CN210110702U - Multi-cantilever thermal bimetal driver - Google Patents
Multi-cantilever thermal bimetal driver Download PDFInfo
- Publication number
- CN210110702U CN210110702U CN201920792424.4U CN201920792424U CN210110702U CN 210110702 U CN210110702 U CN 210110702U CN 201920792424 U CN201920792424 U CN 201920792424U CN 210110702 U CN210110702 U CN 210110702U
- Authority
- CN
- China
- Prior art keywords
- opening
- carrying
- cantilever
- carrying beam
- active area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 230000006835 compression Effects 0.000 claims abstract description 14
- 238000007906 compression Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 38
- 238000002474 experimental method Methods 0.000 abstract description 13
- 230000005540 biological transmission Effects 0.000 abstract description 12
- 238000011065 in-situ storage Methods 0.000 abstract description 12
- 238000002360 preparation method Methods 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000013461 design Methods 0.000 abstract description 3
- 239000002086 nanomaterial Substances 0.000 abstract description 3
- 238000012512 characterization method Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 45
- 238000004627 transmission electron microscopy Methods 0.000 description 31
- 238000000034 method Methods 0.000 description 12
- 238000005520 cutting process Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 244000137852 Petrea volubilis Species 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Abstract
The utility model relates to the technical field of nano material in-situ characterization based on a transmission electron microscope, and provides a multi-cantilever thermal bimetal driver, which comprises a body, a first opening and a second opening; the body comprises an active area and passive areas arranged on two sides of the active area; the active area is provided with the first opening, the passive area is provided with the second opening, a connecting part between the first opening and the passive area is set as a first carrying beam, and a connecting part between the second opening and the active area is set as a second carrying beam; the first opening is communicated with the second opening through a connecting channel; a compression driving position is formed between each second carrying beam and the side wall of the second opening opposite to the second carrying beam; the utility model discloses simple structure, preparation are convenient, and the mass production of being convenient for has realized carrying out TEM normal position mechanics experiment under different temperatures, still can design the driver structure as required in a flexible way, satisfies different drive demands.
Description
Technical Field
The utility model relates to a nano-material normal position sign technical field based on transmission electron microscope especially relates to a hot bimetal driver of many cantilevers.
Background
Mechanical properties are important indicators for characterizing material properties. The material is subjected to active or passive stress during the service process. The research on the elastic-plastic deformation process of the material under the stress action can provide theoretical and experimental basis for failure analysis, structural design, material modification, new material development and the like. With the continuous development of material science and the increasing requirements of various industries on the mechanical properties of materials, research work is also continuous and deep. Transmission Electron Microscopy (TEM) is a powerful tool for material research with its resolution capability at the nano-atomic scale. The TEM in-situ mechanics is an important branch of the TEM technology, and has great advantages in dynamically revealing the relationship between the microstructure and the mechanical property of the material. The TEM in-situ mechanics means that mechanical load is applied to a sample in the TEM, and the dynamic evolution process of the structure and the performance of the same region on the sample is observed and recorded in real time from the nanometer and atomic dimensions, so that the structure-performance relationship of the material under a specific stress field is further disclosed. The TEM in-situ mechanical experiment is continuously developed in the past decades, the application material range is gradually widened, the loading type is increased, the signal input and acquisition capacity is improved, and the outstanding research results are obtained.
At present, various TEM in-situ mechanical experiment platforms (hereinafter referred to as in-situ platforms) are developed successively by subject groups and instrument companies all over the world on the basis of TEM sample rods. Since this type of study requires the application of a load to the sample, an important component of the in situ platform is the actuator. The actuators of the home platform can be classified into the following categories, depending on size and location: 1. large three-dimensional drives such as those used by Bruker's PI 95 nanoindenter and Nanofactory's TEM nanoindenter. The experimental instrument drives the probe to be close to a sample fixed at the front end of the sample rod and applies pressure through a precise three-dimensional moving system penetrating through the sample rod; 2. a micro one-dimensional driver, such as a Quantitative Mechanical platform developed by the Korean-east topic group in MEMS device for Quantitative in Mechanical Testing in Electron Microscope, using micro piezoelectric ceramics to provide driving force and displacement for a Micro Electro Mechanical System (MEMS) Mechanical chip; 3. MEMS electrical signal driver, such as the drivers adopted by Chang et al In A microelectronic system for thermal testing of nanostructures, and Garcia et al In-situ Transmission Electron High Temperature Electrical device In Nanocristalline platinum Films, during the driving process, it is necessary to apply an electric field to the drivers to realize the driving output of electrothermal, electrostatic, piezoelectric, etc.; 4. the korean patent application No. 200610144031, discloses a thermal bimetal actuator in the form of a "transmission electron microscope carrier net driven by a thermal bimetal" which is formed by firmly bonding two materials having different thermal expansion coefficients, wherein the thermal bimetal actuator is a strip-shaped structure, and the two bimetal actuators are bonded to a carrier ring in an antiparallel manner at a certain distance, and when the temperature changes, the two bimetal actuators bend in opposite directions due to the difference of the two expansion coefficients, thereby providing a driving force and a displacement for a sample mounted between the two bimetal actuators.
The TEM in-situ mechanics needs to combine precise and stable mechanical loading with the ultra-high resolution of a transmission electron microscope, and strives to dynamically observe the deformation process of a sample under the action of stress in real time from a nanometer and an atomic scale, for a crystal material, the information quantity revealed by a TEM image is closely related to the orientation relation between a specific area crystal grain and an electron beam, the biaxial tilting function of the TEM sample rod is to tilt the sample to the optimal diffraction condition according to the requirements, so that more nanometer and atomic scale structures and defect information are obtained, the TEM sample rod usually realizes the biaxial tilting function of the sample along two orthogonal axes of α axes and β axes, wherein α axis represents the long axis direction of the TEM sample rod, 5630 axis represents the direction at the front end of the TEM sample rod and is perpendicular to the electron beam and the long axis, α axis can be realized by driving the TEM sample rod to rotate along the axial direction through a transmission electron microscope angle measuring platform, β axis tilting needs to drive a front end part structure to rotate along a β axis through a biaxial tilting mechanism arranged in the TEM sample rod, a part of the TEM sample rod is positioned in a narrow space, and the tilting capability of the TEM rod is greatly different from a TEM pole piece 30, thus the tilting objective lens can be tilted along the tilting capability of the TEM sample rod when the TEM sample rod is tilted along a tilting objective lens tilted by a very small tilting angle 734, and the tilting angle, which is greatly different from the TEM sample rod, the tilting capability of the TEM sample rod is greatly different.
The mechanical platform of the above driving modes has different effects on β axis tilting, namely, a first type-large three-dimensional driver which usually penetrates through the long axis direction of a sample rod and cannot rotate along the axis β, a second type-micro one-dimensional driver which is designed according to the Han-Xiao-Dong subject group and has MEMS mechanical chips and micro piezoelectric ceramics arranged along the long axis direction of the sample rod and can tilt along the axis β during experiments, and the part has a certain length and has a certain effect on β axis tilting and can still realize tilting of about +/-20 degrees, a third type-MEMS electric signal driver which has the platform β axis tilting capability depending on the length of the used MEMS mechanical chip, and a sample rod which partially uses a long chip with a complex structure cannot tilt along the axis β, and gradually increases the β axis angle along with the reduction of the length of the chip, and a fourth type-thermal bimetallic driver which has the smallest size and has a diameter of 3mm, is adapted to a common tilting sample rod, has no effect on the β axis tilting capability, so that a TEM bimetallic image can be easily obtained by using the biaxial tilting actuator.
In addition to this, thermal bimetallic actuators have other advantages: the driver is suitable for various sample preparation modes, such as a double-spraying and ion thinning sample thin area which can be directly bonded and cut, a thin film material separated from a substrate can be directly carried, and a sample can be prepared by using a conventional focused ion beam block sampling technology; meanwhile, the driver is temperature-driven, a special TEM sample rod is not required to be designed, an electric signal is not required to be introduced, the driver can be directly matched with a heating sample rod (such as a 652-type sample rod produced by Gatan company) for use, and the driving can be realized by heating thermal bimetal during experiments; in addition, the thermal bimetal has low cost, and the cost of TEM in-situ research can be effectively reduced. In the past decade, the performance of the thermal bimetal actuator is gradually improved through continuous improvement, and the field of applied materials is gradually expanded, so that a great deal of excellent research results are generated.
The conventional thermal bimetal actuator is mainly proposed by the aforementioned korea-eastern subject group. However, such thermal bimetal actuators are complex in structure and cumbersome to manufacture, and involve a large number of manual operations in the manufacturing process, including polishing the bimetal to a suitable thickness, cutting to a suitable length and flattening the end face, adhering to a carrier ring, etc., which are not only time-consuming, but also dependent on the experience and skill of the operator in terms of manufacturing efficiency and effect; moreover, the manual manufacturing mode cannot realize batch production, which greatly limits the popularization and application of the thermal bimetal driver; meanwhile, in the preparation process, the bimetallic strip and the bearing ring need to be connected by resin glue, and the working temperature of the glue is low, so that the thermal bimetallic driver cannot work at a high temperature and can only be used for a low-temperature TEM (transverse electric and magnetic field) in-situ mechanical experiment.
Disclosure of Invention
Technical problem to be solved
The utility model aims at providing a hot bimetal driver of many cantilevers for it is complicated, the preparation is loaded down with trivial details to solve current hot bimetal driver structure, is difficult to realize mass production, and can only be used for the problem of low temperature TEM normal position mechanics experiment.
(II) technical scheme
In order to solve the technical problem, the utility model provides a multi-cantilever thermal bimetal driver, which comprises a body, a first opening and a second opening, wherein the first opening and the second opening are arranged on the body;
the body comprises an active area and passive areas arranged on two sides of the active area, and the coefficient of thermal expansion of the material adopted by the active area is greater than that of the material adopted by the passive areas;
the active area is provided with the first opening, the passive area is provided with the second opening, a connecting part between the first opening and the passive area is set as a first carrying beam, a connecting part between the second opening and the active area is set as a second carrying beam, and the first carrying beam and the second carrying beam are connected in parallel;
the two opposite sides of the first opening are respectively communicated with the second openings on the corresponding sides through connecting channels; the first carrying beam and the second carrying beam are divided into two parts by the connecting channel;
and a compression driving position is formed between each second carrying beam and the side wall of the second opening opposite to the second carrying beam.
Preferably, in the utility model discloses in the body is circular slice or semi-circular sheet structure, first opening with the second opening all is bar structure, just first opening with the mutual parallel arrangement of second opening.
Preferably, in the present invention, the active area is provided with one of the first openings, each of the passive areas is provided with one of the second openings, two of the second openings are symmetrically disposed at two sides of the first opening.
Preferably, in the present invention, the connecting channel is vertically disposed in the middle of the first opening and the second opening; two be equipped with respectively on the second open-ended lateral wall and carry on the end with the second relatively that the second carries on the roof beam and arrange, just first carry on the end with the second carries on the end and arranges relatively connect the both ends of passageway.
Preferably, the utility model discloses in still be equipped with the third and carry on the roof beam in the first opening, the third carries on the roof beam will first opening is separated for two parts, just the third carry on the roof beam with first carry on the roof beam and parallel.
Preferably, in the present invention, a fourth carrying beam is further disposed in the connecting channel; two ends of the fourth carrying beam are respectively connected with the first carrying end and the second carrying end, and the middle part of the fourth carrying beam is provided with a cross-shaped carrying end; the cross-shaped carrying end is positioned in the first opening, and four ends of the cross-shaped carrying end correspond to the suspended ends of the four first carrying beams in the first opening respectively.
Preferably, the utility model also provides a preparation method of many cantilevers heat bimetal driver, include:
s1, preparing a first plate material and a second plate material with different thermal expansion coefficients;
s2, alternately stacking the first plate and the second plate along the vertical direction, and combining the plates of each layer into a whole to form an intermediate material sample module;
s3, cutting the intermediate sample die set along the vertical direction to obtain a bimetallic plate, wherein the bimetallic plate is formed by alternately arranging the active area and the passive area;
and S4, typesetting a processing layout corresponding to the multi-cantilever thermal bimetal driver structure on the bimetal plate, and shearing along the processing layout to obtain the multi-cantilever thermal bimetal driver.
Preferably, in the present invention, the first plate and the second plate are non-magnetic materials.
Preferably, in step S2, the present invention further includes performing surface treatment on the first plate and the second plate, and after the stacking operation of the first plate and the second plate is completed, combining the plates of each layer into a whole by using a rolling or diffusion welding method; in step S3, performing sand paper polishing on two side edges of the bimetal plate in the vertical direction, and performing surface treatment on the cut end surfaces of the bimetal plate; in step S4, a cutting process is performed along the process layout by a laser cutting, ion beam etching, or plasma etching process.
Preferably, the thickness of the bimetallic plate in the utility model is 50-200 μm; the diameter of the multi-cantilever bimetal actuator prepared in the steps S1-S4 is 2.5-3.5 mm.
(III) technical effects
The utility model provides a multi-cantilever thermal bimetal driver, which adopts the body prepared on the bimetal plate in batch, the body has an integrated structure, and the active area and the passive area on the body respectively correspond to the plate materials with two thermal expansion coefficients on the bimetal plate, when the active area and the adjacent passive area are respectively provided with a first opening and a second opening, a first carrying beam and a second carrying beam which are arranged in parallel can be formed on the body; each group of first carrying beams and second carrying beams which are arranged in parallel are divided into two parts by a connecting channel, and the first carrying beams and the second carrying beams which are arranged in parallel in each part are of cantilever type structures; because the thermal expansion coefficient of the first carrying beam is larger than that of the second carrying beam, when the multi-cantilever thermal bimetal actuator is heated, the first carrying beam and the second carrying beam can bend towards one side of the second carrying beam together, so that a compression driving position can be formed between each second carrying beam and the side wall, opposite to the second carrying beam, of the second opening respectively, and a sample can be carried at each compression driving position to carry out a compression experiment.
Meanwhile, based on the above characteristics of the multi-cantilever thermal bimetal driver, the first opening on the body, the number of the second openings and the arrangement positions of the second openings can be further set, so that different driving requirements are met, the multi-cantilever thermal bimetal driver is installed into the heating sample rod, and the multi-cantilever thermal bimetal driver is placed into the transmission electron microscope, and then the thermal deformation characteristics of the multi-cantilever thermal bimetal driver can be measured under the thermal field environment, four compression experiments for carrying samples are realized simultaneously, and the deformation process of the carrying samples is observed in real time based on the transmission electron microscope.
According to the above, the utility model discloses simple structure, preparation are convenient, can design the structure of driver as required in a flexible way to carry out batch preparation on bimetal flitch, not only do benefit to and satisfy different drive demands, realized mass production, owing to the bimetal driver formula structure as an organic whole that the preparation obtained, need not the viscose in the preparation process moreover, overcome the problem that current hot bimetal tensile driver only is applicable to low temperature TEM normal position mechanics experiment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a multi-cantilever compression driver according to embodiment 1 of the present invention;
fig. 2 is a schematic structural view of a multi-cantilever pull-press integrated driver according to embodiment 2 of the present invention;
fig. 3 is a schematic structural diagram of a multi-cantilever tension-bending integrated driver according to embodiment 3 of the present invention;
fig. 4 is a schematic structural diagram of the first sheet material and the second sheet material in step S1 according to embodiment 4 of the present invention;
fig. 5 is a schematic structural diagram of the intermediate sample module in step S2 according to embodiment 4 of the present invention;
fig. 6 is a schematic structural diagram of the bimetal plate in step S3 according to embodiment 4 of the present invention;
fig. 7 is a schematic structural diagram of layout processing in step S4 according to embodiment 4 of the present invention;
fig. 8 is a schematic structural diagram of a multi-cantilever thermal bimetal actuator manufactured in embodiment 4 of the present invention.
In the figure: 1-body, 2-first opening, 3-second opening, 4-active area, 5-passive area, 6-first carrying beam, 7-second carrying beam, 8-tensile driving position, 9-compressive driving position, 10-bending driving position, 11-connecting channel, 12-first carrying end, 13-second carrying end, 14-third carrying beam, 15-fourth carrying beam, 16- 'cross' carrying end, 17-first plate, 18-second plate, 19-intermediate material sample module, 20-bimetallic plate and 21-processing layout.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the case of the example 1, the following examples are given,
referring to fig. 1, the present embodiment provides a multi-cantilever thermal bimetal actuator, which includes a sheet-like body 1, and a first opening 2 and a second opening 3 formed on the body 1;
the body 1 comprises an active area 4 and passive areas 5 arranged at two sides of the active area 4, and the thermal expansion coefficient of the material adopted by the active area 4 is larger than that of the material adopted by the passive areas 5;
the active area 4 is provided with a first opening 2, each passive area 5 is provided with a second opening 3, and the two second openings 3 are symmetrically arranged on two sides of the first opening 2;
a connecting part between the first opening 2 and the passive area 5 is set as a first carrying beam 6, a connecting part between the second opening 3 and the active area 4 is set as a second carrying beam 7, and the first carrying beam 6 and the second carrying beam 7 are connected in parallel;
two opposite sides of the first opening 2 are respectively communicated with the second openings 3 on the corresponding sides through connecting channels 11; the first carrying beam 6 and the second carrying beam 7 are divided into two parts by a connecting channel 11, so that four first carrying beams 6 and four second carrying beams 7 are respectively arranged on the body 1.
Based on the structure, the body 1 is of an integrated structure, and after the first carrying beam 6 and the second carrying beam 7 on the body 1 are separated by the connecting channel 11, the body 1 is respectively provided with four cantilever type first carrying beams 6 and four cantilever type second carrying beams 7; because the thermal expansion coefficient of the first carrying beam 6 is greater than that of the second carrying beam 7, when the body 1 is placed in a thermal field environment, the first carrying beam 6 and the second carrying beam 7 bend towards one side of the second carrying beam 7 together, and four compression driving positions 9 are formed between the four second carrying beams 7 and the side wall of the second opening 3 opposite to the second carrying beam 7; thus, the multi-cantilever thermal bimetallic actuator of the present embodiment may also be referred to as a multi-cantilever compression actuator.
After the multi-cantilever thermal bimetal driver is installed into the heating sample rod and is placed into the transmission electron microscope, the compression experiment of four loaded tensile samples can be simultaneously realized according to the self thermal deformation characteristic of the multi-cantilever thermal bimetal driver under the thermal field environment, and the mechanical characteristic of the tensile samples can be observed in real time based on the transmission electron microscope.
Meanwhile, the body 1 formula structure as an organic whole of hot bimetal driver of many cantilevers, this embodiment, can realize carrying out batch preparation on bimetal flitch, it is convenient to prepare to low cost need not sticky in the preparation process, can be used to higher temperature, non-deformable when installing to heating sample pole simultaneously, can not cause the damage to the sample of carrying on like this.
Further, in order to realize that the multi-cantilever thermal bimetal actuator has a better double-shaft tilting function based on a transmission electron microscope, in this embodiment, the body 1 is designed to be in a circular structure (or the body 1 may be designed to be in a semi-circular structure); in order to ensure that the first carrying beam 6 and the second carrying beam 7 realize better bending deformation under the condition of being heated, the first opening 2 and the second opening 3 are both designed to be in a strip structure, and the first opening 2 and the second opening 3 are arranged in parallel.
Further, the connecting channel 11 is vertically disposed in the middle of the first opening 2 and the second opening 3 in this embodiment; the side walls of the two second openings 3 are respectively provided with a first carrying end 12 and a second carrying end 13 which are arranged opposite to the second carrying beam 7, and the first carrying end 12 and the second carrying end 13 are oppositely arranged at two ends of the connecting channel 11.
Referring to fig. 1, a connecting channel 11 vertically disposed in the middle of the first opening 2 and the second opening 3 divides each of the first carrying beams 6 and the second carrying beams 7 into two parts with the same length, and each of the first carrying beams 6 and the second carrying beams 7 is of a cantilever beam structure, wherein one end of each of the first carrying beams 6 and the second carrying beams 7, which is far away from the fixed side thereof, is a suspension end; by arranging the corresponding first carrying end 12 and second carrying end 13 at the two ends of the connecting channel 11, the suspending ends of the first carrying beam 6 and the second carrying beam 7 with four cantilever structures correspond to the corresponding first carrying end 12 and second carrying end 13 respectively; under the condition that the first carrying beam 6 and the second carrying beam 7 are heated, the suspended ends of the first carrying beam 6 and the second carrying beam 7 generate large bending deformation relative to the fixed ends thereof, and the suspended ends of the second carrying beam 7 can be just close to the corresponding first carrying end 12 or second carrying end 13 when the second carrying beam 7 is deformed, and form the corresponding compression driving position 9.
In the case of the example 2, the following examples are given,
referring to fig. 2, the present embodiment is based on embodiment 1, and is different in that a third mounting beam 14 is further provided in the first opening 2, the third mounting beam 14 divides the first opening 2 into two parts, and the third mounting beam 14 is parallel to the first mounting beam 6.
As can be seen from fig. 2, the body 1 is a circular plate structure, and the two first carrying beams 6 and the two second carrying beams 7 are respectively divided into four cantilever-type structures by the connecting channel 11, so that four compression driving positions 9 can be correspondingly arranged between the suspension ends of the four cantilever-type structures and the first carrying ends 12 and the second carrying ends 13; moreover, since the third carrying beam 14 is further provided in the first opening 2, when the suspending ends of the first carrying beam 6 and the second carrying beam 7 are bent toward one side of the second carrying beam 7, the suspending end of the first carrying beam 6 is inevitably separated from the third carrying beam 14, so that four stretching drive positions 8 can be provided between the suspending ends of the four first carrying beams 6 and the third carrying beam 14; therefore, the multi-cantilever thermal bimetal actuator of the embodiment can be called as a multi-cantilever pull-press integrated actuator.
In the case of the example 3, the following examples are given,
referring to fig. 3, the present embodiment is based on embodiment 1, and is different in that a fourth mounting beam 15 is further provided in the connection passage 11 in the present embodiment; two ends of a fourth carrying beam 15 are respectively connected with a first carrying end 12 and a second carrying end 13, and the middle part of the fourth carrying beam 15 is provided with a cross-shaped carrying end 16; the cross-shaped carrying end 16 is positioned in the first opening 2, and four ends of the cross-shaped carrying end 16 respectively correspond to the suspended ends of the four first carrying beams 6 in the first opening 2.
As can be seen from fig. 3, the body 1 has a circular plate structure, when heated, because the first carrying beam 6 and the second carrying beam 7 are both cantilevered structures, and the number of cantilevered structures is four, when the suspended end of each cantilevered structure bends at the side facing the second carrying beam 7, they inevitably will also separate and bend relative to two adjacent end portions vertically arranged on the cross-shaped carrying end 16, so that the multi-cantilever bimetal actuator of the present embodiment can be provided with four tensile driving positions 8, four compressive driving positions 9 and four bending driving positions 10; therefore, the multi-cantilever thermal bimetal actuator of the embodiment can be called a multi-cantilever tension-bending integrated actuator.
In the case of the example 4, the following examples are given,
the embodiment specifically provides a method for manufacturing a multi-cantilever thermal bimetal actuator based on the above embodiments 1 to 3, and the method includes:
s1, preparing a first plate 17 and a second plate 18, where the first plate 17 and the second plate 18 have the same structure and are both square plates, the thicknesses of the first plate 17 and the second plate 18 are set according to actual requirements, and the coefficient of thermal expansion of the material used for the first plate 17 is greater than that of the material used for the second plate 18, as shown in fig. 4;
s2, respectively carrying out surface treatment on the first plate material 17 and the second plate material 18, alternately stacking the first plate material 17 and the second plate material 18 after the surface treatment along the vertical direction, and combining the plate materials of all layers into a whole by adopting a rolling or diffusion welding method to form an intermediate material sample module 19, referring to fig. 5, it should be pointed out that the step should ensure that the bonding strength between the plate materials of all layers is enough to bear the temperature rise of S3-S4 during cutting, etching and application, and simultaneously should keep the flatness of all the plate materials as much as possible so as to facilitate the subsequent dimension measurement and drawing of a cutting/etching processing layout;
s3, cutting the intermediate sample die set 19 along the vertical direction to obtain a bimetallic plate 20, as shown in fig. 6, wherein the bimetallic plate 20 is formed by alternately arranging an active area 4 and a passive area 5; because any cutting mode can reduce the bonding strength near the section, the affected areas on the two sides are taken into consideration when the thickness of the section is selected, and enough unaffected areas are reserved, so that after the cutting is finished, the two sides of the bimetallic plate 20 in the vertical direction need to be sanded to eliminate the affected areas, and the surface treatment (polishing) is carried out on the cutting end surface (the unaffected areas) of the bimetallic plate 20;
s4, typesetting a processing layout 21 corresponding to the multi-cantilever thermal bimetal driver structure on the bimetal plate 20, referring to fig. 7, cutting along the processing layout 21 by laser cutting, ion beam etching or plasma etching, wherein the cutting precision is less than or equal to +/-20 μm, and releasing in batch to obtain the multi-cantilever thermal bimetal driver, referring to fig. 8; the structure shown in fig. 8 is the multi-cantilever compression driver described in embodiment 1 of the present invention.
Further, in this embodiment, the first plate 17 and the second plate 18 are made of non-magnetic materials, so that the finished product does not affect the electron beam of the transmission electron microscope in the experiment; in addition, it should be noted that the selection of the first plate 17 and the second plate 18 is not limited to the single metal or the alloy material, as long as the dual metal plate 20 made of the first plate 17 and the second plate 18 satisfies the functional requirements (thermal expansion characteristics and mechanical characteristics) of the utility model, for the convenience of introduction, the scheme of the utility model discloses in still continue to use this concept of multi-cantilever thermal dual metal driver.
Further, the thickness of the bimetallic plate 20 in the embodiment is 50-200 μm, so as to be matched with a TEM sample rod in a TEM in-situ mechanical experiment; the multi-cantilever thermal bimetal actuator prepared in the steps S1-S4 has a body diameter of 2.5-3.5 mm.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (7)
1. A multi-cantilever thermal bimetal actuator is characterized in that,
comprises a body, a first opening and a second opening which are arranged on the body;
the body comprises an active area and passive areas arranged on two sides of the active area, and the coefficient of thermal expansion of the material adopted by the active area is greater than that of the material adopted by the passive areas;
the active area is provided with the first opening, the passive area is provided with the second opening, a connecting part between the first opening and the passive area is set as a first carrying beam, a connecting part between the second opening and the active area is set as a second carrying beam, and the first carrying beam and the second carrying beam are connected in parallel;
the two opposite sides of the first opening are respectively communicated with the second openings on the corresponding sides through connecting channels; the first carrying beam and the second carrying beam are divided into two parts by the connecting channel;
and a compression driving position is formed between each second carrying beam and the side wall of the second opening opposite to the second carrying beam.
2. The multi-cantilever bimetal actuator of claim 1, wherein the body is in a circular or semi-circular plate configuration, the first and second openings are in a strip configuration, and the first and second openings are arranged parallel to each other.
3. The multi-cantilever bimetal actuator of claim 2, wherein the active region defines one first opening, each of the passive regions defines one second opening, and the two second openings are symmetrically disposed on two sides of the first opening.
4. The multi-cantilever bimetal actuator of claim 3, wherein the connecting channel is disposed vertically in the middle of the first opening and the second opening; two be equipped with respectively on the second open-ended lateral wall and carry on the end with the second relatively that the second carries on the roof beam and arrange, just first carry on the end with the second carries on the end and arranges relatively connect the both ends of passageway.
5. The multi-cantilever thermal bimetal actuator of claim 3, wherein a third carrier beam is further disposed in the first opening, the third carrier beam divides the first opening into two parts, and the third carrier beam is parallel to the first carrier beam.
6. The multi-cantilever bimetal actuator of claim 4, wherein a fourth carrier beam is further disposed in the connecting channel; two ends of the fourth carrying beam are respectively connected with the first carrying end and the second carrying end, and the middle part of the fourth carrying beam is provided with a cross-shaped carrying end; the cross-shaped carrying end is positioned in the first opening, and four ends of the cross-shaped carrying end correspond to the suspended ends of the four first carrying beams in the first opening respectively.
7. The multi-cantilever bimetal actuator of claim 2, wherein the body has a thickness of 50 to 200 μm and a diameter of 2.5 to 3.5 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920792424.4U CN210110702U (en) | 2019-05-29 | 2019-05-29 | Multi-cantilever thermal bimetal driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920792424.4U CN210110702U (en) | 2019-05-29 | 2019-05-29 | Multi-cantilever thermal bimetal driver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210110702U true CN210110702U (en) | 2020-02-21 |
Family
ID=69563340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920792424.4U Withdrawn - After Issue CN210110702U (en) | 2019-05-29 | 2019-05-29 | Multi-cantilever thermal bimetal driver |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210110702U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299274A (en) * | 2019-05-29 | 2019-10-01 | 北京工业大学 | A kind of more cantilever thermo bimetal drivers and preparation method thereof |
-
2019
- 2019-05-29 CN CN201920792424.4U patent/CN210110702U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299274A (en) * | 2019-05-29 | 2019-10-01 | 北京工业大学 | A kind of more cantilever thermo bimetal drivers and preparation method thereof |
| CN110299274B (en) * | 2019-05-29 | 2024-04-12 | 北京工业大学 | Multi-cantilever thermal bimetal driver and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Zhu et al. | A review of microelectromechanical systems for nanoscale mechanical characterization | |
| CN104502202A (en) | Online material biaxial static-dynamic performance test platform under service temperature | |
| Kang et al. | In situ thermomechanical testing methods for micro/nano-scale materials | |
| WO2017054782A1 (en) | Transmission electron microscope dual-tilt in-situ nanoindentation platform | |
| CN204255775U (en) | Material twin shaft static and dynamic performance on-line testing platform under service temperature | |
| US20200132574A1 (en) | Tem electromechanical in-situ testing method of one-dimensional materials | |
| CN210110702U (en) | Multi-cantilever thermal bimetal driver | |
| Mehrabi et al. | A novel design and fabrication of a micro-gripper for manipulation of micro-scale parts actuated by a bending piezoelectric | |
| CN108760438B (en) | Preparation method of in-situ mechanical tensile sample of transmission electron microscope | |
| CN104764660A (en) | Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope | |
| CN209963018U (en) | Thermal bimetal tension-compression integrated driver | |
| CN210571726U (en) | Thermal bimetal stretching driver | |
| Elhebeary et al. | Lessons learned from nanoscale specimens tested by MEMS-based apparatus | |
| CN110243679B (en) | Thermal bimetal stretching driver and preparation method thereof | |
| Yong et al. | Mechanical design of high-speed nanopositioning systems | |
| CN110299274B (en) | Multi-cantilever thermal bimetal driver and preparation method thereof | |
| CN210571725U (en) | In-situ stretching device | |
| Elhebeary et al. | Design, simulation, and testing of a novel bending stage for mechanical characterization of materials | |
| Ozaki et al. | Biaxial flexure testing of free-standing thin film membrane with nanoindentation system | |
| Namazu et al. | Tension–Torsion Combined Loading Test Equipment for a Minute Beam Specimen | |
| CN105223055A (en) | For the original position stretching sample and preparation method thereof of transmission electron microscope | |
| CN113237733B (en) | In-situ force thermoelectric multi-field coupling test chip and preparation method thereof | |
| Li et al. | Advances on in situ TEM mechanical testing techniques: A retrospective and perspective view | |
| Koo et al. | Design and application of a novel in situ nano-manipulation stage for transmission electron microscopy | |
| CN108572106B (en) | In-situ composite loading and measuring device for micro-nano sample |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20200221 Effective date of abandoning: 20240412 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20200221 Effective date of abandoning: 20240412 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |