CN210036600U - Grating ruler detection device - Google Patents
Grating ruler detection device Download PDFInfo
- Publication number
- CN210036600U CN210036600U CN201921212987.8U CN201921212987U CN210036600U CN 210036600 U CN210036600 U CN 210036600U CN 201921212987 U CN201921212987 U CN 201921212987U CN 210036600 U CN210036600 U CN 210036600U
- Authority
- CN
- China
- Prior art keywords
- guide rail
- grating
- horizontal guide
- sliding table
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 11
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 238000009827 uniform distribution Methods 0.000 claims description 7
- 230000007704 transition Effects 0.000 claims description 6
- 239000000872 buffer Substances 0.000 claims description 4
- 239000010438 granite Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 18
- 238000005259 measurement Methods 0.000 abstract description 11
- 230000009471 action Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Images
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The utility model discloses a grating ruler detection device, which comprises a horizontal guide rail and an air-float slide block; a first scale grating is arranged on the left side wall surface of the horizontal guide rail, and a first grating reading head is arranged on the air floatation sliding block; a second scale grating is arranged on the right side wall surface of the horizontal guide rail, and a second grating reading head is arranged on the air floatation sliding block; a lifting platform is arranged at the front end of the horizontal guide rail, a laser interferometer is arranged on the lifting platform, and a reflecting mirror of the laser interferometer is arranged on the air floatation sliding block; the right side of the upper part of the horizontal guide rail is provided with a plurality of clamping mechanisms which are distributed along the front-back direction and are used for clamping the scale grating of the grating ruler to be detected. According to the grating ruler detection device, the second grating displacement sensor and the laser interferometer which are formed by the second scale grating and the second grating reading head are used as measurement standards for detecting the grating ruler to be detected, and then the precision and the error of the grating ruler to be detected can be detected.
Description
Technical Field
The utility model belongs to the technical field of the grating chi detects, concretely relates to grating chi detection device.
Background
Grating scales, also known as grating scale displacement sensors, are measurement feedback devices that operate using the optical principle of gratings. The grating ruler is often applied to a closed-loop servo system of a numerical control machine tool and can be used for linear displacement detection. Because the grating ruler is mostly used for displacement detection, in order to ensure the accuracy of displacement measurement, the precision and the measurement error of the grating ruler need to be detected before the grating ruler leaves a factory or is used.
Therefore, it is necessary to provide a device capable of detecting the precision and error of the grating ruler to ensure the accuracy of displacement measurement.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough of above-mentioned prior art, provide a grating chi detection device.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a grating ruler detection device comprises a horizontal guide rail and an air-floating slide block which is arranged on the horizontal guide rail and can move back and forth along the horizontal guide rail;
a first scale grating extending along the front-back direction is arranged on the left side wall surface of the horizontal guide rail, and a first grating reading head matched with the first scale grating is arranged on the air floatation sliding block;
a second scale grating extending along the front-back direction is arranged on the right side wall surface of the horizontal guide rail, and a second grating reading head matched with the second scale grating is arranged on the air floatation sliding block;
a lifting platform is arranged at the front end of the horizontal guide rail, a laser interferometer is arranged on the lifting platform, and a reflecting mirror of the laser interferometer is arranged on the air floatation sliding block;
and a plurality of clamping mechanisms which are distributed along the front-back direction and are used for clamping the scale grating of the grating ruler to be detected are arranged on the right side of the upper part of the horizontal guide rail.
Preferably, the air-floating slide block comprises a main sliding table matched with the top end surface of the horizontal guide rail, a left sliding table matched with the left end surface of the horizontal guide rail is vertically and fixedly arranged at the left end of the main sliding table downwards, and a right sliding table matched with the right end surface of the horizontal guide rail is vertically and fixedly arranged at the right end of the main sliding table downwards;
a plurality of air flow holes are formed in the left side and the right side of the bottom end face of the main sliding table, the right end face of the left sliding table and the left end face of the right sliding table; the end face of each sliding table provided with the airflow hole is provided with an air inlet hole communicated with the airflow hole on the sliding table, and the air inlet hole is connected with air supply equipment through a pipeline;
the left side and the right side of the bottom end face of the main sliding table and the left end face of the right sliding table are provided with adsorption grooves, air outlets are formed in the adsorption grooves, exhaust holes communicated with the air outlets in the sliding table are formed in the end face of each sliding table provided with the air outlets, and the exhaust holes are connected with a vacuumizing device through pipelines.
Preferably, the periphery of the end part of the airflow hole on the main sliding table and the left sliding table is provided with a first airflow uniform distribution groove which is vertically communicated with the airflow hole and is of a cross structure.
Preferably, a second airflow uniform distribution groove communicated with the airflow holes is formed in the left end face of the right sliding table.
Preferably, the air-floating sliding block is connected with a linear motor, and the air-floating sliding block slides and is locked along the horizontal guide rail under the driving of the linear motor.
Preferably, the clamping mechanism comprises an L-shaped clamping seat, and the right-angle edge at the bottom of the L-shaped clamping seat is fixedly connected with the horizontal guide rail; two connecting lug plates are symmetrically arranged on the right end surface of the L-shaped clamping seat, and an angle adjusting piece is rotatably connected between the two connecting lug plates;
the middle part of the angle adjusting part is rotatably connected with one end of the transition part, the other end of the transition part is rotatably connected with the two support legs of the angle adjusting handle, and the end parts of the two support legs of the angle adjusting handle are respectively rotatably connected with the corresponding connecting lug plates;
the upper part of the angle adjusting piece is provided with a clamping screw rod, and the end part of the clamping screw rod is provided with a clamping block; and clamping nuts are arranged on the clamping screws on the two sides of the angle adjusting piece.
Preferably, the front end and the rear end of the horizontal guide rail are both provided with anti-collision buffers for reducing vibration.
Preferably, the crash cushion is an oil hydraulic pipe cushion.
Preferably, the bottom of the horizontal guide rail is provided with a plurality of jacks which are uniformly distributed and used for adjusting the levelness of the horizontal guide rail.
Preferably, the horizontal guide rail is made of granite materials.
The utility model has the advantages that:
(1) according to the grating ruler detection device, the second grating displacement sensor and the laser interferometer which are formed by the second scale grating and the second grating reading head are used as measurement standards for detecting the grating ruler to be detected, and then the precision and the error of the grating ruler to be detected can be detected.
(2) According to the grating ruler detection device, an air film with stable thickness can be formed between the air-floating sliding block and each matching surface of the horizontal guide rail, so that frictionless contact between the air-floating sliding block and the horizontal guide rail is realized; meanwhile, the linear motor is adopted to drive the air-floating slide block to move along the horizontal guide rail, so that high-precision and high-stability linear motion almost without friction can be realized; meanwhile, a grating scale displacement sensor consisting of the first scale grating and the first grating reading head can accurately reflect displacement data, so that closed-loop control is realized, and the positioning precision is high.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
Fig. 1 is a schematic perspective view of the structure of the grating ruler detection device of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1;
fig. 3 is a left side view of the structure of the grating ruler detection device of the present invention;
FIG. 4 is a partial enlarged view of B in FIG. 3;
FIG. 5 is a first schematic structural view of the air-floating slider of the present invention;
FIG. 6 is a second schematic structural view of the air-floating slider of the present invention;
FIG. 7 is a schematic perspective view of the clamping mechanism of the present invention;
FIG. 8 is a schematic left side view of the clamping mechanism of the present invention;
wherein,
1-horizontal guide rail, 101-guide rail groove;
2-an air-floating slide block, 201-a main slide table, 202-a left slide table, 203-a right slide table, 204-an air flow hole, 205-an adsorption groove, 206-an air outlet hole, 207-a first air flow uniform distribution groove and 208-a second air flow uniform distribution groove;
3-a first scale grating, 4-a first grating reading head, 5-a second scale grating, 6-a second grating reading head, 7-a lifting platform and 8-a laser interferometer;
9-clamping mechanism, 901-L-shaped clamping seat, 902-connecting lug plate, 903-angle adjusting piece, 904-transition piece, 905-angle adjusting handle, 906-clamping screw rod, 907-clamping block and 908-clamping nut;
10-a linear motor;
11-a crash cushion;
12-jack.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
In the present invention, the terms such as "front", "back", "left", "right", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, and only for convenience of describing the relationship term determined by the structural relationship of each component or element of the present invention, which is not specific to any component or element of the present invention, which is not to be construed as a limitation of the present invention.
In the present invention, terms such as "connected" and "connected" should be understood in a broad sense, and may be either fixedly connected or integrally connected or detachably connected; may be directly connected or indirectly connected through an intermediate. The meaning of the above terms in the present invention can be determined according to specific situations by persons skilled in the art, and should not be construed as limiting the present invention.
The present invention will be further explained with reference to the drawings and examples.
As shown in fig. 1-4, a grating ruler detection device includes a horizontal guide rail 1 and an air-floating slider 2 disposed on the horizontal guide rail 1 and capable of moving back and forth along the horizontal guide rail 1;
a first scale grating 3 extending along the front-back direction is arranged on the left side wall surface of the horizontal guide rail 1, and a first grating reading head 4 matched with the first scale grating 3 is arranged on the air-floating slide block 2; wherein, a first grating displacement sensor composed of a first scale grating 3 and a first grating reading head 4 is used for closed-loop feedback;
a second scale grating 5 extending in the front-back direction is arranged on the right side wall surface of the horizontal guide rail 1, and a second grating reading head 6 matched with the second scale grating 5 is arranged on the air-floating slide block 2; when a low-precision grating ruler is detected, a second grating displacement sensor consisting of a second ruler grating 5 and a second grating reading head 6 is used as a measurement standard for detecting the grating ruler to be detected, and after the air floatation slide block 2 is in place, the difference is made between the collected reading of the grating ruler to be detected and the reading of the second grating displacement sensor, so that the error of the grating ruler to be detected is calculated; the second grating displacement sensor is used as a measurement standard for detecting the grating ruler to be detected, and the measured Abbe error is small because the second grating displacement sensor is close to the grating ruler to be detected;
a lifting platform 7 is arranged at the front end of the horizontal guide rail 1, a laser interferometer 8 is arranged on the lifting platform 7, and a reflecting mirror of the laser interferometer 8 is arranged on the air floatation sliding block 2;
a plurality of clamping mechanisms 9 which are distributed along the front-back direction and used for clamping the grating ruler to be detected are arranged on the right side of the upper part of the horizontal guide rail 1; during detection of the tool, a reading head of the grating ruler to be detected is fixedly arranged on the air floatation slide block 2, and the grating ruler to be detected is fixedly clamped on the right side of the upper part of the horizontal guide rail 1.
Preferably, as shown in fig. 5 to 6, the air-floating slider 2 includes a main sliding table 201 which is matched with the top end surface of the horizontal guide rail 1, a left sliding table 202 which is matched with the left end surface of the horizontal guide rail 1 is vertically and fixedly arranged at the left end of the main sliding table 201 downward, and a right sliding table 203 which is matched with the right end surface of the horizontal guide rail 1 is vertically and fixedly arranged at the right end of the main sliding table 201 downward;
a plurality of air flow holes 204 are formed in the left side and the right side of the bottom end face of the main sliding table 201, the right end face of the left sliding table 202 and the left end face of the right sliding table 203; the end face of each sliding table provided with the airflow hole 204 is provided with an air inlet communicated with the airflow hole 204 on the sliding table, and the air inlet is connected with air supply equipment through a pipeline, wherein the air supply equipment is an air compressor;
the left and right sides of main slip table 201 bottom end face, be provided with on the left end face of right side slip table 203 and adsorb groove 205, be provided with venthole 206 on adsorbing groove 205, all be provided with the exhaust hole that is linked together with venthole 206 on the slip table of place on the terminal surface of each slip table that is provided with venthole 206, the exhaust hole passes through the pipeline and is connected with evacuating device.
When the air floatation slide rail is used, air enters between the air floatation slide table 2 and each matching surface of the horizontal guide rail 1 through the air inlet holes and the air flow holes 204 by external air supply equipment, so that air films are formed between the bottom end surface of the main slide table 201 and the top end surface of the horizontal guide rail 1, between the right end surface of the left slide table 202 and the left end surface of the horizontal guide rail 1, and between the left end surface of the right slide table 203 and the right end surface of the horizontal guide rail 1, and the air films can float the air floatation slide block 2; meanwhile, the gas in the adsorption groove 205 is sucked away along the air outlet 206 and the exhaust hole under the action of the external vacuum pumping device to form vacuum, the main sliding table 201 and the right sliding table 203 are sucked towards the horizontal guide rail 1 under the action of vacuum adsorption, meanwhile, the gas at each matching surface can be sprayed out from the side surface of the air-floating slide block 2 and the position with a cutter groove, and after the air entering and exhausting at each matching surface reaches the required balance, the thickness of the air film between each end surface is not changed any more, so that the friction-free contact between the air-floating slide block 2 and the horizontal guide rail 1 is realized.
Preferably, the peripheries of the end parts of the airflow holes 204 on the main sliding table 201 and the left sliding table 202 are provided with first airflow uniform distribution grooves 207 which are vertically communicated with the airflow holes 204 and are in a cross structure; the gas of the gas supply device is sprayed out from the air floatation surface of the left sliding table 202 along the gas inlet holes and the gas flow holes 204, and the gas sprayed out from the gas flow holes 204 realizes the function of distributing the gas flow through the first gas flow distributing groove 207, so that the gas is quickly and uniformly distributed on the whole air floatation surface.
Preferably, a second airflow uniform distribution groove 208 communicated with the airflow hole 204 is arranged on the left end surface of the right sliding table 203; the second air flow distribution groove 208 is in a rectangular structure.
Preferably, the air-floating slide block 2 is connected with a linear motor 10, and the air-floating slide block 2 slides and is locked along the horizontal guide rail 1 under the driving of the linear motor 10; wherein, the linear motor stator of the linear motor 10 is fixedly arranged in the guide rail groove 101 extending along the front-back direction on the top end surface of the horizontal guide rail 1, and the linear motor rotor of the linear motor is fixedly arranged on the air-floating slide block 2. The linear motor 10, the first scale grating 3 and the first grating reading head 4 form closed loop feedback together, after the linear motor drives the air-floating slide block 2 to reach a position, the first grating displacement sensor feeds back the current position in real time, if the position is not reached, the position is compared with a target point according to the currently collected position, and the linear motor 10 drives the air-floating slide block 2 to slide again until the position reaches the target point.
Preferably, as shown in fig. 7-8, the clamping mechanism 9 includes an L-shaped clamping seat 901, and a bottom right-angle side of the L-shaped clamping seat 901 is fixedly connected with the horizontal guide rail 1; two connecting lug plates 902 are symmetrically arranged on the right end face of the L-shaped clamping seat 901, and an angle adjusting piece 903 is rotatably connected between the two connecting lug plates 902;
the middle part of the angle adjusting piece 903 is rotatably connected with one end of a transition piece 904, the other end of the transition piece 904 is rotatably connected with two legs of an angle adjusting handle 905, and the end parts of the two legs of the angle adjusting handle 905 are respectively rotatably connected with corresponding connecting ear plates 902;
the upper part of the angle adjusting piece 903 is provided with a clamping screw 906, the end part of the clamping screw 906 is provided with a clamping block 907, and when the angle adjusting piece is used, a scale grating of a grating ruler to be measured is clamped between the clamping block 907 and a vertical right-angle side of the L-shaped clamping seat 901; clamping nuts 908 are arranged on the clamping screw 906 on both sides of the angle adjusting element 903.
When the grating ruler to be measured needs to be clamped, firstly, the angle of the clamping surface of the clamping block 907 needs to be adjusted, so that the clamping surface of the clamping block 907 is parallel to the contact surface of the grating ruler to be measured; when adjusting, the right end of the angle adjusting handle 905 is pushed up or down to swing the angle adjusting element 903 leftwards or rightwards.
Preferably, the front and rear ends of the horizontal guide rail 1 are provided with crash cushions 11 for reducing vibration.
Preferably, the crash cushion 11 is a hydraulic tube cushion.
Preferably, a plurality of jacks 12 which are uniformly distributed and used for adjusting the levelness of the horizontal guide rail 1 are arranged at the bottom of the horizontal guide rail 1.
Preferably, the horizontal guide rail 1 is made of granite materials; the granite has the advantages of small expansion coefficient, high hardness, high precision, good machinability and the like.
A grating ruler detection device has the following specific implementation mode:
firstly, clamping a scale grating of a grating ruler to be measured on a horizontal guide rail 1 through a clamping mechanism 9, and arranging a reading head of the grating ruler to be measured on an air-floating slide block 2;
then after the linear motor 10 drives the air-floating slide block 2 to reach the position, the first scale grating 3 and the first grating reading head 4 perform real-time feedback on the current position through the first grating displacement sensor, if the position is not reached, the current collected position is compared with a target point, and the linear motor 10 drives the air-floating slide block 2 to slide again until the position reaches the target point;
when a low-precision grating scale is detected, a second grating displacement sensor consisting of a second scale grating 5 and a second grating reading head 6 is used as a measurement standard for detecting the grating scale to be detected; after the position is reached, the difference is made between the collected reading of the grating ruler to be detected and the reading of the second grating displacement sensor, so that the error and the precision of the grating ruler to be detected are calculated;
when detecting a high-precision grating scale, a laser interferometer 8 at the front end of a horizontal guide rail is used as a measurement reference; during measurement, the grating ruler to be detected and the laser light path are collinear to meet the Abbe error, and the difference is made between the collected reading of the grating ruler to be detected and the reading of the laser interferometer, so that the error and the precision of the grating ruler to be detected are obtained.
Although the present invention has been described with reference to the accompanying drawings, it is not intended to limit the present invention, and those skilled in the art should understand that, based on the technical solution of the present invention, various modifications or variations that can be made by those skilled in the art without inventive labor are still within the scope of the present invention.
Claims (10)
1. A grating ruler detection device is characterized by comprising a horizontal guide rail and an air-floating slide block which is arranged on the horizontal guide rail and can move back and forth along the horizontal guide rail;
a first scale grating extending along the front-back direction is arranged on the left side wall surface of the horizontal guide rail, and a first grating reading head matched with the first scale grating is arranged on the air floatation sliding block;
a second scale grating extending along the front-back direction is arranged on the right side wall surface of the horizontal guide rail, and a second grating reading head matched with the second scale grating is arranged on the air floatation sliding block;
a lifting platform is arranged at the front end of the horizontal guide rail, a laser interferometer is arranged on the lifting platform, and a reflecting mirror of the laser interferometer is arranged on the air floatation sliding block;
and a plurality of clamping mechanisms which are distributed along the front-back direction and are used for clamping the scale grating of the grating ruler to be detected are arranged on the right side of the upper part of the horizontal guide rail.
2. The optical grating ruler detection device as claimed in claim 1, wherein the air-floating slider comprises a main sliding table which is matched with the top end surface of the horizontal guide rail, a left sliding table which is matched with the left end surface of the horizontal guide rail is vertically and fixedly arranged at the left end of the main sliding table downwards, and a right sliding table which is matched with the right end surface of the horizontal guide rail is vertically and fixedly arranged at the right end of the main sliding table downwards;
a plurality of air flow holes are formed in the left side and the right side of the bottom end face of the main sliding table, the right end face of the left sliding table and the left end face of the right sliding table; the end face of each sliding table provided with the airflow hole is provided with an air inlet hole communicated with the airflow hole on the sliding table, and the air inlet hole is connected with air supply equipment through a pipeline;
the left side and the right side of the bottom end face of the main sliding table and the left end face of the right sliding table are provided with adsorption grooves, air outlets are formed in the adsorption grooves, exhaust holes communicated with the air outlets in the sliding table are formed in the end face of each sliding table provided with the air outlets, and the exhaust holes are connected with a vacuumizing device through pipelines.
3. The device according to claim 2, wherein the peripheries of the end portions of the airflow holes on the main sliding table and the left sliding table are provided with first airflow distribution grooves which are vertically communicated with the airflow holes and have a cross-shaped structure.
4. The optical grating ruler detection device as claimed in claim 2, wherein a second air flow uniform distribution groove communicated with the air flow holes is arranged on the left end surface of the right sliding table.
5. The optical grating ruler detection device as claimed in claim 1, wherein the air-floating slider is connected to a linear motor, and the air-floating slider slides and locks along a horizontal guide rail under the driving of the linear motor.
6. The grating ruler detection device as claimed in claim 1, wherein the clamping mechanism comprises an L-shaped clamping seat, and a bottom right-angle side of the L-shaped clamping seat is fixedly connected with the horizontal guide rail; two connecting lug plates are symmetrically arranged on the right end surface of the L-shaped clamping seat, and an angle adjusting piece is rotatably connected between the two connecting lug plates;
the middle part of the angle adjusting part is rotatably connected with one end of the transition part, the other end of the transition part is rotatably connected with the two support legs of the angle adjusting handle, and the end parts of the two support legs of the angle adjusting handle are respectively rotatably connected with the corresponding connecting lug plates;
the upper part of the angle adjusting piece is provided with a clamping screw, the end part of the clamping screw is provided with a clamping block, and when the angle adjusting piece is used, a scale grating of a grating ruler to be measured is clamped between the clamping block and a vertical right-angle side of the L-shaped clamping seat; and clamping nuts are arranged on the clamping screws on the two sides of the angle adjusting piece.
7. The apparatus according to claim 1, wherein the front and rear ends of the horizontal rail are provided with anti-collision buffers for reducing vibration.
8. The apparatus according to claim 7, wherein the anti-collision buffer is an oil hydraulic tube buffer.
9. The grating ruler detection device as claimed in claim 1, wherein the bottom of the horizontal guide rail is provided with a plurality of jacks uniformly distributed for adjusting the levelness of the horizontal guide rail.
10. The grating ruler detection device of claim 1, wherein the horizontal guide rail is made of granite material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921212987.8U CN210036600U (en) | 2019-07-30 | 2019-07-30 | Grating ruler detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921212987.8U CN210036600U (en) | 2019-07-30 | 2019-07-30 | Grating ruler detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210036600U true CN210036600U (en) | 2020-02-07 |
Family
ID=69350389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921212987.8U Active CN210036600U (en) | 2019-07-30 | 2019-07-30 | Grating ruler detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210036600U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112461126A (en) * | 2020-11-05 | 2021-03-09 | 广东工业大学 | Measuring system and method of double-reading head absolute grating ruler and related equipment |
| CN113654793A (en) * | 2021-08-30 | 2021-11-16 | 浙江稳越智能科技有限责任公司 | Self-locking linear guide rail channel detection device |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
| CN113790654A (en) * | 2021-10-08 | 2021-12-14 | 东风（武汉）汽车零部件有限公司 | Automobile threshold spare detects uses positioner and examines utensil |
| CN114485413A (en) * | 2021-12-24 | 2022-05-13 | 上海羿弓精密科技有限公司 | Ultra-high precision displacement measuring device |
| CN114518068A (en) * | 2020-11-20 | 2022-05-20 | 微正股份有限公司 | Double-reading head optical ruler ball rod and measured value processing method thereof |
| CN114577103A (en) * | 2021-09-28 | 2022-06-03 | 长光（沧州）光栅传感技术有限公司 | Magnetic grid precision calibration detection device and detection method thereof |
-
2019
- 2019-07-30 CN CN201921212987.8U patent/CN210036600U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112461126A (en) * | 2020-11-05 | 2021-03-09 | 广东工业大学 | Measuring system and method of double-reading head absolute grating ruler and related equipment |
| CN112461126B (en) * | 2020-11-05 | 2023-01-03 | 广东工业大学 | Measuring system and method of double-reading head absolute grating ruler and related equipment |
| CN114518068A (en) * | 2020-11-20 | 2022-05-20 | 微正股份有限公司 | Double-reading head optical ruler ball rod and measured value processing method thereof |
| CN113654793A (en) * | 2021-08-30 | 2021-11-16 | 浙江稳越智能科技有限责任公司 | Self-locking linear guide rail channel detection device |
| CN113654793B (en) * | 2021-08-30 | 2024-03-15 | 丽水学院 | Self-locking linear guide rail channel detection device |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
| CN113776439B (en) * | 2021-09-07 | 2022-09-27 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
| CN114577103A (en) * | 2021-09-28 | 2022-06-03 | 长光（沧州）光栅传感技术有限公司 | Magnetic grid precision calibration detection device and detection method thereof |
| CN114577103B (en) * | 2021-09-28 | 2023-09-08 | 长光（沧州）光栅传感技术有限公司 | Magnetic grid precision calibration detection method |
| CN113790654A (en) * | 2021-10-08 | 2021-12-14 | 东风（武汉）汽车零部件有限公司 | Automobile threshold spare detects uses positioner and examines utensil |
| CN114485413A (en) * | 2021-12-24 | 2022-05-13 | 上海羿弓精密科技有限公司 | Ultra-high precision displacement measuring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210036600U (en) | Grating ruler detection device | |
| CN210290493U (en) | Air floatation motion guide rail device | |
| CN110142647B (en) | Device and method for measuring steady-state performance of hydrostatic guideway in real time | |
| CN108214423B (en) | Motion platform for OLED detection equipment | |
| CN100461365C (en) | High precision silicon slice bench and uses thereof | |
| JP5797942B2 (en) | Error compensation system using encoder feedback, error mapping, and pneumatic control | |
| CN108592839B (en) | Ultra-precise three-coordinate test platform | |
| CN208620995U (en) | A kind of testing for level difference machine with positioning function | |
| CN107514986A (en) | A kind of calibrating device for displacement sensor based on air floating platform | |
| CN207197480U (en) | A kind of calibrating device for displacement sensor based on air floating platform | |
| CN104400763A (en) | Gas lubrication and friction damping composition type high-rigidity and high-stability two-dimensional adjusting workbench | |
| CN101746711B (en) | H-shaped two-dimensional ultraprecise worktable structure | |
| CN2932619Y (en) | High-precision silicon table | |
| CN210757607U (en) | Two-dimensional precision micro-motion workbench with double displacements | |
| CN210268535U (en) | Grating length measuring device | |
| CN105157661A (en) | Large travel submicron plane precision measuring system | |
| CN210452424U (en) | Workpiece positioning equipment | |
| CN107214530B (en) | Ultra-precise air floatation positioning platform | |
| CN104400374B (en) | Two frames coplanar guide type aligning method and apparatus of stator alignment measurement is turned for aero-engine | |
| CN213021492U (en) | Automatic calibrating device for steel ruler | |
| JP2017013210A (en) | Biaxial positioning stage apparatus | |
| CN211221114U (en) | Five-axis linkage machining center's workstation structure | |
| CN103900482B (en) | Injection machine matched moulds thrust bearing straight-line displacement device for accurately measuring and installation method thereof | |
| CN103217505B (en) | SMT screen plate detection device | |
| CN106626451A (en) | L-shaped composite material component pavement forming mold and operation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |