CN209645884U - Cold-trap fills liquid nitrogen plan and cold-trap - Google Patents
Cold-trap fills liquid nitrogen plan and cold-trap Download PDFInfo
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- CN209645884U CN209645884U CN201920305688.2U CN201920305688U CN209645884U CN 209645884 U CN209645884 U CN 209645884U CN 201920305688 U CN201920305688 U CN 201920305688U CN 209645884 U CN209645884 U CN 209645884U
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Abstract
The utility model relates to the cooling equipment technical field of semiconducter process, discloses a kind of cold-trap and fill liquid nitrogen plan and cold-trap, specifically, it includes funnel, gas-liquid separator, triple valve and reflux water pipe that cold-trap, which fills liquid nitrogen plan,；Three valve ports of triple valve are respectively that high-order valve port, neutral valve mouth and low level valve port, the outlet of high-order valve port and funnel, neutral valve mouth are connected to gas-liquid separator, and low level valve port is connected to reflux water pipe.The case where when the utility model avoids filling liquid nitrogen, condensed water is frozen into ice by liquid nitrogen, blocks gas-liquid separator ensure that the normal operation of gas-liquid separator.
Description
Technical field
The utility model relates to the cooling equipment technical fields of semiconducter process, more particularly, to a kind of cold-trap liquid filling
Nitrogen device, and the cold-trap including cold-trap filling liquid nitrogen plan.
Background technique
Cold-trap is commonly used equipment in production process of semiconductor, is widely used in the evaporator man of production process of semiconductor
In sequence.Cold pump performance in cold-trap is generally promoted by manual filling liquid nitrogen in cold-trap.
In the liquid nitrogen system of existing cold-trap when liquid nitrogen deficiency generates water, often saves bit by bit in gas-liquid separator, work as operation
Person again liquid filling nitrogen when gas-liquid separator in water encounter liquid nitrogen can quick-frozen Cheng Bing, gas-liquid separator is blocked, cause liquid nitrogen without
Method flows into cold-trap.
Utility model content
The purpose of this utility model is to provide a kind of cold-traps to fill liquid nitrogen plan, existing in the prior art above-mentioned to solve
The gas-liquid separator of cold-trap liquid nitrogen system be easy the technical issues of being plugged.
The purpose of this utility model, which also resides in, provides a kind of cold-trap, to solve above-mentioned cold-trap liquid existing in the prior art
The gas-liquid separator of nitrogen system is easy the technical issues of being plugged.
Based on above-mentioned first purpose, the utility model provides a kind of cold-trap filling liquid nitrogen plan, the filling liquid nitrogen plan packet
Include funnel, gas-liquid separator, triple valve and reflux water pipe；
Three valve ports of the triple valve are respectively high-order valve port, neutral valve mouth and low level valve port, the high position valve port
With the outlet of the funnel, the neutral valve mouth is connected to the gas-liquid separator, the low level valve port and the reflux
Water pipe connection；
The setting height of the gas-liquid separator is lower than the outlet port of the funnel, the setting height of the reflux water pipe
Lower than the setting height of the gas-liquid separator；The gas-liquid separator can be connected to cold-trap；
Into cold-trap when filling liquid nitrogen, high-order valve port, neutral valve mouth are opened, and low level valve port is closed；Cold-trap liquid nitrogen is filled
Cheng Shi, neutral valve mouth, low level valve port are opened, and condensed water flows into the reflux water pipe by neutral valve mouth, low level valve port.
Further, the filling liquid nitrogen plan further includes liquid nitrogen flange, and the gas-liquid separator passes through liquid nitrogen flange and institute
Cold-trap is stated to be connected to and fix.
Further, the filling liquid nitrogen plan further includes exhaust pipe, and the exhaust pipe is connected to the gas-liquid separator.
Further, the exhaust pipe is connected with elbow, the outlet of the elbow far from one end of the gas-liquid separator
The direction of mouth avoids operative position when filling liquid nitrogen.
Further, the funnel includes cylindrical portion and the back taper section for being connected to the cylindricality pars infrasegmentalis；The funnel
Import the top of the cylindrical portion is set, the bottom corner position of the back taper section is arranged in the outlet of the funnel.
Further, the import that the top of the cylindrical portion corresponds to the funnel is provided with rotation lid, and the rotation covers
It is arranged jagged；
The rotation lid can be rotated around the shaft perpendicular to funnel axial direction, and the rotation lid turns to the notch and institute
When stating the side wall docking of cylindrical portion, the import of the funnel is opened.
Further, filter screen is provided in the funnel.
Further, the partition tilted down, the upper end of the partition and the one of the funnel are provided in the funnel
The connection of side side wall, and the sidewall spacers of the lower end of the partition and funnel are arranged.
Further, fixed plate is provided on the periphery of the side wall of the funnel.
Based on above-mentioned second purpose, the utility model additionally provides a kind of cold-trap, and it is practical new that this is provided on the cold-trap
The cold-trap that type provides fills liquid nitrogen plan.
Compared with prior art, the utility model has the following beneficial effects:
Cold-trap provided by the utility model fills liquid nitrogen plan, including funnel, gas-liquid separator, triple valve and recirculation water
Pipe；Three valve ports of the triple valve are respectively high-order valve port, neutral valve mouth and low level valve port, the high position valve port with it is described
The outlet of funnel, the neutral valve mouth are connected to the gas-liquid separator, and the low level valve port and the reflux water pipe connect
It is logical；The setting height of the gas-liquid separator is lower than the outlet port of the funnel, and the setting height of the reflux water pipe is lower than
The setting height of the gas-liquid separator；The gas-liquid separator can be connected to cold-trap.The utility model cold-trap liquid filling nitrogen dress
It sets and the reflux water pipe that a setting height is lower than gas-liquid separator, when liquid nitrogen deficiency, gas-liquid separator is connected by triple valve
The water of middle generation can flow to reflux water pipe by triple valve and is discharged or be stored；When so as to avoid filling liquid nitrogen again,
Water is frozen into the case where ice blocks gas-liquid separator by liquid nitrogen, ensure that the normal operation of gas-liquid separator.
Cold-trap provided by the utility model is provided with cold-trap provided by the utility model and fills liquid nitrogen plan, compares existing skill
Art, the utility model cold-trap has beneficial effect identical with cold-trap provided by the utility model filling liquid nitrogen plan, by above
The description that liquid nitrogen plan beneficial effect is filled to the utility model cold-trap, also can intuitively know, in this not go into detail.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic diagram that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 2 is the schematic front view for the funnel that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 3 is the schematic side view for the funnel that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 4 is the schematic front view for the gas-liquid separator that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 5 is the gas-liquid separator schematic top plan view that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 6 is the schematic diagram for the exhaust pipe that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 7 is the schematic front view for the liquid nitrogen flange that the utility model embodiment cold-trap fills liquid nitrogen plan；
Fig. 8 is the schematic top plan view for the liquid nitrogen flange that the utility model embodiment cold-trap fills liquid nitrogen plan.
Icon: 1- funnel；11- cylindrical portion；12- back taper section；13- boss；14- filter screen；15- partition；16- is fixed
Plate；2- triple valve；3- gas-liquid separator；31- separator import；32- gas vent；4- exhaust pipe；41- elbow；5- liquid nitrogen flange；
6- reflux water pipe；First communicating pipe of 7-；Second communicating pipe of 8-；9- rotation lid；91- shaft；92- notch.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical
Novel protected range.
In the description of the present invention, it should be noted that such as occur term " center ", "upper", "lower", " left side ",
" right side ", "vertical", "horizontal", "inner", "outside" etc., the orientation or positional relationship of instruction are orientation based on the figure or position
Relationship is set, is merely for convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning
It must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.This
Outside, such as there is term " first ", " second ", " third " are used for description purposes only, be not understood to indicate or imply relatively heavy
The property wanted.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, such as there is term
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirect by intermediary
It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
Embodiment one
Liquid nitrogen plan, including funnel 1, gas-liquid separation are filled referring to a kind of cold-trap shown in Fig. 1 to Fig. 8, is present embodiments provided
Device 3, triple valve 2 and reflux water pipe 6.
Wherein, three valve ports of triple valve 2 are respectively high-order valve port, neutral valve mouth and low level valve port, high-order valve port with
The outlet of funnel 1, neutral valve mouth are connected to gas-liquid separator 3, and low level valve port is connected to reflux water pipe 6.As its name suggests, high
The setting height of position valve port is greater than neutral valve mouth, and the setting height of low level valve port is lower than neutral valve mouth, correspondingly, gas-liquid separator
3 setting height is lower than the outlet port of funnel 1, and the setting height of reflux water pipe 6 is lower than the setting height of gas-liquid separator 3.
The liquid nitrogen outlet of gas-liquid separator 3 can be connected to cold-trap.Specifically into cold-trap when filling liquid nitrogen, triple valve 2
High-order valve port, neutral valve mouth are opened, and low level valve port is closed, after liquid nitrogen flows into triple valve 2, gas-liquid separator 3 by funnel 1 at this time
Flow into cold-trap；When the filling completion of cold-trap liquid nitrogen, low level valve port is opened, neutral valve mouth is opened, and high-order valve port can be opened as needed
Or close, at this time if when having condensed water in gas-liquid separator 3, condensed water can flow into reflux by neutral valve mouth, low level valve port
Water pipe 6.Reflux water pipe 6, which can be, directly discharges condensed water, and condensed water can also be temporarily stored within to reflux water pipe 6
Interior, the general reflux water pipe 6 using the sealing temporarily stored is united after the condensed water in the water pipe 6 that flows back reaches a certain amount of
One discharge.
It is understood that the utility model embodiment cold-trap, which fills liquid nitrogen plan, connects a setting height by triple valve 2
Degree is lower than the reflux water pipe 6 of gas-liquid separator 3, and when liquid nitrogen deficiency, the water generated in gas-liquid separator 3 can pass through triple valve
2 flow direction reflux water pipes 6 are discharged or are stored；When so as to avoid filling liquid nitrogen again, water is frozen into ice and blocks gas-liquid by liquid nitrogen
The case where separator 3, occurs, and ensure that the normal operation of gas-liquid separator 3.
Specifically, as shown in Figure 1, the present embodiment cold-trap fill liquid nitrogen plan gas-liquid separator 3 can by liquid nitrogen flange 5 with
Cold-trap is connected to and fixes.
As shown in Figure 1, the neutral valve mouth of triple valve 2 can be connected to by the first communicating pipe 7 with gas-liquid separator 3, correspondingly,
The separator import 31 being connected to the first communicating pipe 7 is provided on gas-liquid separator 3.First communicating pipe 7 and gas-liquid separation
Imperial (being commonly called as the polytetrafluoroethylene (PTFE)) material of safe fluorine can be used in the material of device 3.
In order to realize the exhaust of gas-liquid separator 3, as shown in fig. 4 or 5, gas vent 32 is additionally provided on gas-liquid separator 3.
As shown in Figure 1, being connected with exhaust pipe 4 on gas vent 32.As shown in Fig. 1 or 6, exhaust pipe 4 connects far from one end of gas-liquid separator 3
It is connected to elbow 41, the direction of the gas outlet of elbow 41 avoids operative position when filling liquid nitrogen.Namely the elbow 41 of exhaust pipe 4 go out
The direction of port not oriented manipulation personnel filling liquid nitrogen when operative position, operative position when general filling liquid nitrogen is the one of funnel
Side, so the gas outlet of elbow 41 can be also possible to be exhausted away from funnel 1 as shown in Fig. 1 or 6 downward.
It is understood that elbow 41 is installed on the exhaust pipe 4 of gas-liquid separator 3, it can be by the liquid nitrogen gas of discharge
Trend changes into downward discharge, avoids high cold air and is directly blown on the body of liquid filling nitrogen people and damages.
As Figure 2-3, the funnel 1 that the present embodiment cold-trap fills liquid nitrogen plan specifically includes cylindrical portion 11 and is connected to cylindricality
The back taper section 12 of 11 lower parts of section.The top of cylindrical portion 11 is arranged in the import of funnel 1, and the outlet of funnel 1 is arranged in back taper
The bottom corner position of section 12.
It is understood that cylindrical portion 11 can be structure as a whole with back taper section 12.Funnel 1 generally uses stainless steel
Matter.The outlet of the funnel of the bottom apex angle of back taper section 12 can pass through the height of the second communicating pipe 8 and triple valve 2 of stainless steel material
Position valve port connection.
The import of funnel 1 can be sealed by rotating lid, and the import that the top of specific cylindrical portion 11 corresponds to funnel is set
It is equipped with rotation lid 9, rotates and is arranged jagged 92 on lid 9.Rotating lid 9 can rotate around the axial shaft 91 perpendicular to funnel 1,
When rotation lid 9 turns to notch 92 and docks with the side wall of cylindrical portion 11, the import of funnel 1 is openable；Rotation lid 9 turns to non-lack
When mouth position, sealing is closed in the import of funnel 1.
As shown in figures 2 and 3, it is provided with filter screen 14 in the middle and upper part of funnel 1, is provided on the inner wall of specific funnel 1
Boss 13, filter screen 14 can be fixed on boss 13.
It is understood that filter screen 14 can prevent in trash flow air inlet liquid/gas separator 3 or entrance cold-trap in liquid nitrogen.
As shown in figures 2 and 3, the present embodiment cold-trap fill liquid nitrogen plan funnel 1 the lower section of filter screen 14 be additionally provided with to
Under inclined partition 15, the upper end of partition 15 is connect with the side side wall of funnel 1, between the lower end of partition 15 and the side wall of funnel 1
Every setting.That is, the upper end of partition 15 is fixed by the side wall of funnel 1, and permit between the lower end of partition 15 and the side wall of funnel 1
Perhaps liquid nitrogen flows into the bottom of funnel 1.
It is understood that the partition 15 being obliquely installed can prevent liquid nitrogen be splashed to when pouring into funnel 1 rotation lid 9 or
Import through funnel 1 splashes out.Specifically, by the liquid nitrogen that filter screen 14 filters after the guiding of partition 15, by the one of funnel 1
The bottom of side hopper, one side partition 15 play the role of buffering liquid nitrogen flow velocity；Meanwhile liquid nitrogen passes through the side of funnel 1
The bottom of hopper 1, compared to liquid nitrogen from the bottom of center hopper 1, the liquid splash generated is few, and liquid nitrogen is flowing into
When the bottom of funnel 1, it can also be stopped by partition 15 even if splashing, avoid liquid nitrogen and splash upwards.
The present embodiment cold-trap, which fills, can weld fixed plate 16 on the periphery of the side wall of the funnel 1 of liquid nitrogen plan.Funnel 1 passes through solid
Fixed board 16 is fixed in corresponding equipment.
It should be noted that the size that the present embodiment cold-trap fills the funnel 1 of liquid nitrogen plan can as needed and installation is empty
Between rationally designed.Existing funnel volume is smaller, and a pot liquid nitrogen cannot be poured into directly, needs in equal funnels under liquid nitrogen stream
It is filled again after going, a pot liquid nitrogen will be finished down in three times, and operator's waiting time is too long.The funnel of the present embodiment cold-trap filling liquid nitrogen plan
Volume may be designed as accommodate two pot liquid nitrogen or space allow in the range of design bigger volume；The funnel of big volume uses
The efficiency that operator's liquid filling nitrogen can have been mentioned significantly afterwards, reduces residence time of the liquid nitrogen outside cold-trap, and the corresponding liquid nitrogen that reduces is waved
Hair amount, also saves on liquid nitrogen.
The triple valve 2 of the present embodiment is generally stainless steel material.
In conclusion occur freezing and causes equipment fault when the present embodiment cold-trap filling liquid nitrogen plan avoids liquid filling nitrogen, from
And influence the case where equipment operates normally；And the present embodiment cold-trap fills liquid nitrogen plan and is able to ascend liquid filling nitrogen efficiency, and subtracts significantly
The light labor intensity of operator.
The utility model embodiment also provides a kind of cold-trap, and cold-trap provided by the embodiment of the utility model is equipped on cold-trap
Fill liquid nitrogen plan.
Compared with prior art, the utility model embodiment cold-trap, which has, fills liquid nitrogen plan with cold-trap provided by the utility model
Identical beneficial effect also can be intuitive by filling the description of liquid nitrogen plan beneficial effect to the utility model cold-trap above
Know, in this not go into detail.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should
Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of
Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new
The range of each embodiment technical solution of type.
Claims (10)
1. a kind of cold-trap fills liquid nitrogen plan, which is characterized in that the filling liquid nitrogen plan includes funnel, gas-liquid separator, triple valve
And reflux water pipe；
The respectively high-order valve port of three valve ports of the triple valve, neutral valve mouth and low level valve port, the high position valve port and institute
The outlet of funnel is stated, the neutral valve mouth is connected to the gas-liquid separator, the low level valve port and the reflux water pipe
Connection；
The setting height of the gas-liquid separator is lower than the outlet port of the funnel, and the setting height of the reflux water pipe is lower than
The setting height of the gas-liquid separator；The gas-liquid separator can be connected to cold-trap；
Into cold-trap when filling liquid nitrogen, high-order valve port, neutral valve mouth are opened, and low level valve port is closed；When the filling completion of cold-trap liquid nitrogen,
Neutral valve mouth, low level valve port are opened, and condensed water flows into the reflux water pipe by neutral valve mouth, low level valve port.
2. cold-trap according to claim 1 fills liquid nitrogen plan, which is characterized in that the filling liquid nitrogen plan further includes liquid nitrogen method
Orchid, the gas-liquid separator are connected to and are fixed with the cold-trap by liquid nitrogen flange.
3. cold-trap according to claim 1 or 2 fills liquid nitrogen plan, which is characterized in that the filling liquid nitrogen plan further includes row
Tracheae, the exhaust pipe are connected to the gas-liquid separator.
4. cold-trap according to claim 3 fills liquid nitrogen plan, which is characterized in that the exhaust pipe is far from the gas-liquid separation
One end of device is connected with elbow, and the direction of the gas outlet of the elbow avoids operative position when filling liquid nitrogen.
5. cold-trap according to claim 1 or 2 fills liquid nitrogen plan, which is characterized in that the funnel includes cylindrical portion and company
Connect the back taper section in the cylindricality pars infrasegmentalis；The top of the cylindrical portion is arranged in the import of the funnel, the funnel
The bottom corner position of the back taper section is arranged in outlet.
6. cold-trap according to claim 5 fills liquid nitrogen plan, which is characterized in that the top of the cylindrical portion corresponds to the leakage
The import of bucket is provided with rotation lid, and it is jagged that the rotation covers setting；
The rotation lid can be rotated around the shaft perpendicular to funnel axial direction, and the rotation lid turns to the notch and the column
When the side wall docking of shape section, the import of the funnel is opened.
7. cold-trap according to claim 1 or 2 fills liquid nitrogen plan, which is characterized in that be provided with filter screen in the funnel.
8. cold-trap according to claim 1 or 2 fills liquid nitrogen plan, which is characterized in that be provided with and dip down in the funnel
Oblique partition, the upper end of the partition is connect with the side side wall of the funnel, and the side wall of the lower end of the partition and funnel
Interval setting.
9. cold-trap according to claim 1 or 2 fills liquid nitrogen plan, which is characterized in that on the periphery of the side wall of the funnel
It is provided with fixed plate.
10. a kind of cold-trap, which is characterized in that be provided with the described in any item cold-trap liquid filling nitrogen of claim 1-9 on the cold-trap
Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920305688.2U CN209645884U (en) | 2019-03-11 | 2019-03-11 | Cold-trap fills liquid nitrogen plan and cold-trap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920305688.2U CN209645884U (en) | 2019-03-11 | 2019-03-11 | Cold-trap fills liquid nitrogen plan and cold-trap |
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| Publication Number | Publication Date |
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| CN209645884U true CN209645884U (en) | 2019-11-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115531907A (en) * | 2022-08-19 | 2022-12-30 | 安徽贝意克智能科技有限公司 | Down-loading type cold trap structure and sublimation instrument |
-
2019
- 2019-03-11 CN CN201920305688.2U patent/CN209645884U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115531907A (en) * | 2022-08-19 | 2022-12-30 | 安徽贝意克智能科技有限公司 | Down-loading type cold trap structure and sublimation instrument |
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