CN210199505U - Light source of exposure machine - Google Patents
Light source of exposure machine Download PDFInfo
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- CN210199505U CN210199505U CN201921160077.XU CN201921160077U CN210199505U CN 210199505 U CN210199505 U CN 210199505U CN 201921160077 U CN201921160077 U CN 201921160077U CN 210199505 U CN210199505 U CN 210199505U
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Abstract
The utility model relates to a light source of an exposure machine, which is sequentially provided with a light source, a light path adjusting component and a light path correcting component; the light path of the light source sequentially passes through the light path adjusting component and the light path correcting component; the light path direction of the light path adjusting component is parallel to the central axis of the light path correcting component; the side wall of the light transmission part of the light path correction component is provided with a plurality of annular grooves; and the connecting line of the centers of the annular grooves is parallel to the central axis of the optical path correction component. The beneficial effects are that: the light path is corrected in a spiral mode, so that the light beam of the LED is pure and free of stray light after being optically condensed; the optical modules are arranged into a rectangle or an approximate rectangle in an area array mode to form an area array light source with high energy and high accuracy.
Description
Technical Field
The utility model belongs to the technical field of light utensil equipment, especially, relate to an exposure machine light utensil.
Background
One of the most critical processes in the manufacture of Printed Circuit Boards (PCB) is the transfer of a negative image to a substrate. Firstly, a layer of photosensitive material (such as liquid photosensitive glue, photosensitive dry film, etc.) is coated on a substrate, and then the photosensitive material coated on the substrate is subjected to light radiation to change the solubility of the photosensitive material. The resin of the unexposed part is not polymerized and dissolved under the action of a developing solution, and the photosensitive material of the exposed part is subjected to polymerization reaction and is solidified to form an image on a base material, and the process is exposure, namely the process completed by an exposure machine in the production of the printed circuit board.
In the manufacturing equipment of PCB and microelectronic device, the development of exposure machine is very important. With the rapid development of the electronic industry, especially products in the field of household appliances such as mobile phones, flat-panel televisions, cameras and the like and micro weapons such as micro robots, micro aircrafts, micro torpedoes and the like, it is shown that the high-precision high-resolution LED exposure machine has wide application prospects and huge application potential, but the existing LED exposure machine cannot meet the requirements of high-precision high-resolution (50 μm) PCBs until now.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model adopts the following technical scheme:
a light source of exposure machine is provided with a light path adjusting component and a light path correcting component;
the light source light path can pass through the light path adjusting component and the light path correcting component;
the light path direction of the light path adjusting component is the same as the central axis of the light path correcting component;
the side wall of the light transmission part of the light path correction component is provided with a plurality of annular grooves;
and the connecting line of the centers of the annular grooves is parallel to the central axis of the optical path correction component.
In one form, the optical path adjustment assembly is located between a light source and the optical path modification assembly;
the light of the light source can pass through the light path adjusting component and the light path correcting component.
In one mode, the light-emitting optical path direction of the optical path adjusting component is parallel to the central axis of the light-transmitting part;
the optical path adjusting component comprises a primary lens and a secondary lens, wherein the primary optical axes of the primary lens and the secondary lens are parallel to each other.
In one form, the primary lens is located between the light source and the secondary lens.
In one mode, the light transmission part is a through hole formed in the optical path correction component;
the plurality of light transmission parts of the light path correction component are arranged in a matrix shape.
In one mode, a plurality of the annular grooves are communicated with each other to form a spiral groove.
In one mode, a central axis of the spiral groove is parallel to a central axis of the optical path adjusting component; the main optical axis of the light path adjusting component is parallel to the central axis of the light transmission part.
In one form, the secondary lens is a biconvex lens; the first convex part and the second convex part of the secondary lens are arranged at two ends of the main body of the secondary lens; one end face of the primary lens is convex out of a third convex part.
One way, the second raised portion is located between the first raised portion and the third raised portion; the light source is positioned at one end of the primary lens, which is far away from the third convex part.
In one mode, the thickness of the secondary lens is 3-3.5cm, the thickness of the first convex part is 0.8-1.2cm, and the thickness of the second convex part is 0.3-0.7 cm; the thickness of the third convex part is 2-2.3 cm.
The utility model has the advantages that:
1. the light path is corrected in a spiral mode, so that the light beam of the LED is pure and free of stray light after being optically condensed;
2. the optical modules are arranged into a rectangle or an approximate rectangle in an area array mode to form an area array light source with high energy and high accuracy;
3. the energy variation of the double lenses is not large, and the effect of comparing and analyzing parameters is better.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view showing an arrangement of light-transmitting portions of the present invention;
FIG. 3 is a schematic view of a primary lens structure of the present invention;
FIG. 4 is a schematic view of a secondary lens structure according to the present invention;
FIG. 5 is prior art optical angle test data;
FIG. 6 is optical angle test data for one aspect of the present invention;
FIG. 7 is a resolution test film diagram.
In the figure: the light source comprises a light source 1, a light path adjusting component 2, a light path correcting component 3, a primary lens 21, a tertiary convex part 211, a secondary lens 22, a secondary lens body 220, a primary convex part 221, a secondary convex part 222, a light transmitting part 30, an annular groove 31 and a spiral groove 300.
Detailed Description
The invention is further described in a manner as follows with reference to the accompanying drawings:
as shown in fig. 1, a light source of an exposure machine is provided with a light source 1, a light path adjusting component 2, a light path correcting component 3 in sequence;
the light path of the light source 1 sequentially passes through the light path adjusting component 2 and the light path correcting component 3 (filter plate); after light of the light source 1 passes through the light path adjusting component 2, a parallel light path is formed, and then the light path is corrected through the light path correcting component 3;
the optical path direction of the optical path adjusting component 2 is parallel to the central axis of the light transmission part 30 of the optical path correcting component 3, and the optical path adjusting component 2 is used for regulating the optical path of the light source so as to form a parallel-like optical path; so that light can better pass through the light-transmitting portion 30;
the side wall of the light transmission part 30 is provided with a plurality of annular grooves 31; a line connecting center points of the plurality of annular grooves 31 is parallel to a central axis of the light-transmitting portion 30; by providing the annular groove 31 on the side wall of the light transmission portion 30, the optical path can propagate along the axial direction of the light transmission portion 30; the light transmission aperture is smaller than the lens size.
After the light beam is optically condensed, the light beam is pure and has no stray light, so that the product quality of the PCB after exposure is ensured;
the optical path adjusting component 2 comprises a primary lens 21 and a secondary lens 22 with mutually parallel main optical axes;
the primary lens 21 is located between the light source 1 and the secondary lens 22. Light of the light source 1 is converged through the primary lens 21, the large-angle irradiation direction of the light source is contracted, then the light passes through the primary lens 21 and irradiates the secondary lens 22, and the light passes through the secondary lens 22 and is further converged, so that the light is changed into parallel light;
the specific arrangement and the spacing distance of the light source 1, the primary lens 21 and the secondary lens 22 are adjusted according to actual conditions, different types of primary lenses 21 and secondary lenses 22 need different spacing, and all that is needed is to change the light of the light source 1 into parallel light.
In one case, a plurality of the annular grooves 31 are communicated with each other to form the spiral groove 300, and at this time, the plurality of annular grooves 31 are not closed rings connected end to end, and two adjacent annular grooves 31 are connected with each other to form the continuous spiral groove 300 on the inner wall of the light transmission part 30.
The center axis of the spiral groove 300 is parallel to the center axis of the optical path correcting element 3, and further parallel to the center axis of the light transmitting portion 30. The central axis is generally a rotation central axis.
The main optical axis of the optical path adjusting component 2 coincides with the central axis of the optical path correcting component, so that light can be better emitted from the central position.
Referring to fig. 2, the light-transmitting portion 30 is a through hole formed in the optical path correction assembly;
the plurality of light-transmitting portions 30 of the optical path correction element are arranged in a matrix shape; the area array light source is arranged into a rectangle or an approximate rectangle in an area array mode to form the area array light source with high energy and high accuracy.
As shown in fig. 3-4, the secondary lens 22 is a biconvex lens; the first convex part 221 and the second convex part 222 of the secondary lens 22 are disposed at both ends of the secondary lens body 220; an end surface of the primary lens 21 is convex-shaped to a third convex portion 211.
The thickness of the secondary lens 22 is 3-3.5cm, the thickness of the first convex part 221 is 0.8-1.2cm, and the thickness of the second convex part 222 is 0.3.0.7 cm; the thickness of the third protruding part 211 is 2-2.3 cm.
In one mode, the thickness of the secondary lens 22 is 3.3cm, the thickness of the first convex portion 221 is 1cm, and the thickness of the second convex portion 222 is 0.5 cm; the third raised part 211 has a thickness of 2.24 cm.
With reference to fig. 1, the second convex portion 222 is located between the first convex portion 221 and the third convex portion 211; the light source 1 is positioned at one end of the primary lens 21 far away from the third convex part 211; the first protruding part 221 is disposed adjacent to the spiral groove 300. FIG. 5 shows the original dual-lens light source test data of the old scheme of phi 10/T5.0+ phi 13.
Furthermore, the present invention is not limited to the above embodiments, as long as it achieves the technical effects of the present invention by substantially the same means, and all shall belong to the protection scope of the present invention.
Claims (10)
1. A light source of an exposure machine, characterized in that: the device is provided with a light path adjusting component (2) and a light path correcting component (3);
the light source light path can pass through the light path adjusting component (2) and the light path correcting component (3);
the light path direction of the light path adjusting component (2) is the same as the central axis of the light path correcting component (3);
the side wall of the light transmission part (30) of the light path correction component (3) is provided with a plurality of annular grooves (31);
the connecting line of the centers of the annular grooves (31) is parallel to the central axis of the optical path correcting component (3).
2. The light source of an exposure machine according to claim 1, characterized in that: the optical path adjusting component (2) is positioned between the light source (1) and the optical path correcting component (3);
the light of the light source (1) can pass through the light path adjusting component (2) and the light path correcting component (3).
3. The light source of an exposure machine according to claim 2, characterized in that: the light-emitting light path direction of the light path adjusting component (2) is parallel to the central axis of the light-transmitting part (30);
the optical path adjusting component (2) comprises a primary lens (21) and a secondary lens (22) with mutually parallel main optical axes.
4. A light source of an exposure machine according to claim 3, characterized in that: the primary lens (21) is located between the light source (1) and the secondary lens (22).
5. The light source of an exposure machine according to claim 2, characterized in that: the light-transmitting part (30) is a through hole formed in the light path correction component (3);
the plurality of light-transmitting parts (30) of the optical path correction component (3) are arranged in a matrix shape.
6. The light source of an exposure machine according to claim 1, characterized in that: the annular grooves (31) are communicated with each other to form a spiral groove (300).
7. The light source of an exposure machine according to claim 6, characterized in that: the central axis of the spiral groove (300) is parallel to the central axis of the light path adjusting component (2); the main optical axis of the light path adjusting component (2) is parallel to the central axis of the light transmission part (30).
8. The light source of an exposure machine according to claim 4, wherein: the secondary lens (22) is a biconvex lens; the first convex part (221) and the second convex part (222) of the secondary lens (22) are arranged at two ends of the secondary lens main body (220); one end face of the primary lens (21) is convex to form a third convex part (211).
9. The light source of an exposure machine according to claim 8, characterized in that: the second relief portion (222) is located between the first relief portion (221) and the third relief portion (211); the light source (1) is positioned at one end of the primary lens (21) far away from the third convex part (211).
10. The light source of an exposure machine according to claim 9, characterized in that: the thickness of the secondary lens (22) is 3-3.5cm, the thickness of the first convex part (221) is 0.8-1.2cm, and the thickness of the second convex part (222) is 0.3-0.7 cm; the thickness of the third convex part (211) is 2-2.3 cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921160077.XU CN210199505U (en) | 2019-07-23 | 2019-07-23 | Light source of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921160077.XU CN210199505U (en) | 2019-07-23 | 2019-07-23 | Light source of exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210199505U true CN210199505U (en) | 2020-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921160077.XU Active CN210199505U (en) | 2019-07-23 | 2019-07-23 | Light source of exposure machine |
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| CN (1) | CN210199505U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110376851A (en) * | 2019-07-23 | 2019-10-25 | 东莞科视自动化科技有限公司 | A kind of light source of exposure machine |
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2019
- 2019-07-23 CN CN201921160077.XU patent/CN210199505U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110376851A (en) * | 2019-07-23 | 2019-10-25 | 东莞科视自动化科技有限公司 | A kind of light source of exposure machine |
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Address after: No. 333, Zhushan Zhenxing Road, Dongcheng District, Dongguan City, Guangdong Province Patentee after: Guangdong Keshi Optical Technology Co.,Ltd. Address before: No. 333, Zhushan Zhenxing Road, Dongcheng District, Dongguan City, Guangdong Province Patentee before: CST AUTOMATION TECHNOLOGY Co.,Ltd. |