CN210397450U - Air bearing - Google Patents
Air bearing Download PDFInfo
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- CN210397450U CN210397450U CN201921360931.7U CN201921360931U CN210397450U CN 210397450 U CN210397450 U CN 210397450U CN 201921360931 U CN201921360931 U CN 201921360931U CN 210397450 U CN210397450 U CN 210397450U
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- 238000001816 cooling Methods 0.000 claims abstract description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 34
- 238000007789 sealing Methods 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims 2
- 238000005192 partition Methods 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 abstract description 4
- 239000000498 cooling water Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010008 shearing Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
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Abstract
The utility model discloses an air-floating bearing, which comprises a radial bearing body and a thrust ring, wherein the outer side wall of the radial bearing body is provided with a plurality of circumferential air supply grooves, and the bottom of each circumferential air supply groove is provided with a plurality of circumferential air supply channels; a circumferential exhaust groove is formed in the middle section of the inner side wall of the inner hole of the radial bearing body, and a plurality of exhaust channels are formed in the bottom of the circumferential exhaust groove; the left end surface of the radial bearing body is also provided with a circle of axial hollow grooves; the right end face of the thrust ring comprises two circles of end face air supply hole groups, each circle of end face air supply hole group comprises a plurality of end face air supply holes, and each end face air supply hole is communicated with the circumferential air supply channel positioned at the rightmost end through an end face air supply channel; the outer side wall of the radial bearing body is also provided with at least one circumferential cooling groove to realize cooling of the radial bearing body; and an end face cooling groove is formed in the left end face of the thrust ring, so that the thrust ring is cooled. The utility model has the advantages that: the high-rigidity heat dissipation device has the advantages of high bearing capacity, high rigidity and high heat dissipation efficiency.
Description
Technical Field
The utility model belongs to the technical field of high-speed accurate rotating machinery technique and specifically relates to an air supporting bearing.
Background
The air bearing is widely applied to the field of high-speed precise rotating machinery due to the advantages of low friction, low power consumption, high motion precision, cleanness, environmental protection and the like. The precision rotating machinery develops towards the direction of higher speed and higher precision, the maximum working rotating speed can reach 300,000r/min or even higher, the working precision is required to be 0.1 mu m, and the precision bearing device bears the action of large alternating load in the working process, so that higher requirements are provided for the bearing capacity and the supporting rigidity of an air bearing in the precision rotating machinery. Because the viscosity of the gas is low, the air flow shearing friction heating of the air bearing at low rotating speed can be basically ignored, but the air film viscosity shearing friction of the air bearing at high rotating speed is serious, and the air film heating problem of the air bearing at the moment is serious, so that the bearing supporting performance is influenced. Therefore, an air bearing with high bearing capacity, high rigidity and high heat dissipation efficiency is needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art not enough, provide an air supporting bearing with high bearing, high rigidity, high radiating efficiency.
The utility model discloses a realize through following technical scheme:
the air bearing is arranged in an inner cavity of a shell of an electric spindle and is sleeved outside a mandrel of the electric spindle in an empty mode, the air bearing comprises a radial bearing body and a thrust ring positioned at the right end of the radial bearing body, a plurality of annular circumferential air supply grooves are formed in the outer side wall of the radial bearing body from left to right, a plurality of circumferential air supply channels extending along the radial direction are arranged at the bottom of each circumferential air supply groove, and the corresponding circumferential air supply grooves and the inner hole of the radial bearing body are communicated through the circumferential air supply channels;
the middle section of the inner side wall of the inner hole of the radial bearing body is also provided with an annular circumferential exhaust groove, the bottom of the circumferential exhaust groove is provided with a plurality of radially extending exhaust channels, and the circumferential exhaust groove is communicated with the outer side wall of the radial bearing body through each exhaust channel; the left end face of the radial bearing body is also provided with a circle of axial hollow grooves, the number of the axial hollow grooves is the same as that of the exhaust passages, each axial hollow groove extends along the axial direction and is communicated with the corresponding exhaust passage, and the axial hollow grooves are blind holes with the right ends being blind ends;
the right end face of the thrust ring comprises two circles of end face air supply hole groups, the two circles of end face air supply hole groups are respectively an outer ring end face air supply hole group and an inner ring end face air supply hole group, each circle of end face air supply hole group comprises a plurality of end face air supply holes, each end face air supply hole is communicated with a circumferential air supply channel located at the rightmost end through an end face air supply channel, and the end face air supply channel extends along a direction parallel to the axial direction;
the outer side wall of the radial bearing body is also provided with at least one circumferential cooling groove, the circumferential cooling groove surrounds the radial bearing body but is not closed, two ends of the circumferential cooling groove are separated by a first spacer block, two ends of the circumferential cooling groove respectively form a circumferential water inlet end and a circumferential water discharge end, and the radial bearing body is cooled by water entering the circumferential cooling groove from the circumferential water inlet end and water discharging from the circumferential water discharge end;
the left end face of the thrust ring is provided with an end face cooling groove, the end face cooling groove is of an unclosed annular structure, two ends of the end face cooling groove are separated through a second spacer block, two ends of the end face cooling groove are respectively provided with an end face water inlet end and an end face water discharge end, water is fed into the end face cooling groove through the end face water inlet end, water is discharged from the end face water discharge end, and cooling of the thrust ring is achieved.
Furthermore, a circle of middle ring end face air supply hole group is also arranged between the outer ring end face air supply hole group and the inner ring end face air supply hole group on the right end face of the thrust ring, the middle ring end face air supply hole group comprises a plurality of middle end face air supply holes, and the plurality of middle end face air supply holes and the plurality of end face air supply holes of the outer ring end face air supply hole group are arranged in a staggered mode;
the circumference air feed tank bottom that is located the rightmost end still is equipped with a plurality of circumference air feed blind ways along radially extending, and a plurality of circumference air feed blind ways and a plurality of circumference air feed passageway interval that are located the circumference air feed tank bottom of rightmost end arrange, and terminal surface air feed hole is linked together through respective middle terminal surface air feed passageway and a plurality of circumference air feed blind way one-to-one, middle terminal surface air feed passageway extends along the direction with axial direction parallel.
Furthermore, a thrust disc protruding outwards in the radial direction is arranged at the position, close to the right end, of the mandrel, the air bearing is located on the left side of the thrust disc, and a thrust ring of the air bearing protrudes out of the thrust disc in the radial direction;
the air supply hole group on the right end face of the thrust ring is respectively an outer ring end face air supply hole group, a middle ring end face air supply hole group and an inner ring end face air supply hole group from outside to inside, the circle where the circle centers of a plurality of end face air supply holes of the outer ring end face air supply hole group are located is a first reference circle, the circle where the circle centers of a plurality of middle end face air supply holes of the middle ring end face air supply hole group are located is a second reference circle, the circle where the circle centers of a plurality of end face air supply holes of the inner ring end face air supply hole group are located is a third reference circle, and the diameters of the first reference circle, the second reference circle and the third reference circle are respectively D1、D2、D3Then D is1、D2、D3Calculated according to the following formula:
wherein D isinIs the bore diameter on the right end face of the thrust collar, DoutIs the outer diameter of the thrust disk of the spindle.
Furthermore, the left and right sides that corresponds every circumference air feed groove on the radial bearing body lateral wall is opened respectively has the seal groove, be equipped with the sealing washer in the seal groove, through two sealing washers with the shell inside wall closely cooperates the sealed of realizing each circumference air feed groove.
Compared with the prior art, the utility model has the following advantages:
1. the utility model provides an air bearing, it has improved air bearing's bearing capacity and supporting rigidity through set up multirow circumference air feed groove on the journal bearing body, and set up many rings of terminal surface air feed punch combinations on the thrust collar; in addition, the radial bearing body is also provided with a plurality of circumferential cooling grooves, and the left end face of the thrust collar is provided with an end face cooling groove, so that the high-speed air film shearing friction heating of the air bearing can be efficiently and directly cooled, and the temperature of the bearing is effectively reduced; the radial bearing body is provided with a circle of axial hollow grooves and communicated with the plurality of exhaust passages, so that flowing gas of the exhaust passages can enter the axial hollow grooves, air convection in the axial hollow grooves is enhanced, and the heat dissipation capacity of the bearing is further enhanced. In addition, the air-floating bearing directly arranges the air path structure and the cooling water path structure on the bearing, and has simple and compact structure.
2. The utility model provides a pair of air supporting bearing, it sets up outer, in, interior three rings of terminal surface air feed punch combination altogether on the working face of thrust collar right-hand member face, and the terminal surface air feed hole in the middle of a plurality of middle ring terminal surface air feed punch combination and a plurality of terminal surface air feed holes of outer lane terminal surface air feed punch combination crisscross the arranging, this kind of structural design has effectively increased air supporting bearing's air film pressure, is favorable to improving air supporting bearing's bearing capacity and supporting rigidity.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a perspective view of another perspective view of the present invention.
Fig. 3 is a right side view of the present invention.
Fig. 4 is a sectional view taken along line a-a of fig. 3.
Fig. 5 is a sectional view taken along line B-B of fig. 3.
Fig. 6 is a cross-sectional view of C-C of fig. 4.
Fig. 7 is a cross-sectional view taken along line D-D of fig. 4.
Fig. 8 is a sectional view of the waterway structure of the air bearing assembled with the housing and the spindle of the present invention.
Fig. 9 is a cross-sectional view of the gas circuit structure of the air bearing assembled with the housing and the spindle according to the present invention.
Reference numbers in the figures: 1, an air bearing, 11, a radial bearing body, 12, a thrust collar, 13, 14, 15, 16, 17, 18, 19, 110, 111, 112, 113, 114, 115, 116, and 117 seal grooves; 118 outer lane terminal surface air feed punch combination, 119 middle lane terminal surface air feed punch combination, 120 inner circle terminal surface air feed punch combination, 121 circumference air feed blind way, 122 middle terminal surface air feed passageway, 2 shells, 21 main air feed passageway, 22 main exhaust passage, 23 main water supply passageway, 24 main drainage passageways, 3 dabber, 31 thrust disc, 4 left journal bearing, 5 motor element, 6 right journal bearing.
Detailed Description
The embodiments of the present invention will be described in detail below, and the present embodiment is implemented on the premise of the technical solution of the present invention, and a detailed implementation manner and a specific operation process are given, but the scope of the present invention is not limited to the following embodiments.
Referring to fig. 1 to 9, in the embodiment, an air-floating bearing is disclosed, in which an air-floating bearing 1 is installed in an inner cavity of a housing 2 of an electric spindle and is sleeved outside a spindle 3 of the electric spindle, the air-floating bearing 1 includes a radial bearing body 11 and a thrust collar 12 located at a right end of the radial bearing body 11, and the radial bearing body 11 and the thrust collar 12 are designed in an integrated manner.
The outer side wall of the radial bearing body 11 is provided with a plurality of annular circumferential air supply grooves 13 from left to right, and four circumferential air supply grooves 13 are adopted in the embodiment. The outer side wall of the radial bearing body 11 is provided with a sealing groove 117 on the left and right sides corresponding to each circumferential air supply groove 13, a sealing ring is arranged in the sealing groove 117, and the sealing of each circumferential air supply groove 13 is realized by the close fit of the two sealing rings and the inner side wall of the housing 2. The bottom of each circumferential air supply groove 13 is provided with a plurality of circumferential air supply channels 14 extending along the radial direction, and the corresponding circumferential air supply grooves 13 are communicated with the inner hole of the radial bearing body 11 through the circumferential air supply channels 14.
An annular circumferential exhaust groove 15 is formed in the middle section of the inner side wall of the inner hole of the radial bearing body 11, a plurality of exhaust channels 16 extending along the radial direction are formed in the bottom of the circumferential exhaust groove 15, and the circumferential exhaust groove 15 is communicated with the outer side wall of the radial bearing body 11 through each exhaust channel 16; the left end face of the radial bearing body 11 is further provided with a circle of axial hollow grooves 17, the number of the axial hollow grooves 17 is the same as that of the exhaust passages 16, each axial hollow groove 17 extends along the axial direction and is communicated with the corresponding exhaust passage 16, and the right end of each axial hollow groove 17 is a blind hole with a blind end.
The right end face of the thrust collar 12 is provided with two circles of end face air supply hole groups, each circle of end face air supply hole group is an outer ring end face air supply hole group 118 and an inner ring end face air supply hole group 120, each circle of end face air supply hole group comprises a plurality of end face air supply holes, each end face air supply hole is communicated with the circumferential air supply channel 14 located at the rightmost end through an end face air supply channel 18, and the end face air supply channel 18 extends along the direction parallel to the axial direction.
The outer side wall of the radial bearing body 11 is further provided with at least one circumferential cooling groove 19, and in the embodiment, two circumferential cooling grooves 19 are adopted. The circumferential cooling groove 19 surrounds the radial bearing body 11 but is not closed, two ends of the circumferential cooling groove 19 are separated by the first spacer block 110, two ends of the circumferential cooling groove 19 are respectively provided with a circumferential water inlet end 112 and a circumferential water outlet end 111, water is fed into the circumferential cooling groove 19 through the circumferential water inlet end 112, and water is discharged from the circumferential water outlet end 111, so that the radial bearing body 11 is cooled.
An end face cooling groove 113 is formed in the left end face of the thrust collar 12, the end face cooling groove 113 is of an unclosed annular structure, two ends of the end face cooling groove 113 are separated by a second spacer block 114, an end face water inlet end 116 and an end face water outlet end 115 are formed in two ends of the end face cooling groove 113 respectively, water is fed into the end face cooling groove 113 through the end face water inlet end 116, water is discharged from the end face water outlet end 115, and cooling of the thrust collar 12 is achieved.
Specifically, a circle of middle ring end face air supply hole group 119 is further arranged between the outer ring end face air supply hole group 118 and the inner ring end face air supply hole group 120 on the right end face of the thrust ring 12, the middle ring end face air supply hole group 119 comprises a plurality of middle end face air supply holes, and the plurality of middle end face air supply holes and the plurality of end face air supply holes of the outer ring end face air supply hole group 118 are arranged in a staggered mode.
The bottom of the circumferential air supply groove 13 at the rightmost end is also provided with a plurality of circumferential air supply blind channels 121 extending along the radial direction, the plurality of circumferential air supply blind channels 121 at the bottom of the circumferential air supply groove 13 at the rightmost end and the plurality of circumferential air supply channels 14 are arranged at intervals, a plurality of middle end face air supply holes are communicated with the plurality of circumferential air supply blind channels 121 in a one-to-one correspondence manner through respective middle end face air supply channels 122, and the middle end face air supply channels 122 extend along the direction parallel to the axial direction.
Specifically, a thrust disc 31 protruding outward in the radial direction is arranged at a position, close to the right end, of the mandrel 3, the air-floatation bearing 1 is located on the left side of the thrust disc 31, and a thrust ring 12 of the air-floatation bearing 1 protrudes out of the thrust disc 31 in the radial direction;
the air supply hole groups on the right end face of the thrust ring 12 are respectively an outer ring end face air supply hole group 118, an intermediate ring end face air supply hole group 119 and an inner ring end face air supply hole group 120 from outside to inside, a circle in which the centers of a plurality of end face air supply holes of the outer ring end face air supply hole group 118 are located is set as a first reference circle, a circle in which the centers of a plurality of intermediate end face air supply holes of the intermediate ring end face air supply hole group 119 are located is set as a second reference circle, and a circle in which the centers of a plurality of end face air supply holes of the inner ring end face air supply hole group 120 are located is set asThe diameters of the first reference circle, the second reference circle and the third reference circle are respectively set as D1、D2、D3Then D is1、D2、D3Calculated according to the following formula:
wherein D isinThe diameter of the inner circle of the effective gas film of the thrust collar 12, i.e., the inner hole aperture on the right end face of the thrust collar 12; doutIs the diameter of the effective gas film outer circle of the thrust ring 12, i.e. the outer diameter of the thrust disk 31 corresponding to the spindle 3.
During assembly, firstly, the left radial bearing 4, the motor component 5 and the air bearing 1 are sequentially arranged in parallel from left to right in the cavity of the shell 2, the core shaft 3 sequentially penetrates into inner holes of the left radial bearing 4, the motor component 5 and the air bearing 1 from right to left, then the right thrust bearing is sleeved at the right end of the core shaft 3, the air bearing 1 and the right thrust bearing are respectively arranged at the left side and the right side of the thrust plate 31 of the core shaft 3 and protrude out of the thrust plate 31 in the radial direction, and a gap adjusting ring is sleeved on the periphery of the thrust plate 31 in an empty mode.
Referring to fig. 8, in operation, the main water supply channel 23 in the housing 2 is respectively abutted with the circumferential water inlet end 112 of each circumferential cooling groove 19 of the radial bearing body 11 and the end surface water inlet end 116 of the end surface cooling groove 113 on the left end surface of the thrust collar 12, so as to supply cooling water to the air-bearing 1, thereby cooling the air-bearing 1. And the main drainage channel 24 in the shell 2 is respectively butted with a circumferential drainage end 111 of each circumferential cooling groove 19 and an end surface drainage end 115 of an end surface cooling groove 113 on the left end surface of the thrust collar 12, so as to drain water, thereby realizing the circulation of cooling water.
Referring to fig. 9, the main air supply channel 21 in the housing 2 is communicated with each first circumferential air supply groove 13 on the outer side wall of the radial bearing body 11, so that high-pressure air is supplied to the air bearing 1, an air film is formed between the air bearing 1 and the mandrel 3, and the mandrel 3 floats; and the exhaust is realized by the main exhaust channel 22 in the shell 2 and the outer end of the ring of exhaust channels 16 on the radial bearing body 11.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (4)
1. The utility model provides an air bearing, air bearing (1) is installed in shell (2) inner chamber of electricity main shaft to empty cover is outside dabber (3) of electricity main shaft, its characterized in that: the air bearing (1) comprises a radial bearing body (11) and a thrust ring (12) located at the right end of the radial bearing body (11), a plurality of annular circumferential air supply grooves (13) are formed in the outer side wall of the radial bearing body (11) from left to right, a plurality of circumferential air supply channels (14) extending along the radial direction are arranged at the bottom of each circumferential air supply groove (13), and the corresponding circumferential air supply grooves (13) are communicated with inner holes of the radial bearing body (11) through the circumferential air supply channels (14);
the middle section of the inner side wall of the inner hole of the radial bearing body (11) is also provided with an annular circumferential exhaust groove (15), the bottom of the circumferential exhaust groove (15) is provided with a plurality of radially extending exhaust channels (16), and the circumferential exhaust groove (15) is communicated with the outer side wall of the radial bearing body (11) through each exhaust channel (16); a circle of axial hollow grooves (17) are further formed in the left end face of the radial bearing body (11), the number of the axial hollow grooves (17) is the same as that of the exhaust passages (16), each axial hollow groove (17) extends in the axial direction and is communicated with the corresponding exhaust passage (16), and the right end of each axial hollow groove (17) is a blind hole with a blind end;
the right end face of the thrust ring (12) comprises two circles of end face air supply hole groups, the two circles of end face air supply hole groups are respectively an outer circle end face air supply hole group (118) and an inner circle end face air supply hole group (120), each circle of end face air supply hole group comprises a plurality of end face air supply holes, each end face air supply hole is communicated with a circumferential air supply channel (14) located at the rightmost end through an end face air supply channel (18), and the end face air supply channel (18) extends along a direction parallel to the axial direction;
the outer side wall of the radial bearing body (11) is also provided with at least one circumferential cooling groove (19), the circumferential cooling groove (19) surrounds the radial bearing body (11) but is not closed, two ends of the circumferential cooling groove (19) are separated through a first partition block (110), two ends of the circumferential cooling groove (19) form a circumferential water inlet end (112) and a circumferential water drainage end (111) respectively, water is fed into the circumferential cooling groove (19) through the circumferential water inlet end (112) and discharged from the circumferential water drainage end (111), and cooling of the radial bearing body (11) is achieved;
it has terminal surface cooling bath (113) to open on thrust collar (12) left end face, terminal surface cooling bath (113) are not confined loop configuration, the both ends of terminal surface cooling bath (113) are separated through second spacer (114), the both ends of terminal surface cooling bath (113) form terminal surface respectively and intake end (116) and terminal surface drainage end (115), intake end (116) through the terminal surface and intake to terminal surface cooling bath (113) and from terminal surface drainage end (115) play water, realize the cooling to thrust collar (12).
2. An air bearing as claimed in claim 1 wherein: a circle of middle ring end face air supply hole group (119) is further arranged between the outer ring end face air supply hole group (118) and the inner ring end face air supply hole group (120) on the right end face of the thrust ring (12), the middle ring end face air supply hole group (119) comprises a plurality of middle end face air supply holes, and the plurality of middle end face air supply holes and the plurality of end face air supply holes of the outer ring end face air supply hole group (118) are distributed in a staggered mode;
the bottom of the circumferential air supply groove (13) at the rightmost end is also provided with a plurality of circumferential air supply blind passages (121) extending along the radial direction, the plurality of circumferential air supply blind passages (121) at the bottom of the circumferential air supply groove (13) at the rightmost end are arranged at intervals with the plurality of circumferential air supply channels (14), a plurality of middle end face air supply holes are communicated with the plurality of circumferential air supply blind passages (121) in a one-to-one correspondence manner through respective middle end face air supply channels (122), and the middle end face air supply channels (122) extend along the direction parallel to the axial direction.
3. An air bearing as claimed in claim 2 wherein: a thrust disc (31) protruding outwards in the radial direction is arranged at the position, close to the right end, of the mandrel (3), the air-floatation bearing (1) is located on the left side of the thrust disc (31), and a thrust ring (12) of the air-floatation bearing (1) protrudes out of the thrust disc (31) in the radial direction;
the gas supply hole groups on the right end face of the thrust ring (12) are respectively an outer ring end face gas supply hole group (118), a middle ring end face gas supply hole group (119) and an inner ring end face gas supply hole group (120) from outside to inside, the circle where the circle centers of a plurality of end face gas supply holes of the outer ring end face gas supply hole group (118) are located is a first reference circle, the circle where the circle centers of a plurality of middle end face gas supply holes of the middle ring end face gas supply hole group (119) are located is a second reference circle, the circle where the circle centers of a plurality of end face gas supply holes of the inner ring end face gas supply hole group (120) are located is a third reference circle, and the diameters of the first reference circle, the second reference circle and the third reference circle are respectively D1、D2、D3Then D is1、D2、D3Calculated according to the following formula:
wherein D isinIs the bore diameter D of the inner bore on the right end face of the thrust collar (12)outIs the outer diameter of a thrust disc (31) of the mandrel (3).
4. An air bearing as claimed in claim 1 wherein: the radial bearing is characterized in that a sealing groove (117) is formed in the left side and the right side of the outer side wall of the radial bearing body (11) corresponding to each circumferential air supply groove (13) respectively, a sealing ring is arranged in the sealing groove (117), and the sealing of each circumferential air supply groove (13) is realized through tight matching of the inner side wall of the shell (2) and the two sealing rings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921360931.7U CN210397450U (en) | 2019-08-20 | 2019-08-20 | Air bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921360931.7U CN210397450U (en) | 2019-08-20 | 2019-08-20 | Air bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210397450U true CN210397450U (en) | 2020-04-24 |
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ID=70339237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921360931.7U Withdrawn - After Issue CN210397450U (en) | 2019-08-20 | 2019-08-20 | Air bearing |
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| CN (1) | CN210397450U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110360223A (en) * | 2019-08-20 | 2019-10-22 | 中国科学院合肥物质科学研究院 | A kind of air-bearing |
| CN111927886A (en) * | 2020-07-15 | 2020-11-13 | 杭州电子科技大学 | AACMM high-precision joint based on static pressure air bearing and supporting method thereof |
| CN115199647A (en) * | 2022-03-03 | 2022-10-18 | 南方科技大学 | Static pressure air bearing for double-rotor support |
-
2019
- 2019-08-20 CN CN201921360931.7U patent/CN210397450U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110360223A (en) * | 2019-08-20 | 2019-10-22 | 中国科学院合肥物质科学研究院 | A kind of air-bearing |
| CN110360223B (en) * | 2019-08-20 | 2024-03-19 | 中国科学院合肥物质科学研究院 | Air bearing |
| CN111927886A (en) * | 2020-07-15 | 2020-11-13 | 杭州电子科技大学 | AACMM high-precision joint based on static pressure air bearing and supporting method thereof |
| CN115199647A (en) * | 2022-03-03 | 2022-10-18 | 南方科技大学 | Static pressure air bearing for double-rotor support |
| CN115199647B (en) * | 2022-03-03 | 2023-08-22 | 南方科技大学 | Static pressure air bearing facing double-rotor support |
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