CN210452221U - Plane polishing device - Google Patents
Plane polishing device Download PDFInfo
- Publication number
- CN210452221U CN210452221U CN201920846992.8U CN201920846992U CN210452221U CN 210452221 U CN210452221 U CN 210452221U CN 201920846992 U CN201920846992 U CN 201920846992U CN 210452221 U CN210452221 U CN 210452221U
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- polishing
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- crank
- gripper
- driving wheel
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- 238000005498 polishing Methods 0.000 title claims abstract description 58
- 230000033001 locomotion Effects 0.000 claims abstract description 19
- 238000013519 translation Methods 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000003754 machining Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A plane polishing device comprises a parallel swing mechanism and a top swing mechanism, wherein the parallel swing mechanism is a crank rocker mechanism, and the top swing mechanism is a crank slider mechanism; the parallel swinging mechanism comprises a speed-regulating brake motor, a driving wheel, a belt, a driven wheel, a supporting rod, connecting rods and a gripper, wherein the speed-regulating brake motor drives the driving wheel, the driving wheel drives the driven wheel to rotate through the belt, the two connecting rods are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod is respectively connected with the gripper to form a crank rocker mechanism, and therefore the gripper is driven to drive a machined workpiece to swing on the polishing disc; the hand grips are arc-shaped, and the relative positions of the two hand grips are unchanged. The utility model discloses use the crank rocker as the swing mechanism of core principle, the tongs of the reciprocal translation of cooperation upper end for the motion of work piece on polishing dish is complicated unordered more, thereby makes the polishing precision of work piece higher, also makes polishing dish's grinding more even, and the life-span is longer.
Description
Technical Field
The utility model mainly relates to a plane burnishing machine field, concretely relates to plane burnishing device.
Background
The prior electronic process products such as crystal oscillator substrates, silicon wafers, lithium niobate substrates and the like not only have extremely high requirements on surface flatness, but also require that two ends of a substrate are parallel and have no crystal orientation error. Therefore, in order to ensure the performance of the components and reduce the polishing cost, these electronic components are currently finally processed using ultra-precision polishing techniques.
The ultra-precise plane polishing machine is a processing machine for various parts with high precision requirements, when the ultra-precise plane polishing machine works, a motor drives a main shaft to rotate, the main shaft drives a polishing disc to rotate, the parts do driven motion on the polishing disc, but the friction track is single, the polishing effect is poor, the abrasion on the same position of the polishing disc is serious, and the service life of the polishing disc is influenced.
Disclosure of Invention
Not good, the short not enough of life in order to solve the polishing effect of overcoming current plane burnishing machine, the utility model provides a plane burnishing device to the crank rocker is the swing mechanism of core principle, and the tongs of the reciprocal translation of cooperation upper end makes the motion of work piece on the polishing dish more complicated unordered, thereby makes the polishing precision of work piece higher, also makes the grinding of polishing dish more even, and the life-span is longer.
The utility model provides a technical scheme that its technical problem adopted is:
a plane polishing device comprises a parallel swing mechanism and a top swing mechanism, wherein the parallel swing mechanism is a crank rocker mechanism, and the top swing mechanism is a crank slider mechanism; the parallel swinging mechanism comprises a speed-regulating brake motor, a driving wheel, a belt, a driven wheel, a supporting rod, connecting rods and a gripper, wherein the speed-regulating brake motor drives the driving wheel, the driving wheel drives the driven wheel to rotate through the belt, the two connecting rods are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod is respectively connected with the gripper to form a crank rocker mechanism, and therefore the gripper is driven to drive a machined workpiece to swing on the polishing disc; the hand grips are arc-shaped, and the relative positions of the two hand grips are unchanged.
The top swing mechanism requires modification of the gripping motion of the workpiece as a rocker to achieve a small angle. Therefore, the stroke and the return stroke of the rocker mechanism designed by the patent are working strokes. The oscillating mechanism is designed as a crank-rocker mechanism without snap-back characteristics.
Furthermore, the hand grip is in the shape of an arc with a central angle of 150 degrees, the tail part of the hand grip is extended to a certain extent, and two holes with different sizes are formed in the extension rod and are used for being connected with the support rod and the connecting rod.
The radius of the inner ring of the arc-shaped hand grip is r1, the radius of the outer ring is r2, r1 is smaller than r2, and r1 and r2 can take different values according to different polishing devices and different sizes of polishing discs.
Preferably, two small holes are formed in the two ends of the opening and used for installing a finishing ring, the finishing ring can prevent the workpiece from flying out of the range of the hand grab during machining movement, and the workpiece is guaranteed to be machined within a preset range.
To different work pieces and different burnishing devices, the pivot angle of work piece is different, and according to different pivot angles, the pivot angle of rocker also correspondingly can the suitable value, and the length of crank and rocker should satisfy:
wherein,
is the swing angle of the rocker, a is the crank length, and c is the rocker length.
The top swing mechanism comprises a rotating wheel, a telescopic connecting rod, a sliding block, a hydraulic cylinder and a workpiece clamp, the rotating wheel, the telescopic connecting rod and the sliding block form a crank sliding block structure, a motor drives the rotating wheel to rotate, the sliding block is driven to perform reciprocating translation on a sliding rail through the telescopic connecting rod, the lower part of the sliding block is connected with the hydraulic cylinder, the bottom of a hydraulic rod is connected with the workpiece clamp, the hydraulic cylinder is provided with a control system, the hydraulic cylinder can be manually controlled to lift according to the thickness of a workpiece, so that the workpiece is adjusted to be in contact with a polishing disc, appropriate pressure is set, and the length l of the sliding block in translation and:
l≤kD
wherein k is a coefficient, and is 0.75-0.85.
Furthermore, the length of the telescopic connecting rod can be reasonably set according to the size of the polishing disc and other reference parameters, so that the translation amplitude of the clamp is changed, and expected swinging and machining effects are realized.
Furthermore, the telescopic connecting rod is connected with the supporting rod and the hand grip through pin shafts.
The technical conception of the utility model is as follows: the crank rocker mechanism is convenient to manufacture, the kinematic pairs are all low pairs, can bear larger load, and can control the speed; although less flexible in achieving the law of motion of the driving rod, in order to achieve a semi-planar motion, it is more appropriate to achieve a swinging motion, as contemplated by this patent; the connecting rod mechanism is an advanced, reasonable and practical mechanism.
The beneficial effects of the utility model are that: the problem of when present burnishing machine polished the work piece the motion trail of work piece single lead to work piece machining precision not enough and polishing dish wearing and tearing serious, the life-span is shorter is solved, a structure that makes work piece polishing precision higher, efficiency is higher is provided to make the wearing and tearing of polishing dish more even, and working life is longer, saves the cost.
Drawings
FIG. 1 is a front view of the mechanism of the plane polishing device of the present invention
FIG. 2 is a schematic view of the crank and rocker mechanism in the plane polishing device of the present invention
Figure 3 is a schematic view of a gripper in a crank and rocker mechanism of the present invention
FIG. 4 is the utility model provides a work piece processing intelligent regulation feedback optimization system flow chart
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1 to 4, a plane polishing device is shown in fig. 1 in a schematic main structural diagram, and includes a parallel swing mechanism and a polishing disk upper end translation mechanism, the parallel swing mechanism referring to fig. 2 is mainly a crank rocker mechanism, and the polishing disk upper end translation mechanism is driven by a crank slider mechanism.
The crank rocker mechanism is convenient to manufacture, the kinematic pairs are all low pairs, large load can be borne, and the speed can be controlled. Although less flexible in achieving the law of motion of the driving rod, in order to achieve a semi-planar motion, it is more appropriate to achieve an oscillating motion, as contemplated by this patent. The research on the link mechanism in the field is mature and deep, and the link mechanism is advanced, reasonable and practical.
The parallel swinging mechanism mainly comprises a speed regulation driving wheel 9, a driven wheel 10, a belt 12, a supporting rod 14, a connecting rod 11, a hand grip 15 and a trimming ring. The motor drives the driving wheel 9, the driving wheel 9 drives the driven wheel 10 to rotate through the belt 12, the two connecting rods 11 are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod 11 is respectively connected with the gripper 13 to form a crank rocker mechanism, and therefore the gripper 13 is driven to drive a machined workpiece to swing on the polishing disc. The gripper 13 is arc-shaped, the relative positions of the two grippers are unchanged, and the two ends of the gripper are provided with trimming rings to prevent parts from being thrown out of the gripper during processing.
The swing mechanism of the present embodiment requires modification of the gripping movement of the workpiece as the rocker to achieve a small angle. Therefore, the stroke and the return stroke of the rocker mechanism designed by the patent are working strokes. The oscillating mechanism is designed as a crank-rocker mechanism without snap-back characteristics.
The hand grip (as shown in figure 3) is in an arc shape with a central angle of 150 degrees, the horizontal length of the hand grip is b, the tail part of the hand grip is extended to a certain extent, the horizontal length of the whole rocker is c, and two holes with different sizes are formed in the extension rod and are used for being connected with the support rod and the connecting rod. The radius of an inner ring of the arc-shaped hand grip is r1, the radius of an outer ring is r2, r1 is smaller than r2, and r1 and r2 can take different values according to different polishing machines and different sizes of polishing disks. Two small holes are formed in the two ends of the opening and used for installing a finishing ring, the finishing ring can prevent the workpiece from flying out of the range of the gripper during machining movement, and the workpiece is guaranteed to be machined within a preset range.
For different workpieces and different polishing machines, the swing angles of the workpieces are different, and according to the different swing angles, the swing angle of the gripper 13 (namely a rocker) can be correspondingly appropriate, and the lengths of the crank 11 and the gripper 13 (namely the rocker) should meet the following requirements:
wherein,
is the swing angle of the hand grip 13 (i.e., the rocker), a is the length of the crank 11, and c is the length of the hand grip 13 (i.e., the rocker).
Further, in the present invention,
the angle between the two extreme positions when the hand grip 13 (i.e. the rocker) is swung.
The upper end structure of the polishing disc comprises a rotating wheel 3, a compressible connecting rod 4, a sliding block 5, a hydraulic cylinder 6 and a clamp 7, wherein the rotating wheel 3, the connecting rod 4 and the sliding block 5 form a crank sliding block structure, a motor drives the rotating wheel 3 to rotate, the sliding block 5 is driven to perform reciprocating translation on a sliding rail through the connecting rod 4, the lower part of the sliding block 5 is connected with the hydraulic cylinder 6, the bottom of the hydraulic cylinder 6 is connected with the workpiece clamp 7, and the hydraulic cylinder is provided with a control system and can manually control the lifting of the hydraulic cylinder 6 according to the thickness of a workpiece so as to adjust the contact. Wherein, the length l of the sliding block translation and the D between the polishing disks satisfy the following relation:
l≤kD
wherein k is coefficient, and is 0.75-0.85.
Further, the length of the compressible connecting rod 4 can be reasonably set according to the size of the polishing disc and other reference parameters, so that the translation amplitude of the clamp is changed, and expected swinging and machining effects are realized.
Furthermore, the connecting rod 11 and the hand grip 13 are connected through a pin shaft, and other structures are connected through threads and welded.
Further, the correcting gripper 13 and the upper end clamp 7 run in a staggered mode without intervals, and a control feedback system for increasing the workpiece motion randomness is arranged and is shown in fig. 4. The operation steps are as follows:
the first step is as follows: the system firstly inputs parameters such as thickness, roughness and the like of the workpiece.
And secondly, the system randomly inputs a random number.
The third step: the random number is set as the gripper travel distance.
The fourth step: judging whether the random movement distance exceeds the operable range of the clamp or not, and returning to the second step if the random movement distance exceeds the operable range of the clamp; if not, continue to go down.
The fifth step: and setting working parameters of the hand grip and the upper end clamp according to the selected running distance of the clamp, wherein the working parameters comprise the working time of the hand grip and the upper end clamp and the swinging speed of the hand grip and the clamp.
And a sixth step: and operating according to the set parameters to finish the processing and output of the workpiece.
Further, when the correcting gripper 7 works, the upper end clamp 7 does not perform reciprocating translation, the position is right opposite to the circle center of the polishing disc, the clamp 7 does not clamp the workpiece, only the protection effect is achieved, and the workpiece is prevented from flying out from the upper end; when the upper end clamp 7 works, the clamp 7 clamps a workpiece, the workpiece is driven to make reciprocating translation while the polishing disc rotates, and the correcting gripper 13 is static and does not move at the moment.
The embodiment has solved the single problem that leads to work piece machining precision not enough and polishing dish wearing and tearing seriously, life-span are shorter of the movement track of work piece when present burnishing machine polishes the work piece, provides one kind and makes work piece polishing precision higher, the higher structure of efficiency to make the wearing and tearing of polishing dish more even, working life is longer, saves the cost.
The protection scope of the present invention includes but is not limited to the above embodiments, the protection scope of the present invention is subject to the claims, and any replacement, deformation, and improvement that can be easily conceived by those skilled in the art made by the present technology all fall into the protection scope of the present invention.
Claims (7)
1. A plane polishing device is characterized by comprising a parallel swing mechanism and a top swing mechanism, wherein the parallel swing mechanism is a crank rocker mechanism, and the top swing mechanism is a crank slider mechanism; the parallel swinging mechanism comprises a speed-regulating brake motor, a driving wheel, a belt, a driven wheel, a supporting rod, connecting rods and a gripper, wherein the speed-regulating brake motor drives the driving wheel, the driving wheel drives the driven wheel to rotate through the belt, the two connecting rods are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod is respectively connected with the gripper to form a crank rocker mechanism, and therefore the gripper is driven to drive a machined workpiece to swing on the polishing disc; the hand grips are arc-shaped, and the relative positions of the two hand grips are unchanged.
2. A plane polishing machine as set forth in claim 1, wherein said hand grip is formed in a circular arc shape having a central angle of 150 °, a tail portion thereof is extended, and two holes having different sizes are formed in the extension bar for coupling with the support bar and the connection bar.
3. A plane polishing apparatus according to claim 1 or 2, wherein said circular arc-shaped hand grip has an inner ring radius of r1, an outer ring radius of r2, r1 < r2, and r1 and r2 take different values for different polishing disk sizes according to different polishing machines.
4. A plane polishing machine as set forth in claim 3, wherein the opening is provided at both ends thereof with two small holes for fitting a finishing ring for preventing the workpiece from flying out of the range of the hand during the working movement to ensure that the workpiece is finished within a predetermined range.
5. A plane polishing apparatus as set forth in claim 1 or 2, wherein the swing angle of the workpiece is different for different workpieces and different polishing machines, and the lengths of the crank and the rocker satisfy:
wherein,
is the swing angle of the rocker, a is the crank length, and c is the rocker length.
6. A flat surface polishing device as claimed in claim 1 or 2, wherein the top swing mechanism comprises a rotating wheel, a telescopic connecting rod, a sliding block, a hydraulic cylinder and a workpiece holder, the rotating wheel, the telescopic connecting rod and the sliding block form a crank-sliding block structure, a motor drives the rotating wheel to rotate, the sliding block is driven to reciprocate on the sliding rail through the telescopic connecting rod, the lower part of the sliding block is connected with the hydraulic cylinder, the bottom of the hydraulic rod is connected with the workpiece holder, the hydraulic cylinder is provided with a control system, the lifting of the hydraulic cylinder can be manually controlled according to the thickness of the workpiece so as to adjust the contact between the workpiece and the polishing disk, and the pressure is set, wherein the length l of the sliding block translation and the D of the:
l≤kD
wherein k is a coefficient, and is 0.75-0.85.
7. A flat polishing machine according to claim 6, wherein said retractable link is pivotally connected to said support rod and said hand grip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920846992.8U CN210452221U (en) | 2019-06-06 | 2019-06-06 | Plane polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920846992.8U CN210452221U (en) | 2019-06-06 | 2019-06-06 | Plane polishing device |
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| Publication Number | Publication Date |
|---|---|
| CN210452221U true CN210452221U (en) | 2020-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920846992.8U Expired - Fee Related CN210452221U (en) | 2019-06-06 | 2019-06-06 | Plane polishing device |
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| CN (1) | CN210452221U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110216560A (en) * | 2019-06-06 | 2019-09-10 | 浙江工业大学 | A kind of plane polishing device |
| CN111747107A (en) * | 2020-07-01 | 2020-10-09 | 吉安县苏运物流有限公司 | Logistics transportation is with transporting platform |
| CN114559277A (en) * | 2021-08-16 | 2022-05-31 | 宜兴市国昌轧辊有限公司 | Surface repairing process for forging and casting |
-
2019
- 2019-06-06 CN CN201920846992.8U patent/CN210452221U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110216560A (en) * | 2019-06-06 | 2019-09-10 | 浙江工业大学 | A kind of plane polishing device |
| CN110216560B (en) * | 2019-06-06 | 2024-04-16 | 浙江工业大学 | Plane polishing device |
| CN111747107A (en) * | 2020-07-01 | 2020-10-09 | 吉安县苏运物流有限公司 | Logistics transportation is with transporting platform |
| CN114559277A (en) * | 2021-08-16 | 2022-05-31 | 宜兴市国昌轧辊有限公司 | Surface repairing process for forging and casting |
| CN114559277B (en) * | 2021-08-16 | 2023-04-18 | 宜兴市国昌轧辊有限公司 | Surface repairing process for forging and casting |
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| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200505 |