CN209501071U - A kind of reduction tail gas silicon powder filtering system - Google Patents
A kind of reduction tail gas silicon powder filtering system Download PDFInfo
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- CN209501071U CN209501071U CN201920189041.8U CN201920189041U CN209501071U CN 209501071 U CN209501071 U CN 209501071U CN 201920189041 U CN201920189041 U CN 201920189041U CN 209501071 U CN209501071 U CN 209501071U
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- silicon powder
- filter
- tail gas
- reduction tail
- pipe
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Abstract
The utility model discloses a kind of reduction tail gas silicon powder filtering system, and including the air inlet pipe for conveying reduction tail gas, the air inlet pipe is connect with silicon powder filter, and filter core is equipped in the silicon powder filter；The silicon powder filter is connected with hydrogen pipe, escape pipe and the conveying pipeline for conveying silicon powder, and in the silicon powder filter top, the conveying pipeline is arranged in the silicon powder filter bottom for the escape pipe setting.It heats the reduction tail gas for being mixed with silicon powder in silicon powder filter, is escaped after chlorosilane gasification, silicon powder is deposited on silicon powder filter bottom after being stopped by filter core.Hydrogen pipe is set on silicon powder filter, blowback is persistently carried out to the silicon powder of deposition, keeping silicon powder is in powdered presence, does not occur hardened blocking situation.
Description
Technical field
The utility model relates to field of polysilicon production, and in particular to a kind of reduction tail gas silicon powder filtering system.
Background technique
The production process of polysilicon is mainly concerned with reduction reaction, and completing can not in the reduction tail gas being discharged after reduction reaction
Have the presence of elemental silicon dust with avoiding.With polysilicon yield increase and and production efficiency promotion, carry secretly in tail gas
Influence of the silicon powder to equipment operation be gradually exposed.If untreated reduction tail gas is sent into device for recovering tail gas,
The problems such as being easy to cause the blocking of hydrogen gas compressor air valve, the abrasion of chlorosilane delivery pump blade wheel, influences normally to produce.
Existing reduction vent gas treatment mode is usually that will first restore the chlorosilane condensate in tail gas into liquid phase, utilizes liquid phase
The method of interception sweeps along the silicon powder in reduction tail gas to enter in surge tank, and then heating makes chlorosilane gasification discharge, retains lower silicon
Powder is recycled.
Problem is, after chlorosilane discharge, remaining silicon powder leads to not smoothly since deposition is easy hardened blocking
Discharge is recycled, and causes waste of raw materials.
Utility model content
In view of this, the application provides a kind of reduction tail gas silicon powder filtering system, make the reduction tail gas for being mixed with silicon powder in silicon
It heats, is escaped after chlorosilane gasification, silicon powder is deposited on silicon powder filter bottom after being stopped by filter core in powder filter.In silicon powder mistake
Hydrogen pipe is set on filter, blowback is persistently carried out to the silicon powder of deposition, keeping silicon powder is in powdered presence, is not occurred hardened blocking
The case where.
In order to solve the above technical problems, technical solution provided by the utility model is a kind of reduction tail gas silicon powder filtering system
System, including the air inlet pipe for conveying reduction tail gas, the air inlet pipe connect with silicon powder filter, sets in the silicon powder filter
There is filter core；The silicon powder filter is connected with hydrogen pipe, escape pipe and the conveying pipeline for conveying silicon powder, the escape pipe setting
In the silicon powder filter top, the conveying pipeline is arranged in the silicon powder filter bottom.
Preferably, set up separately in the filter core position that the air inlet pipe and the hydrogen pipe are connect with the silicon powder filter
Above and below, the setting position of the hydrogen pipe is higher than the setting position of the air inlet pipe.
Preferably, the filter core is movably arranged in silicon powder filter.
Preferably, the hydrogen pipe and silicon powder filter have at least two connectors, and the connector is symmetricly set on institute
On the side wall for stating silicon powder filter.
Preferably, the bottom of the silicon powder filter is pyramidal structure directed downwardly, and the conveying pipeline is arranged in pyramidal structure
End.
Preferably, the conveying pipeline is connected with silicon powder collecting tank, is connected with the first nitrogen in the silicon powder collecting tank sidewall
Pipe, the silicon powder collecting tank top are equipped with waste gas exhaust pipe, filtering dress are equipped between the waste gas exhaust pipe and silicon powder collecting tank
It sets.
Preferably, the conveying pipeline is equipped with valve, and the filter device is equipped with the second nitrogen tube.
The application compared with prior art, it has the advantage that:
Inputting hydrogen carries out blowback in silicon powder filter, and the silicon powder restored in tail gas deposits under the atmosphere of flowing, makes
It obtains and keeps certain dispersity between silicon powder particle, will not be hardened blocking, it is convenient for subsequent recycling.
By adjusting the airflow condition for being blown into silicon powder filter, can make to be arranged in silicon powder filter in air-flow flow path
On filter core trembleed due to force unbalance, the silicon powder that is attached on filter core of filtering can be shaken off down, avoid silicon
Powder, which blocks filter core, influences filter effect.
The silicon powder that filter deposition gets off is sent in silicon powder collecting tank by conveying pipeline, is then passed through nitrogen into silicon powder collecting tank
Gas will restore tail gas discharge, and the reduction tail gas evolution when recycling silicon powder is avoided to pollute.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that the utility model restores tail gas silicon powder filtering system.
Appended drawing reference: air inlet pipe 11, escape pipe 12, conveying pipeline 13, valve 131, silicon powder filter 2, filter core 21, hydrogen pipe
3, silicon powder collecting tank 4, waste gas exhaust pipe 41, filter device 42, the first nitrogen tube 51, the second nitrogen tube 52.
Specific embodiment
In order to make those skilled in the art more fully understand the technical solution of the utility model, with reference to the accompanying drawing and have
The utility model is described in further detail for body embodiment.
Attached drawing is please referred to, the present embodiment provides a kind of reduction tail gas silicon powder filtering systems, including for conveying reduction tail gas
Air inlet pipe 11, air inlet pipe 11 connect with silicon powder filter 2, and filter core 21 is movably set in silicon powder filter 2.Silicon powder filter
2 are connected with hydrogen pipe 3, escape pipe 12 and the conveying pipeline 13 for conveying silicon powder；Hydrogen pipe 3 and silicon powder filter 2 have at least two
A connector, the connector are symmetricly set on the side wall of silicon powder filter 2；The setting of escape pipe 12 is pushed up in silicon powder filter 2
Portion；The bottom of silicon powder filter 2 is pyramidal structure directed downwardly, and the end of pyramidal structure is arranged in conveying pipeline 13.11 He of air inlet pipe
The position that hydrogen pipe 3 is connect with silicon powder filter 2 is set up separately above and below filter core 21, and the setting position of hydrogen pipe 3 is higher than
The setting position of air inlet pipe 11.
Conveying pipeline 13 is connected with silicon powder collecting tank 4, and conveying pipeline 13 is equipped with valve.It is connected on 4 side wall of silicon powder collecting tank
First nitrogen tube 51 is equipped with waste gas exhaust pipe 41 at the top of silicon powder collecting tank 4.It is set between waste gas exhaust pipe 41 and silicon powder collecting tank 4
There is filter device 42, filter device 42 is equipped with the second nitrogen tube 52.
Reduction tail gas silicon powder filtering system provided in this embodiment is in use, reduction tail gas imports silicon powder mistake from air inlet pipe 11
In filter 2, the liquid chlorosilane gasification carried in tail gas is restored, the silicon powder swept along is detached.For blowback hydrogen from
Hydrogen pipe 3 is sent into silicon powder filter 2, is formed air-flow in silicon powder filter 2 and is constantly stirred the silicon powder deposited, avoids silicon
Agglomeration of reuniting occurs for powder.It restores tail gas to flow out after filtration core 21 from escape pipe 12, partially sweep along in reducing gas as deposition
Silicon powder stopped by filter core 21.The silicon powder deposited flows into conveying pipeline under the guidance of 2 bottom pyramidal structure of silicon powder filter
In 13 and it is delivered in silicon powder collecting tank 4.Silicon powder be collected into it is a certain amount of after, close conveying pipeline 13 on valve 131, from the first nitrogen
Tracheae 51 is blown into nitrogen into silicon powder collecting tank 4, enters the reduction tail gas and hydrogen of silicon powder collecting tank 4 together along conveying pipeline 13
Along flying up, exhaust pipe 41 is extruded, and sweeps along the silicon powder of drive to be arranged between silicon powder collecting tank 4 and exhaust pipe 41 by air-flow
Filter device 42 intercept, avoid silicon powder loss reduce the rate of recovery.When pouring out silicon powder, nitrogen is defeated from the second nitrogen tube 52
Enter, is blown off the silicon powder being attached on filter device 42 by blowback, and silicon powder is rushed in silicon powder collecting tank 4 by air-flow and is sent
Out, it is transferred to subsequent handling.
Hydrogen pipe 3 is symmetrical arranged on silicon powder filter 2, can more fully adjust the air-flow feelings in silicon powder filter 2
Condition, the dead angle acumulation for avoiding silicon powder from blowing in air-flow is hardened, ensure that the mobility of silicon powder and the convenience of recycling.Carry silicon
The reduction tail gas of powder flows from the bottom up in silicon powder filter 2, and most of silicon powder intercepted by filter core falls deposition automatically, makes
Filter core can run the longer time, reduce the frequency and working strength of clean and maintenance.
Above are merely preferred embodiments of the utility model, it is noted that above-mentioned preferred embodiment should not regard
For limitations of the present invention, the protection scope of the utility model should be defined by the scope defined by the claims..For
For those skilled in the art, without departing from the spirit and scope of the utility model, it can also make several
Improvements and modifications, these improvements and modifications also should be regarded as the protection scope of the utility model.
Claims (7)
1. a kind of reduction tail gas silicon powder filtering system, including the air inlet pipe for conveying reduction tail gas, which is characterized in that it is described into
Tracheae is connect with silicon powder filter, and filter core is equipped in the silicon powder filter；The silicon powder filter is connected with hydrogen pipe, outlet
Pipe and the conveying pipeline for conveying silicon powder, the escape pipe setting exist in the silicon powder filter top, the conveying pipeline setting
The silicon powder filter bottom.
2. reduction tail gas silicon powder filtering system as described in claim 1, which is characterized in that the air inlet pipe and the hydrogen pipe
The position connecting with the silicon powder filter is set up separately above and below the filter core, and the setting position of the hydrogen pipe is higher than
The setting position of the air inlet pipe.
3. reduction tail gas silicon powder filtering system as claimed in claim 2, which is characterized in that the filter core is movably arranged on silicon powder
In filter.
4. reduction tail gas silicon powder filtering system as claimed in claim 3, which is characterized in that the hydrogen pipe and silicon powder filter
There are at least two connectors, the connector is symmetricly set on the side wall of the silicon powder filter.
5. reduction tail gas silicon powder filtering system as described in claim 1, which is characterized in that the bottom of the silicon powder filter is
The end of pyramidal structure is arranged in pyramidal structure directed downwardly, the conveying pipeline.
6. reduction tail gas silicon powder filtering system as described in claim 1, which is characterized in that the conveying pipeline is connected with silicon powder receipts
Collect slot, the first nitrogen tube is connected in the silicon powder collecting tank sidewall, is equipped with waste gas exhaust pipe, institute at the top of the silicon powder collecting tank
It states and is equipped with filter device between waste gas exhaust pipe and silicon powder collecting tank.
7. reduction tail gas silicon powder filtering system as claimed in claim 6, which is characterized in that the conveying pipeline is equipped with valve,
The filter device is equipped with the second nitrogen tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920189041.8U CN209501071U (en) | 2019-01-31 | 2019-01-31 | A kind of reduction tail gas silicon powder filtering system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920189041.8U CN209501071U (en) | 2019-01-31 | 2019-01-31 | A kind of reduction tail gas silicon powder filtering system |
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| Publication Number | Publication Date |
|---|---|
| CN209501071U true CN209501071U (en) | 2019-10-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920189041.8U Active CN209501071U (en) | 2019-01-31 | 2019-01-31 | A kind of reduction tail gas silicon powder filtering system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110694388A (en) * | 2019-11-12 | 2020-01-17 | 四川永祥新能源有限公司 | System for be arranged in getting rid of silica flour in tail gas |
| CN111661827A (en) * | 2020-06-22 | 2020-09-15 | 四川永祥多晶硅有限公司 | System and method for recycling silicon powder in polycrystalline silicon reduction tail gas |
-
2019
- 2019-01-31 CN CN201920189041.8U patent/CN209501071U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110694388A (en) * | 2019-11-12 | 2020-01-17 | 四川永祥新能源有限公司 | System for be arranged in getting rid of silica flour in tail gas |
| CN111661827A (en) * | 2020-06-22 | 2020-09-15 | 四川永祥多晶硅有限公司 | System and method for recycling silicon powder in polycrystalline silicon reduction tail gas |
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