CN210198392U - Novel MEMS resonant gyroscope measurement and control device - Google Patents
Novel MEMS resonant gyroscope measurement and control device Download PDFInfo
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Abstract
The utility model provides a novel MEMS resonant mode gyroscope measurement and control device, the device utilize ring oscillator to gather the small electric capacity signal of gyroscope gauge outfit and obtain square wave signal, with the frequency of square wave signal input detection square wave in to the main control chip, record the displacement volume of gauge outfit, the circuit of this signal acquisition scheme is compared in adc and peripheral circuit, has reduced electronic components's quantity greatly, has compressed gyroscope measurement and control device's hardware volume. The device adopts the main control chip to directly generate analog signals, the analog signals enter the buffer module circuit and then are output to the gyroscope gauge outfit, most of work of the signal output scheme is completed in the main control chip, and the peripheral circuit only has the buffer module circuit. Furthermore, the utility model discloses still have compression cost, improve SNR, temperature drift control, controllable and the start-up time of energy consumption advantage such as short.
Description
Technical Field
The utility model relates to a novel MEMS resonant gyroscope measurement and control device.
Background
In the underwater environment, due to the attenuation effect of electromagnetic waves, satellite communication systems such as a GPS (global positioning system), a Beidou and the like cannot be used, so that the inertial navigation technology plays a vital role in the underwater environment.
Micro-Electro-Mechanical systems (MEMS) resonant gyroscopes have many advantages such as low power consumption, low cost, and short boot time, and thus have great potential in marine inertial navigation applications.
The traditional MEMS resonant gyroscope mostly adopts mature data converter chips (including ADC chips and DAC chips) to solve the problems related to driving the gyroscope header vibrations (i.e., the output signals drive the header vibrations) and analog signal acquisition.
However, the above implementation scheme requires a data converter chip and a huge peripheral circuit support thereof, so that the hardware volume of the whole measurement and control device is increased. In addition, the data converter chip scheme adopted in the implementation scheme also has the defects of serious temperature drift, large energy loss, high cost and the like, so that the application range of the measurement and control device is severely limited.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a novel MEMS resonant mode gyroscope measurement and control device, through the relevant structure that changes drive gyroscope gauge outfit vibrations and analog signal collection to compression measurement and control device's hardware volume improves and measures the SNR, and effective control temperature floats and energy consumption shortens start-up time, and the application scope of device is widened to compression overall cost.
The utility model discloses a realize above-mentioned purpose, adopt following technical scheme:
a novel MEMS resonant gyroscope measurement and control device comprises a main control chip, a buffer module circuit and a ring oscillator;
the main control chip is internally provided with two groups of frequency detection digital circuits, a central processing unit, a two-way signal generator, two groups of gain modules, two groups of low-pass modulators and two groups of general input and output ports;
the output ends of the two groups of frequency detection digital circuits are respectively connected with the central processing unit;
the central processor is connected with the two-way signal generator;
the two-way signal generator is provided with two ways of outputs, and each way of output is respectively connected with one group of gain modules;
each group of gain modules are respectively connected with a group of low-pass modulators and a group of universal input/output ports in sequence;
the buffer module circuits are divided into two groups, and each group of general input/output ports is respectively connected with the input ends of one group of buffer module circuits;
the output ends of the two groups of buffer module circuits are respectively connected to the gyro instrument head;
the number of the ring oscillators is two, and the input end of each ring oscillator is connected to the head of the gyro instrument;
the output end of each ring oscillator is respectively connected to the input ends of a group of frequency detection digital circuits.
Preferably, the ring oscillator is composed of M inverters connected end to end, where M is an odd number greater than or equal to 3.
Preferably, the signal generator employs a digitally controlled oscillator.
Preferably, the buffer module circuit is composed of a voltage following buffer circuit and an RC filter circuit.
Preferably, the RC filter circuit includes a resistor R1, a resistor R2, a capacitor C1 and a capacitor C2;
the input end of the RC filter circuit, the resistor R1, the resistor R2 and the output end of the RC filter circuit are connected in sequence;
one end of the capacitor C1 is connected between the resistor R1 and the resistor R2, and the other end is grounded;
one end of the capacitor C2 is connected between the resistor R2 and the output end of the RC filter circuit, and the other end is grounded.
The utility model has the advantages of as follows:
(1) hardware volume beneficial to compressing measurement and control device and application range of device is widened
The circuit of the signal acquisition scheme is compared with an analog-to-digital converter and a peripheral circuit thereof, the number of electronic components is greatly reduced, and the hardware volume of a gyroscope measurement and control device is compressed;
the main control chip is adopted to directly generate an analog signal, the analog signal enters the buffer module circuit and then is output to the gyroscope gauge head, most of work of the signal output scheme is completed in the main control chip, and the peripheral circuit is only provided with the buffer module circuit, so that compared with a digital-to-analog converter and the peripheral circuit thereof, the number of electronic components is greatly reduced, and the hardware volume of the gyroscope measurement and control device is compressed;
(2) cost further compression
In the traditional gyroscope measurement and control device, mature ADC and DAC solutions are adopted, which means that more cost is invested to purchase finished ADC and DAC chips, and the high-precision ADC and DAC required by the gyroscope measurement and control device have very high design and manufacturing process difficulty and are monopolized by foreign high-tech companies for a long time, so that the purchase price is always high and occupies a great proportion of the overall cost of the measurement and control device. The utility model provides a MEMS resonant gyroscope interface circuit and measurement and control device, through designing the brand-new scheme, can abandon ADC and DAC, undoubtedly can compress the cost by a wide margin.
(3) Is favorable for improving the signal-to-noise ratio
In a traditional gyroscope measurement and control device, a plurality of analog devices such as an ADC (analog to digital converter), a DAC (digital to analog converter) and peripheral circuits thereof are included, most of signal streams among the analog devices are analog signals, and the analog signals are easier to be interfered than digital signals. Therefore, the utility model discloses a abandon most analog device for analog signal quantity in the device further reduces, and the substitute is the stronger digital signal of interference killing feature, so can further reduce the measurement noise, improves the whole SNR of device.
(4) The temperature drift can be controlled
For traditional gyroscope measurement and control device, the utility model discloses it is less to receive ambient temperature to influence. Analog devices such as an ADC (analog to digital converter), a DAC (digital to analog converter) and the like adopted in the traditional scheme are greatly influenced by the ambient temperature, namely the temperature drift is serious. And the utility model discloses the digital device of well adoption is lower to the sensitivity of temperature, and the temperature drift performance is good promptly, also can normally work under extreme ambient temperature, has further widened the range of application, has promoted practical value greatly.
(5) Controllability of energy consumption
For traditional gyroscope measurement and control device, the utility model discloses in the design process, can be according to practical application scene control energy consumption. Reference frequency (f) of oscillation ring in ring oscillation circuit design processo) The adjustment can be made by increasing or decreasing the number of rings (number of inverters) the more the number of rings (inverters) the lower the reference frequency and vice versa.
Because a large part of the whole energy consumption of the gyroscope measurement and control device is higher and lower than the reference frequency, the lower the reference frequency is, the lower the energy consumption of the device is; although the higher the reference frequency is, the higher the measurement accuracy is, if the reference frequency is too high, the waste of energy consumption is inevitably caused; therefore, the reference frequency is controlled within a reasonable range, the measurement accuracy can be guaranteed, the power consumption of the device can be reduced, the device is suitable for certain scenes with high requirements on the power consumption, and the practical value is further improved.
(6) Short startup time
The devices of an ADC, a DAC and peripheral circuits of the traditional gyroscope measurement and control device are all analog devices, the analog devices need to be preheated when the device is just powered on, and the device can normally work after the internal temperature and the ambient temperature of the devices reach a balanced state. But the utility model discloses in replaced most analog device with digital device, digital device is insensitive to self temperature and ambient temperature, need not to preheat, just can get into operating condition at once after the electricity on the device, so the utility model discloses a whole start time is shorter.
If the power supply is unstable in an application scene, the problem of short-time power failure can occur; the traditional gyroscope measurement and control device needs to be preheated, so that the restart time is too long, and the measurement work cannot be carried out in the long restart process; the utility model provides a measurement and control device need not to preheat, so restart the time weak point, can furthest guarantee the even running of device.
Drawings
Fig. 1 is a schematic structural block diagram of a novel MEMS resonant gyroscope measurement and control device in an embodiment of the present invention;
fig. 2 is a schematic diagram of a ring oscillator circuit according to an embodiment of the present invention.
Fig. 3 is a schematic block diagram of a frequency detection digital circuit according to an embodiment of the present invention.
Fig. 4 is a block diagram of a signal output scheme in an embodiment of the present invention.
Fig. 5 is a schematic block diagram of a processing flow of the low-pass modulator according to an embodiment of the present invention.
Fig. 6 is a schematic diagram of a buffer module circuit according to an embodiment of the present invention.
The system comprises a frequency detection digital circuit 1, a central processing unit 2, a double-channel signal generator 3, a gain module 4, a low-pass modulator 5, a universal input/output port 6, a buffer module circuit 7, a gyroscope meter head 8, a ring oscillator 9a, a ring oscillator 9b, a crystal oscillator 10, a time-base frequency division module 11, a gate controller 12, a counter 13 and a latch 14.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments:
as shown in fig. 1, the embodiment of the present invention describes a novel MEMS resonant gyroscope measurement and control device, which includes a main control chip (as shown in fig. 1 by a dashed line frame), a buffer module circuit 7 and a ring oscillator 9.
The main control chip is internally provided with two groups of frequency detection digital circuits 1, a central processing unit 2, a two-way signal generator 3, two groups of gain modules 4, two groups of low-pass modulators 5 and two groups of general input/output ports (i.e. I/O ports in fig. 1) 6.
The output ends of the two groups of frequency detection digital circuits 1 are respectively connected with the central processing unit 2.
The central processor 2 is connected with a two-way signal generator 3.
The two-way signal generator 3 has two outputs, and each output is connected with a group of gain modules 4 respectively.
Each group of gain modules 4 is connected with a group of low-pass modulators 5 and a group of general input/output ports 6 in turn.
There are two groups of buffer module circuits 7, and each group of general input/output ports is connected with the input end of one group of buffer module circuits.
The output ends of the two groups of buffer module circuits 7 are respectively connected to the gyroscope gauge head 8.
The number of the ring oscillators 9 is two, and the input end of each ring oscillator 9 is connected to the gyro meter 8.
The output of each ring oscillator 9 is connected to the inputs of a set of frequency detection digital circuits 1, respectively.
The buffer module circuit 7 and the ring oscillator 9 are peripheral circuits of the main control chip.
The main control chip is arranged at the rear end of the gyroscope gauge head 8 and mainly used for processing digital signals, and the buffer module circuit 7 and the ring oscillator 9 are arranged at the front end of the gyroscope gauge head 8 and mainly used for processing analog signals.
In fig. 1 there are two channels CH1 and CH2, namely the part located above and the part located below the line in fig. 1.
The part above the neutral line is the drive channel CH1, which is responsible for driving the vibration of the gyroscope head 8, and accordingly the ring oscillator 9a in the drive channel is used to acquire signals related to the driving mode of the gyroscope head 8.
The part below the neutral line is a detection channel CH2, when external rotation occurs, the induction mode of the gyroscope meter head 8 can generate vibration, and the CH2 generates a signal of superposition of sine waves and cosine waves according to the vibration condition, so that the meter head 8 achieves a force balance state.
The ring oscillator 9b in the detection channel is used to acquire signals related to the sensing mode of the gyroscope head 8.
The signal flow direction of the novel MEMS resonant gyroscope measurement and control device is as follows:
the two-way signal generator 3 generates a standard sine wave signal, the standard sine wave signal is amplified by the gain module 4, then enters the low-pass modulator 5 for modulation, and a square wave signal is output to the outside of the main control chip through the universal input/output port 6.
The square wave signal is processed by the buffer module circuit 7 to obtain a sine wave signal, and the gyroscope gauge outfit is driven to regularly shake earthquake.
The gyroscope head in the vibration state can generate an analog signal output.
The ring oscillator 9 collects analog signals and outputs measurement results after processing.
Meanwhile, the ring oscillator 9 feeds back the acquired gyroscope square wave signal to the main control chip, the frequency detection digital circuit 1 detects the frequency to obtain the displacement of the gauge outfit, and the frequency detection digital circuit 1 feeds back the signal to the central processing unit 2.
The central processor 2 makes a minor adjustment to the dual-path signal generator 3 according to the feedback condition (i.e. the central processor 2 adjusts the frequency of the output signal of the dual-path signal generator 3), thus forming a closed-loop system.
The embodiment of the utility model provides a need not to adopt analog-to-digital converter (ADC), but the very little ring oscillator 9 of application circuit scale designs the ring oscillator circuit to this small electric capacity signal of gathering gyroscope gauge outfit 8.
The ring oscillator 9 is a ring circuit composed of M inverters connected end to end, where M is an odd number greater than or equal to 3. Fig. 2 shows a ring oscillator formed by three inverters connected end to end, and the principle is as follows:
the inherent transmission delay time of the gate circuit is formed by connecting odd inverters end to end, the input and the output of any one inverter cannot be maintained in a high level or low level state, and can only be in an unstable state of mutual conversion between the high level and the low level, and the output is a square wave signal.
The embodiment of the utility model provides a ring oscillator circuit has been designed based on ring oscillator technique, can simplify to the circuit model that fig. 2 shows. Wherein, the micro capacitance signal C output by the gyroscope gauge head 8 is input to the ring oscillation circuit and can be converted into square wave signalNumber, wherein the frequency f of the square-wave signal0Is in linear relation with the displacement of the gauge head.
In this embodiment, the square wave signal output by the ring oscillator 9 is directly transmitted to the main control chip for frequency detection. Specifically, the square wave signal is input to the frequency detection digital circuit 1 in the main control chip to detect the frequency, and then the displacement of the gauge outfit can be measured.
The principle of the frequency detection digital circuit 1 is shown in fig. 3:
the frequency detection digital circuit 1 includes a crystal oscillation 10, a time-base frequency division block 11, a gate controller 12, a counter 13, a latch 14, and the like. The crystal oscillator 10 generates a standard frequency signal, which enters the time-based frequency division module 11 for frequency division processing, and the divided time reference is used as a reference clock of the frequency detection digital circuit 1.
The gate controller 12 controls the counter 13 and the latch 14 to perform the related operation based on the clock signal.
The frequency signal to be measured (the square wave signal output by the ring oscillator 9) enters the counter 13, the gate controller 12 controls the gate in the counter 13 to open and close to form a pulse signal, the number of pulses is calculated, and frequency data is measured by combining time data.
The latch 14 reduces data jitter caused by counting or clearing, and improves measurement accuracy.
The utility model discloses circuit in the signal acquisition scheme compares with traditional scheme, and the advantage lies in:
according to the traditional scheme, a tiny capacitance signal of a gyroscope gauge head 8 is amplified through an amplifier, then sent to an analog-to-digital converter to be converted into a digital signal, and then sent to a main control chip to be processed.
And the utility model discloses a directly input ring oscillator 9 with gyroscope gauge outfit 8's small electric capacity signal, obtain a square wave signal (do not carry out digital processing), then send to main control chip mesometer frequency data.
It is therefore clear that the embodiment of the utility model provides a circuit of adopting in the signal acquisition scheme compares with adc and peripheral circuit, has reduced electronic components's quantity greatly to the hardware volume of gyroscope measurement and control device has been compressed.
Fig. 4 shows the signal output scheme in the embodiment of the present invention, that is, the output signal drives the gyroscope head 8 to vibrate.
As can be seen from fig. 4, the embodiment of the present invention does not need to adopt digital-to-analog converter (DAC), but utilizes the main control chip to directly generate analog signals, and after entering the buffer module circuit 7 to process, the analog signals are output to the gyroscope header 8.
Wherein, the two-way signal generator 3 adopts a digital control oscillator.
The central processor 2 controls the two-way signal generator 3 to generate two-way digital signals which are amplified by the gain modules 4 of the CH1 channel and the CH2 channel respectively; and then into the low-pass modulators 5 of the respective channels.
After being modulated by the low-pass modulator 5, the two paths of digital signals continuously output high-level or low-level signals to peripheral circuits through the universal input/output port 6 of the main control chip, and the signals are continuously output to be square wave signals.
The two-way signal generator 3, the gain module 4 and the general input/output port 6 are all implemented according to a general scheme.
The processing flow of the low-pass modulator 5 of the present invention is shown in fig. 5.
The digital sine wave signal output by the two-way signal generator 3 is input to the digital circuit (i.e. the low-pass modulator 5), and after a first-order link, the digital sine wave signal enters a digital comparator link and passes through a time lag link z-1Negative feedback is carried out to the input end to form a closed loop system; the output signal of the comparator is a series of continuous high and low levels, namely a regular square wave signal.
The formula derivation for this first order element is as follows:
first, the standard first-order link formula is:
wherein Y(s) is the output of the signal, and U(s) is the input of the signal.
The standard formula is an expression of a time continuous system and can only express a continuous process of an analog signal.
If a computer is used to perform digital computation, i.e. inputting to a digital circuit for processing, a discretization operation must be performed on a continuous system, which is commonly performed by an euler method, and the formula is as follows:
in the formula, Δ t represents a sampling time interval in the discretization operation.
Substituting the formula into a standard first-order link formula, wherein the derivation process is as follows:
this equation is the first order element shown in FIG. 5, and for further derivation, it is assumed that
Then the following formula is given:
multiplying both sides of the equation by a time lag z-1Obtaining:
further processed to obtain Y (k) ═ - α. Y (k-1) + U (k) — U (k-1).
The formula shows that the output at each moment can be obtained by iterative calculation through the output at the previous moment, the input at the current moment and the input at the previous moment, and the feasibility of the scheme is further demonstrated.
The digital signals are output to the peripheral circuit through the general input and output port 6 to form a series of regular square wave signals.
In fig. 5, two analog square wave signals enter a buffer module circuit 7 through a peripheral circuit, and the buffer module circuit is composed of a simple analog circuit; the two square wave signals are respectively processed by buffering, filtering and the like, and then changed into sine wave signals to be output to the gyroscope gauge head 8.
Fig. 6 shows a schematic diagram of a buffer module circuit 7, which consists of a voltage-follower buffer circuit and an RC filter circuit.
The RC filter circuit includes a resistor R1, a resistor R2, a capacitor C1 and a capacitor C2.
The input end of the RC filter circuit is connected with the resistor R1, the resistor R2 and the output end of the RC filter circuit in sequence.
One end of the capacitor C1 is connected between the resistor R1 and the resistor R2, and the other end is grounded.
One end of the capacitor C2 is connected between the resistor R2 and the output end of the RC filter circuit, and the other end is grounded.
The buffering and filtering processing of the square wave signals can be realized through the buffering module circuit 7, and sine wave signals are obtained.
The utility model discloses circuit in the signal output scheme compares with traditional scheme, and the advantage lies in:
in the traditional scheme (the gyroscope gauge outfit 8 is driven by a DAC output signal to vibrate), a signal generator in a main control chip generates a digital signal, and the digital signal is output to the DAC (at the moment, the digital signal is already outside the main control chip); the DAC outputs analog sine wave signals to the buffer module, and the analog sine wave signals are processed by the buffer module and then output to the gyroscope gauge head 8.
And the embodiment of the utility model provides a double-circuit signal generator 3 in the main control chip produces digital signal, handles through low pass modulator 5, via general input/output port 6 output simulation square wave signal (the signal is in the main control chip outside this moment), and square wave signal is handled through buffer module circuit 7, converts sine wave signal into, exports to gyroscope gauge outfit 8.
It can be seen that, the utility model discloses most work is all accomplished on the main control chip platform in the signal output scheme, and peripheral circuit only buffers module circuit 7's simple analog circuit, consequently compares with digital analog converter and peripheral circuit, the utility model discloses the signal output scheme has reduced electronic components's quantity greatly to gyroscope measurement and control device's hardware volume has been compressed.
Of course, the above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above embodiment, and it should be noted that any equivalent substitution, obvious modification made by those skilled in the art under the teaching of the present specification fall within the essential scope of the present specification, and the protection of the present invention should be protected.
Claims (5)
1. The utility model provides a novel MEMS resonant gyroscope observes and controls device which characterized in that includes:
the system comprises a main control chip, a buffer module circuit and a ring oscillator;
the main control chip is internally provided with two groups of frequency detection digital circuits, a central processing unit, a two-way signal generator, two groups of gain modules, two groups of low-pass modulators and two groups of general input and output ports;
the output ends of the two groups of frequency detection digital circuits are respectively connected with the central processing unit;
the central processor is connected with the two-way signal generator;
the two-way signal generator is provided with two ways of outputs, and each way of output is respectively connected with one group of gain modules;
each group of gain modules are respectively connected with a group of low-pass modulators and a group of universal input/output ports in sequence;
the buffer module circuits are divided into two groups, and each group of general input/output ports is respectively connected with the input ends of one group of buffer module circuits;
the output ends of the two groups of buffer module circuits are respectively connected to the gyro instrument head;
the number of the ring oscillators is two, and the input end of each ring oscillator is connected to the head of the gyro instrument;
the output end of each ring oscillator is respectively connected to the input ends of a group of frequency detection digital circuits.
2. The measurement and control device of the MEMS resonant gyroscope of claim 1,
the ring oscillator is formed by connecting M inverters end to end, wherein M is an odd number larger than or equal to 3.
3. The measurement and control device of the MEMS resonant gyroscope of claim 1,
the signal generator adopts a digital control oscillator.
4. The measurement and control device of the MEMS resonant gyroscope of claim 1,
the buffer module circuit is composed of a voltage following buffer circuit and an RC filter circuit.
5. The measurement and control device of the MEMS resonant gyroscope of claim 4,
the RC filter circuit comprises a resistor R1, a resistor R2, a capacitor C1 and a capacitor C2;
the input end of the RC filter circuit, the resistor R1, the resistor R2 and the output end of the RC filter circuit are sequentially connected;
one end of the capacitor C1 is connected between the resistor R1 and the resistor R2, and the other end is grounded;
one end of the capacitor C2 is connected between the resistor R2 and the output end of the RC filter circuit, and the other end is grounded.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110470291A (en) * | 2019-09-04 | 2019-11-19 | 中国海洋大学 | A kind of MEMS resonant formula gyroscope interface circuit and TT&C system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110470291A (en) * | 2019-09-04 | 2019-11-19 | 中国海洋大学 | A kind of MEMS resonant formula gyroscope interface circuit and TT&C system |
| CN110470291B (en) * | 2019-09-04 | 2023-11-24 | 中国海洋大学 | MEMS resonant gyroscope interface circuit and measurement and control system |
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