CN210214032U

CN210214032U - Diaphragm moves and carries operation mechanism

Info

Publication number: CN210214032U
Application number: CN201920856369.0U
Authority: CN
Inventors: Xiaohe Zhu; 朱小和
Original assignee: Suzhou Longer Precision Automation Technology Co ltd
Current assignee: Suzhou Longer Precision Automation Technology Co ltd
Priority date: 2019-06-10
Filing date: 2019-06-10
Publication date: 2020-03-31
Anticipated expiration: 2029-06-10

Abstract

The utility model discloses a diaphragm transfer operation mechanism, which comprises a base, a transfer unit, an operation platform and a lifting unit; the transfer unit comprises a transfer driving source arranged on a base, and a platform base is arranged at the free end of the transfer driving source; the operation platform comprises two separated platform supports arranged on a platform base, a clamping plate driving source and a lower clamping plate parallel to the platform supports are arranged on the platform supports, an upper clamping plate is arranged at the free end of the clamping plate driving source, and the upper clamping plate is positioned above the lower clamping plate; the lifting unit comprises a lifting driving source arranged on the platform base, a lifting platform is arranged at the free end of the lifting driving source, and the lifting platform is located between the two platform supports. The protective device can provide good protection for the membrane, and has the advantages of high crystal grain levelness, strong reliability and high operation quality.

Description

Diaphragm moves and carries operation mechanism

Technical Field

The utility model relates to a move and carry the mechanism, concretely relates to diaphragm moves and carries operation mechanism.

Background

During the production of semiconductor devices, it is often necessary to arrange the die on the film in order to perform efficient batch operation. However, since the circuit of the semiconductor device is extremely fine, the semiconductor device is likely to break down due to strong static electricity generated by sliding friction. However, in order to ensure the quality of the operation, it is also required that all the dies are on the same plane.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a diaphragm moves carries operation mechanism, it can provide good protection for the diaphragm, and the crystalline grain levelness is high, and the good reliability, the operation quality is high.

In order to solve the technical problem, the utility model provides a diaphragm moves and carries operation mechanism, including base, move and carry unit, operation platform and lift unit; the transfer unit comprises a transfer driving source arranged on a base, and a platform base is arranged at the free end of the transfer driving source; the operation platform comprises two separated platform supports arranged on a platform base, a clamping plate driving source and a lower clamping plate parallel to the platform supports are arranged on the platform supports, an upper clamping plate is arranged at the free end of the clamping plate driving source, and the upper clamping plate is positioned above the lower clamping plate; the lifting unit comprises a lifting driving source arranged on the platform base, a lifting platform is arranged at the free end of the lifting driving source, and the lifting platform is located between the two platform supports.

Preferably, the movable platform comprises a transverse moving unit, the transverse moving unit comprises a transverse moving slide rail, a fixing plate and a fixing pin, the transverse moving slide rail and the fixing plate are arranged on the platform base along the direction perpendicular to the upper clamping plate, one of the platform supports is arranged on the transverse moving slide rail, a plurality of pin holes are formed in the fixing plate along the direction of the transverse moving slide rail, the fixing pin is arranged on the platform support on the transverse moving slide rail, and the fixing pin is inserted into one pin hole.

Preferably, a ball spring plunger is arranged on the platform support on the transverse sliding rail, a plurality of plug holes are formed in the fixing plate along the direction of the transverse sliding rail, and a ball of the ball spring plunger is clamped and embedded in one plug hole.

Preferably, a sideslip induction sheet is arranged on the platform support on the sideslip slide rail, and a sideslip sensor matched with the sideslip induction sheet is arranged on the platform base.

Preferably, the lower plate comprises a first lower plate and a second lower plate which are sequentially arranged from inside to outside, the thickness of the second lower plate is smaller than that of the first lower plate, and the upper plate is located above the second lower plate.

Preferably, the end surfaces of the upper clamping plate and the lower clamping plate II are respectively provided with an upper clamping plate guide surface and a lower clamping plate guide surface.

Preferably, the free end of the splint driving source is provided with a splint support, the upper splint is arranged on the splint support, the splint support is provided with a splint sliding rod, the platform support is provided with a splint sliding sleeve, and the splint sliding rod is arranged in the splint sliding sleeve in a sliding manner.

Preferably, the platform base is provided with a lifting support, the lifting support is provided with at least two lifting sensors along the vertical direction, and the bottom of the lifting platform is provided with a lifting induction sheet matched with the lifting sensors.

Preferably, there are two of the lift sensors.

Preferably, the base is provided with a transfer slide rail, and the platform base is provided on the transfer slide rail and connected to a free end of the transfer drive source.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model can keep the diaphragm suspended when the diaphragm is moved up and down by arranging the operation platform, thereby avoiding the static electricity generated by friction from puncturing crystal grains on the diaphragm and improving the operation quality; meanwhile, the diaphragm can be firmly fixed, and the operation reliability is improved.

2. The utility model discloses a set up and lift the unit, can hold up the unsettled part of diaphragm when the operation, make whole diaphragm keep on the coplanar, improved the operation quality.

3. The utility model discloses a set up and carry the unit of carrying, can carry the diaphragm as required before the operation, during the operation and after the operation to the different processes of butt joint, degree of automation is high.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic structural view of a transfer mechanism;

FIG. 2 is a schematic structural view of a transfer platform;

fig. 3 is a schematic rear view of the transfer platform.

Wherein, 10-base;

300-a transfer driving source, 301-a transfer slide rail and 302-a platform base;

310-platform support, 311-splint driving source, 312-splint support, 313-upper splint, 314-lower splint one, 315-lower splint two, 316-upper splint guide surface, 317-lower splint guide surface, 318-splint sliding sleeve, 319-splint sliding rod;

320-traverse slide rail, 321-fixing plate, 322-fixing pin, 323-ball spring plunger, 324-plug hole, 325-traverse induction sheet and 326-traverse sensor;

330-lifting support, 331-lifting driving source, 332-lifting platform, 333-lifting induction sheet and 334-lifting sensor.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by a person skilled in the art without any inventive work based on the embodiments of the present invention belong to the protection scope of the present invention.

Examples

Referring to fig. 1 to 3, the utility model discloses a diaphragm moves and carries operation mechanism, including base 10, move and carry unit, operation platform, sideslip unit and lift unit.

A transfer unit:

the transfer unit includes a transfer drive source 300, a transfer slide 301, and a stage base 302. The transfer drive source 300 and the transfer slide 301 are both provided on the base 10. The stage base 302 is provided on the transfer slide 301 and connected to the free end of the transfer drive source 300. The transfer drive source 300 can drive the stage base 302 to reciprocate along the direction of the transfer slide 301.

An operation platform:

the work platform includes two platform supports 310 that are separately disposed. The two platform supports 310 are respectively provided with a lower clamping plate which is parallel to each other. The deck frame 310 is provided with a clamp driving source 311. The free end of the clamp driving source 311 is provided with an upper clamp 313. Two upper clamping plates 313 are respectively positioned above one lower clamping plate. The clamping plate driving source 311 can drive the upper clamping plate 313 to move up and down so as to clamp and fix the membrane, and the reliability of the operation is ensured; the two separated platform supports 310 can suspend the middle of the membrane when the membrane is moved up and down, so as to prevent the crystal grains on the membrane from being broken down due to friction static electricity when the membrane slides.

As a further improvement of the present invention, the lower clamp plate includes a second lower clamp plate 315 and a first lower clamp plate 314 sequentially arranged from the inside of the platform bracket 310 to the outside thereof. The thickness of the second lower clamping plate 315 is smaller than that of the first lower clamping plate 314. During clamping, the upper clamping plate 313 falls onto the second lower clamping plate 315. The second lower clamping plate 315 can limit the transverse position of the diaphragm, and improve the accuracy of the position of the diaphragm.

As a further improvement of the present invention, the end surfaces of the upper clamp 313 and the lower clamp 315 are respectively provided with an upper clamp guide surface 316 and a lower clamp guide surface 317. Which can vertically guide the position of the diaphragm and improve the success rate of the diaphragm entering between the upper clamping plate 313 and the lower clamping plate 315.

As a further improvement of the present invention, the free end of the clamp driving source 311 is provided with a clamp bracket 312. The upper clamp plate 313 is disposed on the clamp plate bracket 312. A splint slide 319 is provided on the splint support 312. The platform bracket 310 is provided with a splint sliding sleeve 318. The cleat sliding rods 319 are slidably disposed within the cleat sliding sleeve 318. Which can ensure the accuracy of the movement of the upper clamp plate 313 in the vertical direction.

A transverse moving unit:

the traverse unit includes a traverse rail 320, a fixing plate 321, and a fixing pin 322. The cross slide 320 and the fixing plate 321 are disposed on the platform base 302 in a direction perpendicular to the upper clamp plate 313. One of the platform supports 310 is disposed on a sideslip rail 320. The fixing plate 321 is provided with a plurality of pin holes along the direction of the traverse slide 320. The fixing pin 322 is provided on the platform bracket 310 on the traverse slide 320. The fixing pin 322 is inserted into one of the pin holes. The fixing pin 322 is pulled up, so that one of the platform supports 310 can be moved, the distance between the two platform supports 310 can be adjusted, the diaphragm adjusting device is suitable for diaphragms with different specifications, and the universality is high.

As a further improvement of the present invention, a ball spring plunger 323 is disposed on the platform bracket 310 on the traverse slide rail 320. The fixing plate 321 is provided with a plurality of plug holes 324 along the direction of the sliding rail 320. The ball of the ball spring plunger 323 is snap-fitted into one of the plug holes 324. It can assist the location of fixed pin 322 and pinhole, and convenient adjustment position can increase the inlay card pressure simultaneously.

As a further improvement of the present invention, a traverse induction plate 325 is disposed on the platform support 310 on the traverse slide rail 320. A lateral movement sensor 326 is provided on the platform base 302. Which can detect the current spacing of the two platform supports 310 and signal them outward.

A lifting unit:

the lifting unit includes a lifting driving source 331 and a lifting platform 332. The lift driving source 331 is provided on the base 10. The lift platform 332 is disposed at a free end of the lift driving source 331 and located between the two platform supports 310. The lifting platform 332 can rise when the membrane normally works to lift the drooping part in the middle part, so that the crystal grains on the membrane are positioned at the same height, and the working quality is improved; meanwhile, after the operation is finished, the diaphragm can be separated, and electrostatic breakdown is avoided.

As a further improvement of the present invention, a lifting support 330 is provided on the platform base 302. At least two lifting sensors 334 are arranged on the lifting bracket 330 along the vertical direction. The bottom of the lifting platform 332 is provided with a lifting sensing sheet 333. It can detect the height of the lifting platform and send out signals. The lift sensors 334 may be two, for detecting the up and down positions, respectively.

The working principle is as follows:

the transfer driving source 300 moves the upper clamping plate 313 and the lower clamping plate to the upper film position, and the film sheet is pushed between the upper clamping plate 313 and the lower clamping plate; the clamp driving source 311 drives the upper clamp 313 to descend, so that the upper clamp and the lower clamp are clamped on the diaphragm; the transferring driving source 300 drives the membrane to move to an operation station; before operation, the lift driving source 331 lifts the long lift platform 332, so that the lift platform 332 is lifted on the diaphragm; after the operation is finished, the transferring driving source 300 drives the membrane to move to a lower membrane position to wait for membrane discharge; after the film is discharged, resetting each component and waiting for the next operation; when the diaphragms with different specifications are replaced, the fixing pin 322 is lifted upwards, the platform support 310 is moved, and after the fixing pin 322 is in place, the fixing pin 322 is inserted into the pin hole, so that the fixing is completed.

The embodiment needs to be supplemented with that: the utility model discloses constitute by concrete hardware structures such as driving source, sensor, some hardware has the participation of software program in the operation process, and the software program of supplementary local operation is current software program that can duplicate, does not constitute the innovation point of this application.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A membrane shifting operation mechanism is characterized by comprising a base, a shifting unit, an operation platform and a lifting unit;

the transfer unit comprises a transfer driving source arranged on a base, and a platform base is arranged at the free end of the transfer driving source;

the operation platform comprises two separated platform supports arranged on a platform base, a clamping plate driving source and a lower clamping plate parallel to the platform supports are arranged on the platform supports, an upper clamping plate is arranged at the free end of the clamping plate driving source, and the upper clamping plate is positioned above the lower clamping plate;

the lifting unit comprises a lifting driving source arranged on the platform base, a lifting platform is arranged at the free end of the lifting driving source, and the lifting platform is located between the two platform supports.

2. A membrane transfer operating mechanism according to claim 1, comprising a traverse unit including a traverse rail, a fixing plate and a fixing pin, the traverse rail and the fixing plate being provided on the platform base in a direction perpendicular to the upper plate, wherein a platform support is provided on the traverse rail, the fixing plate is provided with a plurality of pin holes in the direction of the traverse rail, the fixing pin is provided on the platform support on the traverse rail, and the fixing pin is inserted in one of the pin holes.

3. The membrane transfer mechanism as claimed in claim 2, wherein a ball-end spring plunger is disposed on the platform support of the cross slide rail, a plurality of plug holes are disposed on the fixing plate along the direction of the cross slide rail, and a ball end of the ball-end spring plunger is engaged with one of the plug holes.

4. A film transfer mechanism as claimed in claim 3, wherein a traverse sensing piece is provided on the platform support of the traverse slide, and a traverse sensor is provided on the platform base to cooperate with the traverse sensing piece.

5. The film transfer mechanism according to claim 1, wherein said lower clamp plate comprises a first lower clamp plate and a second lower clamp plate arranged in sequence from inside to outside, the thickness of said second lower clamp plate is smaller than that of said first lower clamp plate, and said upper clamp plate is located above said second lower clamp plate.

6. The film transfer operating mechanism according to claim 5, wherein the end surfaces of the upper and lower clamp plates are provided with upper and lower clamp plate guide surfaces, respectively.

7. The film transfer operating mechanism according to claim 5, wherein a clamp plate holder is provided at a free end of said clamp plate driving source, said upper clamp plate is provided on said clamp plate holder, a clamp plate slide bar is provided on said clamp plate holder, and a clamp plate slide sleeve is provided on said platform holder, said clamp plate slide bar being slidably provided in said clamp plate slide sleeve.

8. The film transfer mechanism as claimed in claim 1, wherein a lifting bracket is provided on the platform base, at least two lifting sensors are provided on the lifting bracket along a vertical direction, and a lifting sensing piece is provided on a bottom of the lifting platform to cooperate with the lifting sensors.

9. The film transfer unit according to claim 8, wherein there are two lift sensors.

10. The film transfer operation mechanism according to claim 1, wherein a transfer rail is provided on the base, and the stage base is provided on the transfer rail and connected to a free end of a transfer drive source.