CN209669362U - It is electrolysed legal system germane electrolysis unit - Google Patents
It is electrolysed legal system germane electrolysis unit Download PDFInfo
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- CN209669362U CN209669362U CN201822169458.6U CN201822169458U CN209669362U CN 209669362 U CN209669362 U CN 209669362U CN 201822169458 U CN201822169458 U CN 201822169458U CN 209669362 U CN209669362 U CN 209669362U
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Abstract
The utility model relates to germane preparation technical fields, disclose a kind of electrolysis legal system germane electrolysis unit, including electrolytic cell, the liquid outlet of the electrolytic cell is connect with the inlet of the back-flow scrubbing device of electrolyte, the liquid outlet of the back-flow scrubbing device of electrolyte is connect with the inlet of the electrolytic cell, constitutes electrolyte circulation loop;Electrolyte, electrolysis anode and electrolytic cathode are equipped in the electrolytic cell, the electrolysis anode and electrolytic cathode are connected with the positive and negative anodes of external power supply respectively.Germane is prepared using electrolytic cell, other gases will not be generated, ensure that the preparation purity of germane, electrolyte in electrolytic cell passes through after the back-flow scrubbing device purified treatment of electrolyte, it is back in electrolytic cell, guarantees the continuous electrolysis work of electrolytic cell, improve the utilization rate of electrolytic efficiency and electrolyte, simultaneously, the precipitating damage electrolysis unit that purified electrolyte effectively prevent electrolytic process to generate, structure is simple, easy to operate, circulation production, improves the yield of Germane gas.
Description
Technical field
The utility model relates to germane preparation technical fields, more particularly to a kind of electrolysis legal system germane electrolysis unit.
Background technique
In recent years, global economy structure and re-invent industry upgrading are accelerated, and electronics and information industry is all placed in weight by countries in the world
The position wanted.Electronics special gas determines the performance of electronic product, price as electronics industry supportive raw material, quality
The cost of competition of electronic product is controlled, therefore the technology of preparing for developing high pure electronic special gas seems especially urgent.
Germane is important used in electronic industry unstrpped gas, is the important former material for manufacturing HpGe and various sige alloys
Material, with the fast development of semi-conductor industry, the requirement to germane is increasing.Germane, molecular formula GeH4, molecular weight 76.64,
It is colourless, hypertoxic, can spontaneous combustion, noncorrosive gases.Thermal stability is poor, and germane slowly aoxidizes at 160~180 DEG C, about at 280 DEG C
It can detect that germane is decomposed into germanium and hydrogen, resolve into elemental Germanium and hydrogen in 350 DEG C of germane almost all;The self-catalysis of germane
Property is very strong, once being decomposed to form metal covering film, will sharply decompose, therefore its decomposition explosion risk is very high.Germane is general
By chemical reduction method, electrochemical reaction method, the synthesis of Plasma synthesis method, but production scale is small, and purity is low, with high costs, system
The about development of China's semiconductor industry.
Utility model content
(1) technical problems to be solved
The purpose of the utility model is to provide a kind of electrolysis method to prepare germane electrolysis unit, to solve existing electrolysis unit
.
(2) technical solution
In order to solve the above-mentioned technical problem, the utility model provides a kind of electrolysis legal system germane electrolysis unit, including electricity
Slot is solved, the liquid outlet of the electrolytic cell is connect with the inlet of the back-flow scrubbing device of electrolyte, the back-flow scrubbing device of electrolyte
Liquid outlet is connect with the inlet of the electrolytic cell, constitutes electrolyte circulation loop;Electrolyte, electrolysis are equipped in the electrolytic cell
Anode and electrolytic cathode, the electrolysis anode and electrolytic cathode are connected with the positive and negative anodes of external power supply respectively.
It wherein, further include electrolyte circulatory pool, the liquid outlet of the electrolyte circulatory pool and the inlet of the electrolytic cell
Connection, the inlet of the electrolyte circulatory pool are connect with the liquid outlet of the back-flow scrubbing device of the electrolyte.
Wherein, the connecting line of the inlet of the liquid outlet and electrolytic cell of the electrolyte circulatory pool is equipped with first
Circulating pump, the pipeline that the inlet of the back-flow scrubbing device of electrolyte is connect with the liquid outlet of the electrolytic cell are equipped with second and follow
Ring pump.
It wherein, further include nitrogen supercharging holding vessel and nitrogen stabilization pressure holding vessel, the outlet of the nitrogen supercharging holding vessel
Mouthful connect with the air inlet of the nitrogen stabilization pressure holding vessel, the gas outlet of the nitrogen stabilization pressure holding vessel and the electrolytic cell into
Port connection, to be purged to electrolysis unit nitrogen.
Wherein, the pipeline that the nitrogen stabilization pressure holding vessel is connect with the electrolytic cell is equipped with purging bypass duct, described to blow
Sweep the pipeline that the other end of bypass duct is connect with the liquid outlet of the back-flow scrubbing device of the electrolyte with the inlet of the electrolytic cell
Connection.
It wherein, further include germane displacer and gas storage warehouse, the air inlet and the electrolytic cell of the germane displacer
Gas outlet connection, the gas outlet of the germane displacer is connect with the air inlet of the gas storage warehouse.
It wherein, further include electric controller, the electric controller is supervised with the gas being arranged in the electrolytic cell respectively
Device is surveyed to connect with the germane concentration detector being arranged in the germane displacer.
Wherein, the electrolytic cell inner sidewall is equipped with liner.
Wherein, the electrolytic cell is column type electrolytic cell, and the electrolytic cell is equipped with upper viewing window and lower viewing window.
(3) beneficial effect
A kind of electrolysis legal system germane electrolysis unit provided by the utility model, prepares germane using electrolytic cell, will not produce
Other raw gases, ensure that the preparation purity of germane, and the electrolyte in electrolytic cell passes through the back-flow scrubbing device purified treatment of electrolyte
Afterwards, it is back in electrolytic cell, guarantees the continuous electrolysis work of electrolytic cell, improve the utilization rate of electrolytic efficiency and electrolyte, meanwhile,
The precipitating damage electrolysis unit that purified electrolyte effectively prevent electrolytic process to generate, structure is simple, easy to operate, circulation life
It produces, improves the yield of Germane gas.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that the utility model embodiment is electrolysed legal system germane electrolysis unit.
In figure, 1: integrated electro-hydraulic cabinet;11: electrolyte circulatory pool;12: power supply;13: electric controller;131: gas-monitoring
Device;132: germane concentration detector;2: electrolytic cell;21: electrolytic cathode;22: electrolysis anode;23: upper viewing window;24: lower form
Mouthful;3: gas-liquid handles cabinet;31: nitrogen stabilization pressure holding vessel;32: germane displacer;33: the back-flow scrubbing device of electrolyte;4: distributing cabinet;
41: nitrogen supercharging holding vessel;42: gas storage warehouse;5: first circulation pump;6: second circulation pump;7: hand-operated valve.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is a part of the embodiment of the utility model, instead of all the embodiments.Based on the reality in the utility model
Apply example, those of ordinary skill in the art's every other embodiment obtained without making creative work, all
Belong to the range of the utility model protection.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection;It can be mechanical connection, be also possible to be electrically connected;Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
In addition, in the description of the present invention, unless otherwise indicated, " multiple ", " more ", " multiple groups " are meant that two
A or more than two, " several ", " several ", " several groups " are meant that one or more.
As shown in Figure 1, the utility model embodiment provides a kind of electrolysis legal system germane electrolysis unit, including electrolytic cell 2,
The liquid outlet of electrolytic cell 2 is connect with the inlet of the back-flow scrubbing device 33 of electrolyte, the liquid outlet of the back-flow scrubbing device 33 of electrolyte with
The inlet of electrolytic cell 2 connects, and constitutes electrolyte circulation loop.
It wherein, further include electrolyte circulatory pool 11, electrolyte circulatory pool 11 is equipped with inlet and liquid outlet, fills as electrolysis
The offer part of required electrolyte is provided.The liquid outlet of electrolyte circulatory pool 11 is connect with the inlet of electrolytic cell 2 by liquid pushing tube, is sent
Liquid pipe is equipped with first circulation pump 5 and the first valve, and the first valve is arranged in first circulation and pumps on the liquid pushing tube in 5 downstreams.Electrolysis
The inlet of liquid circulatory pool 11 is connect with the liquid outlet of the back-flow scrubbing device 33 of electrolyte, and the electrolyte in entire electrolysis unit is formed
The utilization rate of electrolyte is improved in circuit.Electric controller 13 connects with gas monitor 131 and germane concentration detector 132 respectively
It connects, gas monitor 131 is arranged in electrolytic cell 2, to monitor the response situation and Germane gas of electrolytic cell 2 electrolyte inside
Quantum of output, germane concentration detector 132 is arranged in germane displacer 32, to monitor the concentration of germane.In electric controller
13, under 132 collective effect of gas monitor 131 and germane concentration detector, guarantee the safety in production of entire electrolysis unit, work as inspection
It measures electrolysis unit gas leakage and first time is stopped the electrolysis work of electrolytic cell 2 by liquid leakage, system.
Further, further include power supply 12, set in electrolytic cell 2 there are two electrode, respectively electrolytic cathode 21 and electrolysis be just
Pole 22, electrolytic cathode 21 are connect by cable with the cathode of power supply 12, are electrolysed anode 22 and are connected by the anode of cable and power supply 12
It connects, electrolytic cathode 21 generates Germane gas, and electrolysis anode 22 does not generate germane.Power supply can be adjusted according to the amount for generating Germane gas
12 output electric current and voltage guarantees safety in production.Power supply 12 and electrolyte circulatory pool 11 are arranged in integrated electro-hydraulic cabinet 1.
Wherein, electrolytic cell 2 is column type electrolytic cell, and the material of electrolytic cell 2 is stainless steel, and the inner wall of electrolytic cell 2 is sticked interior
Lining, the material of liner are polytetrafluoroethylene (PTFE) or polyether-ether-ketone, have good anti-corrosion function, prevent electrolytic corrosion electrolytic cell.
Electrolytic cell 2 be equipped with upper viewing window 23 and lower viewing window 24, facilitate staff check 2 electrolyte inside of electrolytic cell response situation and
Surplus guarantees continuous production.
It further, further include nitrogen stabilization pressure holding vessel 31, germane displacer 32 and the back-flow scrubbing device 33 of electrolyte, nitrogen
The air inlet of pressure stabilizing holding vessel 31 is connect with the gas outlet of the nitrogen supercharging holding vessel 41 in distributing cabinet 4, nitrogen stabilization pressure holding vessel
31 gas outlet is connect by scavenging air pipe with the air inlet of electrolytic cell 2, and scavenging air pipe is equipped with the 4th valve.Specifically, before electrolysis,
Nitrogen enters in nitrogen stabilization pressure holding vessel 31 after the pressurization of nitrogen supercharging holding vessel 41, and then is passed through nitrogen into electrolytic cell 2,
Security context is manufactured for cell reaction, prevents germane from exploding, while checking whether entire electrolysis unit seals completely.Nitrogen
Pressure stabilizing holding vessel 31, germane displacer 32 and the back-flow scrubbing device 33 of electrolyte are arranged in gas-liquid processing cabinet 3.
Wherein, the air inlet of germane displacer 32 is connect by air inlet pipe with the gas outlet of electrolytic cell 2, and air inlet pipe is equipped with
Second valve, the germane for being electrolysed generation enter germane ejector 32, Germane gas are dried and are pressed in germane displacer 32
Contracting is handled, the gas concentration of germane in 132 real-time detection germane displacer 32 of germane concentration detector.Germane displacer 32 goes out
Port is connect with the gas storage warehouse 42 in distributing cabinet 4, and connecting line is equipped with hand-operated valve 7, when germane concentration detector 132 is examined
After survey germane concentration is up to standard, hand-operated valve 7 is opened, the germane in germane displacer 32 is discharged into gas storage warehouse 42, in case after
Continuous process requirement.
Further, the inlet of the back-flow scrubbing device 33 of electrolyte is connect with the liquid outlet of electrolytic cell 2 by return pipe, is returned
Flow tube is equipped with second circulation pump 6.The return pipe that second circulation pumps 6 upstreams is connect with one end of purging bypass duct, purges branch
The other end of pipe is connect with the scavenging air pipe of the 4th valve downstream, and purging bypass duct is equipped with the 5th valve, to return pipe
Remaining electrolyte is purged on tube wall.The installation site of first circulation pump 5 and second circulation pump 6 is needed all in accordance with actual production
It is arranged, lift is 3~8m, guarantees the stability of flow and liquid fan-out capability of entire electrolysis unit.
Wherein, the liquid outlet of the back-flow scrubbing device 33 of electrolyte is connect with the inlet of electrolyte circulatory pool 11.Specifically, electric
Electrolyte after reaction is filtered by the solution back-flow scrubbing device 33 of liquid, and the reaction precipitate in electrolyte is purged, is prevented
Pollution damage electrolysis unit, improves the utilization rate of electrolyte.Connecting pipe used in entire electrolysis unit is stainless steel material,
Liner is equipped in connecting pipe, the material of liner is polytetrafluoroethylene (PTFE) or polyether-ether-ketone, has good anti-corrosion function, prevent by
Corrosion.
A kind of electrolysis legal system germane electrolysis unit provided by the utility model, prepares germane using electrolytic cell, will not produce
Other raw gases, ensure that the preparation purity of germane, and the electrolyte in electrolytic cell passes through the back-flow scrubbing device purified treatment of electrolyte
Afterwards, it is back in electrolytic cell, guarantees the continuous electrolysis work of electrolytic cell, improve the utilization rate of electrolytic efficiency and electrolyte, meanwhile,
The precipitating damage electrolysis unit that purified electrolyte effectively prevent electrolytic process to generate, structure is simple, easy to operate, circulation life
It produces, improves the yield of Germane gas.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (9)
1. a kind of electrolysis legal system germane electrolysis unit, which is characterized in that including electrolytic cell, the liquid outlet and electricity of the electrolytic cell
The inlet connection of the back-flow scrubbing device of liquid is solved, the liquid outlet of the back-flow scrubbing device of electrolyte and the inlet of the electrolytic cell connect
It connects, constitutes electrolyte circulation loop;Electrolyte, electrolysis anode and electrolytic cathode, the electrolysis anode are equipped in the electrolytic cell
It is connected respectively with the positive and negative anodes of external power supply with electrolytic cathode.
2. electrolysis legal system germane electrolysis unit as described in claim 1, which is characterized in that it further include electrolyte circulatory pool,
The liquid outlet of the electrolyte circulatory pool is connect with the inlet of the electrolytic cell, the inlet of the electrolyte circulatory pool and institute
State the liquid outlet connection of the back-flow scrubbing device of electrolyte.
3. electrolysis legal system germane electrolysis unit as claimed in claim 2, which is characterized in that the electrolyte circulatory pool goes out
The connecting line of the inlet of liquid mouth and the electrolytic cell is pumped equipped with first circulation, the feed liquor of the back-flow scrubbing device of electrolyte
The pipeline that mouth is connect with the liquid outlet of the electrolytic cell is pumped equipped with second circulation.
4. electrolysis legal system germane electrolysis unit as described in claim 1, which is characterized in that further include nitrogen supercharging holding vessel
With nitrogen stabilization pressure holding vessel, the gas outlet of the nitrogen supercharging holding vessel is connect with the air inlet of the nitrogen stabilization pressure holding vessel,
The gas outlet of the nitrogen stabilization pressure holding vessel is connect with the air inlet of the electrolytic cell, to purge to electrolysis unit nitrogen.
5. as claimed in claim 4 electrolysis legal system germane electrolysis unit, which is characterized in that the nitrogen stabilization pressure holding vessel with
The pipeline of the electrolytic cell connection is equipped with purging bypass duct, and the other end of the purging bypass duct and electrolyte reflux are net
Change the piping connection that the liquid outlet of device is connect with the inlet of the electrolytic cell.
6. electrolysis legal system germane electrolysis unit as described in claim 1, which is characterized in that further include that germane displacer is gentle
The air inlet of body storage warehouse, the germane displacer is connect with the gas outlet of the electrolytic cell, the outlet of the germane displacer
Mouth is connect with the air inlet of the gas storage warehouse.
7. electrolysis legal system germane electrolysis unit as claimed in claim 6, which is characterized in that it further include electric controller, institute
State electric controller respectively with the gas monitor being arranged in the electrolytic cell and the germanium being arranged in the germane displacer
The connection of alkane concentration detector.
8. electrolysis legal system germane electrolysis unit as described in claim 1, which is characterized in that the electrolytic cell inner sidewall is equipped with
Liner.
9. such as the described in any item electrolysis legal system germane electrolysis units of claim 1-8, which is characterized in that the electrolytic cell is
Column type electrolytic cell, the electrolytic cell are equipped with upper viewing window and lower viewing window.
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CN201822169458.6U CN209669362U (en) | 2018-12-21 | 2018-12-21 | It is electrolysed legal system germane electrolysis unit |
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CN201822169458.6U CN209669362U (en) | 2018-12-21 | 2018-12-21 | It is electrolysed legal system germane electrolysis unit |
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Effective date of registration: 20210129 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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