CN209531550U

CN209531550U - A kind of vapor deposition apparatus quartz bell cover can washing apparatus

Info

Publication number: CN209531550U
Application number: CN201821745852.3U
Authority: CN
Inventors: 胡兴华; 许峯嘉; 廖世保
Original assignee: Zhiwei Semiconductor Shanghai Co Ltd
Current assignee: Zhiwei Semiconductor Shanghai Co Ltd
Priority date: 2018-10-26
Filing date: 2018-10-26
Publication date: 2019-10-25
Anticipated expiration: 2028-10-26

Abstract

The utility model relates to semiconductor devices manufacturing industry technical field, specifically a kind of vapor deposition apparatus quartz bell cover can washing apparatus, comprising: cleaning pipe；Transition joint；Adapter；The expansion mouth of the cleaning pipe is embedded in the annular caulking groove of adapter, and the interior pipe portion of adapter is embedded in expansion mouth；The pipe portion of cleaning pipe sequentially passes through transition joint cleaning pipe through-hole, unthreaded hole；The external screw thread in diameter portion of the adapter is threadedly coupled with the threaded hole of transition joint.Compared with prior art, structure is simple for the utility model, easy to use, using spray pattern, saves medical fluid, the service life of elongate member reduces the injury to personnel and production cost.

Description

A kind of vapor deposition apparatus quartz bell cover can washing apparatus

Technical field

The utility model relates to semiconductor devices manufacturing industry technical field, specifically a kind of vapor deposition apparatus stone English bell jar can washing apparatus.

Background technique

The cleaning way of existing quartz clock vestlet generally uses immersion type and is cleaned manually with hydraulic giant, immersion type entire zero Part will all contact medical fluid, to the two-sided corrosion of part, reduce service life and waste medical fluid；And Manual-cleaning can cause personnel Dangerous and injury.

Utility model content

The purpose of the utility model is to overcome the deficiencies in the prior art, provide it is a kind of it is easy, part can be extended use the longevity It orders, reduce the usage amount of medical fluid and reduce the cleaning device of the injury to personnel.

To achieve the above object, a kind of vapor deposition apparatus quartz bell cover can washing apparatus is designed, which is characterized in that packet It includes:

--- cleaning pipe comprising one end be equipped with the pipe portion of sealing surface and be located at the pipe portion other end for connection Expansion mouth；Several hydrojet micropores are laid on the curved surface of the pipe portion；

--- transition joint, one end set unthreaded hole, and other end sets threaded hole, and set between unthreaded hole and threaded hole every Plate, the partition are equipped with the cleaning pipe through-hole of connection unthreaded hole and threaded hole；

--- adapter, whole T-shaped, the axial direction in head along central axis sets connecting hole, and the outer wall in diameter portion is set External screw thread；And the axial direction in diameter portion along central axis sets infusion hole, the connecting hole and infusion hole penetrate through；And it is located at outside connecting hole It is additionally provided with annular caulking groove on the end face in diameter portion, path portion is cut into outer portion and interior pipe portion；

The expansion mouth of the cleaning pipe is embedded in the annular caulking groove of adapter, and the interior pipe portion of adapter is embedded and is being flared In portion；The pipe portion of cleaning pipe sequentially passes through transition joint cleaning pipe through-hole, unthreaded hole；The external screw thread in the diameter portion of the adapter is in Between connector threaded hole be threadedly coupled.

Further, the diameter of the micropore is 0.5mm.

Further, the micropore is arranged along the axial uniform intervals of the pipe portion of cleaning pipe, is divided into 10mm between described；Each Micropore on circumference is evenly equipped with 4.

Further, the micropore on adjacent circumference is staggered.

Further, the end face in said inner tube portion protrudes from the end face of the outer portion of adapter.

Further, the inner wall of the unthreaded hole of the transition joint is equipped with seal groove.

Further, there are two the seal groove is arrived along axial direction.

Further, the connecting hole is smooth hole or is internal thread hole；When the connecting hole is smooth hole, for cone Platform shape hole.

Further, the head of the adapter is in hexagon.

Further, the cleaning pipe is managed using PFA；The transition joint uses PTFE connector；The adapter uses PTFE adapter.

Compared with prior art, structure is simple for the utility model, easy to use, using spray pattern, saves medical fluid, extends The service life of component reduces the injury to personnel and production cost.

Detailed description of the invention

Fig. 1 is the utility model structural schematic diagram in use.

Fig. 2 is the perspective view of cleaning pipe in the utility model.

Fig. 3 is the perspective view of another angle of cleaning pipe in the utility model.

Fig. 4 is the partial view of the cut-away view of cleaning pipe in the utility model.

Fig. 5 is the perspective view of transition joint in the utility model.

Fig. 6 is the perspective view of another angle of transition joint in the utility model.

Fig. 7 is the main view of transition joint in the utility model.

Fig. 8 is A-A shown in Fig. 7 to cut-away view.

Fig. 9 is the perspective view of adapter in the utility model.

Figure 10 is the perspective view of another angle of adapter in the utility model.

Figure 11 is the main view of adapter in the utility model.

Figure 12 is B-B direction cut-away view shown in Figure 11.

Specific embodiment

Now in conjunction with accompanying drawings and embodiments, the utility model is further described.

Embodiment 1

Referring to fig. 2~12, a kind of vapor deposition apparatus quartz bell cover can washing apparatus characterized by comprising

--- cleaning pipe 1 comprising one end be equipped with the pipe portion of sealing surface and be located at the pipe portion other end for connection Expansion mouth 1-1；Several hydrojet micropores 2 are laid on the curved surface of the pipe portion；

--- transition joint 3, one end set unthreaded hole 3-3, and other end sets threaded hole 3-1, and unthreaded hole 3-3 and screw thread Partition is set between the 3-1 of hole, the partition is equipped with the cleaning pipe through-hole 3-2 of connection unthreaded hole 3-3 and threaded hole 3-1；

--- adapter 4, whole T-shaped, the axial direction in the 4-1 of head along central axis sets connecting hole 4-11, diameter portion The outer wall of 4-2 sets external screw thread；And the axial direction in diameter portion 4-2 along central axis sets infusion hole 4-12, the connecting hole 4-11 and infusion Hole 4-12 perforation；And annular caulking groove 4-23 is additionally provided on the end face of the diameter portion 4-2 outside connecting hole 4-11 and is cut into path portion Outer portion and interior pipe portion 4-3；

The expansion mouth 1-1 of the cleaning pipe 1 is embedded in the annular caulking groove 4-23 of adapter 4, and the interior pipe portion of adapter 4 It is embedded in expansion mouth 1-1；The pipe portion of cleaning pipe 1 sequentially passes through transition joint 3 and cleans pipe through-hole 3-2, unthreaded hole 3-3；Described turn The external screw thread of diameter portion 4-2 of connector 4 is threadedly coupled with the threaded hole 3-1 of transition joint 3.

It is pumped in use, the connecting hole 4-11 of adapter 4 is connected by connecting line, and the pipe of the cleaning pipe 1 in the present apparatus Portion protrudes into quartz clock vestlet 5, and the unthreaded hole 3-3 of transition joint 3 is locked in the outer end of quartz clock vestlet 5.Medical fluid is pumped to press Power 2-3Kg is confessed, and is then entered from adapter 4, and the micropore on cleaned pipe 1 is uniformly sprayed at the inner wall of quartz clock vestlet 5 On, the microparticle on inner wall is cleaned up.In actual use, deionized water input port, the input port can be also equipped on pump Deionized water is conveyed using piping connection, after using present apparatus sprinkling medical fluid, deionized water can be automatically brought to 2-3Kg Pressure, which is confessed, to continue to clean.

Further, the diameter of the micropore 2 is 0.5mm.

Further, the micropore 2 is arranged along the axial uniform intervals of the pipe portion of cleaning pipe 1, is divided into 10mm between described；Often Micropore on a circumference is evenly equipped with 4, sprays so more evenly comprehensive.

Further, the micropore on adjacent circumference is staggered.

Further, the end face of said inner tube portion 4-3 protrudes from the end face of the outer portion of adapter 4.

Further, the inner wall of the unthreaded hole 3-3 of the transition joint 3 is equipped with seal groove 3-4, when in use, transition joint 3 Seal groove 3-4 in set sealing ring, keep transition joint 3 and the assembly of quartz clock vestlet 5 closer.

Further, there are two the seal groove 3-4 is arrived along axial direction.

Further, the connecting hole 4-11 is smooth hole or is internal thread hole, facilitates connecting line using chock plug or spiral shell The connection of line head.When the connecting hole 4-11 is smooth hole, it is taper type hole, conveniently fills in, and assembles closer secured.

Further, the head 4-1 of the adapter 4 is in hexagon, facilitates rotation adapter 4, makes itself and transition joint 3 Assembly.

Further, the cleaning pipe 1 is managed using PFA；The transition joint 3 uses PTFE connector；The adapter 4 is adopted With PTFE adapter.

Claims

1. a kind of vapor deposition apparatus quartz bell cover can washing apparatus characterized by comprising

--- cleaning pipe (1) comprising one end is equipped with the pipe portion of sealing surface and is located at the expansion for connection of the pipe portion other end Oral area (1-1)；Several hydrojet micropores (2) are laid on the curved surface of the pipe portion；

--- transition joint (3), one end are set unthreaded hole (3-3), and other end is set threaded hole (3-1), and unthreaded hole (3-3) with Partition is set between threaded hole (3-1), the partition is equipped with the cleaning pipe through-hole of connection unthreaded hole (3-3) and threaded hole (3-1) (3-2)；

--- adapter (4), whole T-shaped, the axial direction in head (4-1) along central axis sets connecting hole (4-11), diameter The outer wall in portion (4-2) sets external screw thread；And the axial direction in diameter portion (4-2) along central axis is set infusion hole (4-12), the connecting hole (4- 11) it is penetrated through with infusion hole (4-12)；

And it is additionally provided with annular caulking groove (4-23) on the end face in the diameter portion (4-2) of connecting hole (4-11) outside and is cut into path portion outside Ring portion and interior pipe portion (4-3)；

The expansion mouth (1-1) of the cleaning pipe (1) is embedded in the annular caulking groove (4-23) of adapter (4), and adapter (4) Interior pipe portion is embedded in expansion mouth (1-1)；The pipe portion of cleaning pipe (1) sequentially pass through transition joint (3) cleaning pipe through-hole (3-2), Unthreaded hole (3-3)；The external screw thread in the diameter portion (4-2) of the adapter (4) is threadedly coupled with the threaded hole (3-1) of transition joint (3).

2. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that described micro- The diameter in hole (2) is 0.5mm.

3. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that described micro- Hole (2) is arranged along the axial uniform intervals of the pipe portion of cleaning pipe (1), is divided into 10mm between described；Micropore on each circumference is uniformly distributed There are 4.

4. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as claimed in claim 3, which is characterized in that adjacent Micropore on circumference is staggered.

5. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that in described The end face of pipe portion (4-3) protrudes from the end face of the outer portion of adapter (4).

6. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that in described Between connector (3) unthreaded hole (3-3) inner wall be equipped with seal groove (3-4).

7. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as claimed in claim 6, which is characterized in that described close Sealing groove (3-4) edge is axially arranged with two.

8. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that the company Hole (4-11) is connect to be smooth hole or be internal thread hole；It is taper type hole when the connecting hole (4-11) is smooth hole.

9. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that described turn The head (4-1) of connector (4) is in hexagon.

10. a kind of vapor deposition apparatus quartz bell cover can washing apparatus as described in claim 1, which is characterized in that described Cleaning pipe (1) is managed using PFA；The transition joint (3) uses PTFE connector；The adapter (4) uses PTFE adapter.