CN209545463U - Piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device - Google Patents

Abstract

The utility model relates to a kind of piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning devices, belong to precision machinery and precision engineering field.Piezoelectric inertia formula rotational positioning component is fixedly mounted in connection sleeve, and guarantees to cooperate when power-off with output shaft clearance；Piezoelectric twin-wafer type rotational positioning component and output shaft interference fit are installed, and output shaft guarantees the axis and output axis coaxle of output shaft end connection component by being fixedly mounted on the bearing I connected in sleeve, II support guide；Clamping mechanism by connect bolt be connected on the flange of body, and using hemispherical contact part with connect sleeve be in close contact realization it is self-locking, by body end and outside macro readjustment of direction locating platform be fixedly connected with.Advantage is: compact-sized, the advantage with axial big stroke linear positioning and macro microring array rotational positioning has a good application prospect, it can be achieved that multifreedom motion output in fields such as precision optics, micromanipulation, aerospace and precision instruments.

Description

Piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device

Technical field

The utility model relates to precision machinery and precision engineering field, in particular to a kind of piezoelectricity-electromagnetism hybrid-driven Multiple degrees of freedom precision positioning device can be used for precision optics, precise and ultraprecise machining, micromanipulation, micro- clamping, aerospace Precision positioning is realized with fields such as precision instruments.

Background technique

Precision linear and rotary positioning apparatus are widely used and demand in scientific research and industrial production, especially in essence The fields such as close and Ultra-precision Turning, micro-robot, tradition machinery driving and transmission device such as servo motor, gear drive, rolling The modes such as ballscrew transmission have been unable to meet nano-precision requirement, and wherein higher and higher for the requirement of positioning device.Respectively grind Study carefully mechanism and research be designed to big stroke, high-precision multiple degrees of freedom precision positioning device, be concentrated mainly on step piezoelectric formula/ Piezoelectric motor, voice coil motor, magnetostriction type, flexible structure amplifying type, piezoelectric inertia formula and piezoelectricity looper bionic type etc. are accurate Positioning device.

However, what current most of positioning devices were only designed individually for precision linear positioning or rotational positioning, it is only few Big stroke, high-precision, multiple degrees of freedom precision positioning can be achieved in part, as involved in Chinese patent (106601307 A of CN) Two-dimensional nano flexible motion platform is placed in piezoelectric element in series-parallel compliant mechanism, has many advantages, such as that error is small, precision is high, But it is only capable of realizing the precision positioning of plane two degrees of freedom；Chinese patent (108092545 A of CN) is related to a kind of multiple degrees of freedom pressure The electric micro-nano locating platform of stick-slip realizes that X moves linearly and rotational positioning about the z axis to Y-direction using multiple groups piezoelectric element, tool Have the advantages that bigger stroke, high-precision and control are easy；It is mixed that Chinese patent (108092545 A of CN) is related to a kind of multiple degrees of freedom Drive-type positioning device is closed, when pushing using impact type piezoelectric bimorph moment of inertia and passing through control bilayer clamp mechanism action Sequence is, it can be achieved that any combination of precision rotation and step-by-step movement linear orientation two-freedom moves.But it is driven merely with piezoelectric element It is dynamic to cannot achieve high-precision, axial big stroke linear motion, and cannot take into account well and realize that macro microring array continuous rotation is fixed The functions such as position, limit its practical ranges.

To sum up, it can be seen that developing has compact-sized, high-precision and big, the macro microring array driving capability of stroke etc. practical The multiple degrees of freedom precision positioning device of property index is still a difficult point, and urgently need.

Summary of the invention

The purpose of this utility model is to provide a kind of piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, Solve existing multiple degrees of freedom positioning device above shortcomings.The utility model uses modularized design thinking, and structure is tight Gather, and there is the advantage of axial big stroke linear positioning and the positioning of macro microring array continuous rotation, be big stroke, high-precision, mostly from A kind of available solutions are provided by degree precision positioning.

The above-mentioned purpose of the utility model is achieved through the following technical solutions:

Piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, including the big stroke positioning component of body 1, axial direction, Clamping mechanism 2, piezoelectric inertia formula rotational positioning component 3, piezoelectric twin-wafer type rotational positioning component 4, connection sleeve 4A, output shaft 5, shaft end connection component 6, bearing I 10 and bearing I I13 are exported,

The piezoelectric inertia formula rotational positioning component 3 is fixedly mounted in connection sleeve 4A, and is guaranteed when power-off and exported 5 clearance fit of axis；The piezoelectric twin-wafer type rotational positioning component 4 is installed with the interference fit of output shaft 5, wherein output shaft 5 by The bearing I 10 and bearing I I13 support guide being fixedly mounted in connection sleeve 4A, guarantee the axis of output shaft end connection component 6 Line and output axis 7 are coaxial；The clamping mechanism 2 is connected on the flange of body 1 by connecting bolt, and is connect using hemispherical Contact element with connect sleeve 4A be in close contact realize it is self-locking, wherein by 1 end of body can be with external macro readjustment of direction locating platform phase It is connected.

The axial big stroke positioning component is: coil 12 is connected on body 1, as magnet steel mobile model electromagnetic drive The stator of unit, permanent magnet 11 are connected with sleeve 4A is connect as mover, form closed magnetic flux path 15, realize output shaft 5 Axial big stroke linear positioning, wherein to guarantee that connection sleeve 4A displacement stroke without departing from 1 length limitation of body, passes through pressing plate 8 The flexible bearing 9 for being fixed on 1 end of body carries out axial limiting；Winding wire 14 is connected through 1 end through-hole of body with coil 12, And heat pipe can be connect with cooling system and be replaced, realize that forced convertion improves the radiating condition of coil 12.

The piezoelectric inertia formula rotational positioning component 3 is: four groups of flexible hinge I36 are uniformly distributed by holding screw 31 It is fixed in the square hole of connection sleeve 4A, flexible hinge I36 design has kidney slot 34 to adjust for position；Flexible hinge I36 Piezoelectric Driving component is pasted in the groove of end, Piezoelectric Driving component is cut by piezoelectric stack II33, the piezoelectric ceramics to bond together It cuts and stacks 32 and the composition of contact jaw 35；When piezoelectric stack II33 is powered, contact jaw 35 and output shaft 5 are in close contact and realize preload, Change pretightning force size by adjusting piezoelectric stack II33 driving voltage amplitude；When piezoelectric ceramics shearing stacks 32 energization, drive 35 transverse shifting of contact jaw realizes the two-way continuous precision rotational positioning of output shaft 5.

The piezoelectric twin-wafer type rotational positioning component 4 is by mass block 41, piezoelectric bimorph 42, screw 43, connection Axle sleeve 44 and disc 45 form, wherein two groups of disc 45 are symmetrically connected on connecting bushing 44 by screw 43；Connecting bushing 44 are interference fitted on the connection outer end sleeve 4A output shaft 5；Four piezoelectric bimorphs 42 are bonded in respectively on disc 45, while four Block mass block 41 is respectively adhered on 45 end of disc, increases inertial drive torque.

The clamping mechanism 2 includes that four groups of flexible hinges II22, four groups of piezoelectric stack I21 are placed on flexible hinge II22 Installation groove in, and realized and pre-tightened using the adjustable tightening cushion 23 of thickness；When piezoelectric stack I21 is powered off, guarantee flexible hinge The end chain II22 hemispherical contact part with connect sleeve 4A be in close contact realize connection sleeve 4A axial self-locking, and then realize with it is defeated The connected output shaft end connection component 6 of shaft 5 is axially precisely positioned；When piezoelectric stack I21 is powered, the end flexible hinge II22 Hemispherical contact part is separated with connection sleeve 4A, is controlled by signal sequence and is realized that the macro microring array of 5 multiple degrees of freedom of output shaft positions.

The output shaft end connection component 6 is end effector, and winter end actuator is optical element installation support Or micro- clamping unit etc., different mounting assemblies can be replaced according to practical application, and be connected by screw thread with output shaft 5 and be convenient for Function replacement；Preferably, connection screw thread is all made of accurate fine thread.

The utility model has the beneficial effects that:

1, the utility model is based on piezoelectricity-electromagnetism combination drive principle and realizes axial big stroke linear positioning and macro micro- mixed Rotational positioning is closed, has many advantages, such as that compact-sized, clamper is stable, function is integrated, repetitive positioning accuracy is high, can be used as in gravity There are carrying demand, and the higher precision positioning mechanism of positioning accuracy request in direction, and micro- to China/receive processing, micro-/receive operation, The development in many high sophisticated technology fields such as precision positioning has more important reference significance.

2, the utility model uses modularized design, based on axial big stroke positioning component, in conjunction with piezoelectric inertia formula Rotational positioning component and piezoelectric twin-wafer type rotational positioning component realize big stroke, high-precision, multiple degrees of freedom precision positioning, utilize Clamping mechanism realizes power-off axial self-locking, while modularized design is also beneficial to complete machine combination installation, improves and optimizates and safeguard guarantor It supports.

3, magnet steel mobile model electromagnetic drive unit provided by the utility model can eliminate the energization of traditional voice coil electrical-coil and dissipate The problems such as hot difficulty and difficult wire arrangements, is controlled by signal sequence in the way of combination drive and realizes that output shaft end connects The continuous pose adjustment of connected components, changes Continuous Rectangular/sawtooth drive waveforms voltage magnitude and frequency, realizes the electricity of output performance The adjustment of gas control system.

Detailed description of the invention

Attached drawing described herein is used to provide a further understanding of the present invention, and is constituted part of this application, The illustrative example and its explanation of the utility model do not constitute the improper limit to the utility model for explaining the utility model It is fixed.

Fig. 1 is the overall structure axonometric drawing of the utility model；

Fig. 2 is the overall structure half sectional view of the utility model；

Fig. 3 is the axial big stroke positioning component structure axonometric drawing of the utility model；

Fig. 4 is the macro microring array rotational positioning modular construction axonometric drawing of the utility model；

Fig. 5 is the piezoelectric inertia formula rotational positioning component A direction view of the utility model；

Fig. 6 is the piezoelectric twin-wafer type rotational positioning component front view of the utility model；

Fig. 7 is the timing control figure of the utility model；

Fig. 8 is the multiple degrees of freedom precise motion output services flow diagram of the utility model.

In figure: 1, body；2, clamping mechanism；3, piezoelectric inertia formula rotational positioning component；4, piezoelectric twin-wafer type rotation is fixed Hyte part；4A, connection sleeve；5, output shaft；6, shaft end connection component is exported；7, axis is exported；8, pressing plate；9, flexible axle It holds；10, bearing I；11, permanent magnet；12, coil；13, bearing I I；14, winding wire；15, magnetic flux path；21, piezoelectric stack I； 22, flexible hinge II；23, tightening cushion；31, holding screw；32, piezoelectric ceramics shearing stacks；33, piezoelectric stack II；34, waist Shape hole；35, contact jaw；36, flexible hinge I；41, mass block；42, piezoelectric bimorph；43, screw；44, connecting bushing；45, spoke Plate.

Specific embodiment

The detailed content and its specific embodiment of the utility model are further illustrated with reference to the accompanying drawing.

Referring to shown in Fig. 1 to Fig. 8, the piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device of the utility model, Have many advantages, such as that compact-sized, clamper is stable, function is integrated, repetitive positioning accuracy is high, and can be used as and held in gravity direction Load demand, and the higher precision positioning mechanism of positioning accuracy request, practicability are stronger.The utility model utilizes magnet steel mobile model electricity Magnetic drive unit realizes axial big stroke linear positioning；It is rotated using piezoelectric inertia formula rotational positioning component and piezoelectric twin-wafer type Positioning component realizes macro microring array rotational positioning；It realizes that power-off axial self-locking is accurately positioned using clamping mechanism, and can realize more Freedom degree movement output, before the fields such as precision optics, micromanipulation, aerospace and precision instrument have good application Scape.Axial big stroke linear positioning is realized by square drive waveform；It is realized by continuous sawtooth drive waveforms a wide range of macro dynamic Rotational positioning；Continuous minute angle rotational positioning is realized by two kinds of drive waveforms couplings；Pass through preiodic type square drive waveform Realize axial self-locking and the continuous pose adjustment of optical element.

Referring to shown in Fig. 1 to Fig. 6, the piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device of the utility model, Including body 1, axial big stroke positioning component, clamping mechanism 2, piezoelectric inertia formula rotational positioning component 3, piezoelectric twin-wafer type rotation Turn positioning component 4, connection sleeve 4A, output shaft 5, output shaft end connection component 6, bearing I 10 and bearing I I13, the piezoelectricity Inertia-type rotational positioning component 3 is fixed in connection sleeve 4A, and guarantees to power off 5 clearance fit of Shi Qiyu output shaft；Institute It states piezoelectric twin-wafer type rotational positioning component 4 and the interference fit of output shaft 5 is installed, wherein output shaft 5 is by being fixedly mounted on connection Sleeve 4A middle (center) bearing I10 and bearing I I13 support guide guarantee that the axis of output shaft end connection component 6 and positioning device export The requirement of 7 concentricity of axis；The clamping mechanism 2 is connected on the flange of body 1 by connecting bolt, and is connect using hemispherical Contact element with connect sleeve 4A be in close contact realize it is self-locking, wherein by 1 end of body can be with external macro readjustment of direction locating platform phase It is connected.

The big stroke positioning component of axial direction, is mainly led by pressing plate 8, flexible bearing 9, permanent magnet 11, coil 12 and coil Line 14 forms；Coil 12 is connected on body 1, as the stator of magnet steel mobile model electromagnetic drive unit, and permanent magnet 11 and even Female connector cylinder 4A, which is connected, is used as mover, forms closed magnetic flux path 15, realizes the axial big stroke linear positioning of output shaft 5, wherein To guarantee that without departing from 1 length limitation of body, the flexible axle of 1 end of body is fixed on by pressing plate 8 for connection sleeve 4A displacement stroke Hold 9 carry out axial limitings；Winding wire 14 is connected through 1 end through-hole of body with coil 12, and can connect heat pipe with cooling system It is replaced, realizes that forced convertion improves the radiating condition of coil 12.

The piezoelectric inertia formula rotational positioning component 3 stacks 32, piezoelectric stack by holding screw 31, piezoelectric ceramics shearing II33, contact jaw 35 and flexible hinge I36 composition；Four groups of flexible hinge I36 are uniformly distributed the company of being fixed on by holding screw 31 In female connector cylinder 4A square hole, wherein flexible hinge I36 design has kidney slot 34 to adjust for position；The end flexible hinge I36 is recessed Piezoelectric Driving component is pasted in slot, wherein Piezoelectric Driving component is sheared by piezoelectric stack II33, the piezoelectric ceramics to bond together Stack 32 and the composition of contact jaw 35；When piezoelectric stack II33 is powered, contact jaw 35 and output shaft 5 are in close contact and realize preload, lead to It overregulates piezoelectric stack II33 driving voltage amplitude and changes pretightning force size；When piezoelectric ceramics shearing stacks 32 energization, drive is connect 35 transverse shifting of contravention realizes the two-way continuous precision rotational positioning of output shaft 5.

The piezoelectric twin-wafer type rotational positioning component 4, by mass block 41, piezoelectric bimorph 42, screw 43, connecting bushing 44 and disc 45 form, wherein two groups of disc 45 are symmetrically connected on connecting bushing 44 by screw 43；44 mistake of connecting bushing Cooperation be full of on the connection outer end sleeve 4A output shaft 5；Four piezoelectric bimorphs 42 are bonded in respectively on disc 45, while four pieces of matter Gauge block 41 is respectively adhered on 45 end of disc, increases inertial drive torque.

The clamping mechanism 2, including piezoelectric stack I21, flexible hinge II22, tightening cushion 23；Four groups of piezoelectric stack I21 It is placed in the installation groove of flexible hinge II22, and is realized and pre-tightened using the adjustable tightening cushion 23 of thickness；Piezoelectric stack I21 When power-off, guarantee that the end flexible hinge II22 hemispherical contact part is in close contact realization connection sleeve 4A axial direction with sleeve 4A is connect It is self-locking, and then realize the accurate positioning for output 6 axial position of shaft end connection component being connected with output shaft 5；Piezoelectric stack I21 When energization, the end flexible hinge II22 hemispherical contact part is separated with connection sleeve 4A, can be achieved by signal sequence control defeated The macro microring array positioning of 5 multiple degrees of freedom of shaft.

The output shaft end connection component 6 can replace different end effectors, such as optical element according to practical application Mounting rack, micro- clamping unit etc., and be connected by screw thread with output shaft 5 and replaced convenient for function；Preferably, connection screw thread is equal Using accurate fine thread.

Embodiment:

In the following, illustrating by taking the workflow for exporting the adjustment of the continuous pose of shaft end connection component 6 as an example based on pressure The control method of electricity-electromagnetism combination drive principle multiple degrees of freedom precision positioning device.

Shown in Figure 8, the output continuous pose of shaft end connection component 6 adjustment general work process is as follows: guaranteeing first Piezoelectric stack I21 in clamping mechanism 2 is powered, and so that flexible hinge II22 is disconnected sleeve 4A cancellation self-locking；Secondly first to magnetic Coil 12 in steel mobile model electromagnetic drive unit is powered, and so that output shaft 5 is realized axial big stroke linear positioning, until output shaft End connection component 6 arrives at X-direction target position；Next to controlling same side in piezoelectric twin-wafer type rotational positioning component 3 It is powered to the piezoelectric bimorph 32 of curved deflector, makes a wide range of macro dynamic angle adjustment of output shaft 5, secondly by piezoelectric inertia formula Piezoelectric ceramics shearing stacks 42 and piezoelectric stack II43 drive waveforms electrical control in rotational positioning component 4, keeps output shaft 5 small Angle rotational positioning, and then realize the positioning of the macro microring array continuous rotation of output shaft 5；Eventually by the axial big throw line of output shaft 5 Property positioning and macro microring array rotational positioning, realize output the continuous pose of shaft end connection component 6 adjustment.

The piezoelectricity of the utility model-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device control method, it is main to wrap Include following steps:

A) tightening cushion 23 of suitable thickness is selected to pre-tighten piezoelectric stack I21, and guarantees that piezoelectric inertia formula rotates Disc 45 in contact jaw 35 and 5 clearance fit of output shaft and piezoelectric twin-wafer type rotational positioning component 4 in positioning component 3 The mass block 41 of end with connect barrel clearance fit on the inside of sleeve 4A；

B) apply square wave drive voltage (shown in Fig. 7) to the piezoelectric stack I 21 in clamping mechanism 2, piezoelectric stack I 21 Under the action of inverse piezoelectric effect, slowly extend, in this process, corresponding flexible deformation occurs for flexible hinge II 22, thus It separates hemispherical contact part thereon with connection sleeve 4A and cancels self-locking, in power process, 22 elasticity of flexible hinge II becomes Shape restore, make hemispherical contact part with connect sleeve 4A close contact realization it is self-locking；

C it) while clamping mechanism 2 is powered, is powered to the stator coil 12 in magnet steel mobile model electromagnetic drive unit, by It is acted in the permanent magnet 11 for being located at the connection end sleeve 4A by Ampere force, drives the axial big stroke linear of output shaft 5 mobile, and Connection sleeve 4A stroke range is limited by 1 end flexible bearing 9 of body；

D) after exporting the locking of 6 axial position of shaft end connection component, in piezoelectric twin-wafer type rotational positioning component 4 Piezoelectric bimorph 42 applies sawtooth wave driving voltage, and piezoelectric bimorph 42 is quickly reversed vibration after slow bending deformation, drives The mass block 41 of its 45 end of disc moves and generates inertia force, and then formation makes a wide range of macro dynamic rotational positioning of output shaft 5 Moment of inertia, and by changing driving electrical signal voltage waveform direction, realize the change of 5 direction of rotation of output shaft；

E) after a wide range of macro dynamic rotational positioning of output shaft 5, by being driven to piezoelectricity in piezoelectric inertia formula rotational positioning component 3 Dynamic component timing control first applies rectangular wave to piezoelectric stack II 33 at this time, it can be achieved that 5 minute angle rotational positioning of output shaft Driving voltage, piezoelectric stack II 33 slowly extend under the action of inverse piezoelectric effect, and piezoelectric ceramics is sheared in this process It stacks 32 drive output ends 35 and is in close contact preload with output shaft 5, next stack 32 application sawtooth waves to piezoelectric ceramics shearing Shape driving voltage drives output shaft 5 to rotate clockwise, in the process of voltage rapid decrease based on piezoelectricity shearing effect contact jaw 35 In, due to motional inertia, output shaft 5 only has small rollback movement；Similarly, change driving voltage waveform direction, realize output Axis 5 rotates counterclockwise；

F driving voltage (electric current) amplitude and frequency for) adjusting each element are, it can be achieved that 5 axial displacement of output shaft and angle The regulation of deflection speed.

The foregoing is merely the preferred embodiments of the utility model, are not intended to limit the utility model, for ability For the technical staff in domain, various modifications and changes may be made to the present invention.It is all to made by the utility model it is any modification, Equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.

Claims (6)

1. a kind of piezoelectricity-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, it is characterised in that: including body (1), axially Big stroke positioning component, clamping mechanism (2), piezoelectric inertia formula rotational positioning component (3), piezoelectric twin-wafer type rotational positioning component (4), sleeve (4A), output shaft (5), output shaft end connection component (6), bearing I (10) and bearing I I(13 are connected), the pressure Electrical inertia formula rotational positioning component (3) is fixedly mounted in connection sleeve (4A), and guarantees to match when power-off with output shaft (5) gap It closes；The piezoelectric twin-wafer type rotational positioning component (4) and output shaft (5) interference fit are installed, and wherein output shaft (5) is by fixing The bearing I (10) and bearing I I(13 being mounted in connection sleeve (4A)) support guide, guarantee output shaft end connection component (6) Axis and output axis (7) it is coaxial；The clamping mechanism (2) is connected on the flange of body (1) by connecting bolt, and benefit With hemispherical contact part with connect sleeve (4A) be in close contact realize it is self-locking, wherein being adjusted by body (1) end and external macroscopic view Adjusting bit platform is fixedly connected with.

2. piezoelectricity according to claim 1-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, it is characterised in that: The axial big stroke positioning component is: coil (12) is connected on body (1), as magnet steel mobile model electromagnetic drive unit Stator, permanent magnet (11) is connected as mover with sleeve (4A) is connect, formed closed magnetic flux path (15), realizes output shaft (5) axial big stroke linear positioning, wherein to guarantee that connection sleeve (4A) displacement stroke without departing from body (1) length limitation, is led to Cross flexible bearing (9) the progress axial limiting that pressing plate (8) is fixed on body (1) end；Winding wire (14) is through body (1) end Through-hole is connected with coil (12), and can connect heat pipe with cooling system and be replaced, and realizes that forced convertion improves coil (12) Radiating condition.

3. piezoelectricity according to claim 1-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, it is characterised in that: The piezoelectric inertia formula rotational positioning component (3) is: four groups of flexible hinge I(36) it is uniformly distributed admittedly by holding screw (31) Be scheduled on connection sleeve (4A) square hole in, flexible hinge I(36) design have kidney slot (34) for position adjustment；Flexible hinge I(36 Piezoelectric Driving component) is pasted in the groove of end, Piezoelectric Driving component is by the piezoelectric stack II(33 that bonds together), piezoelectricity Ceramic shear stacks (32) and contact jaw (35) composition；Piezoelectric stack II(33) when being powered, contact jaw (35) and output shaft (5) are tight Touch touching and realize preload, pass through and adjust piezoelectric stack II(33) driving voltage amplitude change pretightning force size；Piezoelectric ceramics shearing When stacking (32) energization, contact jaw (35) transverse shifting is driven, realizes output shaft (5) two-way continuous precision rotational positioning.

4. piezoelectricity according to claim 1-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, it is characterised in that: The piezoelectric twin-wafer type rotational positioning component (4) is by mass block (41), piezoelectric bimorph (42), screw (43), connection Axle sleeve (44) and disc (45) composition, wherein two groups of disc (45) are symmetrically connected in connecting bushing (44) by screw (43) On；Connecting bushing (44) is interference fitted in connection sleeve (4A) outer end output shaft (5)；Four piezoelectric bimorphs (42) are glued respectively It connects on disc (45), while four pieces of mass blocks (41) are respectively adhered on disc (45) end, increases inertial drive torque.

5. piezoelectricity according to claim 1-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, it is characterised in that: The clamping mechanism (2) includes four groups of flexible hinge II(22), four groups of piezoelectric stack I(21) it is placed on flexible hinge II(22) Installation groove in, and using the adjustable tightening cushion of thickness (23) realize pre-tighten；Piezoelectric stack I(21) power-off when, guarantee it is soft Property hinge II(22) end hemispherical contact part with connect sleeve (4A) be in close contact realize connection sleeve (4A) axial self-locking, into And realize that the output shaft end connection component (6) being connected with output shaft (5) is axially precisely positioned；Piezoelectric stack I(21) be powered when, Flexible hinge II(22) end hemispherical contact part with connection sleeve (4A) separate, pass through signal sequence control realization output shaft (5) the macro microring array positioning of multiple degrees of freedom.

6. piezoelectricity according to claim 1-electromagnetism hybrid-driven multiple degrees of freedom precision positioning device, it is characterised in that: The output shaft end connection component (6) is end effector, and the end effector is optical element installation support or micro- Clamping unit is connected by screw thread with output shaft (5).