CN209934385U - Tail gas treatment device - Google Patents
Tail gas treatment device Download PDFInfo
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- CN209934385U CN209934385U CN201920205759.1U CN201920205759U CN209934385U CN 209934385 U CN209934385 U CN 209934385U CN 201920205759 U CN201920205759 U CN 201920205759U CN 209934385 U CN209934385 U CN 209934385U
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Abstract
The utility model relates to a tail gas treatment device, which comprises a tail gas inlet, a vacuum pump, a condensation recoverer and a tail gas absorber which are connected through a gas pipe, and the tail gas treatment device also comprises a filter pressing system and a feeding device; the filter pressing system comprises a first booster pump, an online filter pressing device, a second booster pump, a buffer tank and a circulating pump which are sequentially connected through an air pipe; the feeding device comprises a liquid level alarming and automatic water supplementing device, a metering pump and an automatic alkali adding device, the metering pump, the automatic alkali adding device and the tail gas absorber are connected through an air pipe, and the liquid level alarming and automatic water supplementing device is connected with the tail gas absorber through the air pipe. The device effectively reduces the production cost, simultaneously reduces the treatment pressure, achieves good treatment effect, and the content of hydrogen selenide in the tail gas treated by the tail gas treatment device is far lower than the national emission standard.
Description
Technical Field
The utility model relates to an environmental protection field especially relates to a tail gas processing apparatus for handling hydrogen selenide tail gas.
Background
Chemical Vapor Deposition (CVD) grown zinc selenide has excellent fracture strength and hardness, which makes it common for military applications, especially in the 8-12 micron spectrum. Because of its high resistance to erosion by rain, high-speed dust and particle wear, it is particularly suitable for use as an infrared window mounted on the outside of the aircraft fuselage.
The zinc selenide is produced by adopting a chemical vapor deposition method, the produced zinc selenide has high purity, high density and high optical performance, and hydrogen selenide gas is adopted as process gas in the production process. About 10% -20% of hydrogen selenide can enter a tail gas system in the chemical vapor deposition process, and because the hydrogen selenide gas belongs to weak acid highly toxic gas, and is expensive, easy to decompose and easy to form selenium particles, the hydrogen selenide gas has certain difficulty in treatment and can easily cause environmental pollution.
The utility model provides a tail gas processing apparatus for retrieving and handling hydrogen selenide tail gas reduces the manufacturing cost of zinc selenide, has still alleviateed the treatment pressure simultaneously, has reached fine treatment effect, and the tail gas of handling through this tail gas processing apparatus is far below national emission standard.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the difficult problem that prior art exists, provide a tail gas processing apparatus for handling hydrogen selenide tail gas.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a tail gas treatment device comprises a tail gas inlet, a vacuum pump, a condensation recoverer and a tail gas absorber which are connected through a gas pipe, and the tail gas treatment device also comprises a filter pressing system and a feeding device; the filter pressing system comprises a first booster pump, an online filter pressing device, a second booster pump, a buffer tank and a circulating pump which are sequentially connected through an air pipe; the feeding device comprises a liquid level alarming and automatic water supplementing device, a metering pump and an automatic alkali adding device, the metering pump, the automatic alkali adding device and the tail gas absorber are connected through an air pipe, and the liquid level alarming and automatic water supplementing device is connected with the tail gas absorber through the air pipe.
As a further improvement, the tail gas absorber comprises a Venturi absorption tower, a multistage absorption tower and a plurality of lye tanks, which are communicated with each other through a gas pipe.
As a further improvement, the circulating pump, the first booster pump and the second booster pump are all made of acid and alkali corrosion resistant materials.
As a further improvement of the utility model, the coolant of the condensation recoverer adopts alcohol or liquid nitrogen.
The utility model provides a tail gas processing apparatus for retrieving and handling hydrogen selenide tail gas, the device have reduced manufacturing cost effectively, have still alleviateed the processing pressure simultaneously, have reached fine treatment effect, and hydrogen selenide content is far below national emission standard in the tail gas of this tail gas processing apparatus processing.
Drawings
Fig. 1 is the overall structure schematic diagram of the tail gas treatment device of the present invention.
Fig. 2 is a schematic structural diagram of the tail gas absorber of the tail gas treatment device of the present invention.
Detailed Description
The technical solutions described below are clearly and completely described in conjunction with the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, a tail gas treatment device 100 includes a tail gas inlet 110, a vacuum pump 120, a condensation recoverer 130, and a tail gas absorber 140 connected by a gas pipe 170, and the tail gas treatment device 100 further includes a filter pressing system 150 and a feeding device 160.
The filter pressing system 150 comprises a first booster pump 151, an on-line filter pressing device 152, a second booster pump 153, a buffer tank 154 and a circulating pump 155 which are sequentially connected through an air pipe 170. In some embodiments of the present invention, the circulating pump 155, the first pressurizing pump 151, and the second pressurizing pump 153 are made of acid-base corrosion-resistant material.
The feeding device 160 comprises a liquid level alarming and automatic water replenishing device 161, a metering pump 162 and an automatic alkali adding device 163, wherein the metering pump 162, the automatic alkali adding device 163 and the tail gas absorber 140 are connected through an air pipe 170, and the liquid level alarming and automatic water replenishing device 161 is connected with the tail gas absorber 140 through the air pipe 170.
Referring to fig. 2, the tail gas absorber 140 includes a venturi absorption tower 141, a multi-stage absorption tower 142 and a plurality of lye tanks 143, and the venturi absorption tower 141, the multi-stage absorption tower 142 and the plurality of lye tanks 143 are communicated with each other through an air pipe 170.
The venturi absorption tower 141 is used for separating a part of dust and absorbing a part of hydrogen selenide gas, and the dust and a part of hydrogen selenide gas in the tail gas can be effectively removed by adopting the venturi absorption tower because the tail gas contains fine particles such as part of zinc selenide, selenium, zinc and the like.
The multistage absorption tower 142 is used for absorbing hydrogen selenide gas, the multistage absorption tower can adopt a packed tower, a plate tower and the like, one-stage or multistage series connection can be adopted for absorption according to the amount of tail gas, and the number of layers of the tower is also designed and selected according to the absorption amount. The absorption liquid of the multistage absorption tower adopts sodium hydroxide solution.
Because the boiling point of the hydrogen selenide is-42 ℃, a proper coolant can be selected to condense and recover the hydrogen selenide in the tail gas from the vacuum pump 120 in the condensation recoverer 130, the dosage of the coolant in the condensation recoverer 130 can be calculated according to the content of the hydrogen selenide in the tail gas, and the coolant in the condensation recoverer 130 adopts alcohol, liquid nitrogen or other coolants according to different concentrations. In some embodiments of the present invention, the condensate recoverer 130 is made of corrosion-resistant stainless steel, and the sealing performance thereof needs to be considered.
The liquid level alarm and automatic water supply system 161 realizes automatic water supply and alarm for the lye tank, a liquid level alarm is arranged in the lye tank 143, when the liquid level in the lye tank 143 is lower than an alarm value, automatic water supply for tap water is started, and when the liquid level reaches a liquid level line, the automatic water supply stops supplying water.
The filter pressing system 150 is used for automatically filtering and press-filtering the particles in the alkali liquor. The alkali liquor in the alkali liquor tank 143 enters the online filter pressing device 152 through the first booster pump 151, the well-filtered alkali liquor enters the buffer tank 154 through the second booster pump 153, the buffer tank 154 returns to the alkali liquor tank 143 through the circulating pump 155, and the alkali liquor tank 143 is communicated with a communicating vessel to prevent overflowing.
Example 1.
In the chemical vapor deposition furnace, part of hydrogen selenide gas reacts with zinc vapor to generate zinc selenide, part of unreacted hydrogen selenide gas enters a tail gas inlet 110 along with tail gas, the hydrogen selenide in the tail gas accounts for 10% of the mass fraction of the tail gas, the flow of the tail gas is 300L/min, the hydrogen selenide enters a condensation recoverer 130 through a vacuum pump 120 to be condensed and recovered, a coolant adopts alcohol, the cooling temperature is set to be-50 ℃, then the tail gas enters a Venturi absorption tower to be treated, is absorbed by a multistage absorption tower and is discharged after reaching the standard. The liquid level alarm device and the automatic water replenishing device are interlocked to act in the absorption process, so that the liquid level in the lye tank is ensured. Meanwhile, the filter pressing system 150 operates, alkali liquor in the alkali liquor tank enters the online filter pressing device 152 through the first booster pump 151, filtered liquid enters the buffer tank 154 through the second booster pump 153 after filter pressing, and returns to the inside of the alkali liquor tank through the circulating pump 155. The liquid level alarming and automatic water replenishing device 161 monitors the pH value in the lye tank on line, keeps the pH value above 12, immediately and automatically replenishes lye through the automatic lye adding device if the pH value is lower than 12, and automatically replenishes water through the liquid level alarming and automatic water replenishing device if the liquid level in the lye tank is lower than the alarm value. The hydrogen selenide content in the tail gas passing through the tail gas treatment device is lower than the emission standard, and the emission requirement is met.
Example 2.
In the chemical vapor deposition furnace, part of hydrogen selenide gas reacts with zinc vapor to generate zinc selenide, part of unreacted hydrogen selenide gas enters a tail gas inlet 110 along with tail gas, the mass fraction of hydrogen selenide in the tail gas is 15%, the tail gas flow is 500L/min, the hydrogen selenide gas enters a condensation recoverer 130 after passing through a vacuum pump 120 to be condensed and recovered, a coolant adopts alcohol, the cooling temperature is set to be-60 ℃, then the tail gas enters a Venturi absorption tower to be treated, is absorbed by a multistage absorption tower and is discharged after reaching the standard. The liquid level alarm device and the automatic water replenishing device are interlocked to act in the absorption process, so that the liquid level in the lye tank is ensured. Meanwhile, the filter pressing system 150 operates, alkali liquor in the alkali liquor tank enters the online filter pressing device 152 through the first booster pump 151, filtered liquid enters the buffer tank 154 through the second booster pump 153 after filter pressing, and returns to the inside of the alkali liquor tank through the circulating pump 155. The liquid level alarming and automatic water replenishing device 161 monitors the pH value in the lye tank on line, keeps the pH value above 13, immediately and automatically replenishes lye through the automatic lye adding device if the pH value is lower than 13, and automatically replenishes water through the liquid level alarming and automatic water replenishing device if the liquid level in the lye tank is lower than the alarm value. The hydrogen selenide content in the tail gas passing through the tail gas treatment device is lower than the emission standard, and the emission requirement is met.
Example 3.
In the chemical vapor deposition furnace, part of hydrogen selenide gas reacts with zinc vapor to generate zinc selenide, part of unreacted hydrogen selenide gas enters the tail gas inlet 110 along with tail gas, the hydrogen selenide in the tail gas accounts for 20% of the mass fraction of the tail gas, the flow of the tail gas is 450L/min, the hydrogen selenide enters the condensation recoverer 130 through the vacuum pump 120 to be condensed and recovered, the cooling agent adopts alcohol, the cooling temperature is set to be-55 ℃, then the tail gas enters the Venturi absorption tower to be treated, is absorbed by the multistage absorption tower and is discharged after reaching the standard. The liquid level alarm device and the automatic water replenishing device are interlocked to act in the absorption process, so that the liquid level in the lye tank is ensured. Meanwhile, the filter pressing system 150 operates, alkali liquor in the alkali liquor tank enters the online filter pressing device 152 through the first booster pump 151, filtered liquid enters the buffer tank 154 through the second booster pump 153 after filter pressing, and returns to the inside of the alkali liquor tank through the circulating pump 155. The liquid level alarming and automatic water replenishing device 161 monitors the pH value in the lye tank on line, keeps the pH value above 13, immediately and automatically replenishes lye through the automatic lye adding device if the pH value is lower than 13, and automatically replenishes water through the liquid level alarming and automatic water replenishing device if the liquid level in the lye tank is lower than the alarm value. The hydrogen selenide content in the tail gas passing through the tail gas treatment device is lower than the emission standard, and the emission requirement is met.
The utility model provides a tail gas processing apparatus for retrieving and handling hydrogen selenide tail gas, the device have reduced manufacturing cost effectively, have still alleviateed the processing pressure simultaneously, have reached fine treatment effect, and hydrogen selenide content is far below national emission standard in the tail gas of this tail gas processing apparatus processing.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
Claims (4)
1. The utility model provides a tail gas processing apparatus which characterized in that: the tail gas treatment device comprises a tail gas inlet, a vacuum pump, a condensation recoverer and a tail gas absorber which are connected through a gas pipe, and the tail gas treatment device also comprises a filter pressing system and a feeding device; the filter pressing system comprises a first booster pump, an online filter pressing device, a second booster pump, a buffer tank and a circulating pump which are sequentially connected through an air pipe; the feeding device comprises a liquid level alarming and automatic water supplementing device, a metering pump and an automatic alkali adding device, the metering pump, the automatic alkali adding device and the tail gas absorber are connected through an air pipe, and the liquid level alarming and automatic water supplementing device is connected with the tail gas absorber through the air pipe.
2. The exhaust gas treatment device according to claim 1, characterized in that: the tail gas absorber comprises a Venturi absorption tower, a multistage absorption tower and a plurality of lye tanks, and the Venturi absorption tower, the multistage absorption tower and the lye tanks are communicated with one another through air pipes.
3. The exhaust gas treatment device according to claim 1, characterized in that: circulating pump, first booster pump, second booster pump all adopt acid and alkali corrosion resistant material to prepare and form.
4. The exhaust gas treatment device according to claim 1, characterized in that: and the coolant of the condensation recoverer adopts alcohol or liquid nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920205759.1U CN209934385U (en) | 2019-02-18 | 2019-02-18 | Tail gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920205759.1U CN209934385U (en) | 2019-02-18 | 2019-02-18 | Tail gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209934385U true CN209934385U (en) | 2020-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920205759.1U Active CN209934385U (en) | 2019-02-18 | 2019-02-18 | Tail gas treatment device |
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| CN (1) | CN209934385U (en) |
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2019
- 2019-02-18 CN CN201920205759.1U patent/CN209934385U/en active Active
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200511 Address after: 239004 east of yongyang Road, west of Nanjing Road, north of Anqing road and south of Lu'an road in Langya Economic Development Zone, Langya District, Chuzhou City, Anhui Province Patentee after: Anhui Guangzhi Technology Co.,Ltd. Address before: 511517 Guangdong province Qingyuan Baijia Industrial Park 27-9B Patentee before: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2020990000439 Denomination of utility model: Tail gas treatment unit Granted publication date: 20200114 License type: Common License Record date: 20200821 |
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| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2022980005544 Denomination of utility model: Tail gas treatment unit Granted publication date: 20200114 License type: Common License Record date: 20220520 |
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| EE01 | Entry into force of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2020990000439 Date of cancellation: 20220413 |
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| EC01 | Cancellation of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2022980005544 Date of cancellation: 20230103 |
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| EC01 | Cancellation of recordation of patent licensing contract |