CN209541665U - The caliberating device of optics paraboloid of revolution standard array center distance - Google Patents
The caliberating device of optics paraboloid of revolution standard array center distance Download PDFInfo
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- CN209541665U CN209541665U CN201920362634.XU CN201920362634U CN209541665U CN 209541665 U CN209541665 U CN 209541665U CN 201920362634 U CN201920362634 U CN 201920362634U CN 209541665 U CN209541665 U CN 209541665U
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Abstract
The utility model relates to a kind of caliberating devices of optics paraboloid of revolution standard array center distance, including optics paraboloid of revolution standard array, angular transducer, three coordinate measuring machine, optics paraboloid of revolution standard array is placed on three-dimensional coordinates measurement machine worktable, multiple optics paraboloid of revolution standards including array pedestal and laying on the base, angle information of the angular transducer to measure the point on optics paraboloid of revolution standard, including laser, reflecting mirror, pinhole filter, plus lens, polarization splitting prism, quarter-wave plate, object lens and photodetector.Bring location error when the utility model can eliminate the installation of optics paraboloid of revolution standard.
Description
Technical field
The utility model relates to a kind of caliberating device of optical reference part, especially a kind of optics paraboloid of revolution standard
The caliberating device of array center's distance.
Background technique
Freeform optics surface has very big freedom of processing, and machining accuracy is high, may be used as the standard of measurement.Such as light
Learning the paraboloid of revolution has the characteristics that surface slope variation is linear with change in location, can be used for the measurement to position.
At present in mature processing technology, there is very high essence to the processing of the face type and surface roughness of the single optics paraboloid of revolution
Degree often uses in such a way that the arrangement of multiple paraboloids is combined into array when the optics paraboloid of revolution is used to measure, and current
Processing technology in it is not high to the center spacing positioning accuracy between each paraboloid or need pay very big processing cost.And
The raising of measuring system overall precision while the machining accuracy and multiple parabolic interplanar distances for depending on the single optics paraboloid of revolution
Positioning accuracy.
Motion detection in many applications, such as numerically-controlled machine tool, multiaxis displacement platform is needed using position reference and angle
Degree benchmark measures.A kind of optics that can provide position and angle reference is processed using the design of freeform optics surface processing technology
Standard is for measuring detection.Due in the arrangement process of each optics paraboloid of revolution type, each optics rotary parabolic
Deviation and standard will be present in long-term use by external environmental condition in the center in face and the theoretical position of design
Influence that micro-strain occurs, the spacing between each characteristic point also will and design value generates deviation, therefore only with optics rotary parabolic
Design spacing and angle between face the position of measured system and angle are measured as benchmark be it is incorrect, it is practical plus
The spacing of parabolic interplanar distance and Theoretical Design that work goes out has differences, it is therefore desirable to each on the standard gone out to actual processing
Paraboloid centre distance is demarcated, and then improves the accuracy and precision measured using the standard component system under test (SUT) position.
Utility model content
The purpose of the utility model is to provide a kind of caliberating devices of optics paraboloid of revolution standard array center distance.
The utility model is adopted the technical scheme that solve technical problem present in well-known technique:
A kind of caliberating device of optics paraboloid of revolution standard array center distance, including optics paraboloid of revolution benchmark
Part array, angular transducer, three coordinate measuring machine, optics paraboloid of revolution standard array are placed in three-dimensional coordinates measurement machine worktable
On, multiple optics paraboloid of revolution standards including array pedestal and laying on the base, the angular transducer is fixed
In the motive spindle of measuring machine, array pedestal is placed on the workbench of three coordinate measuring machine, which is characterized in that
Angle information of the angular transducer to measure the point on optics paraboloid of revolution standard, including laser
Device, reflecting mirror, pinhole filter, plus lens, polarization splitting prism, quarter-wave plate, object lens and photodetector;By
The laser emitting light of the reflection of reflecting mirror converges light by plus lens after pinhole filter filters, convergence
Light afterwards changes direction and the energy of light after polarization splitting prism;The light of reflection changes by quarter-wave plate
Optics paraboloid of revolution standard is irradiated to after the phase of light, via the optics paraboloid of revolution standard reflection light successively
Through being received by a photoelectric detector after polarization splitting prism and object lens;The photodetector is located on the focal plane of object lens;
Preferably, the laser is dot light spot laser device.The pinhole filter is aperture diaphragm.
The utility model has the advantages and positive effects of: utilizing scaling method of the utility model, passes through three
Coordinate measuring machine fit angle sensor can be completed to each optics rotary parabolic on optics paraboloid of revolution standard array
The calibration of face central point transverse and longitudinal spacing, bring location error when eliminating the installation of optics paraboloid of revolution standard.
Detailed description of the invention
Fig. 1 is the caliberating device schematic diagram of the utility model application
In figure: 1, optics paraboloid of revolution standard array, 2, angular transducer, 3, three coordinate measuring machine
Fig. 2 is the optics paraboloid of revolution standard array schematic diagram of the utility model application
In figure: 1-1, optics paraboloid of revolution standard;1-2, array pedestal
Fig. 3 is the angular transducer light channel structure schematic diagram of the utility model application
In figure: 2-1, laser;2-2, reflecting mirror;2-3, pinhole filter;2-4, plus lens;2-5, polarization spectro rib
Mirror;2-6, quarter-wave plate;1-1, optics paraboloid of revolution standard;2-7, object lens;2-8, photodetector
Specific embodiment
For the utility model content, feature and effect that can further appreciate that the utility model, the following examples are hereby given, and
It is described in detail with the accompanying drawings as follows:
The utility model is to solve technical problem present in well-known technique and provide a kind of optics paraboloid of revolution benchmark
Scaling method, the device of part array center distance, this method utilize the face type feature Accurate Calibration of the optics paraboloid of revolution itself
Centre distance between each optics paraboloid of revolution out eliminates the optics paraboloid of revolution and installs bring error, is coherent detection
Reference data is provided.
The utility model is adopted the technical scheme that solve technical problem present in well-known technique: a kind of optics rotation
Turn scaling method, the device of paraboloid standard array center distance, in a kind of optics paraboloid of revolution standard array
Scaling method, the device of heart distance include optics paraboloid of revolution standard array 1, angular transducer 2 and three coordinate measuring machine
3。
The optics paraboloid of revolution standard array 1 is placed on the workbench of the three coordinate measuring machine 3, by multiple
Optics paraboloid of revolution standard 1-1 and array pedestal 1-2 composition.Optics paraboloid of revolution standard is brass material, in base
The surface of quasi- part processes the optics paraboloid of revolution.Standard bottom is equipped with threaded hole, is connected by bolt with array pedestal,
Centre distance needs further to be demarcated between standard.The single optics paraboloid of revolution on optics paraboloid of revolution standard array
It is row with the direction x by position No., is column with the direction y, the i-th row jth column number is P (i, j).
As shown in Fig. 2, a kind of angular transducer suitable for the detection of freeform optics surface face type, the angular transducer 2
By laser 2-1, reflecting mirror 2-2, pinhole filter 2-3, plus lens 2-4, polarization splitting prism 2-5, quarter-wave plate
The composition such as 2-6, optics paraboloid of revolution standard 1-1, object lens 2-7, photodetector 2-8, can measure optics rotary parabolic
The angle information of point on the standard of face.
The laser is dot light spot laser device, and laser emitting light is vertical light;The reflecting mirror is located at
The underface of laser, from the horizontal by 45° angle, the oblique upper left side of mirror surface;The pinhole filter is aperture diaphragm, hole
Diameter size is 200um, hole heart face laser beam;The plus lens is located on the right side of pinhole filter, converges to light,
Its focal length should not select larger;The polarization splitting prism is semi-transparent semi-reflecting lens, thus it is possible to vary the direction of light and energy;It is described
Quarter-wave plate is located at the underface of polarization splitting prism, thus it is possible to vary the phase of light;The photometry rotation to be checked is thrown
Object plane standard is connected on three-dimensional coordinates measurement machine worktable by connector;The object lens be convex lens, to imaging beam into
Row convergence, improves image quality;The photodetector is located on the focal plane of object lens, generally industry CMOS camera.
Further, the laser emitting laser is reflected by a reflector that vertical thick light beam is made to become horizontal thick light
Beam, horizontal thick light beam becomes the light pencil that diameter is 200um after being limited by pinhole filter, after the convergence of plus lens
By polarization splitting prism, at this moment the p light in light beam passes through completely, s light be reflected through quarter-wave plate go directly it is to be detected
Optics paraboloid of revolution standard, reflection light successively image in after quarter-wave plate, polarization splitting prism, object lens again
On photodetector.The face type information of free form surface to be measured can be obtained according to the facula position information on photodetector.
Assuming that freeform optics surface to be detected is the small-bore optics paraboloid of revolution, and point on the known optical paraboloid of revolution
Slope it is directly proportional to its horizontal distance apart from optics rotary parabolic vertex of surface.For the optics rotary parabolic completed the process
Face is fixed on three-dimensional coordinates measurement machine worktable;Make it in horizontal plane X-direction with one by adjusting three coordinate measuring machine
Determine step pitch to move in a straight line, measures n point;Make it in the mobile certain step of horizontal plane Y-direction by adjusting three coordinate measuring machine again
Away from repeating the above steps and measure m point;And so on, until measurement point is covered substantially to the photometry paraboloid of revolution.It is theoretical
On, facula position distribution of the measurement point on photodetector meets n × m array of certain rule such as equidistantly distributed, practical
Testing result shows that the optics paraboloid of revolution processed is undesirable if not being inconsistent with expection, and there are face type errors, and can
It is otherwise qualified converted products to be corrected targeted specifically according to detection information.
The kinematic axis and horizontal workbench for mutually orthogonal direction that there are three the tools of three coordinate measuring machine 3, and angle
Sensor 2 is mounted on the main shaft of three coordinate measuring machine vertical movement, and the column of optics paraboloid of revolution standard battle array 1 are placed in three seats
On the workbench of co-ordinate measuring machine.
The scaling method uses following steps:
1) calibration carries out sampling site by the way of line by line, first measures the first row first row optics paraboloid of revolution benchmark
The coordinate in part P (1,1) direction x, three coordinate measuring machine main axis drive angular transducer to measure n point in P (1,1) in X direction
Angle information α11、α12···α1n, while three coordinate measuring machine is recorded in the feedback value X of X-direction11、X12···X1n。
2) coordinate in the first row first row the optics paraboloid of revolution standard P (1, the 1) direction y, three-dimensional coordinates measurement are measured again
Owner's axis drives angular transducer to measure the angle information β of n point in P (1,1) along Y-direction11、β12···β1n, record simultaneously
The value of feedback Y of three coordinate measuring machine in the Y direction11、Y12···Y1n。
3) feedback value X that measuring machine is obtained11、X12···X1nWith angle information α11、α12···α1nIt carries out minimum
Two multiply linear fit, the intercept b of obtained fitting a straight line equation11The coordinate in the direction x of as P (1,1);Similarly measuring machine is obtained
The value of feedback Y arrived11、Y12···Y1nWith angle information β11、β12···β1nLeast square linear fit is carried out, what is obtained is quasi-
Close the intercept B of linear equation11The coordinate in the direction y of as P (1,1);Then seat of the P (1,1) under three coordinate measuring machine coordinate system
It is designated as (b11,B11)。
4) coordinate to the direction x for the optics paraboloid of revolution standard that the i-th row jth column number is P (i, j) and the direction y
Coordinate can pass through repeat step 1) -3) measurement obtain, be (bij,Bij);It is the optics of P (m, n) to the n-th column number of m row
The coordinate in the direction x of paraboloid of revolution standard and the coordinate in the direction y, which can also pass through, repeats step 1) -3) measurement obtains, be
(bmn,Bmn);Then the centre distance of P (i, j) and P (m, n) are (bij-bmn,Bij-Bmn)。
5) it repeats the above steps, the single optics paraboloid of revolution in optics paraboloid of revolution standard array can be calibrated
The relative distance at center between any two.
The principles of the present invention:
The utility model be utilized that area is smaller and face type changing rule known to freeform optics surface alignment collimated optical beam
Sensitivity characteristic devises a set of simple light channel structure, can be under the premise of known optical free-curved-surface-type changing rule
The freeform optics surface face type that processes is detected by this light channel structure, screens out that there are the products of larger mismachining tolerance.
When carrying out position measurement as position reference using optics paraboloid of revolution standard array, since optics rotates
Paraboloid standard is usually present certain position error in installation, it is therefore desirable to each optics paraboloid of revolution standard
Centre distance is demarcated, and the exact position between them is obtained.The utility model utilizes the face of the optics paraboloid of revolution itself
Type feature is believed using the location information of three coordinate measuring machine record measurement point by the angle that angular transducer obtains measurement point
Breath, the centre coordinate of optics paraboloid of revolution standard, and then Accurate Calibration are accurately obtained by least square method linear fit
Centre distance between each optics paraboloid of revolution out eliminates the optics paraboloid of revolution and installs bring error, is coherent detection
Reference data is provided.
Although being described above in conjunction with preferred embodiment of the attached drawing to the utility model, the utility model is not
It is confined to above-mentioned specific embodiment, the above mentioned embodiment is only schematical, is not restrictive, ability
The those of ordinary skill in domain is not departing from the utility model aims and claimed under the enlightenment of the utility model
In the case where range, many forms can also be made, these are belonged within the protection scope of the utility model.
Claims (3)
1. a kind of caliberating device of optics paraboloid of revolution standard array center distance, including optics paraboloid of revolution standard
Array, angular transducer, three coordinate measuring machine, optics paraboloid of revolution standard array are placed in three-dimensional coordinates measurement machine worktable
On, multiple optics paraboloid of revolution standards including array pedestal and laying on the base, the angular transducer is fixed
In the motive spindle of measuring machine, array pedestal is placed on the workbench of three coordinate measuring machine, which is characterized in that
Angle information of the angular transducer to measure the point on optics paraboloid of revolution standard, including laser,
Reflecting mirror, pinhole filter, plus lens, polarization splitting prism, quarter-wave plate, object lens and photodetector;By anti-
The laser emitting light for penetrating the reflection of mirror converges light by plus lens after pinhole filter filters, after convergence
Light change direction and the energy of light after polarization splitting prism;The light of reflection changes light by quarter-wave plate
Optics paraboloid of revolution standard is irradiated to after the phase of line, the light reflected via optics paraboloid of revolution standard is successively saturating
It is received by a photoelectric detector after crossing polarization splitting prism and object lens;The photodetector is located on the focal plane of object lens.
2. the apparatus according to claim 1, which is characterized in that the laser is dot light spot laser device.
3. the apparatus according to claim 1, which is characterized in that the pinhole filter is aperture diaphragm.
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Cited By (1)
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CN109974579A (en) * | 2019-03-21 | 2019-07-05 | 天津大学 | The caliberating device of optics paraboloid of revolution standard array center distance |
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CN109974579A (en) * | 2019-03-21 | 2019-07-05 | 天津大学 | The caliberating device of optics paraboloid of revolution standard array center distance |
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