CN209513989U - The detection device of the circuit board function of electron beam sweep measuring set dual pressure controller - Google Patents
The detection device of the circuit board function of electron beam sweep measuring set dual pressure controller Download PDFInfo
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- CN209513989U CN209513989U CN201920128160.2U CN201920128160U CN209513989U CN 209513989 U CN209513989 U CN 209513989U CN 201920128160 U CN201920128160 U CN 201920128160U CN 209513989 U CN209513989 U CN 209513989U
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Abstract
The utility model discloses the detection devices of the circuit board function of electron beam sweep measuring set dual pressure controller, it is related to technical field of semiconductors, the detection device connects the automatic detection that can carry out a key after the circuit board of dual pressure controller to be detected to circuit board by cable, due to being Machine automated detection, therefore there is unified detection judgment criteria, Detection accuracy is high and test result is stablized, and the detection device can navigate to the component to break down on the circuit board of dual pressure controller to be detected, therefore corresponding component is only needed to change when finding failure, reduce the maintenance cost to dual pressure controller.
Description
Technical field
The utility model relates to technical field of semiconductors, the especially circuit of electron beam sweep measuring set dual pressure controller
The detection device of plate function.
Background technique
Electron beam sweep measuring set is that one kind is used to measure in semiconductor fabrication pattern and its crucial ruler on chip
Very little instrument, its working principle is that: the high-power electron beam irradiated from electron gun is irradiated to after deflecting and converge by coil
Specimen surface obtains the image of specimen surface by detecting the secondary electron inspired, high based on clearly surface image
The measurement critical size of precision.The dual pressure controller of electron beam sweep measuring set extracts and adds for electron gun power supply, electron beam
The functions such as speed, output performance directly influences the characteristics such as electron emission current, stability, controllability, and then influences imaging
Clarity and stability, thus in the whole life cycle of electron beam sweep measuring set, dual pressure controller is carried out strictly
Function detection is of great significance.
Electron beam sweep measuring set in actual use, dual pressure controller is opened for a long time, and power is big, performance requirement
Height, but it is expensive, and spoilage is high, mainly specialized voltage table is used to measure for the detection means of dual pressure controller at present
Its output voltage is artificially judged whether dual pressure controller works normally, is asked there are following by the variation of voltmeter output valve
Topic: (1), voltmeter be shown the voltage value after smothing filtering, display rate is low, can not measure well voltage wave emotionally
Condition, accuracy rate is low, inefficiency.(2), artificial to judge whether voltage fluctuation correctly influences vulnerable to subjective factor, standard is not united
One, and dual pressure controller is as the powerful device opened for a long time, working condition runs down, and more exacerbating can not be quasi-
Standby the problem of judging dual pressure controller state.(3), testing result can only judge dual pressure controller whether normal operation, if operation
It is abnormal, entire dual pressure controller can only be replaced, so that maintenance cost is very high.
Utility model content
The present inventor regarding to the issue above and technical need, proposes the electricity of electron beam sweep measuring set dual pressure controller
The detection device of road plate function, the device may be implemented to one key of circuit board of electron beam sweep measuring set dual pressure controller from
Dynamic detection, detection automation is high, detection efficiency is high, and can navigate to first device in the circuit board of dual pressure controller to be measured
Part rank can reduce the maintenance cost of dual pressure controller.
The technical solution of the utility model is as follows:
The detection device of the circuit board function of electron beam sweep measuring set dual pressure controller, the detection device include outer
Shell, setting main control board inside the housing and power adapter, the start button that case surface is set, stop key and
Display screen, and external power cable, power cable, controlling cable, fixed voltage gathering line are led to from the inside of shell
Cable, analog voltage acquire cable and high-voltage acquisition cable, are also provided with LED display window on shell；
Main control board includes the isolation module that control module is connected with control module by data/address bus, and with control
Molding block connected voltage management module, buzzer, LED array and display screen interface, isolation module are separately connected voltage output
Management module, control signal processing module, fixed voltage acquisition module, analog voltage acquisition module and high-voltage acquisition module, electricity
One end of outgoing management module connection power cable is pressed, the other end of power cable is powered for connecting circuit board under test,
Circuit board under test is the circuit board of dual pressure controller to be measured；Control one end of signal processing module connection controlling cable, control line
The other end of cable is for connecting circuit board under test and transmitting control instruction；Fixed voltage acquisition module is connected and fixed voltage acquisition line
The other end of one end of cable, fixed voltage acquisition cable is used to connect each supply voltage point in circuit board under test；Simulation electricity
One end of acquisition module connecting analog voltage acquisition cable is pressed, the other end of analog voltage acquisition cable is for connecting circuit under test
Each median electrical voltage point in plate, median electrical voltage point include but is not limited to electrical voltage point, the amplified electricity after analog-to-digital conversion
Pressure point and transformer input voltage point；High-voltage acquisition module connect high-voltage acquisition cable one end, high-voltage acquisition cable it is another
One end is used to connect the final output electrical voltage point in circuit board under test；
Display screen interface in main control board connects display screen, and the LED array face LED in main control board is shown
Window, the voltage management module in main control board connect power adapter, and power adapter connects one end of power cable, power supply
The other end of cable is for connecting power supply；Control module in main control board be also respectively connected with start button and stop by
Key.
Its further technical solution is that control module uses the module of model STM32F407ZET6.
Its further technical solution is photoelectrical coupler of the isolation module based on model TLP582.
Its further technical solution is, if voltage output management module includes driving circuit and main line relay circuit,
Driving signal chip of the driving circuit based on model 74HC240, each road relay circuit are based on model G6B-1114P-
The relay of FD-US 5VDC and each road relay circuit are used to provide different voltage values.
Its further technical solution is to control digital analog converter of the signal processing module based on model DAC0830LCN
With the amplifier of model OP07CP.
Its further technical solution is fixed voltage acquisition module, analog voltage acquisition module and high-voltage acquisition module
It is based respectively on the amplifier of model OP07CP and the analog-digital converter of model ADC10464.
Its further technical solution is reference voltage source of the voltage management module based on model REF01, power supply conversion
Device includes the power supply of model LRS-100-24 and the power supply of model RT-65C.
The advantageous effects of the utility model are:
This application discloses the detection device of the circuit board function of electron beam sweep measuring set dual pressure controller, the devices
The automatic detection that can carry out a key after the circuit board of dual pressure controller to be detected to circuit board is connected by cable, due to
It is Machine automated detection, therefore has unified detection judgment criteria, Detection accuracy height and test result to stablize, and the detection
Device can navigate to the component to break down on the circuit board of dual pressure controller to be detected, therefore only when finding failure
Corresponding component is needed to change, the maintenance cost to dual pressure controller is reduced.
Detailed description of the invention
Fig. 1 is the surface structure schematic diagram of the detection device of the dual pressure controller of the application
Fig. 2 is the circuit structure diagram of the detection device of the dual pressure controller of the application.
Fig. 3 is the physical circuit figure of the isolation module in the application.
Fig. 4 is the physical circuit figure of the voltage output management module in the application.
Fig. 5 is the physical circuit figure of the control signal processing module in the application.
Fig. 6 is adopting in fixed voltage acquisition module, analog voltage acquisition module and high-voltage acquisition module in the application
The physical circuit figure of collector.
Specific embodiment
Specific embodiments of the utility model will be further explained with reference to the accompanying drawing.
This application discloses the detection devices of the circuit board function of electron beam sweep measuring set dual pressure controller, please refer to
The surface structure schematic diagram of the detection device shown in fig. 1 and Fig. 2 shows the detection device circuit structure diagram.The device
Main control board and power adapter, the start button that case surface is set, stopping including shell, setting inside the housing
Key and display screen, and external power cable, power cable, controlling cable, fixed voltage are led to from the inside of shell
Cable, analog voltage acquisition cable and high-voltage acquisition cable are acquired, is also provided with LED display window on shell.
Main control board includes the isolation module that control module is connected with control module by data/address bus, and with control
Molding block connected voltage management module, buzzer, LED array and display screen interface.Control module in the application uses type
Number be STM32F407ZET6 module.Photoelectrical coupler of the isolation module based on model TLP582, the isolation mode in the application
The physical circuit figure of block referring to FIG. 3, isolation module is used to be isolated the voltage of control module side and the voltage of circuit board under test, from
And test equipment is protected, wherein circuit board under test refers to the circuit board of dual pressure controller to be measured.Isolation module is separately connected electricity
Press outgoing management module, control signal processing module, fixed voltage acquisition module, analog voltage acquisition module and high-voltage acquisition mould
Block.
Voltage output management module connects one end of power cable, and the other end of power cable is for connecting circuit board under test
It is powered.Wherein, if voltage output management module includes driving circuit and main line relay circuit, driving circuit is based on model
For the driving signal chip of 74HC240, each road relay circuit is based on the relay of model G6B-1114P-FD-US 5VDC
Device, each road relay circuit can control phase for providing different voltage values, by the state that driving circuit controls relay
The voltage output answered, the voltage output management module in the application include No. five relay circuits, be respectively configured to provide+5V ,+
The circuit diagram of the voltage of 10V ,+15V, -15V ,+24V, the voltage output management module of the application please refers to Fig. 4.
One end of signal processing module connection controlling cable is controlled, the other end of controlling cable is for connecting circuit board under test
And control instruction is transmitted, control instruction is used to indicate circuit board under test output given voltage.Wherein, signal processing module base is controlled
In the driving signal chip, the digital analog converter of model DAC0830LCN and putting for model OP07CP of model 74HC240
The physical circuit figure of big device, the control signal processing module of the application please refers to Fig. 5.
Fixed voltage acquisition module is connected and fixed one end of voltage acquisition cable, and the other end that fixed voltage acquires cable is used
Each supply voltage point in connection circuit board under test, to acquire each supply voltage in circuit board under test and then judge
With the presence or absence of short-circuit conditions.Analog voltage acquisition module connecting analog voltage acquires one end of cable, and analog voltage acquires cable
The other end be used to connect each median electrical voltage point in circuit board under test, median electrical voltage point includes but is not limited to that modulus turns
Electrical voltage point, amplified electrical voltage point and transformer input voltage point after changing, to acquire each intermediate threshold voltage and then sentence
It is disconnected to whether there is failure.High-voltage acquisition module connects one end of high-voltage acquisition cable, and the other end of high-voltage acquisition cable is for connecting
The output end of the final output electrical voltage point namely transformer in circuit board under test is connect, to acquire entire circuit board under test most
Whole output voltage, and then judge whether there is failure.Wherein, fixed voltage acquisition module, analog voltage acquisition module and high pressure
The circuit structure of acquisition module is similar, each module respectively include the amplifier based on model OP07CP Acquisition Circuit and
The analog to digital conversion circuit of analog-digital converter based on model ADC10464, fixed voltage acquisition module and analog voltage acquire mould
There can be one or more Acquisition Circuits in block, each Acquisition Circuit is respectively used to one electrical voltage point of connection, each Acquisition Circuit
Physical circuit figure please refer to Fig. 6.Acquisition Circuit in these modules can share one or more analog to digital conversion circuits, than
As included three Acquisition Circuits in analog voltage acquisition module, high-voltage acquisition module includes an Acquisition Circuit, and one piece
ADC10464 chip has 4 input terminals, then the Acquisition Circuit in analog voltage acquisition module and high-voltage acquisition module can share
The same analog to digital conversion circuit.
Voltage management module in main control board connects power adapter, and power adapter connects the one of power cable
End, the other end of power cable is for connecting power supply.Wherein, power adapter includes the power supply of model LRS-100-24
With the power supply of model RT-65C, the power supply of model LRS-100-24 is used to 220V alternating current being converted to 24V direct current, type
It number is used to 220V alternating current being converted to+5V, the direct current of+15V, -15V for the power supply of RT-65C.Voltage management module is based on
The reference voltage source of model REF01, for+15V to be turned+10V.
LED array face LED display window in main control board, the display screen interface in main control board connect display
Screen.Control module in main control board is also respectively connected with start button and stops key, when pressing start button, detection dress
Start-up operation is set, while buzzer can carry out buzzing prompt；When press stop key when, detection device stops working, simultaneously
Buzzer can also carry out buzzing prompt.After start-up operation, detection device is provided by power cable for circuit board under test each
Voltage exports control instruction to circuit board under test by controlling cable, and instruction circuit board under test exports different high-voltage signals, leads to
Cross monitoring circuit board under test on each voltage test points the response condition of control instruction can be judged automatically it is undesirable
Voltage test points, and then abnormal element that works quickly and effectively is locked in circuit board under test, final LED display window display is surveyed
Test result, display screen show detailed test information, and entire detection process is succinctly efficient, can be automatically performed.
Above-described is only the preferred embodiment of the application, and the utility model is not limited to above embodiments.It can manage
Solution, those skilled in the art do not depart from the utility model spirit and design under the premise of directly export or associate other
Improvements and changes are considered as being included within the scope of protection of this utility model.
Claims (7)
1. the detection device of the circuit board function of electron beam sweep measuring set dual pressure controller, which is characterized in that the detection
Device includes shell, the main control board that the interior of shell is arranged in and power adapter, the case surface is arranged in
Start button stops key and display screen, and from the inside of the shell lead to external power cable, power cable,
Controlling cable, fixed voltage acquisition cable, analog voltage acquire cable and high-voltage acquisition cable, are also provided on the shell
LED display window；
The isolation module that the main control board includes control module, is connected with the control module by data/address bus, and
Voltage management module, buzzer, LED array and the display screen interface being connected with the control module, the isolation module difference
Connect voltage output management module, control signal processing module, fixed voltage acquisition module, analog voltage acquisition module and high pressure
Acquisition module, the voltage output management module connect one end of the power cable, and the other end of the power cable is used for
Connection circuit board under test is powered, and the circuit board under test is the circuit board of dual pressure controller to be measured；At the control signal
Reason module connects one end of the controlling cable, and the other end of the controlling cable is for connecting the circuit board under test and transmitting
Control instruction；The fixed voltage acquisition module connects one end of the fixed voltage acquisition cable, the fixed voltage acquisition
The other end of cable is used to connect each supply voltage point in the circuit board under test；The analog voltage acquisition module connection
One end of the analog voltage acquisition cable, the other end of the analog voltage acquisition cable is for connecting the circuit board under test
In each median electrical voltage point, the median electrical voltage point includes but is not limited to electrical voltage point after analog-to-digital conversion, amplified
Electrical voltage point and transformer input voltage point；The high-voltage acquisition module connects one end of the high-voltage acquisition cable, the height
The other end of pressure acquisition cable is used to connect the final output electrical voltage point in the circuit board under test；
The display screen interface in the main control board connects the display screen, the LED in the main control board
LED display window described in array face, the voltage management module in the main control board connect the power adapter, the electricity
Source converter connects one end of the power cable, and the other end of the power cable is for connecting power supply；The master control
Control module in circuit board is also respectively connected with the start button and described stops key.
2. detection device according to claim 1, which is characterized in that the control module uses model
The module of STM32F407ZET6.
3. detection device according to claim 1, which is characterized in that light of the isolation module based on model TLP582
Electric coupler.
4. detection device according to claim 1, which is characterized in that the voltage output management module includes driving circuit
If with main line relay circuit, driving signal chip of the driving circuit based on model 74HC240, each road relay circuit
It is based on the relay of model G6B-1114P-FD-US 5VDC and each road relay circuit is for providing different voltage values.
5. detection device according to claim 1, which is characterized in that the control signal processing module is based on model
The digital analog converter of DAC0830LCN and the amplifier of model OP07CP.
6. detection device according to claim 1, which is characterized in that the fixed voltage acquisition module, analog voltage are adopted
Collection module and high-voltage acquisition module are based respectively on the amplifier of model OP07CP and the analog-to-digital conversion of model ADC10464
Device.
7. detection device according to any one of claims 1 to 6, which is characterized in that the voltage management module is based on model
For the reference voltage source of REF01, the power adapter includes the power supply and model RT-65C of model LRS-100-24
Power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920128160.2U CN209513989U (en) | 2019-01-24 | 2019-01-24 | The detection device of the circuit board function of electron beam sweep measuring set dual pressure controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920128160.2U CN209513989U (en) | 2019-01-24 | 2019-01-24 | The detection device of the circuit board function of electron beam sweep measuring set dual pressure controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209513989U true CN209513989U (en) | 2019-10-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920128160.2U Active CN209513989U (en) | 2019-01-24 | 2019-01-24 | The detection device of the circuit board function of electron beam sweep measuring set dual pressure controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209513989U (en) |
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2019
- 2019-01-24 CN CN201920128160.2U patent/CN209513989U/en active Active
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Address after: 214000 No. 11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Wuxi zhuohai Technology Co.,Ltd. Address before: 214000 6-2407, Tianshan Road, Wuxi City, Jiangsu Province Patentee before: WUXI ZHUOHAI TECHNOLOGY Co.,Ltd. |