CN209504094U - A kind of common mask fixture - Google Patents

A kind of common mask fixture Download PDF

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Publication number
CN209504094U
CN209504094U CN201821788013.XU CN201821788013U CN209504094U CN 209504094 U CN209504094 U CN 209504094U CN 201821788013 U CN201821788013 U CN 201821788013U CN 209504094 U CN209504094 U CN 209504094U
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CN
China
Prior art keywords
telescopic rod
holding tank
mask
sliding sleeve
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201821788013.XU
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Chinese (zh)
Inventor
朱希进
刘维维
杨长华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI ZHONGWEI MASK ELECTRONICS Co Ltd
Original Assignee
WUXI ZHONGWEI MASK ELECTRONICS Co Ltd
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Filing date
Publication date
Application filed by WUXI ZHONGWEI MASK ELECTRONICS Co Ltd filed Critical WUXI ZHONGWEI MASK ELECTRONICS Co Ltd
Priority to CN201821788013.XU priority Critical patent/CN209504094U/en
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Publication of CN209504094U publication Critical patent/CN209504094U/en
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  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

The utility model discloses a kind of common mask fixtures, including handle, fixation is plugged with storage sleeve in handle, and it is located at outside handle at storage sleeve ends, there are two storage sleeve is set, and activity is embedded with telescopic rod in each storage sleeve, telescopic rod end is fixedly installed with fixed clamp connector, activity is nested with traversing sliding sleeve on telescopic rod, and movable staple joint is fixedly installed on traversing sliding sleeve, movable staple joint and fixed clamp connector medial surface offer holding tank, and it is correspondingly arranged between the holding tank and fixed clamp connector holding tank of movable staple joint, the utility model is compact-sized, it is easy to use, movable staple joint need to be only transferred when clamping various sizes of mask, being fixed by locating part directly to clamp, no replacement is required, and interior exposure mask not of the same race presss from both sides, it is convenient, fast, it is using simultaneously The mask of two different sizes can be clamped simultaneously in the process and successively processed, processing efficiency is effectively increased.

Description

A kind of common mask fixture
Technical field
The utility model relates to a kind of fixture, specially a kind of common mask fixture belongs to mask clamp technical field.
Background technique
MASK (mask): required a kind of mold when being semicon industry, IC (integrated circuit) production, is to utilize Mask On figure, exposed to be made graph copying in wafer (Wafer), figure of the Mask factory according to Customer design, by figure number It after conversion, is exposed on the photosensitive quartz base plate of one kind using Mask exposure machine, generates its surface by developing manufacture process saturating Light and lighttight imperceptible logic figure, the appearance of mask clamp greatly facilitate the taking and placing of mask, avoid taking manually The polluters such as finger-marks and particle are left after putting mask.But the mask clamp of current stage, there are many deficiencies Place, for example, need different types of fixture for different mask, it is general to cannot achieve a kind of fixture mask, need to be in Fab factory It is equipped with the fixture of different size masks, station fixture is various, and cost is high.
Utility model content
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of common mask fixture.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
A kind of common mask fixture of the utility model, including handle, fixation is plugged with storage sleeve, and institute in the handle It states and is located at outside the handle at storage sleeve ends, there are two the storage sleeve is set, and work in each storage sleeve Dynamic to be embedded with telescopic rod, the telescopic rod end is fixedly installed with fixed clamp connector, and activity is nested on the telescopic rod Traversing sliding sleeve, and movable staple joint is fixedly installed on the traversing sliding sleeve, the activity staple joint and the fixing clamp It holds connector medial surface and offers holding tank, and the holding tank and the fixed clamp connector clamp of the movable staple joint It holds and is correspondingly arranged between slot.
As a kind of optimal technical scheme of the utility model, there are two the traversing sliding sleeve is set, and the traversing sliding sleeve On be embedded finite place piece, the locating part passes through the traversing sliding sleeve and closely presses with the flexible rod end surface.
As a kind of optimal technical scheme of the utility model, several graduation marks are evenly distributed on the telescopic rod.
As a kind of optimal technical scheme of the utility model, cushion is fixedly installed at the holding tank Nell wall.
As a kind of optimal technical scheme of the utility model, connect between the telescopic rod end by the way that connector is fixed It connects.
The utility model beneficial effect achieved is: the utility model is compact structure and easy to use, is clamping different rulers Movable staple joint need to be only transferred when very little mask, being fixed by locating part directly to clamp, and it is different that no replacement is required In kind exposure mask folder, it is convenient, fast, at the same can clamp simultaneously in use two different sizes mask and carry out according to Secondary processing, effectively increases processing efficiency.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the overall structure diagram of the utility model.
In figure: 1, handle, 2, storage sleeve, 3, telescopic rod, 4, graduation mark, 5, traversing sliding sleeve, 6, movable staple joint, 7, Spacer pin, 8, fixed clamp connector, 9, holding tank, 10, cushion, 11, connector.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment
It is fixed in handle 1 to be plugged with storage sleeve 2 as shown in Figure 1, a kind of common mask fixture, including handle 1, and receive Receive and be located at outside handle 1 at 2 port of sleeve, there are two storage sleeve 2 is set, and in each storage sleeve 2 activity be embedded with it is flexible Bar 3,3 end of telescopic rod are fixedly installed with fixed clamp connector 8, and activity is nested with traversing sliding sleeve 5 on telescopic rod 3, and traversing Movable staple joint 6 is fixedly installed on sliding sleeve 5, movable staple joint 6 offers clamping with 8 medial surface of fixed clamp connector Slot 9, and be correspondingly arranged between the holding tank 9 on the holding tank 9 and fixed clamp connector 8 on movable staple joint 6, traversing sliding sleeve 5 set there are two, and finite place piece 7 is embedded on traversing sliding sleeve 5, locating part 7 passes through traversing sliding sleeve 5 and closely presses with 3 end face of telescopic rod It closes, is evenly distributed with several graduation marks 4 on telescopic rod 3, cushion 10,3 end of telescopic rod are fixedly installed at 9 inner wall of holding tank Between be fixedly connected by connector 11.
Specifically, telescopic rod 3 is pulled out out of storage sleeve 2, according to the reality of mask in use, hold handle 1 Size accurately clamps spacing by graduation mark 4, being fixed by locating part 7 can be straight by transfer activity staple joint 6 Clamping is connect, the cushion 10 in holding tank 9 can effectively ensure that not to be worn at mask frame, while in use can root According to process requirements, the mask of two different sizes is clamped by the holding tank 9 of upper and lower side simultaneously and is successively processed, effectively Improve processing efficiency.
The utility model is compact structure and easy to use, need to only transfer movable clamping when clamping various sizes of mask Connector, being fixed by locating part directly to clamp, and no replacement is required, and interior exposure mask not of the same race presss from both sides, convenient, fast, while The mask of two different sizes can be clamped in use process simultaneously and is successively processed, processing efficiency is effectively increased.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on, It should be included within the scope of protection of this utility model.

Claims (5)

1. a kind of common mask fixture, including handle (1), which is characterized in that fixation is plugged with storage sleeve in the handle (1) (2), it is located at and at storage sleeve (2) port there are two the handle (1) is external, and the storage sleeve (2) sets, and each The interior activity of the storage sleeve (2) is embedded with telescopic rod (3), and telescopic rod (3) end is fixedly installed with fixed clamp and connects Head (8), activity is nested with traversing sliding sleeve (5) on the telescopic rod (3), and is fixedly installed with activity on the traversing sliding sleeve (5) Staple joint (6), the activity staple joint (6) and fixed clamp connector (8) medial surface offer holding tank (9), And the holding tank (9) on the movable staple joint (6) and the holding tank (9) on the fixed clamp connector (8) Between be correspondingly arranged.
2. a kind of common mask fixture according to claim 1, which is characterized in that there are two the traversing sliding sleeve (5) sets, And be embedded finite place piece (7) on the traversing sliding sleeve (5), the locating part (7) passes through the traversing sliding sleeve (5) and stretches with described Bar (3) end face closely presses.
3. a kind of common mask fixture according to claim 1, which is characterized in that be uniformly distributed on the telescopic rod (3) There are several graduation marks (4).
4. a kind of common mask fixture according to claim 1, which is characterized in that fixed at holding tank (9) inner wall It is provided with cushion (10).
5. a kind of common mask fixture according to claim 1, which is characterized in that lead between telescopic rod (3) end Connector (11) is crossed to be fixedly connected.
CN201821788013.XU 2018-11-01 2018-11-01 A kind of common mask fixture Active CN209504094U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821788013.XU CN209504094U (en) 2018-11-01 2018-11-01 A kind of common mask fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821788013.XU CN209504094U (en) 2018-11-01 2018-11-01 A kind of common mask fixture

Publications (1)

Publication Number Publication Date
CN209504094U true CN209504094U (en) 2019-10-18

Family

ID=68191528

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821788013.XU Active CN209504094U (en) 2018-11-01 2018-11-01 A kind of common mask fixture

Country Status (1)

Country Link
CN (1) CN209504094U (en)

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