CN210229641U - Normal temperature infiltration TMAH recycling device - Google Patents
Normal temperature infiltration TMAH recycling device Download PDFInfo
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- CN210229641U CN210229641U CN201920983789.5U CN201920983789U CN210229641U CN 210229641 U CN210229641 U CN 210229641U CN 201920983789 U CN201920983789 U CN 201920983789U CN 210229641 U CN210229641 U CN 210229641U
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Abstract
The utility model discloses a normal atmospheric temperature infiltration TMAH recycle device, including the TMAH storage tank, the two-way valve of business turn over material is connected to TMAH storage tank bottom, and the entry of TMAH feed pipeline and circulating pump is connected respectively to the two-way valve of business turn over material, and the entry of TMAH circulation tube coupling normal atmospheric temperature osmotic membrane is passed through in the export of circulating pump, is equipped with check valve and relief pressure valve on the TMAH circulation pipeline in proper order, outlet conduit is connected to the delivery port of normal atmospheric temperature osmotic membrane, and the waste liquid export passes through TMAH feed back tube coupling TMAH storage tank. TMAH recycle device utilizes normal atmospheric temperature osmotic membrane to separate TMAH and water, retrieves after concentrating TMAH, and the device can effectively separate TMAH and water, and does not need the heating, and operating pressure allowed range is big. The TMAH has high concentration degree, the COD content of the effluent is low, the discharge standard can be reached, and the TMAH has no pollution to the environment.
Description
Technical Field
The utility model belongs to TMAH retrieves the field, more specifically relates to a normal atmospheric temperature infiltration TMAH recycle device.
Background
TMAH (tetramethylammonium hydroxide) is a strong alkaline chemical substance, is very easy to absorb moisture, has a certain ammonia smell, can quickly absorb carbon dioxide in air to form carbonate which is an organic strong base and has strong corrosivity. The common biochemical treatment easily causes environmental burden such as eutrophication pollution, so the waste liquid treatment cost is high.
The existing TMAH recycling process mainly removes impurities and recycles TMAH by an ion exchange method, but the method is suitable for the conditions of low TMAH content and more other impurities, can not effectively recycle high-content TMAH waste liquid, has high COD content in the discharged waste liquid, and still has great influence on the environment. In the steam concentration process, the waste liquid needs to be heated, the operation pressure needs to be strictly controlled, and the process conditions are harsh.
SUMMERY OF THE UTILITY MODEL
The utility model aims at designing a TMAH recycle device, mainly utilize normal atmospheric temperature osmotic membrane to separate TMAH and water, retrieve after concentrating TMAH, the device can effectively separate TMAH and water, and need not heat, and TMAH concentration degree is high, and it is low to go out water COD content, can reach emission standard, and is pollution-free to the environment.
In order to realize above-mentioned purpose, the utility model provides a normal atmospheric temperature infiltration TMAH recycle device, including the TMAH storage tank, the two-way valve of business turn over material is connected to TMAH storage tank bottom, and the entry of TMAH feed pipeline and circulating pump is connected respectively to the two-way valve of business turn over material, and the entry of normal atmospheric temperature osmotic membrane is passed through in the export of circulating pump, is equipped with check valve and relief pressure valve on the TMAH circulating pipeline in proper order, outlet conduit is connected to the delivery port of normal atmospheric temperature osmotic membrane, and the waste liquid export passes through TMAH feed back tube and connects the TMAH storage tank.
TMAH storage tank top installation water return circuit valve, the outlet line of the entry linkage normal atmospheric temperature osmotic membrane of water return circuit valve, the upper and lower both ends of normal atmospheric temperature osmotic membrane all are equipped with the delivery port and connect outlet line, installation PH detector in the outlet line of bottom.
When the normal-temperature permeable membrane works, the valve of the water loop is in a closed state; when the normal temperature permeation is damaged, the PH detector can detect that the water discharged by the normal temperature permeation film is alkaline, and then the water loop valve is opened to enable the water loop valve to flow back to the TMAH storage tank, so that the polluted liquid cannot be discharged.
Installation buffer tube among the outlet line prevents to dash in the pipeline.
Two way valve of business turn over material passes through feed valve and connects TMAH feed line, connects the entry of circulating pump through circulating valve.
Install first filter between check valve and the relief pressure valve, install the second filter on the TMAH inlet pipe way.
The utility model discloses controllable pressure is within 3 ~ 5MPa during the operation, thereby the relief pressure valve can adjust pressure and avoid the evaporation film to receive pressure variation and lead to damaging and prolong its life-span.
Compared with the prior art, the beneficial effects of the utility model are that: TMAH recycle device utilizes normal atmospheric temperature osmotic membrane to separate TMAH and water, retrieves after concentrating TMAH, and the device can effectively separate TMAH and water, and does not need the heating, and operating pressure allowed range is big. The TMAH has high concentration degree, the COD content of the effluent is low, the discharge standard can be reached, and the TMAH has no pollution to the environment.
Drawings
Fig. 1 is a schematic view of a normal temperature permeation TMAH recycling device according to the present invention.
In the figure: the system comprises a 1-TMAH storage tank, a 2-feeding and discharging two-way valve, a 3-TMAH feeding pipeline, a 4-circulating pump, a 5-feeding valve, a 6-circulating valve, a 7-TMAH circulating pipeline, an 8-one-way valve, a 9-reducing valve, a 10-normal temperature permeable membrane, an 11-water outlet pipeline, a 12-TMAH return pipeline, a 13-water loop valve, a 14-PH detector, a 15-buffer tube, a 16-first filter and a 17-second filter.
Detailed Description
Preferred embodiments of the present invention will be described in more detail below with reference to the accompanying drawings and specific examples.
Examples
According to the normal atmospheric temperature infiltration TMAH recycle device that fig. 1 shows, including TMAH storage tank 1, two-way valve 2 of business turn over material is connected to TMAH storage tank 1 bottom, and the entry of TMAH feed line 3 and circulating pump 4 is connected respectively to business turn over material two-way valve 2, and the entry of normal atmospheric temperature osmotic membrane 10 is connected through TMAH circulation pipeline 7 in the export of circulating pump 4, is equipped with check valve 8 and relief pressure valve 9 on the TMAH circulation pipeline 7 in proper order, outlet conduit 11 is connected to the delivery port of normal atmospheric temperature osmotic membrane 10, and the waste liquid export passes through TMAH feed back pipeline 12 and connects TMAH storage tank 1.
In this embodiment, a water loop valve 13 is installed at the top of the TMAH storage tank 1, an inlet of the water loop valve 13 is connected to a water outlet pipeline 11 of the normal temperature permeable membrane 10, water outlets are formed at the upper end and the lower end of the normal temperature permeable membrane 10 and connected to the water outlet pipeline 11, and a PH detector 14 is installed in the water outlet pipeline 11 at the bottom.
When the normal temperature permeable membrane 10 works, the water loop valve 13 is in a closed state; when the normal temperature permeable membrane 10 is damaged, the PH detector 14 may detect that the water discharged from the normal temperature permeable membrane 10 is alkaline, and open the water loop valve 13 to enable the water to flow back to the TMAH storage tank 1, so that the polluted liquid is not discharged.
In the present embodiment, buffer tube 15 is installed in outlet line 11 to prevent the inside of the pipe from being flushed.
The two-way valve 2 for feeding and discharging in this embodiment is connected with the TMAH feeding pipeline 3 through the feeding valve 5, and is connected with the inlet of the circulating pump 4 through the circulating valve 6.
In this embodiment, a first filter 16 is installed between the check valve 8 and the pressure reducing valve 9, and a second filter 17 is installed on the TMAH feeding pipe 3.
The controllable pressure is controlled within 3-5 MPa during the operation of the embodiment
While various embodiments of the present invention have been described above, the above description is intended to be illustrative, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.
Claims (7)
1. The utility model provides a normal atmospheric temperature infiltration TMAH recycle device, its characterized in that includes TMAH storage tank (1), business turn over material two way valve (2) are connected to TMAH storage tank (1) bottom, the entry of TMAH feed line (3) and circulating pump (4) is connected respectively in business turn material two way valve (2), the entry of normal atmospheric temperature osmotic membrane (10) is connected through TMAH circulation pipeline (7) in the export of circulating pump (4), be equipped with check valve (8) and relief pressure valve (9) on TMAH circulation pipeline (7) in proper order, outlet line (11) are connected to the delivery port of normal atmospheric temperature osmotic membrane (10), and the waste liquid export passes through TMAH feed back pipeline (12) and connects TMAH storage tank (1).
2. The recycling device of TMAH according to claim 1, wherein the top of the TMAH storage tank (1) is provided with a water circuit valve (13), and the inlet of the water circuit valve (13) is connected to the water outlet line (11) of the TMAH permeable membrane (10).
3. The recycling device of TMAH according to claim 2, wherein the upper and lower ends of the membrane (10) are provided with water outlets and connected to a water outlet pipe (11), and a PH detector (14) is installed in the water outlet pipe (11) at the bottom.
4. The recycling device of TMAH according to claim 2, wherein a buffer tube (15) is installed in the water outlet line (11).
5. The normal temperature permeation TMAH recycling device according to claim 1, wherein the feeding and discharging two-way valve (2) is connected to the TMAH feeding pipeline (3) through a feeding valve (5), and is connected to the inlet of the circulating pump (4) through a circulating valve (6).
6. The recycling device of normal temperature osmosis TMAH according to claim 1, characterized in that a first filter (16) is installed between the check valve (8) and the pressure reducing valve (9).
7. The normal-temperature-permeation TMAH recycling device according to claim 1, wherein the TMAH feed pipeline (3) is provided with a second filter (17).
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CN201920983789.5U CN210229641U (en) | 2019-06-27 | 2019-06-27 | Normal temperature infiltration TMAH recycling device |
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CN201920983789.5U CN210229641U (en) | 2019-06-27 | 2019-06-27 | Normal temperature infiltration TMAH recycling device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113003745A (en) * | 2021-02-24 | 2021-06-22 | 绵阳艾萨斯电子材料有限公司 | Purification and regeneration method of waste organic alkali |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113003745A (en) * | 2021-02-24 | 2021-06-22 | 绵阳艾萨斯电子材料有限公司 | Purification and regeneration method of waste organic alkali |
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