CN209814886U - Three-dimensional storage device - Google Patents

Abstract

The utility model discloses a three-dimensional storage device, include: the storage rack on each layer is provided with a plurality of positioning tool plates in parallel, and each positioning tool plate independently stores a product box with a limited position; the carrying mechanism is arranged on the front face of the storage rack and used for carrying the product boxes to the front of the storage rack in a linear transmission mode so as to further push the product boxes to the target positioning tooling plate. The utility model discloses whole mechanism is compact, can install and do the accurate position function of material loading on the automated production line, also can make the material loading more simple and convenient. Since the positioning of the Foup can be completely ensured, the condition of disk taking skew caused by the Foup offset can be effectively prevented. The whole mechanism occupies a small area, and can achieve the effect of saving more space. The whole positioning process is simple in structure and high in speed, and the beat of the whole automatic manufacturing process can be improved, so that the productivity of a production line is increased, and better economic benefits are brought to a factory.

Description

Three-dimensional storage device

Technical Field

The utility model relates to a positioning device technical field is put to wafer box in the automatic processing procedure of semiconductor trade wafer, more specifically relates to a three-dimensional storage device for wafer class product.

Background

In the semiconductor industry, it is often necessary to fix the Foup (front opening wafer cassette) loading position on one side for the operator to load and unload.

However, for some manufacturers, because of the size of the factory building, it is impossible to lay many foups in a long floor space, which may cause the width of the equipment to be too wide and not go to the factory building, or interfere with the load-bearing columns of the factory building.

Therefore, a novel three-dimensional storage device for wafer products needs to be designed to occupy smaller space of a factory building layer, and the Foup feeding is more convenient and more accurate in positioning.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome the above-mentioned defect that prior art exists, provide a three-dimensional storage device.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

a stereoscopic warehousing device comprising:

the storage rack on each layer is provided with a plurality of positioning tool plates in parallel, and each positioning tool plate independently stores a product box with a limited position;

the carrying mechanism is arranged on the front face of the storage rack and used for carrying the product boxes to the front of the storage rack in a linear transmission mode so as to further push the product boxes to the target positioning tooling plate.

Further, the storage frame is two-layer structure, and every layer is equipped with threely the location frock board coexists and stores up six the product box.

Furthermore, a horizontal fixing plate is arranged at the bottom of the storage rack on each layer, the positioning tool plates are arranged on the horizontal fixing plate, and adjacent positioning tool plates are separated by a plurality of hexagonal equal-height pillars so as to form a storage bin for the product boxes above each positioning tool plate.

Furthermore, four corners of the positioning tool plate are connected with the lower horizontal fixing plate through screws.

Furthermore, a boosting mechanism is arranged on the surface of the positioning tool plate.

Further, the boosting mechanism is a plurality of universal balls.

Furthermore, a positioning mechanism is arranged on the rear side surface of the positioning tool plate.

Further, the positioning mechanism is a check block.

Further, an RFID reading mechanism is arranged on the storage rack above each stored product box.

Furthermore, the carrying mechanism is an x-y two-axis linear module, each linear module adopts a transmission structure driven by an electric cylinder, and a motor of the electric cylinder is a servo motor.

According to the above technical scheme, the utility model discloses an adopt 2 layers of configurations, every layer respectively has three location frock board, is equipped with universal ball (bull's eye) on the frock board, can let the people conveniently push product box (foup) into, after pushing away the position, still is equipped with a non return piece at frock board rear, and the product box plays the effect of final location after pushing away the position and bounces and block. RFID reading can be arranged above the Foup, and the encoding number of the Foup can be known, so that the digitization effect is achieved, and the process can be traced. Can also cooperate outside xy module, carry out long distance's storage transport work in addition 2 servo motor drives. Generally, if a robot is adopted, the arm spread of the robot can be large, and the minimum moving range of the robot is avoided for collision avoidance; and the utility model discloses a transport mechanism adopts sharp module, space around having practiced thrift, and the design on 2 layers of cooperation can practice thrift more spaces more.

Drawings

Fig. 1 is a schematic structural view of a three-dimensional storage device according to a preferred embodiment of the present invention.

Detailed Description

The following describes the present invention in further detail with reference to the accompanying drawings.

In the following detailed description of the embodiments of the present invention, for the sake of clarity of the structure of the present invention, it is to be understood that the structure shown in the drawings is not drawn to scale, and is partially enlarged, deformed and simplified, and therefore the present invention is not limited thereto.

In the following description of the present invention, please refer to fig. 1, in which fig. 1 is a schematic structural diagram of a three-dimensional warehouse device according to a preferred embodiment of the present invention. As shown in fig. 1, the utility model discloses a three-dimensional storage device, include: the three-dimensional multi-layer storage rack comprises main components such as a three-dimensional multi-layer storage rack and a conveying mechanism for conveying product boxes.

Please refer to fig. 1. The storage shelves are of a multi-layer construction, such as the two-layer storage shelf construction illustrated. A plurality of positioning tool plates 4 are arranged on the storage rack on each layer in parallel; each positioning tool plate 4 is used for independently storing a product box 1 with a limited position. The product box 1 may be, for example, a Foup (front opening wafer box) 1. Shown as the rear side of the storage rack.

In the above two-layer storage rack structure, each layer can be provided with three positioning tooling plates 4, so that six product boxes 1 can be stored in total.

Please refer to fig. 1. The bottom of each layer of storage rack is provided with a horizontal fixing plate 6, and the positioning tool plate 4 is arranged on the horizontal fixing plate 6. Adjacent positioning tooling plates 4 are separated by a plurality of hexagonal equal height pillars 3 to form a storage bin for product boxes 1 above each positioning tooling plate 4. The hexagonal equal-height pillars 3 fix the horizontal fixing plates 6 of each layer to form a frame-shaped storage rack.

As an alternative embodiment, four corners of the positioning tool plate 4 can be mounted and connected with the lower horizontal fixing plate 6 through screws to form a detachable structure.

As a preferred embodiment, the positioning tool plate 4 may be provided with a booster mechanism 2 on its surface. The boosting mechanism 2 can adopt a plurality of universal balls (bulleyes) 2, for example, which can facilitate the loading of operators and is good only by pushing in the Foup 1.

Please refer to fig. 1. As a preferred embodiment, a positioning mechanism 5 may be further provided on the rear side surface of the positioning tool plate 4. The positioning means 5 may for example be a non-return block 5. The bounce of the check block 5 is utilized to limit the Foup 1.

As a further preferred embodiment, an RFID reading mechanism may also be provided on the storage shelf above each stored product cartridge 1. That is, the RFID reading mechanism in each bin of each floor may be mounted on the lower surface (ceiling) of the horizontal fixing plate 6 of the upper floor.

The conveying mechanism is arranged on the front surface of the storage rack and used for conveying the product box 1 to the front of the storage rack in a linear conveying mode so as to further push the product box 1 to the target positioning tooling plate 4. The carrying mechanism can adopt an x-y two-axial linear module, and each linear module can adopt a transmission structure driven by an electric cylinder. Wherein, the motor of the electric cylinder can adopt a servo motor.

When the utility model works, firstly, the front mechanism can position the Foup1 completely; when the Foup1 reaches the designated position, the rear check block 5 bounces to play a limiting role. The lower eyelet 2 may also provide for easier handling during pushing in of Foup1, reducing friction.

The utility model discloses whole mechanism is compact, can install and do the accurate position function of material loading on the automated production line, also can make the material loading more simple and convenient. Since the positioning of the Foup can be completely ensured, the condition of disk taking skew caused by the Foup offset can be effectively prevented. The whole mechanism occupies a small area, the occupied area is reduced by one half compared with the common mechanism, and the effect of saving more space can be achieved. The whole positioning process is simple in structure and high in speed, and the beat of the whole automatic manufacturing process can be improved, so that the productivity of a production line is increased, and better economic benefits are brought to a factory.

To sum up, the utility model discloses an adopt 2 layers of configurations, every layer respectively has three location frock board, is equipped with universal ball (bull's eye) on the frock board, can let the people conveniently push away product box (foup) into, after pushing away the position, still is equipped with a non return piece at frock board rear, and the product box pushes away to bounce after the position and blocks, plays the effect of final location. RFID reading can be arranged above the Foup, and the encoding number of the Foup can be known, so that the digitization effect is achieved, and the process can be traced. Can also cooperate outside xy module, carry out long distance's storage transport work in addition 2 servo motor drives. Generally, if a robot is adopted, the arm spread of the robot can be large, and the minimum moving range of the robot is avoided for collision avoidance; and the utility model discloses a transport mechanism adopts sharp module, space around having practiced thrift, and the design on 2 layers of cooperation can practice thrift more spaces more.

The above is only the preferred embodiment of the present invention, and the embodiments are not intended to limit the scope of the patent protection of the present invention, so that all the structural changes equivalent to the contents of the description and the drawings of the present invention should be included in the scope of the present invention.

Claims (9)

1. A stereoscopic warehousing device, comprising:

the storage rack on each layer is provided with a plurality of positioning tool plates in parallel, each positioning tool plate independently stores a product box with a limited position, and the product box is a front-opening wafer box; the bottom of the storage rack on each layer is provided with a horizontal fixing plate, the positioning tool plates are arranged on the horizontal fixing plates, and adjacent positioning tool plates are isolated by a plurality of pillars so as to form a storage bin of the product box above each positioning tool plate; and four corners of the positioning tool plate are connected with the lower horizontal fixing plate in an installing manner.

2. The stereoscopic warehousing device as claimed in claim 1, wherein the storage rack is of a two-layer structure, each layer is provided with three positioning tooling plates, and six product boxes are stored in the storage rack.

3. The stereo warehousing device as claimed in claim 1, wherein a horizontal fixing plate is disposed at the bottom of the storage rack of each layer, the positioning tooling plates are disposed on the horizontal fixing plate, and adjacent positioning tooling plates are separated by a plurality of hexagonal equal-height pillars to form a storage bin for the product boxes above each positioning tooling plate.

4. The stereo warehousing device of claim 3, wherein four corners of the positioning tooling plate are connected with the lower horizontal fixing plate by screws.

5. The stereo warehousing device of claim 1, wherein a boosting mechanism is disposed on a surface of the positioning tooling plate.

6. The stereo bin of claim 5, wherein the boost mechanism is a plurality of ball transfer units.

7. The stereo warehousing device as claimed in claim 1, wherein a positioning mechanism is provided on a rear side surface of the positioning tooling plate.

8. The stereo bin of claim 7, wherein the locating mechanism is a backstop.

9. The stereo stocker of claim 1, wherein an RFID reading mechanism is provided on the storage shelves above each of the stored product cassettes.