CN209940828U - Furnace cover for quartz glass deposition furnace - Google Patents
Furnace cover for quartz glass deposition furnace Download PDFInfo
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- CN209940828U CN209940828U CN201920754115.8U CN201920754115U CN209940828U CN 209940828 U CN209940828 U CN 209940828U CN 201920754115 U CN201920754115 U CN 201920754115U CN 209940828 U CN209940828 U CN 209940828U
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Abstract
The utility model discloses a furnace cover for a quartz glass deposition furnace, which is used for isolating and protecting the deposition furnace, and comprises an upper cover body, a feeding hole and an operation window, wherein the upper cover body is arranged outside the top of the deposition furnace and used for isolating a burner of the deposition furnace; the lower cover body is provided with a mounting hole and a fire observation window, is arranged outside the side wall of the deposition furnace and is used for isolating the furnace body of the deposition furnace; the exhaust mechanism is arranged outside the upper cover body and the lower cover body and used for exhausting tail gas in the upper cover body and the lower cover body; the upper cover body is positioned above the lower cover body, and the bottom end of the upper cover body is connected with the top end of the lower cover body; and a gap is formed between the inner wall of the lower cover body and the side wall of the furnace body of the deposition furnace. The furnace cover also comprises an air supplementing mechanism which is used for supplementing air to the interior of the upper cover body and the lower cover body. The utility model provides a furnace cover for quartz glass deposition furnace has solved the problem of site environment heat loss and hydrogen chloride gas diffusion, has improved the production environment, has reduced the harm to equipment and personnel.
Description
Technical Field
The utility model relates to a synthetic quartz glass prepares technical field, especially relates to an use silicon tetrachloride as the raw materials, oxyhydrogen flame hydrolysis preparation quartz glass's furnace mantle for depositing furnace.
Background
In the process of producing the quartz glass by the hydrogen-oxygen flame hydrolysis method of the silicon tetrachloride, a large amount of heat is released due to the combustion of hydrogen and oxygen, and meanwhile, the silicon tetrachloride is hydrolyzed to generate hydrogen chloride corrosive gas. If the measures are improper, a large amount of heat and hydrogen chloride are dissipated to the production environment, and the formed high-temperature and corrosive gas not only influences the stability of production equipment, but also causes severe corrosion to plants and facilities, and increases the maintenance cost. Even more so, it will cause personal health injury to the production personnel.
Originally, only lightweight insulating materials, such as alumina insulating bricks, were used as the outer layer material of the deposition furnace. Although the heat preservation effect is better, the sealing performance is poor, the furnace body cracks along with the increase of the number of used furnaces, and the overflow of the hydrogen chloride is more and more serious. In order to solve the problem, technicians design and manufacture a furnace cover to cover the furnace body, the furnace cover surrounds the furnace body to avoid the overflow of gas around the furnace body, but the problem of sealing at the mounting hole of a burner is not solved, the generated hydrogen chloride gas can still overflow from the top of the furnace body due to the lack of a gas collecting device, and the furnace cover is made of 304 stainless steel and is difficult to resist the corrosion of the hydrogen chloride. The temperature of the furnace cover is high, the highest temperature reaches more than 100 ℃, and operators are easily scalded while a large amount of heat is radiated outwards.
SUMMERY OF THE UTILITY MODEL
The utility model provides a furnace cover for quartz glass deposition furnace, which solves the problems of heat dissipation and hydrogen chloride gas diffusion of the site environment, improves the production environment and reduces the harm to the equipment and the personnel.
The utility model adopts the technical proposal that:
a furnace cover for a quartz glass deposition furnace, which is used for carrying out isolation protection on the deposition furnace, and comprises:
the upper cover body is provided with a feeding hole and an operation window, is arranged on the outer side of the top of the deposition furnace and is used for isolating a burner of the deposition furnace from the field environment;
the lower cover body is provided with a mounting hole and a fire observation window, is arranged outside the side wall of the deposition furnace and is used for isolating the furnace body of the deposition furnace; and
the exhaust mechanism is arranged outside the upper cover body and the lower cover body and used for exhausting tail gas in the upper cover body and the lower cover body;
the lower cover body is positioned below the upper cover body, and the top end of the lower cover body is connected with the bottom end of the upper cover body; and a gap is formed between the inner wall of the lower cover body and the side wall of the furnace body of the deposition furnace.
Further, the furnace cover also comprises an air supply mechanism for supplying air to the interior of the upper cover body and the lower cover body.
Furthermore, exhaust mechanism includes last exhaust pipe, lower exhaust pipe and exhaust system, the one end and the upper cover body lateral wall of last exhaust pipe are connected, and the other end is connected with exhaust system, the one end of lower exhaust pipe is connected with lower cover body lateral wall respectively, and the other end is connected with exhaust system.
Furthermore, one end of the upper exhaust pipe is connected with the middle part of the side wall of the upper cover body, the number of the lower exhaust pipes is three, two of the lower exhaust pipes are oppositely arranged in the middle part of the side wall of the circumference of the lower cover body, and the other exhaust pipe is positioned on the upper part of the side wall of the circumference of the lower cover body and staggered with the two lower exhaust pipes which are oppositely arranged by an angle of 90 degrees.
Furthermore, the air supply mechanism comprises an air inlet pipe and an air inlet hole, one end of the air inlet pipe is connected with the lower portion of the side wall of the upper cover body, the other end of the air inlet pipe is exposed in the field environment, and the air inlet hole is located below the side wall of the lower cover body.
Furthermore, the two air inlet pipes are oppositely arranged below the side wall of the upper cover body and staggered from the upper air outlet pipe by 90 degrees.
Further, the diameter of the air inlet hole is 30-60 mm.
Furthermore, the pipelines of the air inlet pipe, the upper exhaust pipe and the lower exhaust pipe are provided with adjustable valves.
Further, the distance between the inner wall of the lower cover body and the side wall of the furnace body of the deposition furnace is 30-100 mm.
Furthermore, an upper meter hole is formed in the upper cover body, and a laser positioning hole, a lower meter hole and a temperature measuring hole are formed in the lower cover body.
The utility model has the advantages that:
(1) in the utility model, the furnace cover is made of corrosion-resistant metal material and can bear the corrosion of hydrogen chloride gas in the deposition furnace;
(2) in the utility model, the furnace cover is divided into an upper cover body and a lower cover body, the position of the opening and the connecting position of each pipeline are optimized, the layout design is reasonable,
(3) in the utility model, the operation window arranged in the middle of the upper cover body can comprehensively observe the combustion condition of the equipment burner in the furnace;
(4) in the utility model, the deposition reaction condition in the deposition furnace can be accurately observed through the fire observation window of the lower furnace cover, and the deposition lifting mechanism can be adjusted in real time by matching with the laser position measuring hole;
(5) in the utility model, the upper and lower temperatures of the deposition part can be accurately monitored through the temperature measuring holes;
(6) in the utility model, the air inlet and outlet pipelines at each position of the upper cover body and the lower cover body can meet the requirement of gas flow in the furnace, and provide air input and exhaust tail gas in the furnace cover and the deposition furnace to the maximum extent;
(7) in the utility model, each exhaust pipeline of the upper cover body and the lower cover body leads the negative pressure in the furnace cover through the exhaust system, and the pressure is supplemented through each intake pipe and the intake hole to form gas flow;
(8) the utility model discloses in, each inlet port of lower furnace mantle lower extreme can in time supplement the gas that lacks in the cover through optimal design.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic view of a mounting structure of a furnace hood in the prior art.
Fig. 2 is a schematic view of the installation structure of the furnace hood of the present invention.
Fig. 3 is a schematic view of the installation structure of the furnace cover at another angle in the present invention.
Fig. 4 is a schematic view of the exploded structure of the furnace cover of the present invention.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention.
Embodiments of the present invention/utility model will be described in detail below with reference to the drawings.
The prior art furnace cover, as shown in fig. 1, includes a cylindrical cover body 100, a feeding hole 101 is arranged on the top of the cover body, and is attached to the surface of the furnace body part of the deposition furnace (the furnace body part of the deposition furnace is not shown in the figure, and only the burner part is shown), and the burner 200 is exposed outside the cover body 100 and above the feeding hole 101. The housing 100 itself is machined from 304 stainless steel. Although the structure surrounds the furnace body and avoids the overflow of gas around the furnace body, the structure does not solve the problems of the burner 200 and the sealing of the feed inlet 101, and has the following defects:
1. the furnace cover material has poor corrosion resistance, is easy to corrode, and has reduced service performance and service life;
2. the reaction heat dissipation intensity is high, and the temperature rise of the furnace cover and the environment is high;
3. the hydrogen chloride gas generated by the reaction is easy to overflow from the top of the furnace body due to the lack of a gas collecting device;
4. the furnace cover is affected by heat radiation, the surface temperature of the furnace cover is higher and is more than 100 ℃, and workers are easily scalded.
In order to solve the above technical problems, the present embodiment provides a furnace cover for a quartz glass deposition furnace, as shown in fig. 2 to 4, which includes an upper cover body 1 and a lower cover body 2. The upper cover body 1 and the lower cover body 2 are stacked up and down to form a closed whole, the whole deposition furnace is covered in the closed whole, then tail gas generated in the production process, particularly hydrogen chloride gas and heat diffused by a furnace body are taken away through the exhaust mechanism and are treated in a centralized manner, gas supplement can be carried out in the upper cover body 1 and the lower cover body 2 by the gas supplement mechanism, meanwhile, the internal pressure of the upper cover body and the lower cover body is supplemented, and meanwhile, gas in the furnace cover flows, so that the problems of heat loss of the site environment and hydrogen chloride gas diffusion are solved, the production environment is improved, and the harm to equipment and personnel is reduced. Meanwhile, the upper cover body 1 and the lower cover body 2 are made of corrosion-resistant metal materials, such as aluminum, 316L stainless steel and Hastelloy, so that the corrosion of the upper cover body and the corrosion of the lower cover body can be lower than that of hydrogen chloride gas, and the service life is prolonged.
Specifically, in the present embodiment, the upper cover 1 is a cylindrical shape with a top and without a bottom, and may be replaced with other shapes according to design requirements. The upper cover body 1 is arranged outside the top of the deposition furnace and covers the burner into the interior of the deposition furnace for isolation protection.
A feed hole 11 is arranged in the center of the top of the upper cover body 1, and is used for a production raw material pipeline to reach the top of the deposition furnace through the feed hole 11 and be connected with a burner 200 (the furnace body part of the deposition furnace is not shown in the figure), and a gap between the production raw material pipeline and the feed hole 11 is sealed by a sealing material.
An upper exhaust pipe 12 is arranged in the middle of the circumferential side wall of the upper cover body 1. One end of the upper exhaust pipe 12 is communicated with the inside of the upper cover body 1, and the other end of the upper exhaust pipe is connected with an air draft system such as an induced draft fan for exhaust emission.
An openable operation window 14 is provided on a circumferential side wall of the upper cover 1 opposite to a connection portion of the exhaust pipe 12 with the upper cover 1. The operation window 14 is used when an operator enters the upper cover body 1 to operate, high-temperature-resistant sealing materials are laid around the window, and glass is installed in the window to be used as a window, so that the operator can observe the condition in the upper cover body 1 conveniently.
A plurality of upper instrument holes 15 are further formed in the circumferential side wall of the upper cover body 1 and used for mounting a pressure detection instrument, a temperature detector and the like and measuring parameters such as pressure and temperature in the upper cover body 1.
In this embodiment, the lower cover body 2 is located the lower part of the upper cover body 1, the diameter is the same as that of the upper cover body 1, the top end of the lower cover body is connected with the bottom end of the upper cover body 1 through a flange, the whole lower cover body is cylindrical without a top end, and the lower cover body can be replaced by other shapes and sizes according to design requirements, so that the connection stability and the sealing performance of the upper cover body 1 and the lower cover body 2 are guaranteed. The lower cover body 2 is connected with a deposition furnace body part, the distance between the inner wall of the lower cover body and the outer surface of the deposition furnace is 30-100 mm, and the deposition furnace body part is isolated and protected.
The central position of the top of the lower cover body 2 is provided with a mounting hole 21, the diameter of the mounting hole 21 is far larger than the maximum size of the cross section of the furnace body part of the deposition furnace, and the inner areas of the upper cover body 1 and the lower cover body 2 are communicated, so that the diffusion of gas and heat is facilitated.
Three lower exhaust pipes 22 are arranged on the circumferential side wall of the lower cover body 2, wherein two lower exhaust pipes 22 are oppositely arranged in the middle of the circumferential side wall of the lower cover body 2, and the other lower exhaust pipe is positioned on the upper part of the circumferential side wall of the lower cover body 2 and is staggered with the two lower exhaust pipes 22 which are oppositely arranged by 90 degrees. The one end of lower exhaust pipe 22 and the inside conduction of cover body 2 down, the other end is connected with exhaust system for example the draught fan for exhaust emissions.
A lower exhaust pipe 22 is arranged on the upper part of the circumferential side wall of the lower cover body 2, and a fire observation window 23 is arranged on the middle upper part of the circumferential side wall of the lower cover body 2 and used for observing the reaction deposition state of the deposition furnace in the cover. After the upper cover body 1 and the lower cover body 2 are assembled, the operation window 14 and the observation window 23 are positioned in the same vertical axis direction.
The circumferential side wall of the lower cover body 2 on the same horizontal plane with the observation window 23 is provided with a laser positioning hole 24 for installing a laser detector to detect the horizontal deviation of the deposition position of the deposition furnace.
And a lower instrument hole 25 is formed in the circumferential side wall of the lower cover body 2 near the upper end of the laser positioning hole 24 and used for installing a pressure detection instrument and testing the pressure in the lower furnace body 2.
An upper temperature measuring hole 26 and a lower temperature measuring hole 26 are arranged on the circumferential side wall of the lower cover body 2 corresponding to the lower instrument hole 25 and used for detecting the temperature change in the furnace.
A plurality of air inlet holes 27 are formed in the circumferential direction below the circumferential side wall of the lower cover body 2, the diameter of each air inlet hole 27 is 30-60 mm, and the air inlet holes are used for supplementing air in the lower cover body 2, enabling the air in the lower cover body 2 to flow, taking away heat and hydrogen chloride gas in the lower cover body 2 and discharging the heat and the hydrogen chloride gas, and treating the discharged hydrogen chloride gas in a centralized mode.
In this embodiment, in order to control the intake air amount and the extraction air amount, an adjustable valve 3 is provided on a connection pipe of the intake pipe 13, the upper exhaust pipe 12, and the lower exhaust pipe 22.
Compared with the prior art, the furnace cover in the embodiment comprises:
(1) the furnace body facility is safer and more reliable, and the burner is positioned in the equipment and is not directly exposed outside any more;
(2) the reaction heat quantity diffused to the working environment in the production process is reduced by more than 60 percent;
(3) the leakage amount of hydrogen chloride gas leaked from the furnace body to the working environment is zero in the production process;
(4) the design of the furnace cover is more reasonable, the production environment is improved, and the furnace cover does not corrode production equipment facilities any more.
Claims (10)
1. The furnace cover for the quartz glass deposition furnace is used for isolating and protecting the deposition furnace and is characterized in that: the furnace cover comprises
The upper cover body is provided with a feeding hole and an operation window, is arranged outside the top of the deposition furnace and is used for isolating a burner of the deposition furnace;
the lower cover body is provided with a mounting hole and a fire observation window, is arranged outside the side wall of the deposition furnace and is used for isolating the furnace body of the deposition furnace; and
the exhaust mechanism is arranged outside the upper cover body and the lower cover body and used for exhausting tail gas in the upper cover body and the lower cover body;
the lower cover body is positioned below the upper cover body, and the top end of the lower cover body is connected with the bottom end of the upper cover body; and a gap is formed between the inner wall of the lower cover body and the side wall of the furnace body of the deposition furnace.
2. The furnace cover for the quartz glass deposition furnace according to claim 1, wherein: the furnace cover also comprises an air supplementing mechanism which is used for supplementing air to the interior of the upper cover body and the lower cover body.
3. The mantle for a quartz glass deposition furnace according to claim 2, wherein: the exhaust mechanism comprises an upper exhaust pipe, a lower exhaust pipe and an air draft system, one end of the upper exhaust pipe is connected with the side wall of the upper cover body, the other end of the upper exhaust pipe is connected with the air draft system, one end of the lower exhaust pipe is connected with the side wall of the lower cover body respectively, and the other end of the lower exhaust pipe is connected with the air draft system.
4. The mantle for a quartz glass deposition furnace according to claim 3, wherein: one end of the upper exhaust pipe is connected with the middle part of the side wall of the upper cover body, the number of the lower exhaust pipes is three, two lower exhaust pipes are oppositely arranged in the middle part of the circumferential side wall of the lower cover body, and the other lower exhaust pipe is positioned at the upper part of the circumferential side wall of the lower cover body and staggered with the two lower exhaust pipes which are oppositely arranged by 90 degrees.
5. The mantle for a quartz glass deposition furnace according to claim 4, wherein: the air supply mechanism comprises an air inlet pipe and an air inlet hole, one end of the air inlet pipe is connected with the lower portion of the side wall of the upper cover body, the other end of the air inlet pipe is exposed in the field environment, and the air inlet hole is located below the side wall of the lower cover body.
6. The furnace cover for the quartz glass deposition furnace according to claim 5, wherein: the two air inlet pipes are oppositely arranged below the side wall of the upper cover body and staggered from the upper air outlet pipe by 90 degrees.
7. The furnace cover for the quartz glass deposition furnace according to claim 5, wherein: the diameter of the air inlet hole is 30-60 mm.
8. The furnace cover for the quartz glass deposition furnace according to claim 5, wherein: and the pipelines of the air inlet pipe, the upper exhaust pipe and the lower exhaust pipe are provided with adjustable valves.
9. The furnace cover for the quartz glass deposition furnace according to claim 1, wherein: the distance between the inner wall of the lower cover body and the side wall of the deposition furnace body is 30-100 mm.
10. The furnace cover for the quartz glass deposition furnace according to claim 1, wherein: the upper cover body is provided with an upper instrument hole, and the lower cover body is provided with a laser positioning hole, a lower instrument hole and a temperature measuring hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920754115.8U CN209940828U (en) | 2019-05-23 | 2019-05-23 | Furnace cover for quartz glass deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920754115.8U CN209940828U (en) | 2019-05-23 | 2019-05-23 | Furnace cover for quartz glass deposition furnace |
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| Publication Number | Publication Date |
|---|---|
| CN209940828U true CN209940828U (en) | 2020-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920754115.8U Active CN209940828U (en) | 2019-05-23 | 2019-05-23 | Furnace cover for quartz glass deposition furnace |
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| CN (1) | CN209940828U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113277716A (en) * | 2021-05-27 | 2021-08-20 | 四川神光石英科技有限公司 | Equipment for producing high-quality synthetic quartz glass |
-
2019
- 2019-05-23 CN CN201920754115.8U patent/CN209940828U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113277716A (en) * | 2021-05-27 | 2021-08-20 | 四川神光石英科技有限公司 | Equipment for producing high-quality synthetic quartz glass |
| CN113277716B (en) * | 2021-05-27 | 2022-06-03 | 四川神光石英科技有限公司 | Equipment for producing high-quality synthetic quartz glass |
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Address after: 610000 floor 2, No. 9, Jianshe South Street, Chenghua District, Chengdu, Sichuan Patentee after: Shenguang Optical Group Co.,Ltd. Address before: 621700 science and Technology Incubation Park, south section of Chuangyuan Road, Jiangyou Industrial Park, Mianyang City, Sichuan Province Patentee before: SICHUAN SHENGUANG QUARTZ TECHNOLOGY CO.,LTD. |