises a shell and an inner cavity, channels for gas circulation are formed between the shell and the inner cavity and between a front furnace door and a rear furnace door and between the inner cavity, ventilation holes are formed in the front end and the rear end of the inner cavity, a heating assembly is arranged in the inner cavity, the heating assembly comprises a plurality of heating rods powered by an external power supply, every two heating rods form a heating group, the middle parts of every two heating groups are connected through connecting seats, the connecting seats are installed on the inner wall of the inner cavity, the end parts of the two heating rods in one heating group are connected through connecting rods, an annular heating frame is formed among the plurality of heating groups through the connecting seats and the connecting rods, a fan is fixed on the outer side of the rear furnace door, the output end of the fan is connected with a ventilation pipe, and the ventilation pipe penetrates through the rear furnace door and extends to the ventilation holes;
the temperature detection and control system comprises a temperature measuring element and a temperature controller electrically connected with a controller, the temperature measuring element is arranged in the inner cavity, the temperature controller is electrically connected with the temperature measuring element on one hand, and is electrically connected with the heating assembly and the fan on the other hand, and the temperature measuring element is also electrically connected with an indicator lamp and a buzzer;
the vacuum system comprises a first vacuum pump, a second vacuum pump, an air valve and a vacuum detection element, wherein the first vacuum pump and the second vacuum pump are connected in series and then connected with a pipeline leading to the inner cavity, the air valve is installed in the pipeline, and the controller is electrically connected with the vacuum detection element on one hand and the first vacuum pump, the second vacuum pump and the air valve on the other hand respectively.
2. The vacuum baking pan oven of claim 1, wherein: the controller adopts PLC, and the vacuum detection element adopts a resistance vacuum gauge.
3. The vacuum baking pan oven of claim 1, wherein: the temperature measuring element is an indexing thermocouple.
4. The vacuum baking pan oven of claim 1, wherein: the heating rod is a graphite rod.
5. The vacuum baking pan oven of claim 1, wherein: the first vacuum pump is a rotary vane vacuum pump, and the second vacuum pump is a roots vacuum pump.
6. The vacuum baking pan oven of claim 1, wherein: the outside fixed mounting of preceding furnace gate has the cylinder, the output of cylinder extends into the furnace body and fixedly connected with carries out the shutoff board of shutoff to the ventilation hole that is close to the cylinder.
7. The vacuum baking pan oven of claim 1, wherein: the outer side of the rear furnace door is also fixedly provided with a swing cylinder, the output end of the swing cylinder enters and exits the rear furnace door and is fixedly connected with an air-equalizing cover, and the air-equalizing cover is positioned in front of the ventilation pipe.
8. The vacuum baking pan oven of claim 1, wherein: the controller is electrically connected with a touch screen.
CN201921343558.4U 2019-08-19 2019-08-19 Vacuum baking tray furnace Active CN210464023U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921343558.4U CN210464023U (en) 2019-08-19 2019-08-19 Vacuum baking tray furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921343558.4U CN210464023U (en) 2019-08-19 2019-08-19 Vacuum baking tray furnace

Publications (1)

Publication Number Publication Date
CN210464023U true CN210464023U (en) 2020-05-05

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Application Number Title Priority Date Filing Date
CN201921343558.4U Active CN210464023U (en) 2019-08-19 2019-08-19 Vacuum baking tray furnace

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110425880A (en) * 2019-08-19 2019-11-08 合肥真萍电子科技有限公司 A kind of vacuum baking tray furnace
CN114199017A (en) * 2021-11-16 2022-03-18 重庆市大足区光头刀具有限公司 Vacuum sintering furnace for manufacturing cutter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110425880A (en) * 2019-08-19 2019-11-08 合肥真萍电子科技有限公司 A kind of vacuum baking tray furnace
CN114199017A (en) * 2021-11-16 2022-03-18 重庆市大足区光头刀具有限公司 Vacuum sintering furnace for manufacturing cutter

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