CN210222410U - High-precision automatic focusing detection device for liquid crystal display screen component - Google Patents
High-precision automatic focusing detection device for liquid crystal display screen component Download PDFInfo
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- CN210222410U CN210222410U CN201921458267.XU CN201921458267U CN210222410U CN 210222410 U CN210222410 U CN 210222410U CN 201921458267 U CN201921458267 U CN 201921458267U CN 210222410 U CN210222410 U CN 210222410U
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Abstract
A high-precision automatic focusing detection device for a liquid crystal display component comprises an electric moving platform, a line scanning camera, a differential interference difference microscope, an LED illuminating lamp, a piezoelectric ceramic motor, an objective lens, a laser displacement sensor, a detection platform, a support plate and a piezoelectric ceramic motor controller, wherein the rear side end of the support plate is arranged at the front end of a movable support frame of the electric moving platform at the upper end of the detection platform; the upper part of a lens cone of the microscope is fixedly arranged at the front upper end of the supporting plate; the rear side end of the shell of the piezoelectric ceramic motor is arranged in the lower middle part of the front end of the supporting plate; the outer side of the front lower end of the lens cone of the microscope is provided with an opening communicated with the inside of the lens cone, and the shell of the laser displacement sensor is arranged at the lower part of the front side end of the lens cone of the microscope; the shell of the LED illuminating lamp is arranged on one side of the microscope lens cone; the lower end of the line scanning camera is arranged at the upper end of the microscope lens cone; the objective lens is arranged at the side end of the piezoelectric ceramic motor connected with the movable axial plate. This novel overall structure is compact for microscope focusing speed, and then improved detection speed.
Description
Technical Field
The utility model relates to a check out test set field, especially a liquid crystal display part high accuracy automatic focusing detection device that use such as liquid crystal display.
Background
In recent years, portable electronic devices such as mobile phones have been developed rapidly, and accordingly, technologies for combining liquid crystal displays with ICs (integrated circuits) and FPCs (flexible printed circuits) have been advanced. In actual production, a liquid crystal display or an organic light emitting display is required to be attached to an IC and connected to an external circuit through a Flexible Printed Circuit (FPC). When a liquid crystal display screen or an organic light emitting display screen is attached with an IC (integrated circuit) or a flexible printed circuit board (FPC), the liquid crystal display screen or the organic light emitting display screen is adhered with the IC or the FPC preliminarily through an Anisotropic Conductive Film (ACF) containing conductive particles, and then certain pressure and heat are applied to the ACF through production equipment to break the conductive particles in the ACF, so that two parts to be connected are in conductive communication. If the conductive particles between the two components are not broken or unevenly distributed, or even if the conductive particles are not distributed at a certain connecting position, the use of the liquid crystal display screen is influenced or cannot be used. Therefore, the detection of whether the conductive particles between the two connecting parts are broken, the number of the conductive particles and the distribution of the conductive particles is a precondition for ensuring the normal use of the liquid crystal display screen and the like.
At present, the equipment for detecting the cracking condition, the number and the distribution condition of conductive particles generally adopts a laser triangular displacement sensor as a control sensor for detecting the focusing height of a component, adopts a DIC (differential interference contrast microscope) microscope with a servo or stepping drive motor to amplify and detect an object image, and cooperates with a line scanning camera to finish rapid large-area image pickup (the data output port of the laser triangular displacement sensor and the line scanning camera, and the data port of a controller matched with the servo or stepping drive motor are connected with the data input port of a PC through data lines, the PC receives and processes the input data of the laser triangular displacement sensor, the line scanning camera and a controller and controls the working modes of the laser triangular displacement sensor, the line scanning camera and the controller, the control output port of the laser triangular displacement sensor is connected with the data input port of the controller matched with the servo or stepping drive motor through data lines, the servo or stepping driving motor receives the control signal of the laser triangular displacement sensor through a matched controller, and a power output shaft of the servo or stepping driving motor moves up and down and drives an objective lens with a Wollaston prism in the lower shell of the microscope to move up and down for a distance so as to achieve the aim of focusing). The prior art is widely applied in the indentation detection field, and obtains better detection effect. However, the existing detection equipment has disadvantages that firstly, because a triangular correlation type displacement sensor is adopted, the structure is relatively large, and the automatic focusing speed is influenced in practical use (when the triangular correlation type displacement sensor is used, horizontal adjustment must be performed in two directions of an X, Y axis firstly, and a light spot is required to be adjusted to a position right below an objective lens, so that the work is relatively difficult to complete in a relatively narrow space on site, and particularly, detection is more inconvenient for a plane easy to warp detection surface such as an OLED, and further the detection speed is influenced). Secondly, in the prior art, the objective lens of the DIC microscope is driven by a servo or a stepping motor, but the time for reaching the optimal focusing position is prolonged due to the inherent feedback fluctuation characteristic of the servo system, and the accumulated error of the stepping motor causes that the focusing needs excessive zero returning action, and the focusing time is also increased, so that the detection speed is slow.
Disclosure of Invention
In order to overcome the defects of the prior equipment for detecting whether the conductive particles break, the number of the conductive particles and the distribution of the conductive particles, and the structure is limited, the utility model provides a mature technology for receiving and processing signals input by a coaxial laser displacement sensor, a line scanning camera and a piezoelectric ceramic motor controller and controlling the working modes of the coaxial laser displacement sensor, a linear scanning phase and the piezoelectric ceramic motor controller based on the prior PC, the piezoelectric ceramic motor is adopted to drive an objective lens with a Wollaston prism in a shell to stretch up and down to realize closed-loop control, the piezoelectric ceramic motor has the advantages of high response speed, high positioning precision and no vibration, the focusing contraposition time of a detected part is reduced, the coaxial laser displacement sensor is adopted as the displacement detection of the detected part, the whole structure is more compact, the calibration contraposition of a laser emission light path and a receiving light path is not needed, the high-precision automatic focusing detection device for the liquid crystal display screen component accelerates the focusing speed of the microscope and further improves the detection speed.
The utility model provides a technical scheme that its technical problem adopted is:
a high-precision automatic focusing detection device for a liquid crystal display component comprises an electric moving platform, a line scanning camera, a differential interference difference microscope, an LED illuminating lamp, a piezoelectric ceramic motor, an objective lens with a Wollaston prism in a shell, a laser displacement sensor, a detection table, a supporting plate and a piezoelectric ceramic motor controller, wherein the rear side end of the supporting plate is arranged at the front end of a movable supporting frame of the electric moving platform at the upper end of the detection table; the microscope is characterized in that the upper part of a lens cone of the microscope is fixedly arranged at the front upper end of a support plate; the rear side end of the shell of the piezoelectric ceramic motor is fixedly arranged at the lower middle part of the front end of the supporting plate; the outer side part of the front lower end of the lens cone of the microscope is provided with an opening communicated with the inside of the lens cone, a shell of the laser displacement sensor is fixedly arranged at the lower part of the front side end of the lens cone of the microscope, and an integrated transmitting and receiving head of the laser displacement sensor is positioned in the opening; the shell of the LED illuminating lamp is arranged on one side of the microscope lens barrel; the lower end of the line scanning camera is arranged at the upper end of a lens cone of the microscope; the objective lens is arranged at the side end of the piezoelectric ceramic motor, which is connected with the movable axial plate.
Furthermore, the upper end lens of the objective lens and the lower end lens of the microscope are positioned on a vertical plane from top to bottom, and the upper end lens of the microscope and the lower end of the lens of the line scanning camera are positioned on a vertical plane from top to bottom.
Furthermore, the piezoelectric ceramic motor controller and the piezoelectric ceramic motor are matched for use, the model is P73.Z500S, and the laser displacement sensor is a coaxial laser displacement measurer, and the model is ATF-6 PZ.
Furthermore, when the movable shaft plate connected with the piezoelectric ceramic motor drives the objective lens to move upwards to a dead point, the upper end lens of the objective lens and the lower end of the lower end lens of the microscope are separated by a distance.
The utility model has the advantages that: the utility model discloses be applied to portable electronic equipment such as cell-phone, liquid crystal display or organic light emitting display laminating IC or laminating flexible line way board (FPC) back, whether the conducting particle breaks the detection of the condition, conducting particle number, conducting particle distribution condition. Before this novel detection, put required detection part on the workstation that is located the objective lower extreme. During working, the LED illuminating lamp is used for illuminating during detection, and is convenient to detect and use indoors with poor light and at night. During detection, the laser displacement sensor emits infrared laser and enters the microscope lens barrel through the microscope lens barrel, then the infrared laser is reflected by the detection part and returns to the original path, and the infrared laser receives signals through a receiver of the detection part, distance information is generated after processing and is input to the piezoelectric ceramic motor controller and the PC, after analog quantity signals generated by the laser displacement sensor are input to the piezoelectric ceramic controller, the piezoelectric ceramic controller controls a connecting movable shaft plate of the piezoelectric ceramic motor to move up and down to a proper distance, the connecting movable shaft plate of the piezoelectric ceramic motor drives the objective lens to move up and down to a proper position, the distance between the objective lens and a detected object is corrected to a proper distance, and then the best focusing angle of the detected part is realized through the objective lens by the lens of the microscope. The utility model discloses based on current PC, receive and handle coaxial laser displacement sensor, the line scanning camera, the signal of piezoceramics machine controller input, and control coaxial laser displacement sensor, the linear scanning looks, the mature technique of piezoceramics machine controller working method, adopt the piezoceramics motor to drive the flexible distance from top to bottom of objective that contains Wollaston prism, closed-loop control has been realized, the piezoceramics motor has that response speed is fast, positioning accuracy is high, the advantage of vibrationless, the focus counterpoint time of detecting the part has been reduced, and adopt coaxial laser displacement sensor to detect as the displacement of detecting the part, overall structure is compacter, need not carry out the calibration counterpoint of laser emission light path and receiving light path, microscope focusing speed has been accelerated, and then detection speed has been improved. Based on the above, the novel device has a good application prospect.
Drawings
The invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a circuit diagram of the present invention.
Detailed Description
As shown in figure 1, a high-precision automatic focusing detection device for liquid crystal display components comprises an electric moving platform, a line scanning camera 1, a differential interference difference microscope 2, an LED illuminating lamp 3, a piezoelectric ceramic motor 4, an objective lens 5 with a Wollaston prism in a shell, a laser displacement sensor 6, a detection table 7, a support plate 8, a piezoelectric ceramic motor controller 9, a data port of the piezoelectric ceramic motor controller 9, the laser displacement sensor 6, a data output port of the line scanning camera 1 and a data input port of a PC 11 are connected through data lines, the PC 11 receives and processes input data of the piezoelectric ceramic motor controller 9, the laser displacement sensor 6 and the line scanning camera 1 and controls working modes of the laser displacement sensor 6, the line scanning camera 1 and the piezoelectric ceramic motor controller 9, the laser displacement sensor 6 controls the output port and the piezoelectric ceramic motor controller 9 data input port of the piezoelectric ceramic motor are matched through data lines The data line is connected, the power input end of the piezoelectric ceramic motor 4 is connected with the power output end of the piezoelectric ceramic motor controller 9 through a lead, the power input end of the electric mobile platform is connected with an alternating current 220V power supply, the piezoelectric ceramic motor controller 9 matched with the piezoelectric ceramic motor 4 receives a control signal of the laser displacement sensor 6, then the movable shaft plate 41 connected with the piezoelectric ceramic motor runs up and down and drives the objective lens 5 under the microscope to move up and down to reach the focusing purpose, and the rear side end of the E-shaped support plate 8 is installed at the front end of the movable support frame of the electric mobile platform at the upper end of the detection table 7 through a screw nut; the front part of the upper end of the supporting plate 8 is provided with a front rectangular connecting plate 71 through a screw nut, the front end of the front connecting plate 71 is welded with a U-shaped fixing clamp, the outer side of the upper end of a lens cone of the microscope 2 is sleeved in the front end of the fixing clamp, the left end and the right end of the U-shaped fixing clamp are respectively sleeved with an opening at the left end and the right end of an arc-shaped fixing piece, two nuts are respectively screwed into external threads at the left end and the right end of the U-shaped fixing clamp, and the upper part of the lens cone of the microscope 2 is arranged at; the rear side end of the shell of the piezoelectric ceramic motor 4 is arranged in the lower middle part of the front end of the support plate 8 through a screw nut; the outer side part of the front lower end of the lens cone of the microscope 2 is provided with an opening 21 communicated with the inside of the lens cone, the shell of the laser displacement sensor 6 is arranged at the lower part of the front side end of the lens cone of the microscope 2 through a screw and a nut, the integrated transmitting and receiving head at the rear end of the laser displacement sensor 6 is positioned in the opening 21, and the laser displacement sensor 6 can transmit laser through the opening and receive laser signals returned by a detected part; the shell of the LED illuminating lamp 3 is arranged in the middle of the right side of the lens cone of the microscope 2 through a screw and a nut; the inner side of the lower end of the shell of the line scanning camera 1 is provided with internal threads, the internal threads at the lower end of the shell are screwed into the external threads at the upper end of the lens cone of the microscope 2, and the line scanning camera 1 is arranged at the upper end of the lens cone of the microscope 2; two screws distributed from top to bottom are arranged at the right side end of the outer cylinder of the objective lens 5, two holes distributed up and down on a connecting movable shaft plate 41 of the piezoelectric ceramic motor are respectively sleeved outside the two screws, and the objective lens 5 is installed at the left end of the connecting movable shaft plate 41 of the piezoelectric ceramic motor by respectively screwing two nuts into the two screws. The upper end lens of the objective lens 5 and the lower end lens of the microscope 2 are positioned on a vertical plane from top to bottom, and the upper end lens of the microscope 2 and the lower end of the lens of the line scanning camera 1 are positioned on a vertical plane from top to bottom. The piezoelectric ceramic motor controller 9 is matched with the piezoelectric ceramic motor 4 for use, and the model is P73. Z500S; the laser displacement sensor 6 is a coaxial laser displacement measurer with model number of ATF-6 PZ. When the movable shaft plate 41 connected with the piezoelectric ceramic motor drives the objective lens 5 to move upwards to a dead point, the interval between the upper end lens of the objective lens 5 and the lower end lens of the microscope 2 is 2 mm. Have voltage stabilizing circuit in LED light 3's the casing, can convert 220V alternating current power supply into the required DC power supply of work, voltage stabilizing circuit in the LED light 3 is direct to be connected through the wire with 220V alternating current power supply, and LED light 3 includes many LED lamp pearls, and LED3 light 3 lamp body is towards the lower extreme. The piezoelectric ceramic motor controller 9 and the PC are installed on the detection table 7.
As shown in fig. 1 and 2, a power input terminal of the electric mobile platform M1 is connected to an ac 220V power supply, a data port X of the piezo-ceramic motor controller U1, a data output port X1 of the laser displacement sensor U2, a data output port X2 of the line scanning camera U3, and data input ports C, C1 and C2 of the PC U4 are connected via USB data lines, the PC U4 receives and processes input data of the piezo-ceramic motor controller U1, the laser displacement sensor U2, and the line scanning camera U3, and controls the operation modes of the piezo-ceramic motor controller U1, the laser displacement sensor U2, and the line scanning camera U3, the laser displacement sensor U2 controls the data input port X3 and the piezo-ceramic motor controller U1 data input port C3 associated with the piezo-ceramic motor to be connected via data lines, the power input terminal of the piezo-ceramic motor M is connected to the power output terminal D of the piezo-ceramic motor controller UI via a wire, the piezoelectric ceramic motor controller U1 matched with the piezoelectric ceramic motor M receives a control signal of the laser displacement sensor U2, and then the movable shaft plate connected with the piezoelectric ceramic motor M runs up and down and drives the objective lens 5 under the microscope to move up and down for a distance so as to achieve the aim of focusing.
Shown in fig. 1 and 2, the utility model discloses be applied to portable electronic equipment such as cell-phone, liquid crystal display or organic light emitting display laminating IC, or laminating flexible circuit board (FPC) back, to the detection of the conductive particle condition of breaking, conductive particle number, conductive particle distribution. Before the novel detection, a required detection part 12 is placed on a detection table 7 at the lower end of an objective lens 5. During operation, the LED illuminating lamp 3 is electrified to illuminate in detection, so that the LED illuminating lamp is convenient to detect indoor light and night. Before the novel optical fiber laser is used for the first time, the PC (personal computer) 11 controls the laser displacement sensor 6 to emit infrared laser, the infrared laser enters the microscope lens barrel 2 through the opening 21 of the microscope lens barrel, the infrared laser irradiates on a liquid crystal display screen of a detected part through a lens and an objective lens 5 at the lower end of the microscope 2, the infrared laser is reflected by the detected part and returns back in the original path, and a receiver of the laser displacement sensor 6 receives signals, the laser displacement sensor 6 processes the signals and then generates distance data to be input to the piezoelectric ceramic motor controller 9 and a signal input end of the PC 11, and a display screen of the PC 11 displays distance information; then, the operator manually adjusts the operation button of the piezoelectric ceramic motor controller U1, the piezoelectric ceramic motor controller U1 outputs a control power to enter the power input end of the piezoelectric ceramic motor M, and then the piezoelectric ceramic motor M is powered on to work, and the piezoelectric ceramic motor M is connected with the movable shaft plate 41 to drive the objective lens 5 to move up and down to a proper height, and the power of the line scanning camera 1 is turned on, the line scanning camera 1 repeatedly takes pictures, the picture taken by the line scanning camera 1 is displayed on the display screen of the PC 11, and the operator judges whether the objective lens 5 moves up and down to a proper height according to the obtained picture, that is, whether the microscope 1 reaches an optimal focusing position; after the microscope 1 reaches the optimum focus position, the PC 11 reads the numerical value of the distance between the lower end of the objective lens 5 and the upper end of the detected member 12 outputted from the laser displacement sensor 6, and records the numerical value as the initial position of the objective lens 5 for subsequent detection, and the adjustment is not required for the subsequent detection.
As shown in fig. 1 and 2, in the present novel detection, under the control of the PC 11, the PC enters an automatic operation mode, the PC 11 outputs a control signal to enter a data port of the piezoelectric ceramic motor controller 9, the piezoelectric ceramic motor controller 9 outputs a control power to enter a power input end of the piezoelectric ceramic motor M, and after the piezoelectric ceramic motor M is powered on, the piezoelectric ceramic motor M is connected with the movable shaft plate 41 to drive the objective lens 5 to move up and down to a pre-recorded initial position of the PC 11. After the electric mobile platform M1 is powered on to work, the movable support frame drives the microscope 1 to integrally move from back to front along the horizontal surface of a detected part (a liquid crystal display screen) through the E-shaped support plate 8, in the process, a laser signal emitted by the laser displacement sensor 6 is always acted on the surface of the detected LED display screen, the laser displacement sensor 6 senses the change of the height between the lower end of the objective lens 5 and the detected display screen 12, the height change data of the surface of the liquid crystal display screen in the detection process is input into a PC (personal computer), and the PC displays the specific numerical value; meanwhile, the laser displacement sensor 6 transmits height change data to the piezoelectric ceramic motor controller 9, and when the height between the lower end of the objective lens 5 and the detected object 12 is different from the height data of the initial position, the PC controls the piezoelectric ceramic motor controller 9 to convert the height analog signal into corresponding physical quantity, and the physical quantity is amplified by a power amplifier of the piezoelectric ceramic motor controller 9 and drives the piezoelectric ceramic motor M to work; after the piezoelectric ceramic motor M is electrified to work, the movable shaft plate 41 is connected to move up and down to drive the objective lens 5 to move up or down to a proper height and then stop moving (the preset position height of the objective lens 5 is also set, and the optimal distance between the lower end of the objective lens 5 and the upper end of the detected part is the optimal distance under the premise of optimal focusing of the microscope 1), so that the distance between the lower end of the objective lens 5 and the upper surface of the detected object is corrected, and the optimal focusing distance between the upper end of the detected part and the lower end of the objective lens 5 can be always kept in the detection process by repeating the. During automatic focusing, the line scanning camera 1 continuously magnifies and captures images through a lens of the microscope 1 under the control of the PC, transmits the images to the PC, displays the images on a screen of the PC, and records and stores the detected data (like the prior art, a subsequent inspector analyzes whether the conductive particles break, the number of the conductive particles, and the distribution of the conductive particles through the obtained photos). In the focusing process, the line scanning camera 1 executes the task of continuous image taking, and the time consumption of the focusing process is very short, namely only about 10ms, so that the imaging can be kept in a clear state, and a good foundation is laid for the subsequent image processing. The utility model discloses based on current PC, receive and handle coaxial laser displacement sensor, the line scanning camera, the signal of piezoceramics machine controller input, and control coaxial laser displacement sensor, the linear scanning looks, the mature technique of piezoceramics machine controller working method, adopt the piezoceramics motor to drive the flexible distance from top to bottom of objective that contains Wollaston prism, closed-loop control has been realized, the piezoceramics motor has that response speed is fast, positioning accuracy is high, the advantage of vibrationless, the focus counterpoint time of detecting the part has been reduced, and adopt coaxial laser displacement sensor to detect as the displacement of detecting the part, overall structure is compacter, need not carry out the calibration counterpoint of laser emission light path and receiving light path, microscope focusing speed has been accelerated, and then detection speed has been improved. In the novel differential interference difference microscope, the model is FLY 2000; the line scan camera model is PX-HM-16K 06X; the electric moving platform is an xy-axis electric transverse moving platform produced by Japan and branded NSK.
Having shown and described the fundamental principles and essential features of the invention, and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (4)
1. A high-precision automatic focusing detection device for a liquid crystal display component comprises an electric moving platform, a line scanning camera, a differential interference difference microscope, an LED illuminating lamp, a piezoelectric ceramic motor, an objective lens with a Wollaston prism in a shell, a laser displacement sensor, a detection table, a supporting plate and a piezoelectric ceramic motor controller, wherein the rear side end of the supporting plate is arranged at the front end of a movable supporting frame of the electric moving platform at the upper end of the detection table; the microscope is characterized in that the upper part of a lens cone of the microscope is fixedly arranged at the front upper end of a support plate; the rear side end of the shell of the piezoelectric ceramic motor is fixedly arranged at the lower middle part of the front end of the supporting plate; the outer side part of the front lower end of the lens cone of the microscope is provided with an opening communicated with the inside of the lens cone, a shell of the laser displacement sensor is fixedly arranged at the lower part of the front side end of the lens cone of the microscope, and an integrated transmitting and receiving head of the laser displacement sensor is positioned in the opening; the shell of the LED illuminating lamp is arranged on one side of the microscope lens barrel; the lower end of the line scanning camera is arranged at the upper end of a lens cone of the microscope; the objective lens is arranged at the side end of the piezoelectric ceramic motor, which is connected with the movable axial plate.
2. The apparatus of claim 1, wherein the upper lens of the objective lens and the lower lens of the microscope are disposed in a vertical plane from top to bottom, and the upper lens of the microscope and the lower lens of the line scanning camera are disposed in a vertical plane from top to bottom.
3. The apparatus of claim 1, wherein the piezo-ceramic motor controller is used in conjunction with a piezo-ceramic motor, model p73.z500s, and the laser displacement sensor is a coaxial laser displacement measuring device, model ATF-6 PZ.
4. The device for detecting the high precision auto focus of the lcd component of claim 1, wherein the upper end lens of the objective lens is spaced from the lower end lens of the microscope when the movable shaft plate connected to the piezo-ceramic motor drives the objective lens to move upward to the stop point.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113405973A (en) * | 2021-07-21 | 2021-09-17 | 苏州图墨医疗科技有限公司 | Automatic fluorescence detection equipment |
CN113965696A (en) * | 2021-10-21 | 2022-01-21 | 望江县天长光学仪器有限公司 | Image stabilizing device for optical instrument |
CN114324360A (en) * | 2021-12-31 | 2022-04-12 | 深圳鼎晶科技有限公司 | AOI indentation detection system and method |
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2019
- 2019-09-04 CN CN201921458267.XU patent/CN210222410U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113405973A (en) * | 2021-07-21 | 2021-09-17 | 苏州图墨医疗科技有限公司 | Automatic fluorescence detection equipment |
CN113965696A (en) * | 2021-10-21 | 2022-01-21 | 望江县天长光学仪器有限公司 | Image stabilizing device for optical instrument |
CN114324360A (en) * | 2021-12-31 | 2022-04-12 | 深圳鼎晶科技有限公司 | AOI indentation detection system and method |
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