CN209785875U - cleaning and meltdown protection tool for photoresist rotary shielding cover component of semiconductor equipment - Google Patents
cleaning and meltdown protection tool for photoresist rotary shielding cover component of semiconductor equipment Download PDFInfo
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- CN209785875U CN209785875U CN201920954936.6U CN201920954936U CN209785875U CN 209785875 U CN209785875 U CN 209785875U CN 201920954936 U CN201920954936 U CN 201920954936U CN 209785875 U CN209785875 U CN 209785875U
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- meltallizing
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Abstract
The utility model discloses a semiconductor equipment photoresist rotary shielding cover component cleaning and meltallizing protection jig, belonging to the technical field of cleaning and meltallizing protection, comprising a base, wherein the base is in a disc-shaped structure, the middle part of the base is provided with a positioning through hole, a bottom bolt for fixing a bottom support rod is connected in the positioning through hole, and the shape of the positioning through hole is matched with that of the bottom bolt; the bottom supporting rod is of a cylindrical structure, a bolt groove is formed in one end, connected with the base, of the bottom supporting rod, and the bottom bolt is connected to the positioning through hole and the bolt groove at the same time; a protection rod slot is formed in the other end of the bottom support rod, and a top protection rod is connected in the protection rod slot; the protection precision is high, but reuse and can not pollute the part article.
Description
Technical Field
the utility model relates to a clean meltallizing protection technical field, concretely relates to reverse processing procedure physics vapor deposition device photoresist reverse shields cover part and cleans meltallizing protection tool of semiconductor equipment.
Background
At present, in the process of cleaning and regenerating a reverse shielding cover of a semiconductor photoresist, the surface of a component needs to be subjected to spray treatment, a high-temperature resistant adhesive tape needs to be adopted in the process to protect the non-sprayed surface of the component, the component is in a cup-shaped structure with an open top, the bottom is an arc surface, an article is extremely small, the spray surface of the component is arranged on a cup body, the non-sprayed surface at the bottom needs to be protected, the existing process uses the adhesive tape for protection, the adhesive tape needs to be cut according to the shielding range needed by the component each time, the operation takes more time, the precision of a spray area cannot be ensured by manual adhesive tape protection, the adhesive tape cannot be reused, the production cost is increased, residual adhesive in different degrees is left on the surface of the covered area of the article by using the adhesive tape protection, the product is poor, and the article is difficult to be fixed on a rotary table of a spray machine due to small size of the article, thus, the effect after the meltallizing is uneven, and the rework rate is high.
SUMMERY OF THE UTILITY MODEL
For solving the not enough that exists among the prior art, the utility model provides a rotatory cover part that shields of semiconductor equipment photoresist cleans meltalling spray protection tool, and the protection precision is high, but reuse just can not pollute the portion article.
The utility model discloses a solve the technical scheme that its technical problem adopted and be: a photoresist rotary shielding cover component cleaning and meltallizing protection jig for semiconductor equipment comprises a base, wherein the base is of a disc-shaped structure, a positioning through hole is formed in the middle of the base, a bottom bolt for fixing a bottom supporting rod is connected in the positioning through hole, and the shape of the positioning through hole is matched with that of the bottom bolt; the bottom supporting rod is of a cylindrical structure, a bolt groove is formed in one end, connected with the base, of the bottom supporting rod, and the bottom bolt is connected to the positioning through hole and the bolt groove at the same time; the other end of the bottom support rod is provided with a protection rod slot, and a top protection rod is connected in the protection rod slot.
Further, the bottom sprag pole is including the thin pole portion and the thick pole portion that are connected, the bolt groove has been seted up to thick pole portion bottom, the fender rod slot has been seted up at thin pole portion, thick pole portion top, and thin pole portion diameter is less than thick pole portion diameter, and the junction of thin pole portion and thick pole portion forms the gasket draw-in groove that the cross-section is "L" type, the joint has the gasket in the gasket draw-in groove.
Furthermore, a plurality of lightening holes and a plurality of fixing threaded holes are formed in the base, the number of the lightening holes is consistent with that of the fixing threaded holes, and one fixing threaded hole is formed between every two lightening holes.
Furthermore, the upper end of the top protection rod is provided with a taking-out hole.
Furthermore, a stepped groove matched with the diameter of the thick rod part of the bottom supporting rod is formed in the joint of the base and the bottom supporting rod, and the positioning through hole is located in the center of the stepped groove.
Furthermore, the top guard bar comprises a horizontal cover and a vertical bar which are connected, the vertical bar is vertically connected to the middle of the horizontal cover, and the cross section of the top guard bar is in a cross shape.
Further, the horizontal cover comprises an upper cover and a lower cover which are connected, the upper cover is provided with an inclined end face, the diameter of the lower cover is smaller than that of the upper cover, and a dismounting groove is formed at the joint of the upper cover and the lower cover.
The utility model has the advantages that: the mode that the adhesive tape shields and protects the non-meltallizing part of the part is replaced, the size is stable, the high temperature resistance and the deformation are avoided, and the adhesive tape can be repeatedly used; the meltallizing protection precision has been improved, the product defective rate has been reduced, and can not leave by-products such as cull, dirt to the part surface of being protected, convenient to use uses manpower sparingly and material cost.
Drawings
FIG. 1 is a schematic view of the whole structure of the present invention connected to a component;
FIG. 2 is a partial sectional view of the present invention;
FIG. 3 is a schematic view of the base structure of the present invention;
FIG. 4 is a partial enlarged sectional view of the present invention;
FIG. 5 is a partial enlarged sectional view of the present invention;
fig. 6 is a partially enlarged cross-sectional view of the top protection bar of the present invention.
The reference numbers in the figures are as follows: 1. the base, 2, bottom sprag pole, 3, bottom bolt, 4, bolt groove, 5, fender rod slot, 6, top fender rod, 7, gasket draw-in groove, 8, gasket, 9, lightening hole, 10, fixed screw hole, 11, take-out hole, 12, dismantlement groove, 13, horizontal lid, 14, vertical pole, 15, parts, 101, positioning through hole, 131, upper cover, 132, lower cover.
Detailed Description
in order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Example 1
A photoresist rotary shielding cover component cleaning and meltallizing protection jig for a semiconductor device comprises a base 1, wherein the base 1 is of a disc-shaped structure, a positioning through hole 101 is formed in the middle of the base 1, a bottom bolt 3 for fixing a bottom support rod 2 is connected in the positioning through hole 101, and the shape of the positioning through hole 101 is matched with that of the bottom bolt 3; the bottom support rod 2 is of a cylindrical structure, a bolt groove 4 is formed in one end, connected with the base 1, of the bottom support rod, and the bottom bolt 3 is connected to the positioning through hole 101 and the bolt groove 4 at the same time; the other end of the bottom support rod 2 is provided with a protection rod slot 5, and a top protection rod 6 is connected in the protection rod slot 5. The top protection rod 6 comprises a horizontal cover 13 and a vertical rod 14 which are connected, the vertical rod 14 is vertically connected to the middle of the horizontal cover 13, and the cross section of the top protection rod 6 is in a cross shape. The horizontal cover 13 comprises an upper cover 131 and a lower cover 132 which are connected, the upper cover 131 is provided with an inclined end face, and a melting gun is not blocked during melting; the lower cap 132 has a diameter smaller than that of the upper cap 131, and a removal groove 12 is formed at the junction of the upper cap 131 and the lower cap 132 to facilitate removal of the parts.
The bottom support rod 2 comprises a thin rod part and a thick rod part which are connected, a bolt groove 4 is formed in the bottom end of the thick rod part, a protection rod slot 5 is formed in the tops of the thin rod part and the thick rod part, the diameter of the thin rod part is smaller than that of the thick rod part, a gasket clamping groove 7 with an L-shaped cross section is formed in the joint of the thin rod part and the thick rod part, and a gasket 8 is clamped in the gasket clamping groove 7. The base 1 is provided with a step groove matched with the diameter of the thick rod part of the bottom support rod 2 at the joint of the bottom support rod 2, so that the bottom support rod 2 is positioned more accurately, and the positioning through hole 101 is positioned in the center of the step groove.
The base 1 is provided with a plurality of lightening holes 9 and a plurality of fixing threaded holes 10, the number of the lightening holes 9 is consistent with that of the fixing threaded holes 10, and one fixing threaded hole 10 is arranged between every two lightening holes 9. The upper end of the top protection rod 6 is provided with a taking hole 11, and the jig can be detached by inserting an optical rod into the taking hole 11 after the melting and shooting. The lightening holes 9 are arranged to lighten the weight of the jig, and simultaneously save materials and cost.
Preferably, the jig is made of stainless steel.
The working principle is as follows: fix bottom sprag pole 2 on base 1 through bottom bolt 3, the reuse bolt passes fixed screw hole 10 and fixes base 1 on the meltallizing machine revolving stage, overlap gasket 8 in gasket draw-in groove 7 of bottom sprag pole 2, will treat the portion article 15 of meltallizing and place on gasket 8, pass the vertical pole 14 of top guard bar 6 in the fender rod slot 5 that portion article 15 inserted bottom sprag pole 2, fix a position portion article 15, the top of vertical pole 14 is higher than the top of portion article 15, then carry out the meltallizing operation, take off the tool after the meltallizing, repeatedly usable after the washing.
The above description is only the specific implementation manner of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can substitute or change the technical solution of the present invention and the design of the present invention within the technical scope of the present invention.
Claims (7)
1. A cleaning and meltallizing protection jig for a photoresist rotary shielding cover component of a semiconductor device is characterized by comprising a base (1), wherein the base (1) is of a disc-shaped structure, a positioning through hole (101) is formed in the middle of the base (1), a bottom bolt (3) used for fixing a bottom supporting rod (2) is connected in the positioning through hole (101), and the shape of the positioning through hole (101) is matched with that of the bottom bolt (3); the bottom supporting rod (2) is of a cylindrical structure, a bolt groove (4) is formed in one end, connected with the base (1), of the bottom supporting rod, and the bottom bolt (3) is connected to the positioning through hole (101) and the bolt groove (4) at the same time; the other end of the bottom support rod (2) is provided with a guard bar slot (5), and a top guard bar (6) is connected in the guard bar slot (5).
2. The semiconductor equipment photoresist rotary shielding cover component cleaning and meltallizing protection jig as claimed in claim 1, wherein the bottom support rod (2) comprises a thin rod part and a thick rod part which are connected, a bolt groove (4) is formed at the bottom end of the thick rod part, protection rod slots (5) are formed at the tops of the thin rod part and the thick rod part, the diameter of the thin rod part is smaller than that of the thick rod part, a gasket clamping groove (7) with an L-shaped section is formed at the joint of the thin rod part and the thick rod part, and a gasket (8) is clamped in the gasket clamping groove (7).
3. The semiconductor equipment photoresist rotary shielding cover component cleaning and meltallizing protection jig is characterized in that a plurality of lightening holes (9) and a plurality of fixing threaded holes (10) are formed in the base (1), the number of the lightening holes (9) is consistent with that of the fixing threaded holes (10), and one fixing threaded hole (10) is formed between every two lightening holes (9).
4. the semiconductor equipment photoresist rotary shielding cover component cleaning and meltallizing protection jig according to claim 1, characterized in that the upper end of the top protection rod (6) is provided with an extraction hole (11).
5. The semiconductor equipment photoresist rotary shielding cover component cleaning and meltallizing protection jig according to claim 1, characterized in that a connecting part of the base (1) and the bottom support rod (2) is provided with a step groove matched with the diameter of the thick rod part of the bottom support rod (2), and the positioning through hole (101) is positioned at the center of the step groove.
6. The semiconductor equipment photoresist rotary shielding cover component cleaning and meltallizing protection jig according to claim 1, characterized in that the top protection rod (6) comprises a horizontal cover (13) and a vertical rod (14) which are connected, the vertical rod (14) is vertically connected to the middle part of the horizontal cover (13), and the cross section of the top protection rod (6) is in a cross shape.
7. The semiconductor equipment photoresist rotary shielding cover part cleaning meltallizing protection jig according to claim 6, characterized in that the horizontal cover (13) comprises an upper cover (131) and a lower cover (132) which are connected, the upper cover (131) has an inclined end face, the diameter of the lower cover (132) is smaller than that of the upper cover (131), and a detachable groove (12) is formed at the joint of the upper cover (131) and the lower cover (132).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920954936.6U CN209785875U (en) | 2019-06-24 | 2019-06-24 | cleaning and meltdown protection tool for photoresist rotary shielding cover component of semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920954936.6U CN209785875U (en) | 2019-06-24 | 2019-06-24 | cleaning and meltdown protection tool for photoresist rotary shielding cover component of semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209785875U true CN209785875U (en) | 2019-12-13 |
Family
ID=68789070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920954936.6U Active CN209785875U (en) | 2019-06-24 | 2019-06-24 | cleaning and meltdown protection tool for photoresist rotary shielding cover component of semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209785875U (en) |
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2019
- 2019-06-24 CN CN201920954936.6U patent/CN209785875U/en active Active
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