CN209722362U - Diffusion furnace - Google Patents
Diffusion furnace Download PDFInfo
- Publication number
- CN209722362U CN209722362U CN201821931370.7U CN201821931370U CN209722362U CN 209722362 U CN209722362 U CN 209722362U CN 201821931370 U CN201821931370 U CN 201821931370U CN 209722362 U CN209722362 U CN 209722362U
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- CN
- China
- Prior art keywords
- furnace
- furnace body
- inlet pipe
- air inlet
- admission line
- Prior art date
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- Expired - Fee Related
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 37
- 239000007921 spray Substances 0.000 claims abstract description 29
- 238000007599 discharging Methods 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 14
- 229910052796 boron Inorganic materials 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Furnace Details (AREA)
Abstract
The utility model provides a kind of diffusion furnace, including furnace body, inlet duct and air-out apparatus, one end of the furnace body is equipped with fire door, the other end of the furnace body is equipped with furnace tail, the inlet duct and the air-out apparatus are connect with the furnace body, the inlet duct includes the first admission line that gas is conveyed into the furnace body, the air-out apparatus includes the exhaust pipe of the discharge gas outside the furnace body, first admission line includes being located at intracorporal first air inlet pipe of the furnace, first air inlet pipe is equipped with several spray orifices, the spray orifice is open towards different directions.The utility model allows spray orifice multiple directions in furnace body to convey gas, improves gas in furnace body and disperse problem of non-uniform, promote Si wafer quality by being equipped with the spray orifice towards different directions in air inlet pipe.
Description
Technical field
The utility model relates to a kind of diffusion furnace more particularly to a kind of diffusion furnaces for solar battery sheet manufacture.
Background technique
Diffusion technique is to prepare the critical process of solar battery sheet, it is that certain a certain amount of impurity is doped to crystal
In silicon, the microprocess of diffusion is a kind of transport process of substance, is generated by the random motion of semiconductor lattice lattice point,
This movement is always carried out by the higher place of particle concentration towards the lower place of concentration, so that the distribution of particle be made to tend to be equal
It is even.
Wherein, boron diffusion technique is to make the key technology of N-type solar battery sheet, by using Boron tribromide (BBr3)
Liquid forms PN junction, front-surface field (FSF) or back surface field (BSF) on N-type silicon chip matrix.In boron diffusion process, boron
The boron source (i.e. Pyrex) that the distribution of doping concentration is formed dependent on silicon chip surface, the uniformity of boron source are to influence boron atom to exist
The uniformity with diffused sheet resistance is distributed in silicon wafer.However, the fusion temperature of the boron source formed in diffusion process is higher, due to boron source
It is in a liquid state, as air-flow changes, boron source forms the poor thickness of uniformity easily on silicon wafer；At high operating temperatures, in boron source
Boron atom also easily unevenly diffuse into inside silicon wafer.
Currently, carrying out the diffusion of normal pressure boron using Tempress diffusion furnace, the diffusion of normal pressure boron is equal compared to what low pressure boron was spread
Even property is worse, and internal pressure, which slightly changes, can greatly influence diffused sheet resistance.In addition, the centre of diffusion source gas from furnace tail is straight
It taps into furnace body, air-flow is acted on mainly by tail gas extraction to reach the uniformity of source gas dispersion inside boiler tube, further shadow
Diffused sheet resistance is rung, the problem of diffused sheet resistance uniformity difference is caused.
In view of this, it is necessory to be improved to the diffusion furnace manufactured for solar battery sheet, to solve above-mentioned ask
Topic.
Utility model content
The purpose of this utility model is to provide a kind of diffusion furnaces for solar battery sheet manufacture easily to operate.
To achieve the above objectives, the present invention adopts the following technical solutions:
One end of a kind of diffusion furnace, including furnace body, inlet duct and air-out apparatus, the furnace body is equipped with fire door, the furnace
The other end of body is equipped with furnace tail, and the inlet duct and the air-out apparatus are connect with the furnace body, the inlet duct packet
The first admission line that gas is conveyed into the furnace body is included, the air-out apparatus includes the row of the discharge gas outside the furnace body
Feed channel, first admission line include being located at intracorporal first air inlet pipe of the furnace, and first air inlet pipe is equipped with several
Spray orifice, the spray orifice are open towards different directions, and the distance between described spray orifice is gradually increased on the direction of furnace tail to fire door.
As the further improved technical solution of the utility model, the inlet duct further includes the second admission line, institute
Stating the second admission line includes being located at intracorporal second air inlet pipe of the furnace, and second air inlet pipe is equipped with several spray orifices.
As the further improved technical solution of the utility model, first air inlet pipe is located at top in the furnace body,
Second air inlet pipe is located at lower section in the furnace body, and the exhaust pipe is located at lower section in the furnace body.
As the further improved technical solution of the utility model, the diffusion furnace further includes the ring-type being located in furnace body
Button is hung, for hanging first air inlet pipe.
As the further improved technical solution of the utility model, several spray orifices in first air inlet pipe are in furnace body
It is open towards left and right, lower three directions, several spray orifices in second air inlet pipe are open upward in furnace body.
As the further improved technical solution of the utility model, first admission line and second admission line
It further include the connection tube outside the furnace body, the connection tube connects with first air inlet pipe and second air inlet pipe respectively
Lead to and assign in the through-hole being arranged at furnace tail, the connection tube is detachably connected with corresponding air inlet pipe in through hole.
As the further improved technical solution of the utility model, the inlet duct further includes third admission line, institute
It states the setting of third admission line position, third admission line among the furnace body and conveys gas at the furnace tail.
As the further improved technical solution of the utility model, first air inlet pipe and second air inlet pipe are from institute
Furnace tail is stated to extend to the fire door and be silent close to one end of the fire door.
As the further improved technical solution of the utility model, the inlet duct further includes the supervisor being sequentially connected
Road, several shunt conduits, gas control flowmeter and several admission lines in shunt conduit described in every.
The beneficial effects of the utility model are: being located at the intracorporal air inlet pipe of furnace using being arranged in diffusion furnace, and in air inlet
Pipe is equipped with the spray orifice towards different directions, so that spray orifice multiple directions in furnace body is conveyed gas, improves gas in furnace body
Disperse problem of non-uniform, promotes the photoelectric conversion efficiency of solar battery sheet.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model diffusion furnace；
Fig. 2 is the bottom view of the first air inlet pipe in Fig. 1；
Fig. 3 is the top view of the second air inlet pipe in Fig. 1.
Specific embodiment
In order to keep the purpose of this utility model, technical solution and advantage clearer, with reference to the accompanying drawing and it is embodied
The utility model is described in detail in example.
As shown in Figure 1, being the structural schematic diagram of the utility model diffusion furnace.Diffusion furnace include furnace body 1, inlet duct 2 and
Air-out apparatus 3, furnace body 1 is for placing silicon wafer, and inlet duct 2 is for conveying gas into furnace body 1, and air-out apparatus 3 is for discharging
Exhaust gas in furnace body 1, inlet duct 2 and air-out apparatus 3 are communicated with the inside of furnace body 1, to form a gas in furnace body 1
Body circulation.
One end of furnace body 1 is equipped with fire door, and the other end is equipped with furnace tail, and inlet duct 2 and air-out apparatus 3 are from furnace tail and furnace
Body 1 connects.Inlet duct 2 includes 21, three shunt conduits 22 of a main pipeline being sequentially connected, is located at every shunt conduit 22
On gas control flowmeter 23 and three admission lines 24.Inlet duct 2 can be by adjusting the gas control in shunt conduit 22
Flowmeter 23 processed adjusts the amount of the conveyed gas of every admission line 24, to guarantee the stability of air pressure in furnace body 1.Outlet
Device 3 includes an exhaust pipe 31, and exhaust pipe 31 is located at lower section in furnace body 1 and extends furnace body 1, and exhaust pipe 31 leans on
Nearly fire door end is that opening designs and receives exhaust gas at fire door by the opening, convenient for exhaust gas in furnace body 1 in furnace after circulation
It is sucked out at mouthful.
In addition, avoid damaging to enable diffusion furnace high temperature resistant, thus prolong the service life, furnace body 1, inlet duct
2 and the material of air-out apparatus 3 be quartz.
Three admission lines 24 are respectively the first admission line 241, the second admission line 242 and third admission line 243.
Wherein, the first admission line 241 includes the first air inlet pipe 2411 in furnace body 1 and the connection tube outside furnace body 1
2410, the first air inlet pipe 2411 from furnace tail extend to fire door and close to fire door one end be it is silent, connection tube 2410 is assigned in furnace
In the through-hole (not shown) being arranged at tail.First air inlet pipe 2411 is connected to connection tube 2410 and detachably connects in through hole
It connects, convenient for the disassembly and installation of the first admission line 241.In addition, the first air inlet pipe 2411 is located at top and and furnace body in furnace body 1
Cyclic annular button (not shown) of hanging in 1 connects, and ring-type hangs button for hanging the first air inlet pipe 2411, to make the first air inlet
Pipe 2411 conveys downwards gas from the top in furnace body 1, convenient for gas diffusion in furnace body 1.
Second admission line 242 includes the second air inlet pipe 2421 in furnace body 1 and the connection tube outside furnace body 1
2420, the second air inlet pipe 2421 from furnace tail extend to fire door and close to fire door one end be it is silent, connection tube 2420 is assigned in furnace
In the through-hole (not shown) being arranged at tail.Second air inlet pipe 2421 is connected to and detachable in through hole with connection tube 2420
Connection, convenient for the disassembly and installation of the second admission line 242.In addition, the second air inlet pipe 2421 is located at lower section in furnace body 1, thus
The gas shape for making the second air inlet pipe 2421 convey gas upwards from the lower section in furnace body 1 and being conveyed with the first air inlet pipe 2411
At convection current, the diffusion of gas in furnace body 1 is further enhanced.
Third admission line 243 includes the connection tube 2430 outside furnace body 1, and connection tube 2430 is arranged among furnace body 1
Position is simultaneously open in furnace tail, so that third admission line 243 be made to convey gas into furnace body 1 from the centre of furnace tail, pushes furnace tail
It is mobile to fire door to locate gas, further enhances the diffusion of gas in furnace body 1.
As shown in Fig. 2, for the bottom view of the first air inlet pipe 2411 in Fig. 1.First air inlet pipe 2411 is equipped with towards furnace body 1
The spray orifice 2412 of interior left and right, lower three different directions opening, spray orifice 2412 in each direction are arranged along furnace wall in "-" type
In the first air inlet pipe 2411, the distance between every row's spray orifice 2412 is gradually increased from furnace tail to the direction of fire door, to increase
The amount of gas is conveyed at furnace tail, convenient for pushing the gas at furnace tail to spray from the exhaust pipe 31 at fire door.
As shown in figure 3, for the top view of the second air inlet pipe 2421 in Fig. 1.2421 are equipped with towards furnace body 1 in second air inlet pipe
The spray orifice 2422 of upper opening, spray orifice 2422 is arranged in the second air inlet pipe 2421 along furnace wall in "-" type, between spray orifice 2422
Distance be gradually increased from furnace tail to the direction of fire door, thus increase at furnace tail convey gas amount, convenient for push furnace tail at
Gas is sprayed from the exhaust pipe 31 at fire door.
In conclusion utility model provides a kind of diffusion furnace, including furnace body 1, inlet duct 2 and air-out apparatus 3, furnace body 1
One end be equipped with fire door, the other end of furnace body 1 is equipped with furnace tail, and inlet duct 2 and air-out apparatus 3 connects with furnace body 1, and air inlet fills
Setting 2 includes the first admission line 241 that gas is conveyed into furnace body 1, and air-out apparatus 3 includes the row to the outer discharge gas of furnace body 1
Feed channel 31, the first admission line 241 includes the first air inlet pipe 2411 in furnace body 1, if the first air inlet pipe 2411 is equipped with
Dry spray orifice, spray orifice are open towards different directions.The utility model is made by being equipped with the spray orifice towards different directions in air inlet pipe
Spray orifice multiple directions can convey gas in furnace body 1, improve gas in furnace body 1 and disperse problem of non-uniform, promote solar-electricity
The photoelectric conversion efficiency of pond piece.
It is used herein such as "upper", "lower", "left", "right", "front", "rear", representation space relative position term
It is to describe relationship of the feature relative to another feature as shown in the drawings for the purpose convenient for explanation.It can manage
Solution, according to the difference of product placement position, the term of relative space position can be intended to include other than orientation as shown in the figure
Different direction, should not be interpreted as limitations on claims.In addition, descriptor "horizontal" used herein and non-fully
It is equal to along the inclination for perpendicular to gravity direction, allowing to have certain angle.
In addition, above embodiments are merely to illustrate the utility model and not limit technical side described in the utility model
Case, understanding of this description should be based on persons of ordinary skill in the field, although this specification is referring to above-mentioned
Embodiment has been carried out detailed description to the utility model, still, those skilled in the art should understand that, affiliated skill
The technical staff in art field still can be modified or replaced equivalently the utility model, and all not depart from this practical new
The technical solution and its improvement of the spirit and scope of type, should all cover in the scope of the claims of the utility model.
Claims (9)
1. one end of a kind of diffusion furnace, including furnace body, inlet duct and air-out apparatus, the furnace body is equipped with fire door, the furnace body
The other end be equipped with furnace tail, the inlet duct and the air-out apparatus are connect with the furnace body, it is characterised in that: it is described into
Device of air includes the first admission line that gas is conveyed into the furnace body, and the air-out apparatus includes discharging outside the furnace body
The exhaust pipe of gas, first admission line include being located at intracorporal first air inlet pipe of the furnace, first air inlet pipe
Equipped with several spray orifices, the spray orifice is open towards different directions, and the distance between described spray orifice is on the direction of furnace tail to fire door
It is gradually increased.
2. diffusion furnace according to claim 1, it is characterised in that: the inlet duct further includes the second admission line, institute
Stating the second admission line includes being located at intracorporal second air inlet pipe of the furnace, and second air inlet pipe is equipped with several spray orifices.
3. diffusion furnace according to claim 2, it is characterised in that: first air inlet pipe is located at top in the furnace body,
Second air inlet pipe is located at lower section in the furnace body, and the exhaust pipe is located at lower section in the furnace body.
4. diffusion furnace according to claim 1, it is characterised in that: the diffusion furnace further includes the ring-type being located in furnace body
Button is hung, for hanging first air inlet pipe.
5. diffusion furnace according to claim 2, it is characterised in that: several spray orifices in first air inlet pipe are in furnace body
It is open towards left and right, lower three directions, several spray orifices in second air inlet pipe are open upward in furnace body.
6. diffusion furnace according to claim 2, it is characterised in that: first admission line and second admission line
It further include the connection tube outside the furnace body, the connection tube connects with first air inlet pipe and second air inlet pipe respectively
Lead to and assign in the through-hole being arranged at furnace tail, the connection tube is detachably connected with corresponding air inlet pipe in through hole.
7. diffusion furnace according to claim 1, it is characterised in that: the inlet duct further includes third admission line, institute
It states the setting of third admission line position, third admission line among the furnace body and conveys gas at the furnace tail.
8. diffusion furnace according to claim 2, it is characterised in that: first air inlet pipe and second air inlet pipe are from institute
Furnace tail is stated to extend to the fire door and be silent close to one end of the fire door.
9. diffusion furnace according to claim 1, it is characterised in that: the inlet duct further includes the supervisor being sequentially connected
Road, several shunt conduits, gas control flowmeter and several admission lines in shunt conduit described in every.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821931370.7U CN209722362U (en) | 2018-11-22 | 2018-11-22 | Diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821931370.7U CN209722362U (en) | 2018-11-22 | 2018-11-22 | Diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209722362U true CN209722362U (en) | 2019-12-03 |
Family
ID=68658630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821931370.7U Expired - Fee Related CN209722362U (en) | 2018-11-22 | 2018-11-22 | Diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209722362U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111188093A (en) * | 2020-02-17 | 2020-05-22 | 通威太阳能(眉山)有限公司 | Air inlet assembly and diffusion device |
-
2018
- 2018-11-22 CN CN201821931370.7U patent/CN209722362U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111188093A (en) * | 2020-02-17 | 2020-05-22 | 通威太阳能(眉山)有限公司 | Air inlet assembly and diffusion device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, Lushan Road, Suzhou hi tech Zone, Suzhou City, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No. 199, Lushan Road, Suzhou hi tech Zone, Suzhou City, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191203 Termination date: 20211122 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |