CN209856389U - All-metal pneumatic ultrahigh vacuum stop valve - Google Patents
All-metal pneumatic ultrahigh vacuum stop valve Download PDFInfo
- Publication number
- CN209856389U CN209856389U CN201920238820.2U CN201920238820U CN209856389U CN 209856389 U CN209856389 U CN 209856389U CN 201920238820 U CN201920238820 U CN 201920238820U CN 209856389 U CN209856389 U CN 209856389U
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- valve
- connecting rod
- guide flange
- cylinder
- valve body
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- Expired - Fee Related
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Abstract
The utility model discloses an all-metal pneumatic ultrahigh vacuum stop valve, which comprises a valve body, wherein an elongated supporting seat is arranged at the top of the valve body, a guide flange is arranged between the valve body and the lengthened supporting seat and extends to the interior of the valve body, a valve core connecting rod which can relatively slide along the inner cavity body of the guide flange is arranged in the guide flange, a cylinder is arranged at the top of the valve core connecting rod, the cylinder is internally provided with a small flow-limiting hole, the valve core connecting rod comprises a first connecting rod, a limiting block, a second connecting rod and a valve core which are sequentially connected from top to bottom, the first connecting rod penetrates through the inner cavity of the lengthened supporting seat to be connected with the cylinder, the second connecting rod and the inner cavity of the guide flange slide relatively, be equipped with the direction key between second connecting rod lateral wall and the guide flange inside wall, be equipped with the bellows between guide flange and the case, the case bottom is equipped with the valve plug. The utility model discloses can open fast when this valve is opened, admit air through the aperture to the cylinder and can realize slowly closing when closing, guarantee the life of valve.
Description
Technical Field
The utility model belongs to the valve field, concretely relates to pneumatic super high vacuum stop valve of all-metal.
Background
The ultra-high vacuum exhaust table is an ultra-high vacuum exhaust device for a specific electric vacuum device. With the development of science and technology, the demand of specific electric vacuum devices (such as laser gyros) is rapidly increased, the intelligent requirement on the production process is increasingly remarkable, and the automatic control of all-metal ultrahigh vacuum valves is required to realize the automation of ultrahigh vacuum exhaust stages. Because the sealing surface of the all-metal ultrahigh vacuum valve is made of metal, the service life of the all-metal ultrahigh vacuum valve depends on the motion precision and proper pressing force. Before the creation of the technology, no all-metal ultrahigh vacuum stop valve capable of being automatically controlled exists in China.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that just not enough to above-mentioned prior art provides a pneumatic super high vacuum stop valve of all-metal, can open fast when this valve is opened, admits air through the aperture to the cylinder when closing and can realize slowly closing, has guaranteed the life of valve.
The utility model adopts the technical proposal that: an all-metal pneumatic ultrahigh vacuum stop valve comprises a valve body, wherein a lengthened supporting seat is arranged at the top of the valve body, a guide flange is arranged between the valve body and the lengthened supporting seat and extends to the inside of the valve body, a valve core connecting rod capable of sliding along the inner cavity of the guide flange is arranged inside the guide flange, a cylinder is arranged at the top of the valve core connecting rod, a flow-limiting small hole is arranged inside the cylinder, the valve core connecting rod comprises a first connecting rod, a limiting block, a second connecting rod and a valve core which are sequentially connected from top to bottom, the first connecting rod penetrates through the inner cavity of the lengthened supporting seat and is connected with the cylinder, the second connecting rod slides relative to the inner cavity of the guide flange, a guide key is arranged between the outer side wall of the second connecting rod and the inner side wall of the guide flange, a limiting groove is arranged inside the lengthened supporting, and the bottom of the valve core is provided with a valve plug.
In one embodiment, the valve body is connected with the lengthened supporting seat through a bolt.
In one embodiment, a sealing ring is arranged between the valve body and the guide flange.
In one embodiment, a guide disc is arranged at the bottom of the valve plug.
The beneficial effects of the utility model reside in that: the requirement that the current domestic ultrahigh vacuum laser gyro exhaust platform develops towards the direction of automation is satisfied, and this valve can open fast when opening, admits air the current-limiting through the aperture to the cylinder when closing, has guaranteed to close slowly, and the slow of valve is the number of times in order to guarantee valve life.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure: 1. a valve body; 2. lengthening the supporting seat; 3. a guide flange; 4. a valve core and a valve rod; 5. a cylinder; 6. a guide key; 7. a limiting groove; 8. a keyway; 9. a bellows; 10. a valve plug; 11. a bolt; 12. a seal ring; 13. a guide plate; 41. a first connecting rod; 42. a limiting block; 43. a second connecting rod; 44. a valve core.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, an all-metal pneumatic ultrahigh vacuum stop valve comprises a valve body 1, wherein a lengthened support seat 2 is arranged at the top of the valve body 1, a guide flange 3 is arranged between the valve body 1 and the lengthened support seat 2, the guide flange 3 extends into the valve body 1, a valve core connecting rod capable of relatively sliding along an inner cavity of the guide flange 3 is arranged in the guide flange 3, a cylinder 5 is arranged at the top of the valve core connecting rod, a small flow-limiting hole is arranged in the cylinder 5, the valve core connecting rod comprises a first connecting rod 41, a limiting block 42, a second connecting rod 43 and a valve core 44 which are sequentially connected from top to bottom, the first connecting rod 41 penetrates through the inner cavity of the lengthened support seat 2 to be connected with the cylinder 5, the second connecting rod 43 relatively slides with the inner cavity of the guide flange 3, a guide key 6 is arranged between the outer side wall of the second connecting rod 43 and the, the top of the guide flange 3 is provided with a key groove 8, a corrugated pipe 9 is arranged between the guide flange 3 and the valve core 44, and the bottom of the valve core 44 is provided with a valve plug 10.
In this embodiment, the valve body 1 is connected to the lengthened support seat 2 through a bolt 11.
In this embodiment, a sealing ring 12 is disposed between the valve body 1 and the guide flange 3.
In this embodiment, the bottom of the valve plug 10 is provided with a guide disc 13.
This stop valve drives case valve rod 4 by cylinder 5 and reciprocates, and the in-process of removal, the guide key 6 of second connecting rod 43 lateral wall plays the guide effect at the in-process that case valve rod 4 removed, and repeatability when guaranteeing valve repetitive switch to prevent that inside bellows 9 from rotatory. The bellows 9 can ensure the telescopic stroke of the moving distance when the valve is opened and closed. When the piston rod end of the cylinder 5 extends out, the valve core and the valve rod 4 move downwards, and the valve plug 10 is guided downwards by the guide disc 13, so that sealing is realized and the on-off inside the valve is isolated. The key groove 8 formed in the top of the guide flange 3 can ensure the guide precision, and meanwhile, the limiting block 42 is limited by moving downwards. The limiting groove 7 arranged inside the lengthened supporting seat 2 can limit the upward movement of the limiting block 42. The key groove 8 and the limiting groove 7 are matched for use, so that the upper end and the lower end can be limited, and the movement precision of the valve core and the valve rod 4 is ensured. The small flow-limiting holes arranged in the air cylinder 5 realize slow closing of the air cylinder in the closing process of the air cylinder 5, and the service life of the valve is ensured.
The above-mentioned embodiments only express the specific embodiments of the present invention, and the description thereof is specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.
Claims (4)
1. The utility model provides an all-metal pneumatic ultrahigh vacuum stop valve which characterized in that: comprises a valve body, a lengthened supporting seat is arranged at the top of the valve body, a guide flange is arranged between the valve body and the lengthened supporting seat, the guide flange extends into the valve body, a valve core connecting rod which can relatively slide along the inner cavity of the guide flange is arranged in the guide flange, the top of the valve core connecting rod is provided with a cylinder, the inside of the cylinder is provided with a small flow-limiting hole, the valve core connecting rod comprises a first connecting rod, a limiting block, a second connecting rod and a valve core which are sequentially connected from top to bottom, the first connecting rod penetrates through the inner cavity of the lengthened supporting seat to be connected with the cylinder, the second connecting rod and the inner cavity of the guide flange slide relatively, a guide key is arranged between the outer side wall of the second connecting rod and the inner side wall of the guide flange, a limit groove is arranged in the lengthened supporting seat, the top of the guide flange is provided with a key groove, a corrugated pipe is arranged between the guide flange and the valve core, and the bottom of the valve core is provided with a valve plug.
2. The all-metal pneumatic ultrahigh vacuum stop valve according to claim 1, characterized in that: the valve body is connected with the lengthened supporting seat through a bolt.
3. The all-metal pneumatic ultrahigh vacuum stop valve according to claim 1, characterized in that: and a sealing ring is arranged between the valve body and the guide flange.
4. The all-metal pneumatic ultrahigh vacuum stop valve according to claim 1, characterized in that: the bottom of the valve plug is provided with a guide disc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920238820.2U CN209856389U (en) | 2019-02-26 | 2019-02-26 | All-metal pneumatic ultrahigh vacuum stop valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920238820.2U CN209856389U (en) | 2019-02-26 | 2019-02-26 | All-metal pneumatic ultrahigh vacuum stop valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209856389U true CN209856389U (en) | 2019-12-27 |
Family
ID=68932244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920238820.2U Expired - Fee Related CN209856389U (en) | 2019-02-26 | 2019-02-26 | All-metal pneumatic ultrahigh vacuum stop valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209856389U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116816961A (en) * | 2023-08-23 | 2023-09-29 | 成都中科唯实仪器有限责任公司 | Normally closed vacuum valve |
-
2019
- 2019-02-26 CN CN201920238820.2U patent/CN209856389U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116816961A (en) * | 2023-08-23 | 2023-09-29 | 成都中科唯实仪器有限责任公司 | Normally closed vacuum valve |
| CN116816961B (en) * | 2023-08-23 | 2023-11-21 | 成都中科唯实仪器有限责任公司 | Normally closed vacuum valve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200102 Address after: 610000 No.6 workshop, NO.666, NanEr Road, Chengdu Economic and Technological Development Zone (Longquanyi District), Sichuan Province Patentee after: Sichuan Wuhe Technology Co., Ltd Address before: 610000 -2, A District, Jiao Tong industrial port, Qingyang District, Chengdu, Sichuan Patentee before: Chengdu Wu Ji Vacuum Technology Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191227 Termination date: 20200226 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |