CN209649905U - A kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism - Google Patents
A kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism Download PDFInfo
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- CN209649905U CN209649905U CN201822053440.XU CN201822053440U CN209649905U CN 209649905 U CN209649905 U CN 209649905U CN 201822053440 U CN201822053440 U CN 201822053440U CN 209649905 U CN209649905 U CN 209649905U
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- silicon wafer
- carving machine
- fixture block
- protection mechanism
- bolt
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Abstract
The duplexing sequence carving machine of the silicon wafer processing that the utility model discloses a kind of with protection mechanism, including pedestal and carving machine, placing groove is offered inside at the front surface center of the pedestal, workbench is welded at the top center of the pedestal, the bottom center bolt of the workbench is fixed with servo motor, the outer bolt of the chuck is fixed with XTL-100 electric telescopic rod, the telescopic end bolt of the XTL-100 electric telescopic rod is fixed with fixture block, the inside of the fixture block is sliding to be embedded with clamping plate, extruding spring ring is symmetrically welded between the fixture block and clamping plate, the side for being internally located at clamping plate of the fixture block is provided with pressure sensor.In the utility model, the setting of pressure sensor, the dynamics of detectable silicon wafer clamping, when pressure reaches rated value, pressure sensor can send data to AVR central control processor, AVR central control processor will control XTL-100 electric telescopic rod and stop working, so that the clamping for effectively preventing silicon wafer is impaired.
Description
Technical field
The utility model belongs to duplexing sequence carving machine technical field, and specially a kind of silicon wafer with protection mechanism, which is processed, to be used
Duplexing sequence carving machine.
Background technique
Carving machine it be numerically-controlled machine tool one kind.Metal laser carving machine can carry out metal or nonmetal plate, tubing
Non-contact cutting and boring is particularly suitable for the materials such as stainless steel plate, iron plate, silicon wafer, potsherd, titanium alloy, epoxy, A3 steel, diamond
The laser cutting process of material.The stable equipment operation is reliable, processing quality is good, high-efficient, easy to operate easy to maintain.Due to silicon
The quality of piece is more crisp, however the duplexing sequence carving machine of existing silicon wafer processing, and inside can be to the machine of silicon wafer resilient protection without setting
Structure, the clamping for easily leading to silicon wafer is impaired, while the duplexing sequence carving machine of existing silicon wafer processing, is not easy to different-diameter silicon wafer
Clamping processing is limited, and clamping stability is poor, the duplexing sequence carving machine of last existing silicon wafer processing can not process silicon wafer
Treated, and break flour is collected processing, and the daily cleaning for the person of being not convenient to use uses.
Utility model content
The purpose of this utility model is that: can be to the mechanism of silicon wafer resilient protection without setting in order to solve inside, clamping is steady
It is qualitative poor, and the break flour processed is difficult to the problem of being collected processing, provides a kind of silicon wafer processing use with protection mechanism
Duplexing sequence carving machine.
The technical solution adopted in the utility model is as follows: a kind of duplexing sequence finishing impression of silicon wafer processing with protection mechanism
Machine, including pedestal and carving machine, the front surface side of the pedestal offer electric cabinet, and the electric cabinet is internally provided with
AVR central control processor and control switch, at the front surface center of the pedestal inside offer placing groove, and in placing groove
Portion is sliding to be embedded with bits collecting box, and workbench is welded at the top center of the pedestal, and the bottom center bolt of the workbench is solid
Surely there is servo motor, bracket is sequentially connected on the motor shaft of the servo motor, and bracket is located at the top of workbench, it is described
Chuck is welded at the top of bracket, the outer bolt of the chuck is fixed with XTL-100 electric telescopic rod, the XTL-100 electricity
The telescopic end bolt of dynamic telescopic rod is fixed with fixture block, and fixture block is located at the inside of chuck, and the inside of the fixture block is sliding to be embedded with clamping plate,
Extruding spring ring is symmetrically welded between the fixture block and clamping plate, the side for being internally located at clamping plate of the fixture block is provided with pressure
Sensor, the two sides that the top of the workbench is located at chuck are symmetrically fixedly connected with dust suction disc, the dust suction disc by bolt
It is connected to by conduit with placing groove, vacuum cleaner is provided in the middle part of the conduit, the top of the pedestal is located at the one of workbench
Side is welded with fixed frame, and top plate is welded at the top of the fixed frame, is located at the upper of chuck at the front surface center of the top plate
Square bolt is fixed with guide rail, and the inside of the guide rail is sliding sliding block, and the side bolt of the guide rail is fixed with the first cylinder, and
First Telescopic-cylinder end and sliding block are sequentially connected, and bolt is fixedly connected with the second cylinder at the top center of the sliding block, described
The telescopic end of second cylinder is sequentially connected with carving machine, and carving machine is located at the lower section of sliding block.
Wherein, the vertical section of the workbench is in H-type structure.
Wherein, the bracket is eight pawl hollow out tray type structures.
Wherein, there are three the XTL-100 electric telescopic rod is arranged altogether, and three XTL-100 electric telescopic rods are about folder
The vertical center line circular array of disk is distributed.
Wherein, the section of the fixture block and clamping plate is arcuate structure.
Wherein, rubber pad is embedded on the inside of the clamping plate.
Wherein, the horizontal cross-section of the dust suction disc is arcuate structure.
Wherein, the output end of the control switch and pressure sensor is electric with the input terminal of AVR central control processor
Property connection, the input terminal of the output end of the AVR central control processor and XTL-100 electric telescopic rod is electrically connected, described
The output end of control switch is electrically connected with the input terminal of servo motor, the first cylinder, the second cylinder and carving machine respectively.
In conclusion by adopting the above-described technical solution, the beneficial effects of the utility model are:
1, in the utility model, three groups of XTL-100 electric telescopic rods being placed equidistant in a ring outside chuck can be pushed
The fixture block of arc-shaped structure is close to the outside of silicon wafer, when fixture block is close to the outside of silicon wafer, silicon wafer can be limited clamping and pressed from both sides
Between rubber pad on plate, this structure both improves carving machine convenient for the centripetal limit clamping processing of the silicon wafer of different-diameter
The stability of fixture clamping, while also improving the applicability of finishing impression machine clamp.
2, in the utility model, the pressure sensor being arranged inside fixture block can detect the clamping force of fixture block, work as wafer chuck
When holding between fixture block, clamping plate can inside squeeze pressure sensor, when pressure reaches rated value, pressure sensor can be by data
It is transmitted to AVR central control processor, AVR central control processor will control XTL-100 electric telescopic rod and stop working, from
And the induction clamping processing of silicon wafer is just completed, this structure can carry out protection processing to silicon wafer, to effectively prevent silicon
The clamping of piece is impaired.
3, it in the utility model, in the dust suction disc of the arc-shaped structure in the two sides of workbench, is generated when can process silicon wafer
Break flour is collected processing, and break flour can drop into the top of workbench by bracket after silicon wafer working process, and vacuum cleaner can be by work
Make the bits collecting box that the break flour fallen on platform is sent to inside placing groove by dust suction disc to be collected, this structure can add silicon wafer
The break flour of work is collected processing, consequently facilitating the daily cleaning of user is handled.
Detailed description of the invention
Fig. 1 is a kind of duplexing sequence carving machine structural representation letter of silicon wafer processing with protection mechanism of the utility model
Figure；
Fig. 2 is the top view of workbench in the utility model；
Fig. 3 is workflow block diagram in the utility model.
Marked in the figure: 1, pedestal；2, electric cabinet；3, AVR central control processor；4, control switch；5, placing groove；6,
Bits collecting box；7, workbench；8, servo motor；9, bracket；10, chuck；11, XTL-100 electric telescopic rod；12, dust suction disc；13,
Conduit；14, vacuum cleaner；15, fixed frame；16, top plate；17, guide rail；18, sliding block；19, the first cylinder；20, the second cylinder；21,
Carving machine；22, fixture block；23, clamping plate；24, rubber pad；25, spring ring is squeezed；26, pressure sensor.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to explain this
Utility model is not used to limit the utility model.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention；Term " first ", " the
Two ", " third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance；In addition, unless otherwise specific
Regulation and restriction, term " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, be also possible to
It is detachably connected, or is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also lead to
It crosses intermediary to be indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be with
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
Referring to Fig.1-3, a kind of silicon wafer processing duplexing sequence carving machine, including pedestal 1 and carving machine with protection mechanism
21, the front surface side of pedestal 1 offers electric cabinet 2, and electric cabinet 2 is internally provided with AVR central control processor 3 and control
Make switch 4, at the front surface center of pedestal 1 inside offer placing groove 5, and slide inside placing groove 5 embedded with bits collecting box 6, pedestal 1
Top center at be welded with workbench 7, the bottom center bolt of workbench 7 is fixed with servo motor 8, servo motor 8
Bracket 9 is sequentially connected on motor shaft, and bracket 9 is located at the top of workbench 7, the setting of bracket 9, for consolidating for chuck 10
It is fixed, while it being also convenient for the material leakage processing of break flour, the top of bracket 9 is welded with chuck 10, and the outer bolt of chuck 10 is fixed with
XTL-100 electric telescopic rod 11, the telescopic end bolt of XTL-100 electric telescopic rod 11 is fixed with fixture block 22, and fixture block 22 is located at
The inside of chuck 10, the inside of fixture block 22 is sliding to be embedded with clamping plate 23, and extruding spring ring is symmetrically welded between fixture block 22 and clamping plate 23
25, the side for being internally located at clamping plate 23 of fixture block 22 is provided with pressure sensor 26, and the top of workbench 7 is located at the two of chuck 10
Side is symmetrically fixedly connected with dust suction disc 12 by bolt, and dust suction disc 12 is connected to by conduit 13 with placing groove 5, the middle part of conduit 13
It is provided with vacuum cleaner 14, the side that the top of pedestal 1 is located at workbench 7 is welded with fixed frame 15, the top welding of fixed frame 15
There is top plate 16, the upper square bolt that chuck 10 is located at the front surface center of top plate 16 is fixed with guide rail 17, and the inside of guide rail 17 is sliding
It is connected to sliding block 18, the side bolt of guide rail 17 is fixed with the first cylinder 19, and 19 telescopic end of the first cylinder and the transmission of sliding block 18 connect
It connects, bolt is fixedly connected with the second cylinder 20 at the top center of sliding block 18, and the telescopic end of the second cylinder 20 is sequentially connected with essence
Carving machine 21, and carving machine 21 is located at the lower section of sliding block 18.
Further, the vertical section of workbench 7 is in H-type structure, is fixed convenient for chuck 10 and the installation of dust suction disc 12.
Further, bracket 9 is eight pawl hollow out tray type structures, is handled convenient for the discharge of break flour.
Further, there are three XTL-100 electric telescopic rod 11 is arranged altogether, and three XTL-100 electric telescopic rods 11 are closed
It is distributed in the vertical center line circular array of chuck 10, silicon wafer can be carried out to centripetal clamping processing.
Further, the section of fixture block 22 and clamping plate 23 is arcuate structure, can increase the contact surface of clamping plate 23 Yu silicon wafer
Product, to improve the clamping stability of fixture block 22 and clamping plate 23.
Further, the inside of clamping plate 23 is embedded with rubber pad 24, can promote the frictional force of clamping plate 23, to improve folder
The stability and protective that plate 23 clamps.
Further, the horizontal cross-section of dust suction disc 12 is arcuate structure, it is possible to increase the contact area of dust suction disc 12, thus high
Break flour is carried out absorption processing by effect.
Further, input of the output end of control switch 4 and pressure sensor 26 with AVR central control processor 3
End is electrically connected, and the output end of AVR central control processor 3 and the input terminal of XTL-100 electric telescopic rod 11 are electrically connected,
The output end of control switch 4 is electrical with the input terminal of servo motor 8, the first cylinder 19, the second cylinder 20 and carving machine 21 respectively
Connection.
Silicon wafer: in use, powering on, being placed the top of bracket 9 in chuck 10, presses control switch 4 by working principle,
XTL-100 electric telescopic rod 11 can push fixture block 22 close to the outside of silicon wafer, can when fixture block 22 is close to the outside of silicon wafer
By the centripetal limit clamping of silicon wafer between the rubber pad 24 on clamping plate 23, when clamping plate 23 touches outside silicon wafer, 23 meeting of clamping plate
Inside squeeze pressure sensor 26, when pressure reaches rated value, pressure sensor 26 can be sent data at the control of the center AVR
Device 3 is managed, AVR central control processor 3 will control XTL-100 electric telescopic rod 11 and stop working, to just complete silicon wafer
Centripetal clamping processing, this induction type clamping structure can carry out protection processing to silicon wafer, to effectively prevent silicon wafer
Clamping is impaired, can be by control switch 4 after the completion of silicon chip clamping, the first cylinder 19 of control water in guide rail 17 with movable slider 18
Square to adjusting processing, can control the second cylinder 20 drive carving machine 21 carry out vertical direction position adjusting processing, adjust
After processing, carving machine 21 can be controlled, silicon wafer is processed, after silicon wafer working process, break flour can drop into work by bracket 9
Make the top of platform 7, the break flour that vacuum cleaner 14 can will be fallen on workbench 7 is sent to the collection inside placing groove 5 by dust suction disc 12
Bits box 6 is collected, and is skidded off bits collecting box 6 forward, 6 inside break flour of bits collecting box can be discharged, the setting of bits collecting box 6, and silicon is convenient for
The centralized collection processing of the break flour of piece processing.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (8)
1. a kind of silicon wafer processing duplexing sequence carving machine, including pedestal (1) and carving machine (21) with protection mechanism, feature
Be: the front surface side of the pedestal (1) offers electric cabinet (2), and the electric cabinet (2) is internally provided with the center AVR
Control processor (3) and control switch (4), at the front surface center of the pedestal (1) inside offer placing groove (5), and put
It sets to slide inside slot (5) and is embedded with bits collecting box (6), be welded with workbench (7), the workbench at the top center of the pedestal (1)
(7) bottom center bolt is fixed with servo motor (8), is sequentially connected with bracket on the motor shaft of the servo motor (8)
(9), and bracket (9) is located at the top of workbench (7), is welded with chuck (10) at the top of the bracket (9), the chuck (10)
Outer bolt be fixed with XTL-100 electric telescopic rod (11), the telescopic end bolt of the XTL-100 electric telescopic rod (11) is solid
Surely have fixture block (22), and fixture block (22) is located at the inside of chuck (10), the inside of the fixture block (22) is sliding to be embedded with clamping plate (23), institute
It states to be symmetrically welded between fixture block (22) and clamping plate (23) and squeezes spring ring (25), the fixture block (22) is internally located at clamping plate
(23) side is provided with pressure sensor (26), and the two sides that the top of the workbench (7) is located at chuck (10) pass through bolt
It is symmetrically fixedly connected with dust suction disc (12), the dust suction disc (12) is connected to by conduit (13) with placing groove (5), the conduit
(13) it is provided in the middle part of vacuum cleaner (14), the side that the top of the pedestal (1) is located at workbench (7) is welded with fixed frame
(15), it is welded with top plate (16) at the top of the fixed frame (15), chuck is located at the front surface center of the top plate (16)
(10) upper square bolt is fixed with guide rail (17), and the inside of the guide rail (17) is sliding to be had sliding block (18), the guide rail (17)
Side bolt is fixed with the first cylinder (19), and the first cylinder (19) telescopic end and sliding block (18) are sequentially connected, the sliding block
(18) bolt is fixedly connected with the second cylinder (20) at top center, and the telescopic end of second cylinder (20) is sequentially connected with
Carving machine (21), and carving machine (21) is located at the lower section of sliding block (18).
2. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
The vertical section of workbench (7) is stated in H-type structure.
3. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
Stating bracket (9) is eight pawl hollow out tray type structures.
4. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
It states there are three the total settings of XTL-100 electric telescopic rod (11), and three XTL-100 electric telescopic rods (11) are about chuck (10)
The distribution of vertical center line circular array.
5. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
The section for stating fixture block (22) and clamping plate (23) is arcuate structure.
6. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
It states and is embedded with rubber pad (24) on the inside of clamping plate (23).
7. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
The horizontal cross-section for stating dust suction disc (12) is arcuate structure.
8. a kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism as described in claim 1, it is characterised in that: institute
Input terminal of the output end of control switch (4) and pressure sensor (26) with AVR central control processor (3) is stated electrically to connect
It connects, the output end of the AVR central control processor (3) and the input terminal of XTL-100 electric telescopic rod (11) are electrically connected, institute
State the output end of control switch (4) respectively with servo motor (8), the first cylinder (19), the second cylinder (20) and carving machine (21)
Input terminal be electrically connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822053440.XU CN209649905U (en) | 2018-12-07 | 2018-12-07 | A kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822053440.XU CN209649905U (en) | 2018-12-07 | 2018-12-07 | A kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209649905U true CN209649905U (en) | 2019-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822053440.XU Expired - Fee Related CN209649905U (en) | 2018-12-07 | 2018-12-07 | A kind of duplexing sequence carving machine of silicon wafer processing with protection mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209649905U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111660013A (en) * | 2020-05-29 | 2020-09-15 | 保隆(安徽)汽车配件有限公司 | 2D automatic laser cutting equipment and cutting method |
| CN112572035A (en) * | 2020-11-09 | 2021-03-30 | 呼伦贝尔学院 | Glass processing is with high-efficient cnc engraving and milling machine that has structure of gathering dust |
| CN112605415A (en) * | 2020-11-25 | 2021-04-06 | 武汉优派建筑装饰工程有限公司 | Double-head punching device for building decorative plate and using method thereof |
| CN112721514A (en) * | 2020-12-29 | 2021-04-30 | 宁化县安远镇翠北竹木工艺品厂 | Fine engraving equipment for processing wooden artware |
| CN113400848A (en) * | 2021-07-09 | 2021-09-17 | 汪元 | Processing equipment for jewelry-based artware |
-
2018
- 2018-12-07 CN CN201822053440.XU patent/CN209649905U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111660013A (en) * | 2020-05-29 | 2020-09-15 | 保隆(安徽)汽车配件有限公司 | 2D automatic laser cutting equipment and cutting method |
| CN112572035A (en) * | 2020-11-09 | 2021-03-30 | 呼伦贝尔学院 | Glass processing is with high-efficient cnc engraving and milling machine that has structure of gathering dust |
| CN112572035B (en) * | 2020-11-09 | 2022-10-14 | 呼伦贝尔学院 | Glass processing is with high-efficient cnc engraving and milling machine that has structure of gathering dust |
| CN112605415A (en) * | 2020-11-25 | 2021-04-06 | 武汉优派建筑装饰工程有限公司 | Double-head punching device for building decorative plate and using method thereof |
| CN112721514A (en) * | 2020-12-29 | 2021-04-30 | 宁化县安远镇翠北竹木工艺品厂 | Fine engraving equipment for processing wooden artware |
| CN113400848A (en) * | 2021-07-09 | 2021-09-17 | 汪元 | Processing equipment for jewelry-based artware |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191119 Termination date: 20211207 |