CN209868298U - Clamp for grinding reference surface of crystal bar - Google Patents
Clamp for grinding reference surface of crystal bar Download PDFInfo
- Publication number
- CN209868298U CN209868298U CN201822150008.2U CN201822150008U CN209868298U CN 209868298 U CN209868298 U CN 209868298U CN 201822150008 U CN201822150008 U CN 201822150008U CN 209868298 U CN209868298 U CN 209868298U
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- crystal bar
- cushion block
- fixed
- fixing
- reference surface
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Abstract
The utility model provides an anchor clamps for crystal bar grinding reference surface relates to wafer processing technology field. The method comprises the following steps: the clamping structure, the fixed cushion block and the base are arranged; the clamping structure is fixed on the base, an arc-shaped installation part matched with the shape of the crystal bar is arranged on the clamping structure, and the installation part is provided with an opening; the mounting part is provided with the fixed cushion block, and the fixed cushion block is connected with the base through a fixed assembly; and the fixed cushion block is provided with an arc-shaped mounting surface for contacting with the crystal bar. The surface contact with the crystal bar is realized, the contact area between the fixed cushion block and the crystal bar is increased, and the mechanical damage of the crystal bar is effectively reduced. The fixed cushion block is moved by moving the fixed assembly, the distance between the fixed cushion block and the crystal bar can be adjusted, and further locking or loosening is realized.
Description
Technical Field
The utility model relates to a wafer processing technology field particularly, relates to an anchor clamps that is used for crystal bar grinding reference surface.
Background
The circular wafer of the semiconductor substrate needs to determine the parameters of the wafer part through the reference edge during the processing and using process. The reference edge of the wafer is one or two planes which are ground in the designated direction of the cylindrical crystal bar before the wafer is sliced, and the plane is a reference plane; the reference surface forms a reference edge at each wafer after the wafer is diced. And a crystal bar clamp is required to be used for fixing the crystal bar in the process of grinding the reference surface.
As shown in figure 1, the conventional clamp adopts screws to fix a crystal bar in three directions, and the operation is complicated. The semiconductor crystal belongs to a brittle material, and the surface of the crystal bar can be damaged by fixing the semiconductor crystal by using a metal screw; and the screw made of PP or Teflon material is selected, so that the cost is increased, and screw marks can be remained on the surface of the crystal bar after grinding.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem of crystal bar anchor clamps fixed in-process mechanical damage crystal bar among the prior art, the utility model aims to provide a reduce the contact mechanical damage's of crystal bar in anchor clamps internal fixation process anchor clamps that are used for crystal bar grinding reference surface.
The embodiment of the utility model provides an anchor clamps for crystal bar grinding reference surface, include: the clamping structure, the fixed cushion block and the base are arranged;
the clamping structure is fixed on the base, an arc-shaped installation part matched with the shape of the crystal bar is arranged on the clamping structure, and the installation part is provided with an opening;
the mounting portion is provided with the fixed cushion block, the fixed cushion block is connected with the base through a fixed assembly, and an arc-shaped mounting surface used for being in contact with the crystal bar is arranged on the fixed cushion block.
Further, in a preferred embodiment of the present invention, the fixing assembly includes a spiral positioning element, one end of the spiral positioning element abuts against the fixing cushion block, and the other end of the spiral positioning element is spirally connected to the base;
the spiral positioning piece is rotated to drive the fixed cushion block to move in the normal direction of the installation part.
Further, in a preferred embodiment of the present invention, the fixing assembly further includes an elastic member, one end of the elastic member is fixedly connected to the fixing pad, and the other end of the elastic member is fixedly connected to the base.
Further, in a preferred embodiment of the present invention, the clamping structure is provided with a groove, and the fixing pad is disposed in the groove.
Further, in a preferred embodiment of the present invention, the fixing pad includes a connecting end and a connecting shaft connected to each other, and the connecting end is provided with the arc-shaped mounting surface;
the groove comprises a step structure and a through groove positioned in the center of the step structure, the fixed cushion block is assembled in the groove, and the connecting shaft is positioned in the through groove; the spiral positioning piece is assembled in the through groove and abuts against the connecting shaft.
Further, in a preferred embodiment of the present invention, the fixing pad is provided in plural, and plural fixing pads are arranged along an axial direction of the mounting portion.
Further, in a preferred embodiment of the present invention, a buffer layer is disposed on the mounting portion and/or the mounting surface of the fixing pad.
An embodiment of the utility model provides a pair of anchor clamps for crystal bar grinding reference surface, through set up on the installation department fixed cushion realizes the fixed action, need not set up the screw, moreover fixed cushion with the crystal bar contact surface sets up to arc installation face, realizes the face contact with the crystal bar, has increased fixed cushion with the area of contact of crystal bar has effectively reduced the mechanical damage of crystal bar. The fixed cushion block can move by moving the fixed assembly, so that the distance between the fixed cushion block and the crystal bar is adjusted, and further locking or loosening is realized.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a cross-sectional view of a clip provided in the prior art;
fig. 2 is a schematic structural diagram of a clamp according to an embodiment of the present invention;
fig. 3 is a sectional view taken along the line a-a of the clamp according to an embodiment of the present invention;
fig. 4 is a cross-sectional view taken along line B-B of a clamp according to an embodiment of the present invention;
fig. 5 is a bottom view of a clamp according to an embodiment of the present invention;
fig. 6 is a schematic view illustrating clamping of a boule clamp according to an embodiment of the present invention.
Reference numerals:
1 clamping structure 11 mounting part 12 groove 121 stepped structure 2 fixing cushion block
21 connecting end 22 connecting shaft 23 arc mounting surface 3 base 4 fixing assembly
41 spiral positioning piece 42 spring 5 buffer layer 6 screw 7 iron block 8 crystal bar
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and that for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
As shown in fig. 2 to 6, an embodiment of the present invention provides a fixture for grinding a reference surface of a crystal bar 8, including: the clamping structure 1, the fixed cushion block 2 and the base 3; the clamping structure 1 is fixed on the base 3, and in the embodiment, the base 3 and the clamping structure 1 are fixed by four screws 6 (as shown in fig. 5); an arc-shaped installation part 11 matched with the shape of the crystal bar 8 is arranged on the clamping structure 1, and the installation part 11 is provided with an opening; the mounting part 11 is provided with the fixed cushion block 2, the fixed cushion block 2 is connected with the base 3 through the fixed component 4, and the fixed cushion block 2 is provided with an arc-shaped mounting surface 23 for contacting with the crystal bar 8. The embodiment of the utility model provides a pair of anchor clamps for 8 grinding reference surfaces of crystal bar, through set up on the installation department 11 fixed cushion 2 realizes the fixed action, need not set up screw 6, moreover fixed cushion 2 with 8 contact surfaces of crystal bar set up to arc installation face 23, realize the curved surface cushion that has certain radian and crystal bar 8's face contact, increased fixed cushion 2 with crystal bar 8's area of contact has effectively reduced crystal bar 8's mechanical damage. The fixed cushion block 2 can move by moving the fixed assembly 4, so that the distance between the fixed cushion block 2 and the crystal bar 8 is adjusted, and further locking or loosening is realized.
As shown in fig. 3-6, in a preferred embodiment of the present invention, the fixing assembly 4 includes a spiral positioning element 41, one end of the spiral positioning element 41 abuts against the fixing cushion block 2, and the other end of the spiral positioning element 41 is spirally connected to the base 3; the fixed cushion block 2 is driven to move in the normal direction of the mounting portion 11 or the crystal bar 8 by rotating the spiral positioning piece 41. In another embodiment, one end of the spiral positioning element 41 may be spirally connected to the bottom of the fixed cushion block 2, and the nut end of the spiral positioning element 41 is spirally connected to the base 3, and the distance of the fixed cushion block 2 in the normal direction of the crystal rod 8 is adjusted by turning the spiral positioning element 41. The screw positioning member 41 in the above embodiment may be a locking screw.
As shown in fig. 3-6, in the clamp provided by an embodiment of the present invention, the fixing assembly 4 further includes an elastic member, one end of the elastic member is fixedly connected to the fixing pad 2, and the other end of the elastic member is fixedly connected to the base 3. As shown in fig. 3 and 4, a groove 12 is provided on the clamping structure 1, and the fixing pad 2 is disposed in the groove 12. The elastic member may be a spring 42, and two springs 42 are provided to be connected to the fixed block 2 in this embodiment. The spring 42 provides a pulling force on the fixing pad 2 towards the base 3, which ensures that the fixing pad 2 does not fall off and that the fixing pad 2 is confined in the rectangular recess 12 without external forces.
In the fixture for the grinding reference surface of the crystal bar 8 provided by the embodiment of the present invention, as shown in fig. 3, the fixing pad 2 includes a connecting end 21 and a connecting shaft 22 connected to each other, and the connecting end 21 is provided with the arc-shaped mounting surface 23; the groove 12 comprises a step structure 121 and a through groove positioned in the center of the step structure 121, the fixed cushion block 2 is assembled in the groove 12, and the connecting shaft 22 is positioned in the through groove; the spiral positioning element 41 is assembled in the through groove and abuts against the connecting shaft 22. When in use, the fixed cushion block 2 is contacted with the crystal bar 8 by rotating the spiral positioning piece 41, so that the crystal bar 8 is fixed.
In order to ensure that the crystal bar 8 is firmly clamped in the operation of the prior art, a user must ensure that the screws 6 are tightened. In order to reduce the mechanical damage of the crystal bar 8, the material of the screw 6 is PP or Teflon, and the screw 6 is abraded more highly in a high-strength fixing mode, so that the frequency of replacing the screw 6 is higher. Generally, one screw 6 needs to be replaced after about 50 times of service life (the data are related to the operation habits of operators), which is not beneficial to reducing the processing cost. According to the clamp for the crystal bar 8 grinding reference surface, provided by the embodiment of the invention, the mechanical abrasion of the fixed cushion block 2 is greatly reduced, and the service life of the fixed cushion block 2 is effectively prolonged. Further, in a preferred embodiment of the present invention, the screw positioning member 41 is a metal screw 6. The metal screw 6 is selected to replace the original PP material or Teflon material screw 6, the screw 6 does not need to be frequently replaced, and the processing cost is reduced.
For promoting the fixed effect of crystal bar 8 to promote its stability the utility model relates to an embodiment, fixed cushion 2 is provided with a plurality ofly, and is a plurality of fixed cushion 2 is followed the axial of installation department 11 is arranged, promotes the fixed stability of crystal bar 8. Different from the mode that needs a plurality of directions to fix among the prior art, in this embodiment in one direction fixed crystal bar 8 can, reduce the operation degree of difficulty, improve machining efficiency.
The clamping structure 1 is usually made of aluminum alloy, so that the mechanical strength of the clamp is ensured, and the weight of the clamp is reduced. The base 3 is generally made of cast iron, because most grinding machines use an electromagnetic fixture. The fixing cushion block 2 can be made of metal aluminum, a polishing pad and a black adhesive tape buffer layer 5 are bonded in the area of the arc-shaped mounting surface 23 of the fixing cushion block 2 and/or between the crystal bar 8 and the mounting portion 11, hard contact between the crystal bar 8 and a clamp is avoided, and mechanical damage is avoided.
The utility model provides an anchor clamps for 8 grinding reference surfaces of crystal bar, specific use is as follows:
as shown in fig. 6, the ingot 8 is clamped upside down on two equal-height precision iron blocks 78;
assembling the crystal bar 8 to be processed in the mounting part 11 from the circular end face side, and facing the reference surface to be ground of the crystal bar 8 to the opening side of the mounting part 11 by rotating the crystal bar 8 and using a positioning tool;
an internal hexagonal wrench is respectively used for fixing the spiral positioning pieces 41 on the base 3, so that the fixed cushion block 2 is completely contacted with the crystal bar 8, and the crystal bar 8 cannot be rotated by hands;
rechecking whether the position of the reference surface meets the processing requirements by using a positioning tool, and finishing the clamping of the crystal bar 8 after confirming that no error exists;
rotating the clamp provided with the crystal bar 8 by 180 degrees to enable the base 3 to be placed on a horizontal workbench downwards; preparing to carry out reference surface grinding;
after finishing the reference surface grinding, the ingot 8 is unloaded by loosening the screw positioner 41 with reference to the set position of fig. 6 for the ingot 8.
The fixing of anchor clamps and grinding machine is fixed according to the electromagnetism mode among the present scheme, and anchor clamps and grinding machine fixed mode probably are screw 6 locking in the in-service use, need make appropriate change to the base 3 of anchor clamps this moment, guarantee anchor clamps and the inseparable fixed of wearing the workstation.
In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, that is, the corresponding orientation when the air conditioner is normally installed. This is merely for convenience in describing the invention and to simplify the description and is not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation and is therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A fixture for grinding a reference surface of a crystal bar, comprising: the clamping structure, the fixed cushion block and the base are arranged;
the clamping structure is fixed on the base, an arc-shaped installation part matched with the shape of the crystal bar is arranged on the clamping structure, and the installation part is provided with an opening;
the mounting portion is provided with the fixed cushion block, the fixed cushion block is connected with the base through a fixed assembly, and an arc-shaped mounting surface used for being in contact with the crystal bar is arranged on the fixed cushion block.
2. The fixture for the reference surface of the crystal bar according to claim 1, wherein the fixing assembly comprises a spiral positioning piece, one end of the spiral positioning piece is abutted against the fixing cushion block, and the other end of the spiral positioning piece is spirally connected with the base;
the spiral positioning piece is rotated to drive the fixed cushion block to move in the normal direction of the installation part.
3. The fixture for the reference surface of the ingot grinding machine as claimed in claim 2, wherein the fixing assembly further comprises an elastic member, one end of the elastic member is fixedly connected with the fixing cushion block, and the other end of the elastic member is fixedly connected with the base.
4. The fixture for the crystal bar grinding reference surface according to claim 2, wherein the clamping structure is provided with a groove, and the fixing cushion block is arranged in the groove.
5. The fixture for the crystal bar grinding reference surface according to claim 4, wherein the fixing cushion block comprises a connecting end and a connecting shaft which are connected, and the arc-shaped mounting surface is arranged on the connecting end;
the groove comprises a step structure and a through groove positioned in the center of the step structure, the fixed cushion block is assembled in the groove, and the connecting shaft is positioned in the through groove; the spiral positioning piece is assembled in the through groove and abuts against the connecting shaft.
6. The jig for grinding a reference surface of a crystal bar according to claim 1, wherein the fixing pad block is provided in plurality, and the plurality of fixing pad blocks are arranged in the axial direction of the mounting portion.
7. The jig for grinding a reference surface of a boule according to claim 1, wherein a buffer layer is provided on the mounting portion and/or the mounting surface of the fixing spacer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822150008.2U CN209868298U (en) | 2018-12-20 | 2018-12-20 | Clamp for grinding reference surface of crystal bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822150008.2U CN209868298U (en) | 2018-12-20 | 2018-12-20 | Clamp for grinding reference surface of crystal bar |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209868298U true CN209868298U (en) | 2019-12-31 |
Family
ID=68946590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822150008.2U Active CN209868298U (en) | 2018-12-20 | 2018-12-20 | Clamp for grinding reference surface of crystal bar |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209868298U (en) |
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2018
- 2018-12-20 CN CN201822150008.2U patent/CN209868298U/en active Active
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