CN210278767U - Continuous recovery system of high-purity ammonia water production tail gas - Google Patents
Continuous recovery system of high-purity ammonia water production tail gas Download PDFInfo
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- CN210278767U CN210278767U CN201920795009.4U CN201920795009U CN210278767U CN 210278767 U CN210278767 U CN 210278767U CN 201920795009 U CN201920795009 U CN 201920795009U CN 210278767 U CN210278767 U CN 210278767U
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Abstract
The utility model relates to a continuous recovery system for tail gas in high-purity ammonia water production, wherein an air inlet of a first suction fan is communicated with an emptying pipeline of a front ammonia water production device; an air outlet of the fan I is communicated with the ammonia buffer tank; the gas outlet of the ammonia buffer tank is respectively communicated with the gas inlets of the ammonia absorption tower I and the ammonia absorption tower II; the inner cavities of the ammonia absorption tower I and the ammonia absorption tower II are both provided with cooling coils; the water outlet of the purified water tank is respectively communicated with the water inlets of the ammonia absorption tower I and the ammonia absorption tower II; a liquid outlet of the ammonia absorption tower is communicated with an ammonia water storage tank; the air outlet of the ammonia absorption tower is sequentially communicated with a second suction fan, an air inlet pipe and an acid washing tower; the gas outlet end of the gas inlet pipe extends to the bottom of the pickling tower, and the top of the pickling tower is provided with an emptying pipeline; the system has compact structure and good ammonia absorption effect, can realize continuous and uninterrupted absorption of ammonia, and has high recovery utilization rate and no pollution to the environment.
Description
Technical Field
The utility model relates to an ammonia recovery system especially relates to a continuous recovery system of high-purity aqueous ammonia production tail gas, belongs to the chemical production equipment field.
Background
With the rapid development of the domestic semiconductor industry, the demand of high-purity electronic chemicals is increased rapidly, and high-purity electronic grade ammonia water is used as one of the high-purity electronic grade ammonia water, has the weak alkaline characteristic, is used for activating the surfaces of silicon wafers and particles, and can remove surface particles and partial metal impurities, so that the ultra-pure ammonia water is widely applied to the chip cleaning and etching processes; in the production process of liquid ammonia in the chemical industry, due to the volatility of ammonia, a large amount of gaseous ammonia is directly discharged into the atmosphere through an equipment emptying pipeline, so that not only is the environment polluted, but also the waste of raw materials is caused; to solve this problem, the recovery is usually carried out by absorption with a single-cycle water spray. However, this absorption method has the following disadvantages: the absorption efficiency is low, and the absorption effect of only 30 percent of the total amount can be achieved; the equipment investment cost is high, the water consumption is large, the concentration of the obtained dilute ammonia water is low, and high-content ammonia water can be obtained only by secondary absorption or rectification; the ammonia gas can release heat in the process of dissolving in water, so that the temperature of the ammonia water is increased, the solubility of the ammonia gas is reduced along with the increase of the temperature, and the absorption rate is directly influenced; meanwhile, in the production process, when the liquid storage tank is filled with ammonia water and needs to be replaced, production can only be stopped, and the liquid storage tank can continue to absorb the ammonia water when being replaced, so that the recovery efficiency is greatly reduced.
Disclosure of Invention
An object of the utility model is to overcome above-mentioned not enough, provide a compact structure, ammonia absorption efficiency is high, can realize the continuous incessant absorption of ammonia, and recycle rate is high, to the continuous recovery system of high-purity aqueous ammonia production tail gas of environmental pollution-free.
The purpose of the utility model is realized like this:
a continuous recovery system for tail gas in production of high-purity ammonia water comprises a first suction fan, an ammonia buffer tank, a first ammonia absorption tower, a second ammonia absorption tower, a purified water tank, a liquid pump, an ammonia storage tank, a second suction fan, an air inlet pipe, an acid washing tower and an aeration device;
an air inlet of the first suction fan is communicated with an emptying pipeline of the front ammonia water production equipment; an air outlet of the fan I is communicated with an air inlet of the ammonia buffer tank through a pipeline; the gas outlet of the ammonia buffer tank is respectively communicated with the bottom gas inlet of the ammonia absorption tower I and the bottom gas inlet of the ammonia absorption tower II through pipelines; a one-way valve is arranged on a pipeline between the ammonia buffer tank and the ammonia absorption tower I; a one-way valve is arranged on a pipeline between the ammonia buffer tank and the ammonia absorption tower II; the inner cavity of the ammonia absorption tower I is provided with a first cooling coil, the upper part and the lower part of the outer wall of the ammonia absorption tower I are respectively provided with a water inlet and a water outlet of the first cooling coil, and circulating cooling water is introduced into the first cooling coil; a second cooling coil is arranged in the inner cavity of the second ammonia absorption tower, the upper part and the lower part of the outer wall of the second ammonia absorption tower are respectively provided with a water inlet and a water outlet of the second cooling coil, and circulating cooling water is introduced into the second cooling coil;
the water outlet of the purified water tank is respectively communicated with the top water inlet of the ammonia absorption tower I and the top water inlet of the ammonia absorption tower II through pipelines; a one-way valve is arranged on a pipeline between the purified water tank and a top water inlet of the ammonia absorption tower I, and a one-way valve is arranged on a pipeline between the purified water tank and a top water inlet of the ammonia absorption tower II;
a liquid outlet at the bottom of the ammonia absorption tower I is communicated with an inlet of an ammonia water storage tank through a pipeline, and a liquid outlet at the bottom of the ammonia absorption tower II is communicated with an inlet of the ammonia water storage tank through a pipeline; a one-way valve is arranged at a liquid outlet at the bottom of the ammonia absorption tower; a one-way valve is arranged at a liquid outlet at the bottom of the ammonia absorption tower II; the top air outlet of the first ammonia absorption tower and the top air outlet of the second ammonia absorption tower are respectively communicated with a suction fan two phase through pipelines; an air outlet of the second suction fan is communicated with an air inlet pipe; the gas outlet end of the gas inlet pipe extends to the bottom of the pickling tower, and the top of the pickling tower is provided with an emptying pipeline;
the utility model relates to a continuous recovery system for tail gas in production of high-purity ammonia water, wherein an oil removal membrane component and a particle removal membrane component are arranged in an ammonia buffer tank;
the utility model relates to a continuous recovery system of high-purity ammonia water production tail gas, the deoiling membrane subassembly is made by one or arbitrary multiple in PTFE, PVDF and PP microporous membrane, and the aperture of microporous membrane is 100 plus one's sand 500 nm; the degranulation membrane component is made of a PTFE and/or PP microporous membrane, and the pore diameter of the microporous membrane is 50-100 nm;
the utility model relates to a continuous recovery system for tail gas in high-purity ammonia water production, wherein a first stirring paddle is arranged at the bottom of an inner cavity of a first ammonia absorption tower, and a second stirring paddle is arranged at the bottom of an inner cavity of a second ammonia absorption tower;
the utility model relates to a continuous recovery system for tail gas in high-purity ammonia water production, wherein an ammonia water concentration monitor and a liquid level meter are arranged on a first ammonia absorption tower and a second ammonia absorption tower;
the utility model relates to a continuous recovery system for tail gas in the production of high-purity ammonia water, wherein an aeration device is arranged at the gas outlet end of a gas inlet pipe; the aeration device comprises a transversely arranged main pipe, the main pipe is connected with a plurality of uniformly arranged branch pipes, a plurality of aeration heads are arranged on the branch pipes, the main pipe and the branch pipes are connected in a pipeline fixing frame, and the pipeline fixing frame is tightly attached to the inner wall of the pickling tower.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model arranges the cooling water coil pipe in the ammonia absorption tower, when reducing the temperature of ammonia water and improving the absorption performance, the bottom of the absorption tower is provided with the stirring paddle, so that the gas-liquid contact is more sufficient, and the absorption effect is more obvious; the acid waste liquid which is generated on other production lines of chemical enterprises and cannot be recycled is used for washing the ammonia gas volatilized in the absorption process by arranging the acid washing tower, the ammonia gas and the acid waste liquid are mixed more fully by arranging the aeration device, finally, the ammonia gas is washed by waste acid in the tank and reaches the emission standard, and the rest pollution-free gas is directly discharged into the atmosphere from the emptying pipeline; the system has compact structure, high ammonia absorption efficiency, continuous and uninterrupted absorption, high recovery and utilization rate and no environmental pollution.
Drawings
FIG. 1 is a schematic structural diagram of the continuous recovery system for tail gas from the production of high-purity ammonia water.
FIG. 2 is a sectional view of the aeration apparatus of the continuous recovery system for tail gas from the production of high-purity ammonia water.
FIG. 3 is a top view of the aeration apparatus of the continuous recovery system for tail gas from the production of high-purity ammonia water.
Wherein:
the device comprises a suction fan I1, an ammonia buffer tank 2, an ammonia absorption tower I3, an ammonia absorption tower II 4, a purified water tank 5, a liquid pump 6, an ammonia water storage tank 7, a suction fan II 8, an air inlet pipe 9, an acid washing tower 10 and an aeration device 11;
the device comprises a deoiling membrane component 2.1, a degranulation membrane component 2.2, a cooling coil I3.1, a stirring paddle I3.2, a cooling coil II 4.1, a stirring paddle II 4.2, a main pipe 11.1, branch pipes 11.2, an aeration head 11.3 and a pipeline fixing frame 11.4.
Detailed Description
Referring to fig. 1-3, the utility model relates to a continuous recovery system of high-purity ammonia water production tail gas, which comprises a suction fan I1, an ammonia buffer tank 2, an ammonia absorption tower I3, an ammonia absorption tower II 4, a purified water tank 5, a liquid pump 6, an ammonia storage tank 7, a suction fan II 8, an air inlet pipe 9, an acid washing tower 10 and an aeration device 11;
an air inlet of the suction fan I1 is communicated with an emptying pipeline of the front ammonia water production equipment; an air outlet of the fan I1 is communicated with an air inlet of the ammonia buffer tank 2 through a pipeline; the gas outlet of the ammonia buffer tank 2 is respectively communicated with the bottom gas inlet of the ammonia absorption tower I3 and the bottom gas inlet of the ammonia absorption tower II 4 through pipelines; a one-way valve is arranged on a pipeline between the ammonia buffer tank 2 and the ammonia absorption tower I3; a one-way valve is arranged on a pipeline between the ammonia buffer tank 2 and the ammonia absorption tower II 4; a first cooling coil 3.1 is arranged in an inner cavity of the first ammonia absorption tower 3, a water inlet and a water outlet of the first cooling coil 3.1 are respectively formed in the upper part and the lower part of the outer wall of the first ammonia absorption tower 3, and circulating cooling water is introduced into the first cooling coil 3.1; a cooling coil II 4.1 is arranged in the inner cavity of the ammonia absorption tower II 4, the upper part and the lower part of the outer wall of the ammonia absorption tower II 4 are respectively provided with a water inlet and a water outlet of the cooling coil II 4.1, and circulating cooling water is introduced into the cooling coil II 4.1; the cooling coil increases the contact area with the ammonia water in the absorption tower, absorbs the temperature of the ammonia gas when reacting with the pure water, and reduces the temperature of the reaction liquid to further enhance the absorption capacity of the pure water;
the water outlet of the purified water tank 5 is respectively communicated with the top water inlet of the ammonia gas absorption tower I3 and the top water inlet of the ammonia gas absorption tower II 4 through pipelines; a one-way valve is arranged on a pipeline between the purified water tank 5 and the top water inlet of the ammonia absorption tower I3, and a one-way valve is arranged on a pipeline between the purified water tank 5 and the top water inlet of the ammonia absorption tower II 4; the purified water tank 5 replenishes purified water into the ammonia gas absorption tower I3 and the ammonia gas absorption tower II 4 for absorbing ammonia gas;
a liquid outlet at the bottom of the ammonia absorption tower I3 is communicated with an inlet of an ammonia water storage tank 7 through a pipeline, and a liquid outlet at the bottom of the ammonia absorption tower II 4 is communicated with an inlet of the ammonia water storage tank 7 through a pipeline; a one-way valve is arranged at a liquid outlet at the bottom of the ammonia absorption tower I3; a one-way valve is arranged at a liquid outlet at the bottom of the ammonia absorption tower II 4; the top air outlet of the ammonia absorption tower I3 and the top air outlet of the ammonia absorption tower II 4 are respectively communicated with a second suction fan 8 through pipelines; an air outlet of the second suction fan 8 is communicated with an air inlet pipe 9; the gas outlet end of the gas inlet pipe 9 extends to the bottom of the pickling tower 10, and the top of the pickling tower 10 is provided with an emptying pipeline; a small amount of ammonia volatilized from the ammonia absorption tower enters the bottom of the pickling tower 10 through the gas inlet pipe 9, and is washed by waste acid in the tank to reach the emission standard, and the rest pollution-free gas is directly discharged into the atmosphere from the emptying pipeline;
further, a deoiling membrane component 2.1 and a degranulation membrane component 2.2 are arranged in the ammonia buffer tank 2; the waste ammonia gas enters a deoiling membrane component 2.1 to remove grease and moisture in the waste ammonia gas, and trace metal ions and particle impurities in the waste ammonia gas are filtered by a particle removing membrane component 2.2;
preferably, the deoiling membrane component 2.1 is made of one or more of PTFE, PVDF and PP microporous membrane, and the pore diameter of the microporous membrane is 100-500 nm; the particle-removing membrane component 2.2 is made of PTFE and/or PP microporous membrane, and the aperture of the microporous membrane is 50-100 nm;
further, a first stirring paddle 3.2 is arranged at the bottom of the inner cavity of the first ammonia absorption tower 3, and a second stirring paddle 4.2 is arranged at the bottom of the inner cavity of the second ammonia absorption tower 4; the first stirring paddle 3.2 and the second stirring paddle 4.2 are driven by an external driving motor; when the pure water absorbs the ammonia, the stirring paddle plays a role in stirring, so that the absorption capacity of the pure water on the ammonia is increased;
further, an ammonia water concentration monitoring meter and a liquid level meter are arranged on the ammonia gas absorption tower I3 and the ammonia gas absorption tower II 4 and are respectively used for monitoring the concentration of ammonia water in the towers and the liquid level of the ammonia water in the towers;
further, an aeration device 11 is arranged at the air outlet end of the air inlet pipe 9; the aeration device 11 comprises a main pipe 11.1 which is transversely arranged, the main pipe 11.1 is connected with a plurality of branch pipes 11.2 which are uniformly arranged, a plurality of aeration heads 11.3 are arranged on the branch pipes 11.2, the main pipe 11.1 and the branch pipes 11.2 are both connected in a pipeline fixing frame 11.4, the pipeline fixing frame 11.4 is tightly attached to the inner wall of the acid washing tower 10, and the stability of an aeration pipeline is always kept in the aeration and stirring process;
the working principle of the system is as follows:
pure water is pumped into the ammonia water absorption tower from the pure water tank 5, and water supply to the ammonia water absorption tower is stopped when the pure water reaches a specified liquid level; waste ammonia gas generated in the production of high-purity ammonia water is input into an ammonia gas buffer tank 2 through a suction fan I1, filtered by a multi-stage membrane module and then enters an ammonia water absorption tower I3 and an ammonia water absorption tower II 4, pure water in the towers absorbs ammonia gas entering from the bottoms of the towers, and the absorption is more sufficient by using stirring paddles; ammonia water concentration monitors on the ammonia gas absorption tower I3 and the ammonia gas absorption tower II 4 respectively, and due to the difference of working conditions, the absorption speeds of the two ammonia gas absorption towers have difference, when the ammonia water concentration monitor in one of the absorption towers detects that the ammonia water concentration reaches a target value, a valve on an ammonia gas inlet pipeline of the absorption tower is closed, a valve at an ammonia water outlet at the bottom of the absorption tower is opened, and ammonia water meeting the concentration requirement is pumped to an ammonia water storage tank 7 by a liquid pump to be stored; then supplementing pure water again, opening an ammonia gas inlet valve of the absorption tower, and continuously absorbing ammonia gas; when the ammonia water concentration of the other absorption tower reaches the standard, the operation is continued, and the two absorption towers alternately work to realize continuous and uninterrupted absorption; a small amount of ammonia gas overflowing from the ammonia gas absorption tower is input into the pickling tower through a second suction fan 8 from an air outlet at the top of the tower, is output by aeration of the aeration device 11, reaches the emission standard after being washed by waste acid in the tank, and the rest non-pollution gas is directly discharged into the atmosphere from the emptying pipeline.
In addition: it should be noted that the above-mentioned embodiment is only a preferred embodiment of the present patent, and any modification or improvement made by those skilled in the art based on the above-mentioned conception is within the protection scope of the present patent.
Claims (6)
1. The utility model provides a continuous recovery system of high-purity aqueous ammonia production tail gas which characterized in that: the system comprises a first suction fan (1), an ammonia buffer tank (2), a first ammonia absorption tower (3), a second ammonia absorption tower (4), a purified water tank (5), a liquid pump (6), an ammonia storage tank (7), a second suction fan (8), an air inlet pipe (9), an acid washing tower (10) and an aeration device (11);
an air inlet of the suction fan I (1) is communicated with an emptying pipeline of the front ammonia water production equipment; an air outlet of the fan I (1) is communicated with an air inlet of the ammonia buffer tank (2) through a pipeline; the gas outlet of the ammonia buffer tank (2) is respectively communicated with the gas inlet at the bottom of the ammonia absorption tower I (3) and the gas inlet at the bottom of the ammonia absorption tower II (4) through pipelines; a one-way valve is arranged on a pipeline between the ammonia buffer tank (2) and the ammonia absorption tower I (3); a one-way valve is arranged on a pipeline between the ammonia buffer tank (2) and the ammonia absorption tower II (4); a first cooling coil (3.1) is arranged in the inner cavity of the first ammonia absorption tower (3), a water inlet and a water outlet of the first cooling coil (3.1) are respectively formed in the upper part and the lower part of the outer wall of the first ammonia absorption tower (3), and circulating cooling water is introduced into the first cooling coil (3.1); a second cooling coil (4.1) is arranged in the inner cavity of the second ammonia absorption tower (4), a water inlet and a water outlet of the second cooling coil (4.1) are respectively formed in the upper part and the lower part of the outer wall of the second ammonia absorption tower (4), and circulating cooling water is introduced into the second cooling coil (4.1);
the water outlet of the purified water tank (5) is respectively communicated with the top water inlet of the ammonia absorption tower I (3) and the top water inlet of the ammonia absorption tower II (4) through pipelines; a one-way valve is arranged on a pipeline between the purified water tank (5) and a top water inlet of the ammonia absorption tower I (3), and a one-way valve is arranged on a pipeline between the purified water tank (5) and a top water inlet of the ammonia absorption tower II (4);
a liquid outlet at the bottom of the ammonia absorption tower I (3) is communicated with an inlet of an ammonia water storage tank (7) through a pipeline, and a liquid outlet at the bottom of the ammonia absorption tower II (4) is communicated with an inlet of the ammonia water storage tank (7) through a pipeline; a one-way valve is arranged at a liquid outlet at the bottom of the ammonia absorption tower I (3); a one-way valve is arranged at a liquid outlet at the bottom of the ammonia absorption tower II (4); the top air outlet of the ammonia absorption tower I (3) and the top air outlet of the ammonia absorption tower II (4) are respectively communicated with a suction fan II (8) through pipelines; an air outlet of the second suction fan (8) is communicated with an air inlet pipe (9); the gas outlet end of the gas inlet pipe (9) extends to the bottom of the pickling tower (10), and the top of the pickling tower (10) is provided with an emptying pipeline.
2. The continuous recovery system of tail gas from the production of high-purity ammonia water according to claim 1, characterized in that: and a deoiling membrane component (2.1) and a particle removal membrane component (2.2) are arranged in the ammonia buffer tank (2).
3. The continuous recovery system of tail gas from the production of high-purity ammonia water according to claim 2, characterized in that: the deoiling membrane component (2.1) is made of one or more of PTFE, PVDF and PP microporous membranes, and the pore diameter of the microporous membrane is 100-500 nm; the degranulation membrane component (2.2) is made of PTFE and/or PP microporous membrane, and the pore diameter of the microporous membrane is 50-100 nm.
4. The continuous recovery system of tail gas from the production of high-purity ammonia water according to claim 1, characterized in that: and a first stirring paddle (3.2) is arranged at the bottom of the inner cavity of the first ammonia absorption tower (3), and a second stirring paddle (4.2) is arranged at the bottom of the inner cavity of the second ammonia absorption tower (4).
5. The continuous recovery system of tail gas from the production of high-purity ammonia water according to claim 1, characterized in that: and ammonia water concentration monitoring meters and liquid level meters are arranged on the ammonia gas absorption tower I (3) and the ammonia gas absorption tower II (4).
6. The continuous recovery system of tail gas from the production of high-purity ammonia water according to claim 1, characterized in that: an aeration device (11) is arranged at the air outlet end of the air inlet pipe (9); aeration equipment (11) include house steward (11.1) of horizontal setting, house steward (11.1) are connected with a plurality of align to grid's branch pipe (11.2), be equipped with a plurality of aeration heads (11.3) on branch pipe (11.2), house steward (11.1) and branch pipe (11.2) all are connected in pipeline fixed frame (11.4), pipeline fixed frame (11.4) and pickling tower (10) inner wall closely laminate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920795009.4U CN210278767U (en) | 2019-05-29 | 2019-05-29 | Continuous recovery system of high-purity ammonia water production tail gas |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920795009.4U CN210278767U (en) | 2019-05-29 | 2019-05-29 | Continuous recovery system of high-purity ammonia water production tail gas |
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| CN201920795009.4U Expired - Fee Related CN210278767U (en) | 2019-05-29 | 2019-05-29 | Continuous recovery system of high-purity ammonia water production tail gas |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111921342A (en) * | 2020-07-08 | 2020-11-13 | 福建省气柜设备安装有限公司 | Ammonia water storage tank tail gas recovery device |
| CN113230837A (en) * | 2021-06-01 | 2021-08-10 | 江苏鸣翔化工有限公司 | Ammonia gas recovery device and recovery method for diphenylamine production |
| CN115318070A (en) * | 2022-10-18 | 2022-11-11 | 山东天弘化学有限公司 | Ammonia gas recovery device and recovery method during ammonia water loading and unloading |
-
2019
- 2019-05-29 CN CN201920795009.4U patent/CN210278767U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111921342A (en) * | 2020-07-08 | 2020-11-13 | 福建省气柜设备安装有限公司 | Ammonia water storage tank tail gas recovery device |
| CN113230837A (en) * | 2021-06-01 | 2021-08-10 | 江苏鸣翔化工有限公司 | Ammonia gas recovery device and recovery method for diphenylamine production |
| CN115318070A (en) * | 2022-10-18 | 2022-11-11 | 山东天弘化学有限公司 | Ammonia gas recovery device and recovery method during ammonia water loading and unloading |
| CN115318070B (en) * | 2022-10-18 | 2022-12-23 | 山东天弘化学有限公司 | Ammonia gas recovery device and recovery method during ammonia water loading and unloading |
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