CN209783513U - mechanism for accurately measuring micro-abrasion loss of thin film material in situ - Google Patents
mechanism for accurately measuring micro-abrasion loss of thin film material in situ Download PDFInfo
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- CN209783513U CN209783513U CN201920606254.6U CN201920606254U CN209783513U CN 209783513 U CN209783513 U CN 209783513U CN 201920606254 U CN201920606254 U CN 201920606254U CN 209783513 U CN209783513 U CN 209783513U
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- film material
- thin film
- displacement sensor
- abrasion
- horizontal shaft
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- 239000000463 material Substances 0.000 title claims abstract description 121
- 238000005299 abrasion Methods 0.000 title claims abstract description 65
- 239000010409 thin film Substances 0.000 title claims abstract description 63
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 20
- 238000006073 displacement reaction Methods 0.000 claims abstract description 60
- 239000010408 film Substances 0.000 claims abstract description 54
- 239000000523 sample Substances 0.000 claims abstract description 18
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 17
- 238000012360 testing method Methods 0.000 description 14
- 238000002474 experimental method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
the utility model discloses a mechanism for accurately measuring the micro abrasion loss of a film material in situ, which comprises upright columns (7) which are vertically distributed; the upper part of the upright post (7) is hinged with the right end of a horizontal shaft (3); the horizontal shaft (3) can rotate around the upper part of the upright post (7) in the horizontal direction; the left end of the horizontal shaft (3) is fixedly connected with a displacement sensor (1); the displacement sensor (1) is used for measuring the thin film material placed right below the displacement sensor through a probe (4) below the displacement sensor before and after abrasion respectively to obtain the thickness variation of the surface of the thin film material before and after abrasion, and the thickness variation is used as the abrasion loss of the thin film material. The utility model discloses can measure the thickness variation of being surveyed the material around wearing and tearing to through regard this thickness variation as the wearing and tearing volume, thereby can be more accurate, reliably relatively evaluate the wear resistance of frictional property two kinds of different thin film materials that frictional property is close, the difference of wear resistance is little.
Description
Technical Field
The utility model relates to an wearing and tearing volume measurement technical field especially relates to a mechanism of normal position precision measurement film material's trace wearing and tearing volume.
background
at present, the abrasion loss is one of the main indexes for evaluating the abrasion resistance of materials. For the measurement of the abrasion loss of the material of the current friction abrasion testing machine, a weighing method is mainly adopted for evaluation, namely the mass of the material to be measured before and after abrasion is respectively measured in a weighing mode, and then the difference value of two measurement results is taken as the abrasion loss of the material to be measured.
However, because the measurement error of the weighing method is large, the measurement precision is low, and when the wear resistance of two different materials is compared, especially when the wear resistance of the wear-resistant film material is tested, because the actual wear loss is small, the measurement error is often larger than the actual wear loss, the accuracy is poor, and the obtained measurement data has no convincing force, the current weighing method is not suitable for comparing two different film materials with the friction performance close to that and the wear resistance difference small.
SUMMERY OF THE UTILITY MODEL
in view of this, the utility model aims at providing a mechanism of normal position precision measurement film material's trace wearing and tearing volume, it can measure the thickness variation of film material around wearing and tearing to through regarding this thickness variation as the wearing and tearing volume, thereby can be more accurate, reliably relatively evaluate the wear resistance of friction properties is close, wear resistance difference is little two kinds of different film materials, have extensive market perspective, have great production practice meaning.
Therefore, the utility model provides a mechanism for accurately measuring the micro abrasion loss of the thin film material in situ, which comprises upright columns which are vertically distributed;
The upper part of the upright post is hinged with the right end of a horizontal shaft;
the horizontal shaft can rotate around the upper part of the upright post in the horizontal direction;
The left end of the horizontal shaft is fixedly connected with a displacement sensor;
and the displacement sensor is used for respectively measuring the thin film material placed right below the displacement sensor before and after abrasion to obtain the thickness variation of the surface of the thin film material before and after abrasion, and the thickness variation is used as the abrasion loss of the thin film material.
wherein, the outer wall of the bottom of the upright post is sleeved with a base;
The peripheral edge of the base is fixedly connected with the workbench which is horizontally distributed through a plurality of screws which are arranged at equal intervals.
The left end of the horizontal shaft is fixedly connected with the displacement sensor through a first clamping mechanism;
The rear end of the first card installing mechanism is provided with first through holes which are distributed transversely;
The left end of the horizontal shaft is inserted into the first through hole;
The front end of the first card installing mechanism is provided with second through holes which are vertically distributed;
the displacement sensor is inserted in the second through hole.
wherein,
the front surface of the first card installing mechanism is also provided with a first opening which is vertically distributed;
The rear end of the first notch is communicated with the front side of the second through hole;
the middle parts of the left side and the right side of the first notch are fixedly connected together through a screw.
the diameter of the middle part of the displacement sensor is larger than that of the second through hole.
the upper part of the upright post is hinged with the right end of the horizontal shaft through a second clamping mechanism;
The rear end of the second card installing mechanism is provided with third through holes which are vertically distributed;
the upper part of the upright post is inserted into the third through hole;
The front end of the second card installing mechanism is provided with fourth through holes which are distributed transversely;
the right end of the horizontal shaft is inserted in the fourth through hole.
the front surface of the second card installing mechanism is also provided with a second opening which is transversely distributed;
The rear end of the second notch is communicated with the front side of the fourth through hole;
the middle parts of the upper side and the lower side of the second notch are fixedly connected together through a screw.
the displacement sensor is a vertically distributed contact type displacement sensor, and the bottom surface of the displacement sensor is provided with a probe for contacting with the thin film material.
the displacement sensor is also connected with a data acquisition unit through a signal line;
And the data acquisition unit is used for acquiring and displaying the thickness variation of the thin film material acquired by the displacement sensor before and after abrasion.
By above the utility model provides a technical scheme is visible, compares with prior art, the utility model provides a mechanism of normal position accurate measurement trace wearing and tearing volume, it can measure the thickness variation of being surveyed the material around wearing and tearing to through regard this thickness variation as the wearing and tearing volume, thereby can be more accurate, reliably relatively evaluate the wear resistance of frictional behavior is close, wear resistance difference two kinds of different thin film materials little, have extensive market perspective, have great production practice meaning.
drawings
Fig. 1 is a schematic perspective view of a mechanism for accurately measuring the amount of micro-abrasion of a thin film material in situ according to the present invention;
fig. 2 is a schematic view of a three-dimensional structure of a mechanism for accurately measuring the amount of micro-abrasion of a thin film material in situ, which is provided by the present invention, and is arranged on a worktable;
fig. 3 is a schematic view of the in-situ precise micro-abrasion measuring mechanism of the present invention, illustrating the working state of the in-situ precise micro-abrasion measuring mechanism when measuring a thin film material;
fig. 4 is a schematic view of the working state of the mechanism for accurately measuring the amount of wear of the thin film material in situ when two thin film materials are measured according to the present invention;
In the figure: 1 is a displacement sensor, 2 is a first card installing mechanism, 3 is a horizontal shaft, 4 is a probe, and 5 is an exhaust port;
6 is a second clamping mechanism, and 7 is an upright post;
10 is a workbench, 11 is a first opening, and 12 is a second opening;
13 is a first thin film material, 14 is a first substrate, 15 is a second substrate, and 16 is a second thin film material.
Detailed Description
In order to make the technical field of the present invention better understand, the present invention is further described in detail with reference to the accompanying drawings and embodiments.
Referring to fig. 1 to 4, the present invention provides a mechanism for in-situ accurate measurement of the amount of micro-abrasion of a thin film material, which comprises vertical columns 7;
The upper part of the upright post 7 is hinged with the right end of a horizontal shaft 3; the horizontal shaft 3 is capable of performing a rotational movement in the horizontal direction around the upper portion of the column 7.
The left end of the horizontal shaft 3 is fixedly connected with a displacement sensor 1;
the displacement sensor 1 is used for measuring the thin film material placed right below the displacement sensor before and after abrasion respectively to obtain the thickness variation of the surface of the thin film material before and after abrasion, and the thickness variation is used as the abrasion loss of the thin film material.
in the utility model, in the concrete implementation, the outer wall of the bottom of the upright post 7 is sleeved with a base 5 (specifically a flange base);
The peripheral edge of the base 5 is fixedly connected (screwed) to the horizontally disposed table 10 by a plurality of screws disposed at equal intervals.
In the utility model, in the concrete implementation, the left end of the horizontal shaft 3 is fixedly connected with the displacement sensor 1 through the first card installing mechanism 2;
the rear end of the first card installing mechanism 2 is provided with first through holes which are distributed transversely;
The left end of the horizontal shaft 3 is inserted into the first through hole;
the front end of the first card installing mechanism 2 is provided with second through holes which are vertically distributed;
the displacement sensor 1 is inserted in the second through hole.
In particular, a first opening 11 which is vertically distributed is formed in the front surface of the first card installing mechanism 2;
the rear end of the first notch 11 is communicated with the front side of the second through hole;
the middle parts of the left side and the right side of the first gap 11 are fixedly connected together through a screw.
therefore, through the design of first breach 11, when not screwing up the screw, can make the second through-hole conveniently put into displacement sensor 1, then, through screwing up the screw, the front side of second through-hole is compressed tightly the shrink, has guaranteed reliable fixed, spacing to displacement sensor 1.
in the concrete realization, the diameter at 1 middle part of displacement sensor is greater than the diameter of second through-hole to can not drop down in the second through-hole, conveniently install.
In the utility model, in the concrete implementation, the upper part of the upright post 7 is hinged with the right end of the horizontal shaft 3 through the second card installing mechanism 6;
the rear end of the second card installing mechanism 6 is provided with third through holes which are vertically distributed;
The upper part of the upright post 7 is inserted into the third through hole;
The front end of the second card installing mechanism 6 is provided with fourth through holes which are distributed transversely;
The right end of the horizontal shaft 3 is inserted in the fourth through hole.
in particular, a second opening 12 which is transversely distributed is formed in the front face of the second card installing mechanism 6;
the rear end of the second notch 12 is communicated with the front side of the fourth through hole;
The middle parts of the upper side and the lower side of the second gap 12 are fixedly connected together through a screw.
therefore, through the design of second breach 12, when not screwing up the screw, can be so that the right-hand member of horizontal axis 3 is conveniently inserted to the fourth through-hole, then, through screwing up the screw, the front side of fourth through-hole is compressed tightly the shrink, has guaranteed reliable fixed, spacing to horizontal axis 3 right-hand member.
The utility model discloses in, on specifically realizing, displacement sensor 1 is the contact displacement sensor of perpendicular distribution, and its bottom surface has and is used for carrying out the probe 4 that contacts with the thin film material that is surveyed.
It should be noted that, the contact displacement sensor can detect the thickness variation of the film material to be measured before and after abrasion, which is specifically embodied as: and measuring the film material to be measured before and after abrasion, and collecting the obtained displacement.
in particular, the contact displacement sensor is preferably a high-precision contact displacement sensor, and is an inductive displacement sensor, and the measurement resolution of the sensor can reach the nanometer level.
it should be noted that the probe 4 on the displacement sensor 1 can be in contact with the film material to be measured, and the change in thickness (in the vertical direction, also referred to as height change) of the film material to be measured before and after the abrasion test is monitored to realize in-situ measurement of the abrasion loss.
to the utility model provides a mechanism of normal position accurate measurement trace wearing and tearing volume, it can the direct mount on current friction and wear experiment machine, only need to carry out simple transformation to current friction test machine can (only need can with the utility model discloses, fix in the top that needs the measuring film material that measurands, let displacement sensor 1's probe 4, be located directly over the film material that measurands, can conveniently measure). The existing friction and wear tester is used for carrying out friction test on a thin film material to be tested.
It should be noted that, in the present friction wear testing machine, widely used types include: a roller type abrasion tester, a four-ball type friction abrasion tester, a reciprocating type friction abrasion tester, a cut-in type friction abrasion tester, a disc pin type friction abrasion tester and the like. Since it is a well-known friction test device, it is not described herein.
In the present invention, in order to facilitate the user to observe and know the wear loss obtained by the displacement sensor 1 in time, the displacement sensor 1 is further connected to a data acquisition device (or data acquisition equipment) through a signal line;
and the data acquisition unit (or data acquisition equipment) is used for acquiring and displaying the thickness variation (namely displacement) of the thin film material before and after abrasion acquired by the displacement sensor 1.
It should be noted that the data acquisition unit may be any existing device capable of acquiring data of the displacement sensor and displaying the data. In particular, for example, the displacement sensor may be a direct current rebound type displacement sensor of PDVH20 series produced by shanghai yi electric company ltd, and correspondingly, the data acquisition unit may be an FY series intelligent display control instrument produced by shanghai yi electric company ltd, and the thickness variation (i.e., displacement) of the film material acquired by the displacement sensor 1 before and after abrasion may be acquired and displayed by the intelligent display control instrument.
the utility model discloses in, in specifically realizing, the film material that is surveyed can be any kind of film material, specifically is current wear-resisting film material, for example, can be plastic film, rubber film and metallic film.
The utility model discloses in, on specifically realizing, in order to make things convenient for move and measure film material, can set up film material at the level setting, the basement top surface of stereoplasm, then carry out the measurement of the vertical height situation of change to film material.
In particular, the top surface of the substrate is a plane, and the substrate can be a flat plate made of carbon steel, and can also be a copper plate or an aluminum plate. The thin film material may be coated on the top surface of the substrate by electroplating, chemical plating or vapor deposition, depending on the specific material.
In specific implementation, the substrate may be fixed to the top surface of the worktable by bonding, and of course, the substrate may also be fixed by a fixture and other fixing manners (for example, an electromagnetic chuck may be used, which is a common electromagnetic fixture and a common machine tool accessory product, and the electromagnetic chuck may be embedded and fixed to the top of the worktable, and the top surface of the electromagnetic chuck and the top surface of the worktable are located on the same horizontal plane).
For the present invention, referring to fig. 3, in the implementation, when the height change (i.e. thickness change) before and after the abrasion of the first thin film material 13 on the top surface of the first substrate 14 needs to be measured, first, the probe 4 under the displacement sensor 1 is adjusted to the first thin film material 13 before the friction test (i.e. before the abrasion occurs), so that the probe 4 contacts with the upper surface of the first thin film material 13, and the initial height of the first thin film material 13 is determined. The horizontal shaft 3 is then rotated to move the displacement sensor 1 away from the surface of the first thin-film material 13. At this time, a rubbing test may be performed on the upper surface of the first film material 13 using an existing rubbing tester (of course, the first substrate 14 and the top surface of the first film material 13 may be brought together to a rubbing tester at another position to perform a rubbing test on the first film material 13). After the friction experiment is finished, the horizontal shaft 3 is rotated, the probe 4 below the displacement sensor 1 contacts the upper surface of the abraded first film material 13, the final height at the moment is recorded, and the height difference of two measurements is the abrasion loss and the thickness variation.
To compare the wear resistance properties of two different film materials, a layer of a first film material 13 is positioned on top of a first substrate 14 and a layer of a second film material 16 is positioned on top of a second substrate 15, as shown in fig. 4. First, for the first thin film material 13 and the second thin film material 16 before the friction test (i.e., before the abrasion occurs), the initial heights of the first thin film material 13 and the second thin film material 16 are determined by rotating the water spindle 3 and adjusting the probes 4 under the displacement sensor 1, respectively, so that the probes 4 are in contact with the upper surfaces of the first thin film material 13 and the second thin film material 16, respectively. The horizontal shaft 3 is then rotated to move the displacement sensor 1 away from the surfaces of the first and second thin-film materials 13 and 16. At this time, the friction test may be performed on the upper surfaces of the first film material 13 and the second film material 16 using an existing friction and wear tester (of course, the first substrate 14 and the first film material 13 on the top surface thereof, the second substrate 15 and the second film material 16 on the top surface thereof may be taken to a friction and wear tester at another position, and the friction test may be performed on the first film material 13 and the second film material 16, respectively). After the friction experiment is finished, the horizontal shaft 3 is rotated, the probe 4 below the displacement sensor 1 is respectively contacted with the upper surfaces of the first thin film material 13 and the second thin film material 16 after being abraded, the final heights of the first thin film material 13 and the second thin film material 16 at the moment are respectively recorded, and the height difference of two times of measurement is the abrasion loss and the thickness variation.
for the first film material 13 and the second film material 16, when comparing, if the height difference of two measurements is larger, it means that the abrasion amount is larger, the abrasion resistance is worse, whereas, the height difference of two measurements is smaller, it means that the abrasion amount is smaller, the abrasion resistance is better.
In particular, the dimensions of the first substrate 14 and the second substrate 15 may be 60mm (length) × 15mm (width) × 3mm (height), and may be adjusted according to the actual dimensions of the film, and are not limited to this dimension. In this case, the thickness of the first thin-film material 13 and the second thin-film material 16 may be set to 10 μm or more, and the upper limit of the thickness may be adjusted according to the actual thin-film material, and may be set to 100 μm or less, for example.
therefore, for the present invention, in order to compare the friction performance of two different thin film materials, the wear loss of the two different thin film materials is obtained respectively, and the two different thin film materials can be covered on the top surface of the same substrate (for example, a carbon steel plate, a copper plate or an aluminum plate) respectively, as shown in fig. 4. And then placed under the probe 4 of the displacement sensor 1, and measurements are made before and after wear.
Of course, if the film material can be easily removed from the friction tester, two different film materials can be directly placed under the probe 4 of the displacement sensor 1 to measure before and after abrasion.
it should be noted that, for the present invention, it can be applied to the test of thin film materials (such as plastic film, rubber film and metal film) prepared by any method on a hard substrate (such as the surface of a copper plate or an aluminum plate).
According to the technical scheme provided by the utility model, right the utility model discloses, it can the normal position measure the mechanism of film material's wearing and tearing volume as a section, can the direct mount on current friction test machine's workstation. The change in thickness (i.e., the change in surface height) of the film material before and after abrasion was measured as the amount of abrasion. That is, before friction experiment (i.e. before abrasion), the probe capable of moving up and down is used to measure the surface height change of the measured film material, and during the friction experiment, the probe is removed. After the rubbing experiment (i.e. after abrasion), the probe is moved to the surface of the measured film material again, and the difference of the surface thickness (i.e. the difference of the surface height) of the two measured film materials is compared as the abrasion loss. Therefore, the thickness variation (namely the surface height variation) of the film materials of different materials is measured in situ to be used as the abrasion loss, so that the error caused by the past card installation is greatly reduced, the measurement precision of the abrasion loss is greatly improved, and more accurate data is provided for comparing two different film materials.
To sum up, compare with prior art, the utility model provides a pair of mechanism of normal position precision measurement film material's trace wearing and tearing volume, it can measure film material thickness variation around wearing and tearing to through regarding this thickness variation as the wearing and tearing volume, thereby can be more accurate, reliably relatively evaluate the wear resistance of two kinds of different film materials that frictional behavior is close, the difference of wear resistance is little, have extensive market perspective, have great production practice meaning.
the foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. The mechanism for accurately measuring the micro-abrasion loss of the film material in situ is characterized by comprising upright columns (7) which are vertically distributed;
the upper part of the upright post (7) is hinged with the right end of a horizontal shaft (3);
The horizontal shaft (3) can rotate around the upper part of the upright post (7) in the horizontal direction;
the left end of the horizontal shaft (3) is fixedly connected with a displacement sensor (1);
and the displacement sensor (1) is used for respectively measuring the thin film material placed right below the displacement sensor before and after abrasion to obtain the thickness variation of the surface of the thin film material before and after abrasion, and the thickness variation is used as the abrasion loss of the thin film material.
2. the mechanism for accurately measuring the trace abrasion loss of the film material in situ as claimed in claim 1, wherein the outer wall of the bottom of the upright post (7) is sleeved with a base (5);
the peripheral edge of the base (5) is fixedly connected with the workbench (10) which is horizontally distributed through a plurality of screws which are arranged at equal intervals.
3. The mechanism for accurately measuring the trace abrasion loss of the thin film material in situ according to claim 1, wherein the left end of the horizontal shaft (3) is fixedly connected with the displacement sensor (1) through the first clamping mechanism (2);
The rear end of the first card installing mechanism (2) is provided with first through holes which are distributed transversely;
the left end of the horizontal shaft (3) is inserted into the first through hole;
The front end of the first card installing mechanism (2) is provided with second through holes which are vertically distributed;
The displacement sensor (1) is inserted in the second through hole.
4. The mechanism for accurately measuring the amount of fretting of a thin film material in situ as claimed in claim 3,
the front surface of the first card installing mechanism (2) is also provided with a first opening (11) which is vertically distributed;
The rear end of the first notch (11) is communicated with the front side of the second through hole;
the middle parts of the left side and the right side of the first gap (11) are fixedly connected together through a screw.
5. the mechanism for accurately measuring the amount of the micro-abrasion of the thin film material in situ according to claim 3, wherein the diameter of the middle portion of the displacement sensor (1) is larger than the diameter of the second through hole.
6. The mechanism for accurately measuring the trace abrasion loss of the thin film material in situ according to claim 1, wherein the upper part of the upright post (7) is hinged with the right end of the horizontal shaft (3) through a second clamping mechanism (6);
The rear end of the second clamping mechanism (6) is provided with third through holes which are vertically distributed;
The upper part of the upright post (7) is inserted into the third through hole;
the front end of the second clamping mechanism (6) is provided with fourth through holes which are distributed transversely;
The right end of the horizontal shaft (3) is inserted into the fourth through hole.
7. The mechanism for accurately measuring the trace abrasion loss of the thin film material in situ according to claim 6, wherein the front surface of the second clamping mechanism (6) is also provided with a second notch (12) which is transversely distributed;
The rear end of the second notch (12) is communicated with the front side of the fourth through hole;
the middle parts of the upper side and the lower side of the second gap (12) are fixedly connected together through a screw.
8. The mechanism for accurately measuring the amount of micro-abrasion of a thin film material in situ according to any one of claims 1 to 7, wherein the displacement sensor (1) is a vertically distributed contact type displacement sensor having a probe (4) on its bottom surface for making contact with the thin film material.
9. the mechanism for accurately measuring the trace abrasion loss of the thin film material in situ according to any one of claims 1 to 7, wherein the displacement sensor (1) is further connected with a data acquisition unit through a signal line;
and the data acquisition unit is used for acquiring and displaying the thickness variation of the thin film material acquired by the displacement sensor (1) before and after abrasion.
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Cited By (1)
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CN110243274A (en) * | 2019-04-29 | 2019-09-17 | 天津商业大学 | A kind of mechanism of the micro abrasion loss of original position precise measurement thin-film material |
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CN110243274A (en) * | 2019-04-29 | 2019-09-17 | 天津商业大学 | A kind of mechanism of the micro abrasion loss of original position precise measurement thin-film material |
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