CN209843670U - Special chuck structure for square probe card - Google Patents
Special chuck structure for square probe card Download PDFInfo
- Publication number
- CN209843670U CN209843670U CN201921028736.4U CN201921028736U CN209843670U CN 209843670 U CN209843670 U CN 209843670U CN 201921028736 U CN201921028736 U CN 201921028736U CN 209843670 U CN209843670 U CN 209843670U
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- CN
- China
- Prior art keywords
- probe card
- chuck
- square probe
- square
- positioning
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model relates to a special chuck structure of square probe card, including the chuck, the circumferencial direction of chuck is evenly spaced and is opened has a plurality of counter bores, the central point of chuck puts and opens a slotted hole, both ends face is straight before and after the slotted hole, and both ends face is the arc surface about, and the inboard middle part of two straight faces is respectively inwards extended and is had the location baffle of rectangular shape structure, places a square probe card simultaneously above two location baffles; clamping hands are symmetrically arranged on the chucks positioned outside two ends of the long circular hole, the square probe card is clamped by the clamping hands, positioning blocks are further arranged at the left end and the right end of each clamping hand, and the upper portions of the positioning blocks are locked with the clamping hands through positioning pins. Through designing dedicated chuck, the square probe card of clamping that can be convenient has realized promptly, and original equipment can be used for the switching application of square probe card and circular probe card, uses no limitation, and equipment utilization improves greatly, the cost is reduced.
Description
Technical Field
The utility model belongs to the technical field of chuck location auxiliary assembly technique and specifically relates to a special chuck structure of square probe card.
Background
A probe card (probe card) is an interface between a chip to be tested and a tester in wafer test (wafer test), and is mainly applied to preliminary measurement of electrical properties of the chip before chip segmentation and packaging, and subsequent packaging engineering after poor chips are screened out.
The probe card is used in a principle that a probe on the probe card is directly contacted with a pad (pad) or a bump (bump) on a chip to derive a chip signal. Then, the wafer is automatically measured by matching with the peripheral test instrument and software control. The method is very important for the development of early-stage tests and the yield guarantee of later-stage mass production tests.
The probe card has higher installation requirement and installation precision because the height of each pin has some differences, and in the prior art, the probe card is usually clamped and fixed by using special equipment, but the tool equipped by the equipment can only be used for clamping a circular probe card, so the use of the equipment has certain limitation, and the utilization rate of the equipment is extremely low.
SUMMERY OF THE UTILITY MODEL
The applicant aims at the defects in the prior art and provides a special chuck structure for a square probe card with a reasonable structure, so that the square probe card can be clamped on the same equipment, and a round probe card can be clamped, the utilization rate of the equipment is greatly improved, and the use is flexible and reliable.
The utility model discloses the technical scheme who adopts as follows:
a special chuck structure for a square probe card comprises a chuck, wherein a plurality of counter bores are uniformly arranged in the circumferential direction of the chuck at intervals, a long circular hole is formed in the center of the chuck, the front end face and the rear end face of the long circular hole are straight faces, the left end face and the right end face of the long circular hole are arc faces, the middle parts of the inner sides of the two straight faces are respectively provided with a positioning baffle plate with a long strip-shaped structure in an inward extending mode, and a square probe card is placed above the two positioning baffle plates; clamping hands are symmetrically arranged on the chucks positioned outside two ends of the long circular hole, the square probe card is clamped by the clamping hands, positioning blocks are further arranged at the left end and the right end of each clamping hand, and the upper portions of the positioning blocks are locked with the clamping hands through positioning pins.
As a further improvement of the above technical solution:
the chuck is in a thin disc type structure.
The chuck is connected to the device by a fastener.
Six counter bores are formed in the circumferential direction of the chuck.
The distance between the two positioning baffles is smaller than the width of the square probe card.
The clamping hand is fixed with the chuck through a hand-screwed screw.
The positioning block is fixed on the chuck through a locking screw.
The inner end surface of the clamp is attached to the outer end surface of the square probe card
The utility model has the advantages as follows:
the utility model discloses compact structure, reasonable, convenient operation through designing dedicated chuck, the square probe card of clamping that can be convenient has realized promptly, and original equipment can be used for the switching application of square probe card and circular probe card, uses not have the limitation, and rate of equipment utilization improves greatly, the cost is reduced.
Chuck pass through the fastener and be connected with equipment, set up the mounting hole that each spare part needs to be installed on the chuck, size and position are set for in advance, the precision is high, when needs are installed, put square probe card toward one on the baffle, each fastener locking can, simple to operate, work efficiency is high.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a front view of the chuck of the present invention.
Fig. 3 is a side view of fig. 2.
Wherein: 1. a chuck; 2. a counter bore; 3. a long round hole; 4. positioning blocks; 5. locking the screw; 6. positioning pins; 7. clamping a hand; 8. screwing the screw by hand; 9. a square probe card; 10. a positioning block mounting hole; 11. mounting holes for hand-screwed screws; 12. and positioning the baffle.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1, 2 and 3, the special chuck structure for a square probe card of the present embodiment includes a chuck 1, a plurality of counter bores 2 are uniformly spaced in a circumferential direction of the chuck 1, a long circular hole 3 is formed in a center position of the chuck 1, front and rear end faces of the long circular hole 3 are straight faces, left and right end faces are arc faces, positioning baffles 12 with strip-shaped structures extend inwards from middle portions of inner sides of the two straight faces, and a square probe card 9 is placed above the two positioning baffles 12; clamping hands 7 are symmetrically arranged on the chuck 1 positioned outside the two ends of the long circular hole 3, the square probe card 9 is clamped by the clamping hands 7, positioning blocks 4 are further arranged at the left end and the right end of the clamping hands 7, and the upper portions of the positioning blocks 4 are locked with the clamping hands 7 through positioning pins 6.
The chuck 1 is in the form of a thin disc-like structure.
The chuck 1 is connected to the apparatus by fasteners.
Six counter bores 2 are arranged in the circumferential direction of the chuck 1.
The spacing between the two positioning baffles 12 is less than the width of the square probe card 9.
The clamping hand 7 is fixed with the chuck 1 through a hand-screwed screw 8.
The positioning block 4 is fixed on the chuck 1 through a locking screw 5.
The inner end surface of the clamp 7 is attached to the outer end surface of the square probe card 9
As shown in fig. 2 and 3, the specific structure of the chuck 1 of the present invention is:
the positioning device comprises a circular chuck 1, the diameter of the chuck 1 is 400mm, a long circular hole 3 is formed in the middle of the chuck 1, the width of the long circular hole 3 is 116mm, the radius of the arc surfaces at two ends is 160mm, symmetrical positioning baffles 12 are arranged in the middle of the long circular hole 3, the positioning baffles 12 are of a cuboid structure, two groups of corresponding hand-screwed screw mounting holes 11 are formed in the chucks 1 at two ends of the long circular hole 3, and two groups of corresponding positioning block mounting holes 10 are formed in the chuck 1 outside the hand-screwed screw mounting holes 11. The positions of the mounting holes are calculated and set in advance.
As shown in fig. 1, in an actual use process, a processing device is a mature technology in the prior art, when a square probe card 9 needs to be processed on the device, firstly, a fastener penetrates through each counter bore 2 on the device, a chuck 1 is fixed on the device, then, a square probe card 9 is placed on two positioning baffles 12, two outer sides of the square probe card 9 are fixedly provided with clamping hands 7 through hand screws 8, an inner end surface of each clamping hand 7 is attached to an outer side surface of the square probe card 9, then, a positioning block 4 is installed through a locking screw 5, the positioning block 4 and the clamping hands 7 are fixed through positioning pins 6, installation positions of all positioning elements and fasteners are set in advance, the square probe card 9 can be processed after clamping is finished, and finally, the square probe card 9 is assembled with a PCB board. When a circular needle card needs to be processed, all parts on the chuck 1 are detached, the chuck 1 is detached, and a special circular chuck is mounted. The device is convenient to use and free of limitation, and the utilization rate of the device is greatly improved.
The above description is for the purpose of explanation and not limitation of the invention, which is defined in the claims, and any modifications may be made within the scope of the invention.
Claims (8)
1. A special chuck structure for a square probe card is characterized in that: the probe comprises a chuck (1), a plurality of counter bores (2) are uniformly arranged in the circumferential direction of the chuck (1) at intervals, a long circular hole (3) is formed in the center of the chuck (1), the front end face and the rear end face of the long circular hole (3) are straight faces, the left end face and the right end face of the long circular hole are arc faces, the middle parts of the inner sides of the two straight faces are respectively provided with a positioning baffle (12) with a long strip-shaped structure in an inward extending mode, and a square probe card (9) is arranged above the two positioning baffles (12); clamping hands (7) are symmetrically arranged on the chuck (1) positioned outside the two ends of the long round hole (3), the square probe card (9) is clamped by the clamping hands (7), positioning blocks (4) are further arranged at the left end and the right end of the clamping hands (7), and the upper portions of the positioning blocks (4) are locked with the clamping hands (7) through positioning pins (6).
2. The special chuck structure for a square probe card according to claim 1, wherein: the chuck (1) is in a thin disc type structure.
3. The special chuck structure for a square probe card according to claim 1, wherein: the chuck (1) is connected with equipment through a fastener.
4. The special chuck structure for a square probe card according to claim 1, wherein: six counter bores (2) are formed in the circumferential direction of the chuck (1).
5. The special chuck structure for a square probe card according to claim 1, wherein: the distance between the two positioning baffles (12) is smaller than the width of the square probe card (9).
6. The special chuck structure for a square probe card according to claim 1, wherein: the clamping hand (7) is fixed with the chuck (1) through a hand-screwed screw (8).
7. The special chuck structure for a square probe card according to claim 1, wherein: the positioning block (4) is fixed on the chuck (1) through a locking screw (5).
8. The special chuck structure for a square probe card according to claim 1, wherein: the inner end face of the clamping hand (7) is attached to the outer end face of the square probe card (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921028736.4U CN209843670U (en) | 2019-07-03 | 2019-07-03 | Special chuck structure for square probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921028736.4U CN209843670U (en) | 2019-07-03 | 2019-07-03 | Special chuck structure for square probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209843670U true CN209843670U (en) | 2019-12-24 |
Family
ID=68899358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921028736.4U Active CN209843670U (en) | 2019-07-03 | 2019-07-03 | Special chuck structure for square probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209843670U (en) |
-
2019
- 2019-07-03 CN CN201921028736.4U patent/CN209843670U/en active Active
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